
User Manual
A141D001 Rev 1.2
26-March-2020
Page 3 of 25
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Table of Contents
1. About this Document_____________________________________________________________________5
1.1. Objective and Target Audience of this User Manual ________________________________________5
1.2. Symbols and Typographic Conventions __________________________________________________5
1.3. Other Applicable Documents __________________________________________________________5
2. Safety _________________________________________________________________________________6
2.1. Intended Use _______________________________________________________________________6
2.2. General Safety Instructions ____________________________________________________________6
2.3. Warnings and Safety Notices___________________________________________________________7
2.4. Organizational Measures______________________________________________________________8
3. Product Description ______________________________________________________________________9
3.1. Model Overview and Part Numbering ___________________________________________________9
3.2. Product Features ____________________________________________________________________9
3.3. Product Labeling ___________________________________________________________________10
3.4. Scope of Delivery ___________________________________________________________________10
3.5. Accessories________________________________________________________________________10
3.6. Controllers ________________________________________________________________________11
4. Technical Features ______________________________________________________________________11
4.1. Air Bearing ________________________________________________________________________11
4.2. Linear Motor ______________________________________________________________________11
4.3. Linear Encoder _____________________________________________________________________11
4.4. Limits and Index Mark _______________________________________________________________11
5. Unpacking and Handling _________________________________________________________________12
6. Installation ____________________________________________________________________________13
6.1. Mounting Surface Quality and Preparation ______________________________________________13
6.2. Mounting Procedure ________________________________________________________________13
6.3. Removing the shipping restraint _______________________________________________________14
6.4. Air Supply_________________________________________________________________________15
6.5. Affixing the Payload to the Stage ______________________________________________________16
6.6. XY and Vertical Configurations ________________________________________________________17