PI P-616 NanoCube User manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
PZ268D
P
-616 NanoCube® XYZ Nanopositioner
User manual
Version: 1.1.0
Date: 14.01.2022
This document describes the following product:

P-616.3C
Parallel-kinematic NanoCube® XYZ
nanopositioner, 100 µm × 100 µm × 100 µm
travel range, capacitive sensors

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list: https://www.physikinstrumente.com/en/about-pi/patents
© 2022 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 14.01.2022
Document number: PZ268D, CBo/KSch, Version 1.1.0
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 2) on our website.

1About this Document 1
1.1 Objective and Target Audience of this User Manual.................................................. 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Figures ........................................................................................................................ 2
1.4 Other Applicable Documents ..................................................................................... 2
1.5 Downloading Manuals................................................................................................ 2
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 6
3Product Description 9
3.1 Product View .............................................................................................................. 9
3.2 Product Labeling....................................................................................................... 10
3.3 Scope of Delivery...................................................................................................... 10
3.4 Optional Accessories ................................................................................................ 11
3.5 Suitable Electronics .................................................................................................. 11
3.6 Technical Features.................................................................................................... 12
3.6.1 PICMA® Piezo Actuators .............................................................................. 12
3.6.2 Flexure Guides ............................................................................................. 12
3.6.3 Capacitive sensors ....................................................................................... 12
4Unpacking 13
5Installation 15
5.1 General Notes on Installing ...................................................................................... 15
5.2 Connecting the P-616 to the Protective Earth Conductor ....................................... 16
5.3 Mounting the P-616 ................................................................................................. 18
5.4 Fixing the Load.......................................................................................................... 20
5.5 Fixing the fiber holder .............................................................................................. 24
5.6 Connecting the P-616 to the Electronics.................................................................. 26
6Starting and Operating 29
6.1 General Notes on Starting ........................................................................................ 29
6.2 Operating the P-616 ................................................................................................. 30
6.3 Discharging the P-616............................................................................................... 30
Contents

7Maintenance 33
7.1 General Notes on Maintenance ............................................................................... 33
7.2 Cleaning the P-616 ................................................................................................... 33
8Troubleshooting 35
9Customer Service 37
10 Technical Data 39
10.1 Specifications............................................................................................................ 39
10.1.1 Data Table.................................................................................................... 39
10.1.2 Maximum Ratings........................................................................................ 40
10.1.3 Ambient Conditions and Classifications ...................................................... 41
10.2 Dimensions ............................................................................................................... 42
10.3 Torque for Stainless Steel Screws (A2-70)................................................................ 43
10.4 Pin Assignment ......................................................................................................... 43
11 Old Equipment Disposal 45
12 European Declarations of Conformity 47

1 About this Document
P-616 NanoCube® XYZ Nanopositioner PZ268D Version: 1.1.0 1
In this Chapter
Objective and Target Audience of this User Manual ..................................................................... 1
Symbols and Typographic Conventions......................................................................................... 1
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 2
Downloading Manuals ................................................................................................................... 2
1.1 Objective and Target Audience of this User Manual
This user manual contains the information required for using the P-616 as intended.
Basic knowledge of servo systems, drive technologies, and suitable safety measures is assumed.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
Failure to comply could lead to minor injury.
Precautionary measures for avoiding the risk.
NOTICE
Dangerous situation
Failure to comply could cause damage to equipment.
Precautionary measures for avoiding the risk.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 1.1.0 PZ268D P-616 NanoCube® XYZ Nanopositioner
Symbol/
Label
Meaning
1.
2.
Action consisting of several steps with strict sequential order

Action consisting of one or more steps without relevant
sequential order.

Bullet
p. 5
Cross-reference to page 5
RS-232
Label on the product indicating an operating element (example:
RS-232 interface socket)
Warning signs attached to the product that refer to detailed
information in this manual.
1.3 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.
1.4 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in
separate manuals.
The latest versions of the user manuals are available for download (p. 2) on our website.
Product Document
E-727 digital multi-channel piezo controller E727T0005 User Manual
PIMikroMove SM148E software manual
P-5xx / P-6xx / P-7xx piezo positioners
PZ240EK short instructions
F-603.41 / F-603.42 / F-603.43 fiber holder for P-616
(NanoCube®) piezo positioners
F603T0003 User Manual
1.5 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 37).

1 About this Document
P-616 NanoCube® XYZ Nanopositioner PZ268D Version: 1.1.0 3
Downloading Manuals
1. Open the website www.pi.ws.
2. Search the website for the product number (e.g., P-882) or the product family (e.g.,
PICMA® bender).
3. Click the corresponding product to open the product detail page.
4. Click the Downloads tab.
The manuals are shown under Documentation. Software manuals are shown under
General Software Documentation.
5. Click the desired manual and fill out the inquiry form.
The download link will then be sent to the email address entered.

2 Safety
P-616 NanoCube® XYZ Nanopositioner PZ268D Version: 1.1.0 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures............................................................................................................... 6
2.1 Intended Use
The P-616 is a laboratory device as defined by DIN EN 61010-1. It is intended for indoor use and
use in an environment that is free of dirt, oil, and lubricants.
In accordance with its design, the P-616 is intended for fine positioning in three axes at right
angles to each other with one center of rotation (parallel kinematics). The P-616 is suitable for
fast precision motion of smaller objects. It can be mounted in any orientation.
The intended use of the P-616 is only possible in conjunction with suitable electronics (p. 11)
available from PI. The electronics are not included in the scope of delivery of the P-616.
The electronics must provide the required operating voltages. For closed-loop operation, it
must be in a position to read out and process the signals of the position sensors.
2.2 General Safety Instructions
The P-616 is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the P-616.
Use the P-616 for its intended purpose only, and only when it is in perfect technical
condition.
Read the user manual.
Eliminate any malfunctions that may affect safety immediately.
The operator is responsible for the correct installation and operation of the P-616.
The P-616 is driven by piezo actuators. Temperature changes and compressive stress can induce
charges in piezo actuators. Piezo actuators can remain charged for several hours after
disconnecting the electronics. Touching or short-circuiting the contacts in the P-616's connector
can lead to minor injuries from electric shock. The piezo actuators can be destroyed by an
abrupt contraction.
Do not open the P-616.
Discharge the positioner's piezo actuators before installing:
Connect the positioner to the switched-off PI electronics equipped with an internal
discharge resistor.
2
Safety

2 Safety
6 Version: 1.1.0 PZ268D P-616 NanoCube® XYZ Nanopositioner
Do not pull the plug connector out of the electronics during operation.
Positioners with D-sub plug connector:
Touching the contacts in the plug connector can lead to an electric shock (max. 130 V DC) and
minor injuries.
Do not touch the contacts in the plug connector.
Use screws to secure the positioner's connector against being pulled out of the
electronics.
If a protective earth conductor is not or not properly connected, dangerous touch voltages can
occur on the P-616 in the case of malfunction or failure of the system. If there are touch
voltages, touching the P-616 can result in minor injuries from electric shock.
Connect the P-616 to a protective earth conductor (p. 16) before starting.
Do not remove the protective earth conductor during operation.
If the protective earth conductor has to be removed temporarily (e.g., in the case of
modifications), reconnect the P-616 to the protective earth conductor before restarting.
Mechanical forces can damage or misalign the P-616.
Avoid impacts that affect the P-616.
Do not drop the P-616.
Do not exceed the maximum permissible stress and load capacities according to the
specifications (p. 39).
Grip the surfaces indicated on the P-616's base body (p. 13) only.
The P-616 is maintenance-free and achieves its positioning accuracy as a result of the optimal
alignment of mechanical components and piezo actuators. Loosened screws cause a loss in
positioning accuracy.
Loosen screws only when instructed in this manual.
Do not open the P-616.
2.3 Organizational Measures
User manual
Always keep this user manual together with the P-616.
The latest versions of the user manuals are available for download (p. 2) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the P-616 to a third party, include this user manual as well as other relevant
information provided by the manufacturer.
Do the work only if the user manual is complete. Missing information due to an
incomplete user manual can result in minor injury and damage to equipment.
Install and operate the P-616 only after you have read and understood this user
manual.

2 Safety
P-616 NanoCube® XYZ Nanopositioner PZ268D Version: 1.1.0 7
Personnel qualification
The P-616 may only be installed, started, operated, maintained, and cleaned by authorized and
appropriately qualified personnel.

3 Product Description
P-616 NanoCube® XYZ Nanopositioner PZ268D Version: 1.1.0 9
In this Chapter
Product View.................................................................................................................................. 9
Product Labeling .......................................................................................................................... 10
Scope of Delivery ......................................................................................................................... 10
Optional Accessories.................................................................................................................... 11
Suitable Electronics...................................................................................................................... 11
Technical Features ....................................................................................................................... 12
3.1 Product View
Figure 1: P-616
1 Base body
2M2 hole for mounting the load, depth 2.5 mm (3 × 2 holes)
3XYZ mounting platform (moving part of the P-616, also designated
"motion platform")
4Countersunk bore (2×) for mounting onto surface
5Cable exit (supply voltage, sensor)
6M4 hole for protective earth connector
The arrows indicate the positive direction of motion in each case.
The letters X, Y, and Z indicate the axis.
3
Product Description

3 Product Description
10 Version: 1.1.0 PZ268D P-616 NanoCube® XYZ Nanopositioner
3.2 Product Labeling
Labeling Description
P-616.3C Product name
123456789
Serial number (example), individual for each P-616
Meaning of each position (from the left): 1 = internal
information, 2 and 3 = year of manufacture, 4 to 9 =
consecutive number
NanoCube® Brand name
Country of origin: Germany Country of origin
Manufacturer's logo
Warning sign "Pay attention to the manual!"
Old equipment disposal (p. 45)
WWW.PI.WS Manufacturer's address (website)
CE conformity mark
Symbol for the protective earth conductor, marks the
protective earth connector of the P-616 (p. 16)
Figure 2: "Residual Voltage" warning sign on the connector of the P-616
"Residual Voltage" warning sign: Indicates risk of electric shock (p. 5)
3.3 Scope of Delivery
Product number Description
P-616.3C
Parallel-kinematic NanoCube® XYZ nanopositioner, 100 µm × 100 µm
× 100 µm travel range, capacitive sensors
000036450
M4 screw set for protective earth, consisting of:
One flat-head screw with cross recess, M4x8, ISO 7045
2 lock washers
2 flat washers

3 Product Description
P-616 NanoCube® XYZ Nanopositioner PZ268D Version: 1.1.0 11
Product number Description
P616T0004
Technical note with unpacking instructions for P-616
PZ240EK
Short instructions for P-5xx / P-6xx / P-7xx piezo positioners
Only when ordering a system with analog controller or amplifier*
P-895.3DLC
Adapter cable D-sub 25W3 (f) to LEMO for piezo actuator
nanopositioning systems with capacitive sensors, 3 channels, length:
0.3 m
* E-500.00 / E-501.00 and E-663.00 (p. 11)
3.4 Optional Accessories
Product number Description
E-518.I3 Interface module, 3 channels, TCP/IP, USB, and RS-232 interfaces
E-515.03 Display module for piezo voltage and displacement, 3 channels
F-603.41
Fiber holder 10° for P-616, short, with fiber optic ferrules 1.25 mm,
2.5 mm, and 3.2 mm
F-603.42
Fiber holder 10° for P-616, long, with fiber optic ferrules 1.25 mm, 2.5
mm, and 3.2 mm
F-603.43
Fiber holder 90° for P-616, with fiber optic ferrules 1.25 mm, 2.5 mm,
and 3.2 mm
To order, contact our customer service department (p. 37).
3.5 Suitable Electronics
The P-616 must be connected to suitable electronics. The following devices from PI are suitable
for operation of the P-616:
Product number Description
E-727.3CD
Digital multi-channel piezo controller, 3 axes, -30 to 130 V, capacitive
sensors, D-sub 25W3 socket
E-727.3CDA
Digital multi-channel piezo controller, 3 axes, -30 to 130 V, capacitive
sensors, D-sub 25W3 socket, analog inputs
E-712.3CD
Modular digital piezo controller, 3 axes, capacitive sensors, TCP/IP, USB,
RS-232, SPI interfaces for communication
E-712.3CDA
Modular digital piezo controller, 3 axes, capacitive sensors, analog
inputs and outputs, TCP/IP, USB, RS-232, SPI interfaces for
communication

3 Product Description
12 Version: 1.1.0 PZ268D P-616 NanoCube® XYZ Nanopositioner
Product number Description
E-500.00 /
E-501.00
Modular piezo controller, consisting of:
E-503.00 piezo amplifier module
E-509.C3A sensor / servo controller module
Optional: E-518 interface module and E-515 display module
E-663.00
Piezo amplifier, 3 channels, -20 to 120 V, benchtop device
INFORMATION
The P-895.3DLC adapter cable is necessary for the analog controller and/or E-500/E-501 and E-
663 drivers, available as optional accessories (p. 11).
PC software is included in the scope of delivery of the controllers from PI. The operation of the
controllers is described in the corresponding user manuals.
3.6 Technical Features
3.6.1 PICMA® Piezo Actuators
P-616 positioners are driven by PICMA® piezo actuators. PICMA® actuators have all-ceramic
insulation and their performance and lifetime are therefore far superior to conventional
actuators. The ceramic insulation layer protects the monolithic piezoceramic block against
humidity and failure due to increased leakage current. In this way, an especially high reliability
is achieved even under extreme ambient conditions. In contrast to motorized drives, there are
no rotating parts or friction. The piezo actuators are therefore free of backlash, maintenance,
and wear.
3.6.2 Flexure Guides
P-616 positioners have flexure guides for friction-free motion and high guiding accuracy.
A flexure guide is an element that is free of static and sliding friction. It is based on the elastic
deformation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts.
Flexure elements have a high stiffness and load capacity. Flexure guides are maintenance and
wear free. They are 100 % vacuum compatible, function in a wide temperature range and do
not require any lubricants.
3.6.3 Capacitive sensors
Capacitive sensors measure the position directly on the platform (direct metrology) and work
without contact. Neither friction nor hysteresis interferes with the motion, which allows
excellent linearity values to be achieved together with the high position resolution. In
conjunction with suitable electronics, capacitive sensors achieve the best resolution, stability,
and bandwidth.

4 Unpacking
P-616 NanoCube® XYZ Nanopositioner PZ268D Version: 1.1.0 13
NOTICE
Damage to the P-616 due to incorrect handling!
Impermissible mechanical stress on the cover of the bottom of the P-616 and the XYZ
mounting platform can damage the P-616 and lead to loss of accuracy.
Avoid mechanical stress on the bottom of the P-616 and the XYZ mounting platform, see
figure below.
Figure 3: The marked surfaces may not be subject to mechanical stress. Left: Cover for the bottom of
the P-616, right: The surfaces of the XYZ mounting platform
1. Unpack the P-616 with care.
−Do not exert any force onto the following points:
the cover of the bottom of the P-616
the surfaces of the XYZ mounting platform
2. Compare the contents with the scope of delivery according to the contract and the
delivery note.
3. Inspect the contents for signs of damage. If any parts are damaged or missing, contact
our customer service department (p. 37) immediately.
4. Keep all packaging materials in case the product needs to be returned.
4
Unpacking

5 Installation
P-616 NanoCube® XYZ Nanopositioner PZ268D Version: 1.1.0 15
In this Chapter
General Notes on Installing ......................................................................................................... 15
Connecting the P-616 to the Protective Earth Conductor........................................................... 16
Mounting the P-616..................................................................................................................... 18
Fixing the Load............................................................................................................................. 20
Fixing the fiber holder.................................................................................................................. 24
Connecting the P-616 to the Electronics ..................................................................................... 26
5.1 General Notes on Installing
CAUTION
Dangerous voltage and residual charge in piezo actuators!
The P-616 is driven by piezo actuators. Temperature changes and compressive stress can
induce charges in piezo actuators. Piezo actuators can remain charged for several hours after
disconnecting the electronics. Touching or short-circuiting the contacts in the P-616's
connector can lead to minor injuries from electric shock. The piezo actuators can be destroyed
by an abrupt contraction.
Do not open the P-616.
Discharge the positioner's piezo actuators before installing:
Connect the positioner to the switched-off PI electronics equipped with an internal
discharge resistor.
Do
not
pull the plug connector out of the electronics during operation.
Positioners with D-sub plug connector:
Touching the contacts in the plug connector can lead to an electric shock (max. 130 V DC) and
minor injuries.
Do not touch the contacts in the plug connector.
Use screws to secure the positioner's connector against being pulled out of the electronics.
NOTICE
Mechanical overload from incorrect handling!
Impermissible mechanical loading of the motion platform as well as certain surfaces of the P-
616 can cause damage to the piezo actuators, sensors and flexures of the P-616 as well as loss
of accuracy. In addition, the P-616 can be damaged by tensile forces on the cable exit and
bending of the connecting cable.
Hold the P-616 by its base body (p. 9) only.
Avoid tensile forces on the cable exit and do not bend the cable.
5
Installation

5 Installation
16 Version: 1.1.0 PZ268D P-616 NanoCube® XYZ Nanopositioner
NOTICE
Damage due to unsuitable cables!
Unsuitable cables can damage the P-616 and the electronics.
Use cables provided by PI only to connect the P-616 to the electronics.
NOTICE
Damage due to improper mounting!
Improper mounting of the P-616 or incorrectly mounted parts can damage the P-616.
Only use the holes or threads intended for the purpose of fixing the P-616 and loads.
Install the P-616 so that the platform and all parts attached to it can move freely within the
entire travel range.
NOTICE
Damage due to incorrectly tightened screws!
Incorrectly tightened screws can cause damage.
Pay attention to the torque range (p. 43) specified for the screws used during installation.
INFORMATION
Extension cables can reduce the positioning accuracy of the P-616 or affect sensor processing
by the electronics.
Do not use extension cables. If you need longer cables, contact our customer service
department (p. 37).
5.2 Connecting the P-616 to the Protective Earth Conductor
INFORMATION

Pay attention to the applicable standards for connecting the protective earth conductor.
INFORMATION

If there is any vibration in your application, secure the screw connection for the protective
earth conductor in a suitable manner (e.g., with liquid adhesive) to prevent it from
unscrewing by itself.
The P-616 has an M4 hole for attaching the protective earth conductor. This hole is marked
with the symbol for the protective earth conductor (see "Dimensions" (p. 42)).