PI A-123 Series User manual

User Manual
A123D0001 Rev 1.3
17-May-2021
Page 1 of 30
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
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A-123 Series Linear Air Bearing Stage
PIglide AT3, Linear Motor Driven with Encoder Feedback
This document describes the A-123.xxxxx Series of Linear Air Bearing Motorized Stages.

User Manual
A123D0001 Rev 1.3
17-May-2021
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PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: [phone] Fax: [phone]
Email: [e-mail]
Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®, NanoCube®, NanoAutomation®,
Picoactuator®, PInano®, PIMag®
PI owns the following patents or patent applications for the technology field Magnetic Direct Drives (PIMag®):
WO212146709A2, DE102012207082A1
© 2021 PI (Physik Instrumente) L.P. The text, photographs and drawings in this manual are protected by
copyright. With regard thereto, PI (Physik Instrumente) L.P. retains all the rights. Use of said text, photographs
and drawings is permitted only in part and only upon citation of the source.
Subject to change without notice. This manual is superseded by any new release. PI continually improves its
product offerings, and listed options and specifications may be superseded at any time.

User Manual
A123D0001 Rev 1.3
17-May-2021
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PI (Physik Instrumente) L.P.
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Table of Contents
1. About this Document ____________________________________________________________________5
1.1. Objective and Target Audience of this User Manual ________________________________________5
1.2. Symbols and Typographic Conventions __________________________________________________5
1.3. Other Applicable Documents __________________________________________________________5
2. Safety ________________________________________________________________________________6
2.1. Intended Use ______________________________________________________________________6
2.2. General Safety Instructions ___________________________________________________________6
2.3. Warnings and Safety Notices __________________________________________________________7
2.4. Organizational Measures _____________________________________________________________8
3. Product Description _____________________________________________________________________9
3.1. Model Overview and Part Numbering ___________________________________________________9
3.2. Product Features _________________________________________________________________ 10
3.3. Product Labeling__________________________________________________________________ 11
3.4. Scope of Delivery _________________________________________________________________ 12
3.5. Accessories ______________________________________________________________________ 12
3.6. Controllers ______________________________________________________________________ 12
4. Technical Features ____________________________________________________________________ 13
4.1. Air Bearing ______________________________________________________________________ 13
4.2. Linear Motor_____________________________________________________________________ 13
4.3. Linear Encoder ___________________________________________________________________ 13
4.4. Limits and Index Mark (incremental encoders only) ______________________________________ 13
4.5. Stage Lockdown Control (Optional) ___________________________________________________ 13
5. Unpacking and Handling________________________________________________________________ 14
6. Installation __________________________________________________________________________ 15
6.1. Mounting Surface Quality and Preparation _____________________________________________ 15
6.2. Mounting Procedure ______________________________________________________________ 16
6.3. Removing the shipping restraint _____________________________________________________ 16
6.4. Air Supply _______________________________________________________________________ 17
6.5. Affixing the Payload to the Stage _____________________________________________________ 18

User Manual
A123D0001 Rev 1.3
17-May-2021
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PI (Physik Instrumente) L.P.
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6.6. XY and Vertical Configurations_______________________________________________________ 19
6.7. Connecting the Stage to Protective Earth ______________________________________________ 20
6.8. Connecting the Cables _____________________________________________________________ 21
7. Startup and Operation of the Stage _______________________________________________________ 22
8. Maintenance_________________________________________________________________________ 23
8.1. Cleaning the Stage ________________________________________________________________ 23
8.2. Preparing the Stage for Transport ____________________________________________________ 24
9. Customer Service _____________________________________________________________________ 25
10. Technical Data _____________________________________________________________________ 26
10.1. Basic Specifications______________________________________________________________ 26
10.2. Motor Electrical Specifications_____________________________________________________ 27
10.3. Encoder Specifications ___________________________________________________________ 27
10.4. Ambient Conditions _____________________________________________________________ 27
10.5. Dimensions____________________________________________________________________ 28
10.6. Pin Assignments ________________________________________________________________ 29
11. EC Declaration of Conformity__________________________________________________________ 29
12. Old Equipment Disposal ______________________________________________________________ 30
Table of Figures
Figure 1 - Product Features, A-123 ___________________________________________________________ 10
Figure 2 - Product Labeling Example__________________________________________________________ 11
Figure 3 - Mounting Surface Quality___________________________________________________________ 15
Figure 4 - Shipping Restraint ________________________________________________________________ 16
Figure 5 - Air Inlet Fitting Location ____________________________________________________________ 17
Figure 6 - Payload Mounting Holes ___________________________________________________________ 18
Figure 7 - Earth ground connection point location ________________________________________________ 20
Figure 8 - Mounting of the protective earth conductor (profile view) __________________________________ 20
Figure 9 - Stage Electrical Cable Connectors ___________________________________________________ 21
Figure 10 - A-123 Series Stage Dimensions ____________________________________________________ 28

User Manual
A123D0001 Rev 1.3
17-May-2021
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PI (Physik Instrumente) L.P.
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1. About this Document
1.1. Objective and Target Audience of this User Manual
This manual contains information on the intended use of the A-123 series of linear motor-driven air bearing
stages. It assumes that the reader has a fundamental understanding of basic servo systems as well as motion
control concepts and applicable safety procedures.
1.2. Symbols and Typographic Conventions
The following symbols and markings are used in this User Manual:
Symbol
Meaning
If not avoided, the situation could result in damage to the equipment.
Failure to observe these precautions could result in serious injury to
those performing the procedures and damage to the equipment.
1.
2.
Action consisting of several steps whose sequential order must be
observed
➢
Action consisting of one or several steps whose sequential order is
irrelevant
1.3. Other Applicable Documents
None at this time

User Manual
A123D0001 Rev 1.3
17-May-2021
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2. Safety
2.1. Intended Use
The A-123 is a laboratory device as defined by DIN EN 61010. It is intended to be used in interior spaces and in
an environment which is free of dirt, oil and lubricants.
In accordance with its design and realization, the A-123 is intended for single-axis positioning of loads at different
velocities. The A-123 is not intended for applications in areas in which a failure would present severe risks to
human beings or the environment.
The A-123 is intended for mounting only in which the plane of the stage tabletop is level and parallel to the plane
of the ground or mounted on its side. For orientations in which the motor must lift the payload against the force
of gravity, a custom counterbalance is required.
The intended use of the A-123 is only possible when completely mounted and connected.
The A-123 must be operated with a suitable controller. The controller is not included in the scope of delivery of
the A-123.
2.2. General Safety Instructions
The A-123 is built according to state-of-the-art technology and recognized safety standards. Improper use can
result in personal injury and/or damage to the A-123.
➢Only use the A-123 for its intended purpose, and only use it if it is in a good working order.
➢Read the user manual.
➢Immediately eliminate any faults and malfunctions that are likely to affect safety.
➢The operator is responsible for the correct installation and operation of the A-123.

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2.3. Warnings and Safety Notices
The following statements apply throughout this manual. Failure to observe these precautions could result in
serious injury to those performing the procedures and damage to the equipment. This manual and any additional
instructions included with the stage should be retained for the lifetime of the stage.
To minimize the possibility of electrical shock and bodily injury or death, disconnect all electrical
power prior to making any electrical connections.
To minimize the possibility of electrical shock and bodily injury or death when any electrical circuit
is in use, ensure that no person comes in contact with the circuitry when the stage is connected to
a power source.
To minimize the possibility of bodily injury or death, disconnect all electrical power prior to making
any mechanical adjustments.
To minimize the possibility of bodily injury or death from electric shock in the case of malfunction
or failure of the system, make sure a protective earth conductor is properly connected.
Moving parts of the stage can cause crushing or shearing injuries. All personnel must remain clear
of any moving parts.
The stage table should never be moved without the air supply turned on. Moving the stage table
with no air supply, causing sliding metal-to-metal contact, may damage the bearing surfaces.
Improper use of the stage can cause damage, shock, injury, or death. Read and understand this
manual before operating the stage.
If the stage is used in a manner not specified by the manufacturer, the protection provided by the
stage can be impaired.
Stage cables can pose a tripping hazard. Securely mount and position all stage cables to avoid
potential hazards.
Do not expose the stage to environments or conditions outside the specified range of operating
environments. Operation in conditions other than those specified can cause damage to the
equipment.
The stage must be mounted securely. Improper mounting can result in injury and damage to the
equipment.
Use care when moving the stage. Manually lifting or transporting stages can result in injury.
Use care when moving the stage. Avoid any shocks, drops or bumps that can cause scratches,
dings, dents, or distortion of the stage.

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The stage contains high power magnets that can attract ferrous objects, such as loose screws.
Attracted objects can damage the stage. Make sure that there are no movable, ferrous objects
within a radius of at least 10 cm around the stage.
The stage contains high power magnets that can damage magnetically sensitive objects such as
magnetic data carriers and electronic devices. Make sure that there are no magnetically sensitive
objects within a radius of at least 10 cm around the stage.
Dirt, oil, lubricants and condensation will damage the stage. Keep the stage clean and free of dirt,
debris, oil, lubricants, and moisture.
2.4. Organizational Measures
User manual
➢Always keep this user manual available near the A-123.
➢Add all information given by the manufacturer to the user manual, for example supplements or
Technical Notes.
➢If you pass the A-123 on to other users, also turn over this user manual as well as other relevant
information provided by the manufacturer.
➢Only use the device on the basis of the complete user manual. Missing information due to an
incomplete user manual can result in minor injury and property damage.
➢Only install and operate the A-123 after having read and understood this user manual.
Personnel qualification
The A-123 may only be installed, started up, operated, maintained and cleaned by authorized and
appropriately qualified personnel.

User Manual
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3. Product Description
3.1. Model Overview and Part Numbering
The A-123 series offers various models, defined by the travel range, encoder type, and motor option. The
dimensions of the various models vary with travel. Encoder and motor options do not affect the dimensions.
Model
Travel
Encoder
Motor Wiring
A-123
050 = 50mm
A = 20µm signal period incremental
Sine (1 Vp-p) output
1 = Standard motor
48 VDC nominal buss
100 = 100mm
B = 1nm resolution absolute
BiSS-C 32-bit serial output
200 = 200mm
350 = 350mm
500 = 500mm
750 = 750mm

User Manual
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3.2. Product Features
The A-123 series stages all incorporate completely non-contact air bearing surfaces, linear motors, and feedback
devices to provide a maintenance free stage. There is no mechanical contact to wear or require lubrication,
making these stages ideal for clean room and medical applications. The A-123 incorporates opposing lateral and
vertical preload. The brushless linear motor uses an ironless motor coil, which means there is zero cogging and
no attractive forces –resulting in unsurpassed smoothness of motion. This is especially useful in applications
where velocity control is important.
Figure 1 - Product Features, A-123
#
Description
1.
Stage base
2.
Moving table
3.
Moving cable loop
4.
Linear motor
5.
Motor electrical connection
6.
Encoder electrical connection
7.
Air supply inlet

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3.3. Product Labeling
Figure 2 - Product Labeling Example
#
Description
1.
Product model number (example)
2.
Serial number (example), individual for each A-123
Meaning of the places (counting from left):
A = PIglide Air Bearing Product
16 = year of manufacture (i.e. 2016)
021701 = consecutive unique number, 6-digit
3.
Warning sign "Observe manual"
4.
Old equipment disposal warning sign
5.
CE conformity mark
6.
Protective earth grounding location
7.
Air supply inlet location
8.
Motor electrical connection
9.
Encoder electrical connection
10.
Country of origin
11.
Manufacturer's address (website)
12.
Manufacturer's logo

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3.4. Scope of Delivery
Item ID
Component
A-123.xxxxxx
Linear stage according to the order
---
Stage Mounting Screws (M6 x 40 SHCS)
---
Shipping restraint
A123D0001
User manual (this document)
3.5. Accessories
The following accessories are offered to complement the A-123 stage. Contact PI for all available configurations.
Part #
Description
A-80x.xxx
Air Preparation and Filtration Kit
A-851.xxx
Cable sets for integration with various controllers
3.6. Controllers
The A-123 must be connected to a suitable motion controller to be operated. The following standard controllers
are available from PI to operate the A-123. Other controllers are also available, contact PI for options.
Part #
Description
A-81x.xxxxx
A-82x.xxxxx
PIglide/ACS Family of Motion Controllers
(1, 2, 4, 6, or 8 Axes)

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4. Technical Features
4.1. Air Bearing
The A-123 series stage features fully preloaded, non-contact, frictionless air bearings to guide the motion of the
stage and support the payload. This air bearing is a highly accurate precision instrument. The non-contact
nature of the air bearings will provide years of accurate and reliable use if treated properly. Keep the bearing
clean and avoid any shocks, drops or bumps that can cause scratches, dings or distortion of the bearing.
The A-123 incorporates opposing lateral and vertical preload mechanisms. This sort of preload makes the A-123
suitable for various mounting orientations, such as horizontal, lateral, and vertical. Be careful not to apply excess
cantilever loads to the stage table. In the case of vertical operation, be sure to counterbalance the payload.
Please contact PI for a customization quote if you require a vertical (Z) orientation.
4.2. Linear Motor
The A-123 series stage features a brushless, ironless linear 3-phase motor. This type of motor technology is
completely non-contact and is ideally suited to high speeds; high accelerations; fine resolution positioning; and
smooth, constant-velocity scanning. The motor must be commutated by an external motor drive. Hall effect
sensors are not included, so the drive and/or controller must be capable of encoder-based (sine) commutation.
4.3. Linear Encoder
The A-123 series stage features an optical non-contact linear encoder for direct measurement of the stage
position. This feedback signal is used by an external motion controller to close the servo loop for position and
velocity control.
The A-123 series stage offers three types of encoders:
▪Incremental with analog (sine) output: Suitable for use with controllers using on-board encoder interpolation.
▪Absolute with BiSS-C 32-bit serial output: Eliminates the need for startup homing routines and limit switches.
4.4. Limits and Index Mark (incremental encoders only)
When equipped with either of the incremental encoder options, the A-123 series stage features non-contact limit
switches and home index markers. Both the limits and the index position are integral to the encoder electronics.
The limits are magnetic and active high and are placed near the ends of travel. The index mark is optical.
4.5. Stage Lockdown Control (Optional)
The A-123 stage can be equipped with an optional solenoid control valve that allows the vertical lift air bearing
supply to be turned off while the rest of the air bearing remains active. By cutting the vertical lift air, the stage
carriage is locked in place by friction. The solenoid valve is controlled via digital outputs on the motion controller.
Contact PI for additional information about the use of this option.

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5. Unpacking and Handling
Carefully unpack the air bearing stage and other components from the shipping packaging. Inspect the contents
for signs of damage. If there is any sign of damage or missing parts, contact PI immediately. Compare the
package contents to packing list and notify PI immediately if any parts are missing or incorrect. Keep all
packaging materials in case the product needs to be returned.
Before mounting or using the stage, it is recommended to let the stage stabilize at room temperature for at least
12 hours. Clean any dust or shipping debris off the stage by blowing it off with pressurized nitrogen or clean, oil-
free air.
If the stage will be mounted in such a way as to block the product label, it is recommended to record the stage
serial number for future reference.
The A-123 stage must always be transported and shipped with the shipping restraint installed.
Failure to use the shipping restraint when moving, transporting, or shipping the stage may allow
movement between the stage table and stage base, causing damage.
The stage table should never be moved without the air supply turned on. Moving the stage table
with no air supply, causing sliding metal-to-metal contact, may damage the bearing surfaces.
Use care when moving the stage. Manually lifting or transporting stages can result in injury.
Use care when moving the stage. Avoid any shocks, drops or bumps that can cause scratches,
dings, dents, or distortion of the stage.
The A-123 stage weighs up to 32 kg in its largest size. Use care when lifting and use two people to
lift.

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6. Installation
6.1. Mounting Surface Quality and Preparation
The A-123 is intended for horizontal mounting only in which the plane of the stage tabletop is level and parallel to
the plane of the ground.
The mounting surface should be flat and have adequate stiffness in order to achieve the maximum performance
from the A-123. When the A-123 series stage is mounted to a non-flat surface, the stage can be distorted as the
mounting screws are tightened. This distortion will decrease the overall accuracy of the stage. Adjustments to the
mounting surface must be done before the stage is secured. The effects of flatness on mounting are illustrated
below.
To maintain accuracy, the mounting surface should be flat within 1 µm per 150 mm. A laboratory grade AA
granite surface plate is recommended. Do not shim under the stage base.
Figure 3 - Mounting Surface Quality
Prepare the mounting surface and bottom of the stage base with precision flat stones to remove any burrs or high
spots. Clean the mounting surface and bottom of the stage with the appropriate cleaners (isopropyl alcohol).

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6.2. Mounting Procedure
1. Place the stage on the mounting surface.
2. Remove the shipping restraint.
3. Connect the compressed air supply and turn on the air.
4. Move the stage table by hand as needed to access the mounting holes in the stage base.
5. Affix the stage base to the mounting surface using M6 SHCS x 40mm long (minimum). The number of
screws used will depend on the travel length.
The stage contains high power magnets that can attract ferrous objects, such as loose screws.
Attracted objects can damage the stage. Make sure mounting screws and tools are not pulled into
the motor magnet track.
6. Torque the mounting screws (begin from the center out for best accuracy). The typical maximum torque
value for M6 socket head cap screws is 15-20 N-m.
The stage should now be securely mounted. Make sure to allow sufficient clearance at the end of the stage to
attach the motor and encoder cables.
6.3. Removing the shipping restraint
The stage is shipped with a shipping restraint installed to prevent unwanted motion between the stage table and
the stage base. To remove the shipping restraint, unscrew the three (3) M6 SHCS using an Allen key. Make
sure to safely store the parts for later use, in case the stage ever needs to be moved or transported.
Figure 4 - Shipping Restraint
The shipping restraint kit for the A-123 consists of:
#
Description
1.
Shipping bracket for A-123 (1x)
2.
M6 Flat washer (3x)
3.
M6 SHCS, 60mm long (1x)
4.
M6 SHCS, 12mm long (2x)
5.
Shipping restraint label (1x)

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6.4. Air Supply
Air Requirements
The A-123 stage requires clean, oil-free, and dry compressed air to operate properly. See Section 10.1 Basic
Specifications for detailed air supply requirements.
It is recommended that a pressure switch is installed to monitor air supply pressure and to remove power from
the stage motor if supply pressure drops below 40 psi to prevent damage to the air bearing surfaces.
The air inlet fitting to the A-123 stage accepts flexible polyurethane pneumatic tubing, 4mm OD.
Figure 5 - Air Inlet Fitting Location
Turning off the air supply when not in use
When the stage is not in use, the air supply may be turned off to preserve compressed air and energy.
The stage table should never be moved without the air supply turned on. Moving the
stage table with no air supply, causing sliding metal-to-metal contact, may damage the
bearing surfaces.

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6.5. Affixing the Payload to the Stage
The payload should be flat, rigid, and comparable to the stage in quality. For valid system performance, the
mounting interface surface should be flat within 1 µm per 50 mm.
The stage tabletop features 16x M6x1 tapped holes for mounting the user’s payload. These are the only features
that should be used to attach a payload to the stage.
Prepare the payload mounting surface and the stage table with precision flat stones to remove any burrs or high
spots. Clean the payload mounting surface and the stage table with the appropriate cleaners (isopropyl alcohol).
Figure 6 - Payload Mounting Holes

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Do not attempt to modify the stage table in any way. Customer modifications may damage the
stage.
The M6 screws used to attach the payload to the stage table should not thread into the stage
tabletop any more than 8mm. Longer screws may damage the table.
Do not overtighten the payload mounting screws. A maximum torque of 15 N-m is
recommended.
Do not exceed the maximum payload specified for the A-123 stage. Payload CG should not be
cantilevered beyond the extents of the stage table.
The stage contains high power magnets that can attract ferrous objects, such as loose screws.
Attracted objects can damage the stage. Make sure mounting screws and tools are not pulled
into the motor magnet track.
6.6. XY and Vertical Configurations
XY configurations of the A-123 series stage are not available at this time without customization. Please contact
PI for a quote if you require a multi-axis stack.
Vertical configurations in which the motor is required to move against the force of gravity require a payload
counterbalance customization. Please contact PI for a quote if you require a vertical (Z) orientation.

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6.7. Connecting the Stage to Protective Earth
To minimize the possibility of bodily injury or death from electric shock in the case of malfunction
or failure of the system, make sure a protective earth conductor is properly connected.
The A-123 has an M4 threaded hole for connecting the protective earth conductor. This hole is marked with the
symbol for the protective earth ground . The hole is located on the end plate of the stage near the air inlet.
Figure 7 - Earth ground connection point location
Figure 8 - Mounting of the protective earth conductor (profile view)
#
Description
1.
End plate of the A-123
2.
Flat washer (2x)
3.
Internal tooth washer (2x)
4.
M4 Screw
5.
Cable lug
6.
Protective earth conductor
1. If necessary, fasten a suitable cable lug to the protective earth conductor. Note that the conductor and lug
are not in the scope of delivery of the stage.
2. Fasten the cable lug of the protective earth conductor to the protective earth connection of the A-123 as
shown in the profile view using the M4 screw proved. You will need a 2mm Allen key.
3. Tighten the M4 screw with a torque of 1.2 Nm to 1.5 Nm.
4. Make sure that the contact resistance at all connection points relevant for mounting the protective earth
conductor is <0.1 Ω at 25 A.