
1About this Document 1
1.1 Goal and Target Audience of this Manual............................................................1
1.2 Symbols and Typographic Conventions...............................................................1
1.3 Other Applicable Documents................................................................................2
2Safety 3
2.1 Intended Use ........................................................................................................3
2.2 General Safety Instructions..................................................................................3
2.2.1 Organizational Measures....................................................................3
2.2.2 Safety Measures during Installation ...................................................4
2.2.3 Safety Measures during Start-Up.......................................................5
2.2.4 Safety Measures during Operation.....................................................5
2.2.5 Safety Measures during Maintenance................................................6
3Product Description 7
3.1 System Overview..................................................................................................8
3.2 Features and Applications....................................................................................9
3.3 Model Overview..................................................................................................10
3.4 Product View.......................................................................................................11
3.5 Scope of Delivery ...............................................................................................11
3.6 Suitable Controllers ............................................................................................12
3.7 Accessories ........................................................................................................12
3.8 Technical Features.............................................................................................12
3.8.1 Rotary Encoder.................................................................................12
3.8.2 Limit Switches...................................................................................12
4Unpacking 13
5Installation 15
5.1 General Notes on Installation.............................................................................15
5.2 Installing the Actuator in a Mechanical Mounting...............................................16
5.2.1 Providing a Suitable Mechanical Mounting and Installation
Environment......................................................................................17
5.2.2 Installing the Actuator in a Mechanical Mounting.............................19
5.3 Installing the Actuator in a Micropositioning Stage.............................................21
Contents