PI NEXACT Stage N-565 Series User manual

PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
MP148E
N
-565 NEXACT® Stage
User Manual
Version: 1.3.0
Date: 02.03.2020
This document describes the following products:

N-565.160
Precision Linear Stage, 13 mm Travel Range,
PIOne Linear Encoder, 0.5 nm Resolution,
10 N Drive Force,
Dimensions 65 × 80 × 20 mm (W × L × H),
NEXACT® Piezoelectric Walking Drive

N-565.260
Precision Linear Stage, 26 mm Travel Range,
PIOne Linear Encoder, 0.5 nm Resolution,
10 N Drive Force,
Dimensions 65 × 110 × 20 mm (W × L × H),
NEXACT® Piezoelectric Walking Drive

N-565.360
Precision Linear Stage, 52 mm Travel Range,
PIOne Linear Encoder, 0.5 nm Resolution,
10 N Drive Force,
Dimensions 65 × 160 × 20 mm (W × L × H),
NEXACT® Piezoelectric Walking Drive

Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PIMag®, PiezoWalk®, NEXACT®, NEXLINE®, NanoCube®,
NanoAutomation®
© 2020 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 02.03.2020
Document number: MP148E, LMo / KSch, Version 1.3.0
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Audience of this User Manual.................................................. 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Definition.................................................................................................................... 2
1.4 Figures ........................................................................................................................ 2
1.5 Other Applicable Documents ..................................................................................... 3
1.6 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 6
3Product Description 7
3.1 Model Overview ......................................................................................................... 7
3.2 Product View .............................................................................................................. 8
3.2.1 Product Details .............................................................................................. 8
3.2.2 Product Labeling............................................................................................ 9
3.3 Scope of Delivery...................................................................................................... 11
3.4 Suitable Controllers .................................................................................................. 11
3.5 Technical Features.................................................................................................... 12
3.5.1 Linear Encoder (Sensor)............................................................................... 12
3.5.2 Reference Switch......................................................................................... 12
4Unpacking 13
5Installation 15
5.1 General Notes on Installation................................................................................... 15
5.2 Mounting the N-565 onto a Surface......................................................................... 18
5.3 Setting Up an XY System........................................................................................... 21
5.4 Fixing the Load to the N-565 .................................................................................... 23
5.5 Connecting the N-565 to the Controller................................................................... 25
6Startup and Operation 27
6.1 General Notes on Startup and Operation ................................................................ 27
6.2 Operating Parameters .............................................................................................. 28
6.3 Operating the N-565................................................................................................. 29
Contents

6.4 Discharging the Piezo Actuators of the Drive........................................................... 29
7Maintenance 31
7.1 General Notes on Maintenance ............................................................................... 31
7.2 Cleaning the N-565 ................................................................................................... 31
8Troubleshooting 33
8.1 General Notes on Troubleshooting .......................................................................... 33
8.2 Possible Causes and Correction................................................................................ 34
9Customer Service 35
10 Technical Data 37
10.1 Specifications............................................................................................................ 37
10.1.1 Data Table.................................................................................................... 37
10.1.2 Ambient Conditions and Classifications ...................................................... 38
10.2 Maximum Ratings..................................................................................................... 39
10.3 Dimensions ............................................................................................................... 40
10.4 Pin Assignment ......................................................................................................... 41
10.4.1 Drive Connection ......................................................................................... 41
10.4.2 Sensor Connection....................................................................................... 42
10.4.3 Pin Assignment of the N664B0001 Adapter................................................ 43
11 Old Equipment Disposal 45
12 EC Declaration of Conformity 47

1 About this Document
N-565 NEXACT® Stage MP148E Version: 1.3.0 1
In this Chapter
Objective and Target Audience of this User Manual..................................................................... 1
Symbols and Typographic Conventions......................................................................................... 1
Definition ....................................................................................................................................... 2
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 3
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This manual contains information on the intended use of the N-565.
It assumes that the reader has a fundamental understanding of basic servo systems as well as
motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injury.
Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
1
About this Document

1 About this Document
2 Version: 1.3.0 MP148E N-565 NEXACT® Stage
INFORMATION
Information for easier handling, tricks, tips, etc.
Symbol/
Label
Meaning
1.
2.
Action consisting of several steps whose sequential order must
be observed
Action consisting of one or several steps whose sequential order
is irrelevant
 List item
p. 5
Cross-reference to page 5
RS-232
Labeling of an operating element on the product (example:
socket of the RS-232 interface)
Warning sign on the product which refers to detailed information
in this manual.
1.3 Definition
Term Explanation
Load capacity Maximum load capacity in the vertical direction when the stage is
mounted horizontally. The contact point of the load is in the center of
the platform.
Linear encoder The linear encoder is an incremental sensor for capturing changes in
position. Signals from the sensor are used for axis position feedback.
After switching on the controller a reference point definition must be
performed before absolute target positions can be commanded and
reached.
1.4 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.

1 About this Document
N-565 NEXACT® Stage MP148E Version: 1.3.0 3
1.5 Other Applicable Documents
The devices and software tools that are mentioned in this documentation are described in their
own manuals.
Product Document
E-861 NEXACT® Servo Controller PZ205E User Manual
PIMikroMove SM148E Software Manual
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 35).
Downloading manuals
1. Open the website www.pi.ws.
2. Search the website for the product number (e.g., P-882) or the product family (e.g.,
PICMA® bender).
3. Click the corresponding product to open the product detail page.
4. Click Downloads.
The manuals are shown under Documentation.
5. Click the desired manual and fill out the inquiry form.
The download link will then be sent to the email address entered.

2 Safety
N-565 NEXACT® Stage MP148E Version: 1.3.0 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures............................................................................................................... 6
2.1 Intended Use
The N-565 is a laboratory device as defined by DIN EN 61010-1. It is intended for indoor use and
in an environment which is free of dirt, oil and lubricants.
In accordance with its design, the N-565 is intended for single-axis positioning, adjusting and
shifting of loads at different velocities.
The N-565 is a stage for nanopositioning technology. The feed is produced by NEXACT® piezo
actuators coupled to a ceramic rail (PiezoWalk® principle).
The N-565 is equipped with a linear encoder for direct position measurement.
The intended use of the N-565 is only possible when installed and in connection with a suitable
controller (p. 11). The controller is not included in the scope of delivery of the N-565.
2.2 General Safety Instructions
The N-565 is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the N-565.
Only use the N-565 for its intended purpose, and only use it if it is in a good working
order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect safety.
The operator is responsible for the correct installation and operation of the N-565.
2
Safety

2 Safety
6 Version: 1.3.0 MP148E N-565 NEXACT® Stage
2.3 Organizational Measures
User manual
Always keep this user manual available with the N-565.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the N-565 to other users, also include this user manual as well as other
relevant information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing information due
to an incomplete user manual can result in minor injury and damage to equipment.
Only install and operate the N-565 after you have read and understood this user
manual.
Personnel qualification
The N-565 may only be installed, started up, operated, maintained, and cleaned by authorized
and appropriately qualified personnel.

3 Product Description
N-565 NEXACT® Stage MP148E Version: 1.3.0 7
In this Chapter
Model Overview............................................................................................................................. 7
Product View.................................................................................................................................. 8
Scope of Delivery ......................................................................................................................... 11
Suitable Controllers ..................................................................................................................... 11
Technical Features ....................................................................................................................... 12
3.1 Model Overview
The N-565 is available in the following versions:
Model Description
N-565.160 Precision Linear Positioning Stage, 13 mm Travel Range, PIOne Linear Encoder,
0.5 nm Resolution, 10 N Drive Force, Dimensions 65 × 80 × 20 mm (W × L × H),
NEXACT® Piezoelectric Walking Drive
N-565.260 Precision Linear Positioning Stage, 26 mm Travel Range, PIOne Linear Encoder,
0.5 nm Resolution, 10 N Drive Force, Dimensions 65 × 110 × 20 mm (W × L × H),
NEXACT® Piezoelectric Walking Drive
N-565.360 Precision Linear Positioning Stage, 52 mm Travel Range, PIOne Linear Encoder,
0.5 nm Resolution, 10 N Drive Force, Dimensions 65 × 160 × 20 mm (W × L × H),
NEXACT® Piezoelectric Walking Drive
3
Product Description

3 Product Description
8 Version: 1.3.0 MP148E N-565 NEXACT® Stage
3.2 Product View
3.2.1 Product Details
Figure 1: N-565 product view
1Moving platform
2Cables for connecting sensor and drive to the controller
3Base body
The arrow in the figure shows the positive direction of motion.

3 Product Description
N-565 NEXACT® Stage MP148E Version: 1.3.0 9
3.2.2 Product Labeling
Figure 2: Position of the product labeling on the stage
Figure 3: Position of the product labeling on the motor and sensor connector

3 Product Description
10 Version: 1.3.0 MP148E N-565 NEXACT® Stage
Position Labeling Description
1, 3 N-565 / N-565.x60 Product name. Characters following the period
identify the model exactly.
3 414000946 Serial number (example), individual for each
N-565
Meaning of the places (counting from left):
1 = internal information,
2 and 3 = year of manufacture,
4 to 9 = consecutive numbers
2, 3 Warning sign "Observe manual!"
2, 3 Old equipment disposal
3 Country of origin: Germany Country of origin
1, 3 Manufacturer's logo
3 WWW.PIMICOS.COM Manufacturer's address (website)
2, 3
CE conformity mark
2 Symbol for the protective earth conductor,
marks the position of the holes via which the N-
565 is to be connected to the protective earth
conductor
4 Notice of laser radiation (p. 31) (here: Top side
of sensor connector)
4 Warning sign "Observe manual!" (here: Top side
of sensor connector)
5 Warning sign and values for the laser (p. 31)
(here: Bottom of sensor connector)

3 Product Description
N-565 NEXACT® Stage MP148E Version: 1.3.0 11
3.3 Scope of Delivery
Item ID Components
N-565 Stage according to order (p. 7)
5870500002 Screw set for mounting of the N-565:
4 M3x16 socket-head cap screws, ISO 4762
2 dowel pins 3 m6 x 8, ISO 2338
000036450
Accessories for connection to the grounding system:
1 M4x8 flat-head screw with cross recess, ISO 7045
2 safety washers
2 flat washers
N664B0001
Adapter Sub-D 15 (m) to HD Sub-D 15 (f) for sensor connection
MP137EK Short instructions for the NEXACT® stage
3.4 Suitable Controllers
Controller Description
E-861.1A1 Digital NEXACT® Controller
To order, contact our customer service department (p. 35).

3 Product Description
12 Version: 1.3.0 MP148E N-565 NEXACT® Stage
3.5 Technical Features
3.5.1 Linear Encoder (Sensor)
The stage is equipped with an optical linear encoder. For the encoder resolution, refer to the
table in the "Specifications" section (p. 37).
Optical linear encoders measure the actual position directly (direct metrology). Therefore,
errors occurring in the drivetrain such as nonlinearity, backlash or elastic deformation, cannot
influence the measurement of the position.
3.5.2 Reference Switch
The stage is equipped with a direction-sensing reference switch that is located approximately in
the middle of the travel range. This sensor transmits a TTL signal that indicates whether the
stage is on the positive or negative side of the reference switch.
The commands that use the reference signal are described in the user manual of the controller
and/or in the corresponding software manuals.

4 Unpacking
N-565 NEXACT® Stage MP148E Version: 1.3.0 13
1. Unpack the N-565 with care.
2. Compare the contents with the items listed in the contract and the packing list.
3. Inspect the contents for signs of damage. If parts are missing or you notice signs of
damage, contact PI immediately.
4. Keep all packaging materials in case the product needs to be returned.
4
Unpacking

5 Installation
N-565 NEXACT® Stage MP148E Version: 1.3.0 15
In this Chapter
General Notes on Installation ...................................................................................................... 15
Mounting the N-565 onto a Surface ............................................................................................ 18
Setting Up an XY System.............................................................................................................. 21
Fixing the Load to the N-565........................................................................................................ 23
Connecting the N-565 to the Controller ...................................................................................... 25
5.1 General Notes on Installation
NOTICE
Damage from changes in position due to external forces!
Displacement of the moving platform of the stage from externally acting forces can damage
the drive. Changes in position of the moving platform that are triggered by externally acting
forces can also damage the load or the environment.
Especially when the stage is vertically mounted, make sure that the forces that act on the
moving platform in the direction of motion do not exceed the active push/pull force of the
drive (p. 37).
Initiate all motions by sending motion commands to the controller. Do not displace the
moving platform manually.
5
Installation

5 Installation
16 Version: 1.3.0 MP148E N-565 NEXACT® Stage
Figure 4: Accessible when the moving platform is driven out: Ruler of the linear encoder
1Bottom of the moving platform of the N-565
2Scale of the linear encoder, do not touch!
Figure 5: Accessible when the moving platform is driven out: Ceramic rail of the NEXACT® drive
1Bottom of the moving platform of the N-565
2Ceramic rail of the NEXACT® drive, do not touch!