PI Q-521 User manual

PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
MP145E
Q
-521 Miniature Linear Stage
User Manual
Version: 1.0.1
Date: 29.01.2019
This document describes the following products:

Q-521
Q-
Motion miniature linear stage, piezoelectric
inertia drive
This document applies to various model
versions of the Q-
521. The model version of the
Q-521 is coded in the order number by means
of three characters after a period. Meaning of
the characters and valid values:
First character after the period:
Travel range
1= 12 mm
2= 22 mm
3= 32 mm
Second character after the period:
Sensor equipment
0 = without sensor
3= with sensor, sensor resolution 4 nm
4= with sensor, sensor resolution 1 nm
Third character after the period:
Vacuum suitability
0= suitable to 10-6 hPa
U= suitable to 10-9 hPa

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list: (http://www.physikinstrumente.com/en/about-
pi/patents)
© 2019 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. Use of said text, photographs and drawings is permitted only in part and only upon citation of
the source.
Original instructions
First printing: 29.01.2019
Document number: MP145E, KSch, version 1.0.1
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Audience of this User Manual.................................................. 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Definition of Terms..................................................................................................... 2
1.4 Figures ........................................................................................................................ 2
1.5 Other Applicable Documents ..................................................................................... 3
1.6 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 6
2.4 Measures for Handling Vacuum-Compatible Products.............................................. 6
3Product Description 7
3.1 Model Overview ......................................................................................................... 7
3.2 Product View .............................................................................................................. 9
3.3 Product Labeling....................................................................................................... 11
3.4 Scope of Delivery...................................................................................................... 12
3.5 Accessories ............................................................................................................... 12
3.6 Suitable Electronics .................................................................................................. 14
3.7 Technical Features.................................................................................................... 14
3.7.1 Linear Encoder (Sensor)............................................................................... 14
3.7.2 Reference Point Switch................................................................................ 14
3.7.3 ID Chip.......................................................................................................... 14
4Unpacking 15
5Installation 17
5.1 General Notes on Installation................................................................................... 17
5.2 Mounting the Q-521 on a Surface and Connecting It to a Protective Earth
Conductor................................................................................................................. 19
5.3 Setting Up a Multi-Axis System ................................................................................ 21
5.3.1 General Information on Setting Up a Multi-Axis System ............................ 22
5.3.2 Setting Up an XY System.............................................................................. 23
5.3.3 Setting Up a Z System with an Adapter Bracket.......................................... 25
5.4 Affixing the Load to the Q-521 ................................................................................. 30
5.5 Connecting the Q-521 to the Electronics ................................................................. 32
5.5.1 Overview: Connecting for Operation at Atmospheric Pressure.................. 33
5.5.2 Overview: Connecting for Operation in Vacuum to 10-9 hPa ...................... 34
Contents

5.5.3 Connecting the Q-521 to the Electronics .................................................... 35
6Startup and Operation 37
6.1 General Notes on Startup and Operation ................................................................ 37
6.2 Starting Up the Q-521 .............................................................................................. 40
7Maintenance 43
7.1 General Notes on Maintenance ............................................................................... 43
7.2 Performing a Maintenance Run ............................................................................... 43
7.3 Cleaning the Q-521................................................................................................... 43
8Troubleshooting 45
9Customer Service 47
10 Technical Data 49
10.1 Specifications............................................................................................................ 49
10.1.1 Data Table.................................................................................................... 49
10.1.2 Maximum Ratings........................................................................................ 52
10.1.3 Ambient Conditions and Classifications ...................................................... 52
10.2 Operating Time......................................................................................................... 53
10.3 Dimensions ............................................................................................................... 54
10.3.1 Q-521.1xx..................................................................................................... 54
10.3.2 Q-521.2xx..................................................................................................... 55
10.3.3 Q-521.3xx..................................................................................................... 56
10.3.4 Q-121.80U Adapter Plate ............................................................................ 57
10.3.5 Q-121.10U Adapter Bracket ........................................................................ 58
10.3.6 Q-121.20U Adapter Bracket ........................................................................ 59
10.3.7 Q-121.30U Adapter Bracket ........................................................................ 60
10.3.8 Vacuum Feedthroughs................................................................................. 61
10.4 Pin Assignment ......................................................................................................... 67
10.4.1 Q-521.xx0 (vacuum compatible to 10-6 hPa) ............................................... 67
10.4.2 Q-521.xxU (vacuum compatible to 10-9 hPa)............................................... 68
10.4.3 C-815.VF Vacuum Feedthrough................................................................... 69
10.4.4 C-815.VFUx Vacuum Feedthrough .............................................................. 70
10.4.5 5604500041 Adapter................................................................................... 71
11 Old Equipment Disposal 73
12 EU Declaration of Conformity 75

1 About this Document
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 1
In this Chapter
Objective and Target Audience of this User Manual..................................................................... 1
Symbols and Typographic Conventions......................................................................................... 1
Definition of Terms ........................................................................................................................ 2
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 3
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This manual contains information necessary for the intended use of the Q-521.
It assumes that the reader has a fundamental understanding of basic servo systems as well as
motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injuries or damage to the
equipment.
Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Symbol/
Label
Meaning
1.
2.
Action consisting of several steps whose
sequential order must be Pay attention tod
Action consisting of one or several steps
whose sequential order is irrelevant
 List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the
product (example: socket of the RS-232
interface)
Warning sign affixed to the product that
refers to detailed information in this
manual.
1.3 Definition of Terms
Term Explanation
Load capacity Maximum load capacity in the vertical direction when the
linear stage is mounted horizontally. The contact point of the
load is in the center of the motion platform.
Linear encoder The linear encoder is an incremental sensor for capturing
changes in position. Signals from the sensor are used for axis
position feedback. After switching on the controller a
reference point definition must be performed before
absolute target positions can be commanded and reached.
1.4 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.

1 About this Document
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 3
1.5 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in their
own manuals.
Description Document
E-872.401 Q-Motion® Piezomotor electronics,
benchtop device, drives up to 4 linear actuators via
one amplifier channel, TCP/IP, USB, USB for joystick,
digital I/O
PZ279EN User Manual
E-873.1AT Q-Motion® Controller for piezoelectric
inertia drives, 1 axis, benchtop device (industry), SPI,
TCP/IP, USB, RS-232, I/O, connector for joystick
PZ274E User Manual
E-873.3QTU Q-Motion® Controller for piezoelectric
inertia drives, 3 axes, benchtop device (industry),
TCP/IP, USB, I/O, joystick
PZ273E User Manual
E-873.10C885 Q-Motion® Controller module for
PIMotionMaster, 1 axis, for systems with
piezoelectric inertia drive
E873T0002 Technical Note
PIMikroMove SM148E Software Manual
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 47).
INFORMATION
For products that are supplied with software (CD in the scope of delivery), access to the
manuals is protected by a password. Protected content is only displayed on the website after
entering the access data.
You need the product CD to get the access data.
For products with CD: Get access data
1. Insert the product CD into the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews in the file
name).
4. Get the access data for downloading protected content in the "User login for software
download" section of the Release News. Possible methods for getting the access data:

1 About this Document
4 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
−Link to a page for registering and requesting the access data
−User name and password is specified
5. If the access data needs to be requested via a registration page:
a) Follow the link in the Release News.
b) Enter the required information in the browser window.
c) Click Show login data in the browser window.
d) Note the user name and password shown in the browser window.
Downloading manuals
If you have requested access data for protected contents via a registration page (see above):
Click the links in the browser window to change to the content for your product and log
in using the access data that you received.
General procedure:
1. Open the website www.pi.ws.
2. If access to the manuals is protected by a password:
a) Click Login.
b) Log in with the user name and password.
3. Click Search.
4. Enter the product number up to the period (e.g., P-882) or the product family (e.g.,
PICMA® Bender) into the search field.
5. Click Start search or press the Enter key.
6. Open the corresponding product detail page in the list of search results:
a) If necessary: Scroll down the list.
b) If necessary: Click Load more results at the bottom of the list.
c) Click the corresponding product in the list.
7. Click the Downloads tab.
The manuals are shown under Documentation.
8. Click the desired manual and save it to the hard disk of your PC or to a data storage
medium.

2 Safety
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures............................................................................................................... 6
Measures for Handling Vacuum-Compatible Products ................................................................. 6
2.1 Intended Use
The Q-521 is a laboratory device as defined by DIN EN 61010-1. It is intended to be used in
interior spaces and in an environment which is free of dirt, oil, and lubricants.
In accordance with its design and realization, the Q-521 is intended for single-axis positioning,
adjusting and shifting of loads at different velocities in interval operation. The Q-521 uses a
PIShift piezomotor as a drive. When at rest, the drive is self-locking, requires no current,
generates no heat, and maintains its position.
The Q-521 can be mounted in any orientation. The specifications of the Q-521 apply to
horizontal mounting (p. 49).
The Q-521 is not intended for applications in areas in which a failure would present severe risks
to human beings or the environment. For further information on the operating conditions of
the Q-521, see "Technical Data" (p. 49).
Some models of the Q-521 are equipped with a linear encoder for direct position measurement.
The intended use of the Q-521 is only possible when completely mounted and connected. The
Q-521 must be operated with suitable electronics (p. 14). The electronics are not included in the
scope of delivery of the Q-521.
2.2 General Safety Instructions
The Q-521 is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the Q-521.
Only use the Q-521 for its intended purpose, and only use it if it is in a good working
order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect safety.
The operator is responsible for the correct installation and operation of the Q-521.
2
Safety

2 Safety
6 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
2.3 Organizational Measures
User manual
Always keep this user manual available with the Q-521.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the Q-521 to other users, also include this user manual as well as other
relevant information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing information due
to an incomplete user manual can result in minor injury and damage to equipment.
Only install and operate the Q-521 after you have read and understood this user
manual.
Personnel qualification
The Q-521 may only be installed, started up, operated, maintained, and cleaned by authorized
and appropriately qualified personnel.
2.4 Measures for Handling Vacuum-Compatible Products
When handling the vacuum version of the linear stage, attention must be paid to appropriate
cleanliness. At PI, all parts are cleaned before assembly. During assembly and measurement,
powder-free gloves are worn. In addition, the Q-521.xxU models are wipe cleaned afterwards
and then shrink-wrapped twice in vacuum-compatible film.
Touch the linear stage only with powder-free gloves.
If necessary, wipe the linear stage clean after unpacking.

3 Product Description
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 7
In this Chapter
Model Overview............................................................................................................................. 7
Product View.................................................................................................................................. 9
Product Labeling .......................................................................................................................... 11
Scope of Delivery ......................................................................................................................... 12
Accessories................................................................................................................................... 12
Suitable Electronics...................................................................................................................... 14
Technical Features ....................................................................................................................... 14
3.1 Model Overview
Classification of the Q-521 models
The model version of the Q-521 is coded in the order number by means of three characters
after a period; see also "Detailed model names". Each character codes a feature of the model
version:
First character Second character Third character
Feature Travel range Sensor (linear encoder) Vacuum suitability
Feature value 1 = 12 mm
2 = 22 mm
3 = 32 mm
0 = without sensor
3 = with sensor,
sensor resolution 4 nm
4 = with sensor,
sensor resolution 1 nm
0 = suitable to 10-6 hPa
U = suitable to 10-9 hPa
If the value "x" is used in this manual for a character after the period, the corresponding
description or instruction applies to all feature values of the corresponding feature.
3
Product Description

3 Product Description
8 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Detailed model names
Order
number
Product name
Q-521.100 Q-Motion® Miniature linear stage, piezoelectric inertia drive, 12 mm travel
range, without position sensor for open-loop operation, 1 N push/pull force,
dimensions 21 × 30 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521.10U Q-Motion® Miniature linear stage, piezoelectric inertia drive, 12 mm travel
range, without position sensor for open-loop operation, 1 N push/pull force,
dimensions 21 × 30 × 10 mm (B × L × H), vacuum compatible to 10-9 hPa
Q-521.130 Q-Motion® Miniature linear stage, piezoelectric inertia drive, 12 mm travel
range, linear encoder, 4 nm resolution, 1 N push/pull force, dimensions 21 ×
30 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521.140 Q-Motion® Miniature linear stage, piezoelectric inertia drive, 12 mm travel
range, linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 ×
30 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521.14U Q-Motion® Miniature linear stage, piezoelectric inertia drive, 12 mm travel
range, linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 ×
30 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa
Q-521.200 Q-Motion® Miniature linear stage, piezoelectric inertia drive, 22 mm travel
range, without position sensor for open-loop operation, 1 N push/pull force,
dimensions 21 × 32 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521.20U Q-Motion® Miniature linear stage, piezoelectric inertia drive, 22 mm travel
range, without position sensor for open-loop operation, 1 N push/pull force,
dimensions 21 × 32 × 10 mm (B × L × H), vacuum compatible to 10-9 hPa
Q-521.230 Q-Motion® Miniature linear stage, piezoelectric inertia drive, 22 mm travel
range, linear encoder, 4 nm resolution, 1 N push/pull force, dimensions 21 ×
32 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521.240 Q-Motion® Miniature linear stage, piezoelectric inertia drive, 22 mm travel
range, linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 ×
32 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521.24U Q-Motion® Miniature linear stage, piezoelectric inertia drive, 22 mm travel
range, linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 ×
32 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa
Q-521.300 Q-Motion® Miniature linear stage, piezoelectric inertia drive, 32 mm travel
range, without position sensor for open-loop operation, 1 N push/pull force,
dimensions 21 × 42 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521.30U Q-Motion® Miniature linear stage, piezoelectric inertia drive, 32 mm travel
range, without position sensor for open-loop operation, 1 N push/pull force,
dimensions 21 × 42 × 10 mm (B × L × H), vacuum compatible to 10-9 hPa
Q-521.330 Q-Motion® Miniature linear stage, piezoelectric inertia drive,
32 mm travel range, linear encoder, 4 nm resolution, 1 N push/pull force,
dimensions 21 × 42 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa

3 Product Description
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 9
Order
number
Product name
Q-521.340 Q-Motion® Miniature linear stage, piezoelectric inertia drive, 32 mm travel
range, linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 ×
42 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521.34U Q-Motion® Miniature linear stage, piezoelectric inertia drive, 32 mm travel
range, linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 ×
42 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa
3.2 Product View
Figure 1: Example for models without sensor: Q-521.200 linear stage
1Motion platform
2Cable exit for drive connector
3Connector for drive; with Q-521.x00 models: Sub-D 15 (m) connector,
with Q-521.x0U models: Sub-D 15 (f) connector
4Type plate p. 11
5Base body

3 Product Description
10 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Figure 2: Example for models with sensor: Q-521.240 linear stage
1 Motion platform
2Cable exit for connecting the drive and sensor
3Warning sign "Electrostatic-sensitive devices"
4Connector for drive and sensor; with Q-521.xx0 models: Sub-D 15 (m)
connector, with Q-521.xxU models: Sub-D 15 (f) connector
5ESD protection: ESD protective cap with Q-521.xx0; nonconductive foil with
Q-521.xxU
6Type plate p. 11
7Base body
Figure 3: Direction of motion of the platform of the Q-521, Q-521.240 used as an example
The arrow in the figure above shows the direction of motion on positive commanding.

3 Product Description
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 11
3.3 Product Labeling
Figure 4: Example for models with sensor: Product labeling and type plate of the Q-521.240 linear stage
Position Labeling Description
A, C
Manufacturer's logo
B
Symbol for the protective earth conductor,
marks the protective earth connection of
the Q-521 (p. 19)
B, C Warning sign "Pay attention to the
manual!"
B, C
CE conformity mark
C 113064246
Serial number (example), individual for
each Q-521
Meaning of the places (counting from left):
1 = internal information,
2 and 3 = year of manufacture,
4 to 9 = consecutive numbers
C Q-521.240 Product name (example), the characters
following the period refer to the model
C
Old equipment disposal
C WWW.PI.WS Manufacturer's address (website)
C Warning sign "Electrostatic-sensitive
devices"

3 Product Description
12 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
3.4 Scope of Delivery
The Q-521 is delivered with the following components:
Item
ID
Components
Q-521 Linear stage as specified in the order (p. 7)
Q521B0003
Screw set for mounting the Q-521, consisting of:
2 dowel pins, A2 1.5 m6 x 4 ISO 2338
2 socket head cap screws, A2 M2x6 ISO 4762
MP139EK Short instructions for Q-5xx / Q-6xx PIShift linear stages
Only for models without sensor:
7202500060-0015 Air-side adapter cable for connection to the E-872.401 drive
electronics, Sub-D 15 (f) to LEMO 3-pin (m), 0.15 m
Only for models suitable for operation to 10-9 hPa:
5604500041 Adapter for operation outside of a vacuum chamber,
Sub-D 15 (m/m)
3.5 Accessories
Order
number Description
E-873.UHV1
Air-side extension cable from vacuum feedthrough or Q-521.xx0
to the adapter cable to the electronics, Sub-D 15 (f) to
Sub-D 15 (m), 1 m
E-873.UHV2
Air-side extension cable from vacuum feedthrough or Q-521.xx0
to the adapter cable to the electronics, Sub-D 15 (f) to
Sub-D 15 (m), 2 m
E-873.UHV3
Air-side extension cable from vacuum feedthrough or Q-521.xx0
to the adapter cable to the electronics, Sub-D 15 (f) to
Sub-D 15 (m), 3 m

3 Product Description
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 13
Order
number Description
Q-121.80U
Adapter plate for setting up an XY system consisting of two
Q-521, for use in a vacuum to 10-9
hPa. Material: Aluminum alloy,
uncoated; mass: 4.5 g; including:
2 dowel pins, A2 1.5 m6 x 4 ISO 2338
3 machine screws, 1.4567 M2x4
Q-121.10U Adapter bracket for vertical mounting of a Q-521; for
recommended Z combinations, see p. 25. For use in a vacuum to
10-9 hPa. Material: Aluminum alloy, uncoated; mass: 13.5 g /
16.8 g / 26.6 g; each including:
4 dowel pins A2 1.5 m6 x 5 ISO 2338
6 machine screws, 1.4567 M2x8
Q-121.20U
Q-121.30U
For Q-521.xx0 models only (suitable for use in a vacuum to 10-6 hPa):
Order
number Description
C-815.VF Vacuum feedthrough (drive and sensor signals), Sub-D 15 (m/f),
including C815T0003 Technical Note
For Q-521.xxU models only (suitable for use in a vacuum to 10-9 hPa):
Order
number Description
C-815.VFU1 Vacuum feedthrough (drive and sensor signals), Sub-D 15 (m/m),
DN40CF
C-815.VFU3 Vacuum feedthrough (drive and sensor signals),
3 x Sub-D 15 (m/m), DN63CF
C-815.VFU6 Vacuum feedthrough (drive and sensor signals),
6 x Sub-D 15 (m/m), DN100CF
C-815.VFU15 Vacuum feedthrough (drive and sensor signals),
15 x Sub-D 15 (m/m), DN160CF
To order, contact our customer service department (p. 47).

3 Product Description
14 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
3.6 Suitable Electronics
Electronics
Order number Description
E-872.401 Q-Motion® Piezomotor electronics, benchtop device, drives up to
4 linear actuators via one amplifier channel, TCP/IP, USB, USB for
joystick, digital I/O
E-873.1AT Q-Motion® Controller for piezoelectric inertia drives, 1 axis,
benchtop device (industry), SPI, TCP/IP, USB, RS-232, I/O,
connector for joystick
E-873.3QTU Q-Motion® Controller for piezoelectric inertia drives, 3 axes,
benchtop device (industry), TCP/IP, USB, I/O, joystick
E-873.10C885 Q-Motion® Controller module for PIMotionMaster, 1 axis, for
systems with piezoelectric inertia drive
To order, contact our customer service department (p. 47).
3.7 Technical Features
3.7.1 Linear Encoder (Sensor)
Some of the Q-521 models are equipped with an optical linear encoder. For the encoder
resolution, refer to the table in the "Specifications" section (p. 49).
Optical linear encoders measure the actual position directly (direct metrology). Therefore,
errors occurring in the drivetrain such as nonlinearity, backlash or elastic deformation, cannot
influence the measurement of the position.
3.7.2 Reference Point Switch
The Q-521 models equipped with a sensor have an optical reference point switch.
The commands that use the reference signal are described in the user manual of the controller
and/or in the corresponding software manuals.
3.7.3 ID Chip
Q-521 models with sensor contain an ID chip in the connector.
The following data is stored as parameters on the ID chip:
Information on the linear stage: Type, serial number, date of manufacture, version of
the hardware
Settings for the sensor: Interpolation rate, corrections of hysteresis as well as of phase
and offset, gain values
When switched on or rebooted, controllers from PI read the data from the ID chip.
For more information on the ID chip recognition, see the manual of the controller used.

4 Unpacking
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 15
NOTICE
Electrostatic hazard
Touching the pins in the Sub-D 15 connection of models equipped with sensor can damage
electrostatic-sensitive devices (ESD) of the Q-521. For this reason, these models are supplied
with ESD protection.
Remove the ESD protection from the connector only when you connect the Q-521 to the
controller.
INFORMATION
When handling the vacuum version of the linear stage, attention must be paid to appropriate
cleanliness. At PI, all parts are cleaned before assembly. During assembly and measurement,
powder-free gloves are worn. In addition, the Q-521.xxU models are wipe cleaned afterwards
and then shrink-wrapped twice in vacuum-compatible film.
Touch the linear stage only with powder-free gloves.
If necessary, wipe the linear stage clean after unpacking.
1. Unpack the Q-521 with care.
2. If present, do not remove the ESD protection from the connection of the Q-521.
3. Compare the contents with the items listed in the contract and the packing list.
4. Inspect the contents for signs of damage. If there is any sign of damage or missing parts,
contact PI immediately.
5. Keep all packaging materials and the ESD protection in case the product needs to be
returned.
4
Unpacking