PI Q-521 User manual

PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
MP145E
Q
-521 Miniature Linear Stage
User Manual
Version: 1.0.1
Date: 29.01.2019
This document describes the following products:

Q-521
Q-
Motion miniature linear stage, piezoelectric
inertia drive
This document applies to various model
versions of the Q-
521. The model version of the
Q-521 is coded in the order number by means
of three characters after a period. Meaning of
the characters and valid values:
First character after the period:
Travel range
1= 12 mm
2= 22 mm
3= 32 mm
Second character after the period:
Sensor equipment
0 = without sensor
3= with sensor, sensor resolution 4 nm
4= with sensor, sensor resolution 1 nm
Third character after the period:
Vacuum suitability
0= suitable to 10-6 hPa
U= suitable to 10-9 hPa

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list: (http://www.physikinstrumente.com/en/about-
pi/patents)
© 2019 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. Use of said text, photographs and drawings is permitted only in part and only upon citation of
the source.
Original instructions
First printing: 29.01.2019
Document number: MP145E, KSch, version 1.0.1
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Audience of this User Manual.................................................. 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Definition of Terms..................................................................................................... 2
1.4 Figures ........................................................................................................................ 2
1.5 Other Applicable Documents ..................................................................................... 3
1.6 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 6
2.4 Measures for Handling Vacuum-Compatible Products.............................................. 6
3Product Description 7
3.1 Model Overview ......................................................................................................... 7
3.2 Product View .............................................................................................................. 9
3.3 Product Labeling....................................................................................................... 11
3.4 Scope of Delivery...................................................................................................... 12
3.5 Accessories ............................................................................................................... 12
3.6 Suitable Electronics .................................................................................................. 14
3.7 Technical Features.................................................................................................... 14
3.7.1 Linear Encoder (Sensor)............................................................................... 14
3.7.2 Reference Point Switch................................................................................ 14
3.7.3 ID Chip.......................................................................................................... 14
4Unpacking 15
5Installation 17
5.1 General Notes on Installation................................................................................... 17
5.2 Mounting the Q-521 on a Surface and Connecting It to a Protective Earth
Conductor................................................................................................................. 19
5.3 Setting Up a Multi-Axis System ................................................................................ 21
5.3.1 General Information on Setting Up a Multi-Axis System ............................ 22
5.3.2 Setting Up an XY System.............................................................................. 23
5.3.3 Setting Up a Z System with an Adapter Bracket.......................................... 25
5.4 Affixing the Load to the Q-521 ................................................................................. 30
5.5 Connecting the Q-521 to the Electronics ................................................................. 32
5.5.1 Overview: Connecting for Operation at Atmospheric Pressure.................. 33
5.5.2 Overview: Connecting for Operation in Vacuum to 10-9 hPa ...................... 34
Contents

5.5.3 Connecting the Q-521 to the Electronics .................................................... 35
6Startup and Operation 37
6.1 General Notes on Startup and Operation ................................................................ 37
6.2 Starting Up the Q-521 .............................................................................................. 40
7Maintenance 43
7.1 General Notes on Maintenance ............................................................................... 43
7.2 Performing a Maintenance Run ............................................................................... 43
7.3 Cleaning the Q-521................................................................................................... 43
8Troubleshooting 45
9Customer Service 47
10 Technical Data 49
10.1 Specifications............................................................................................................ 49
10.1.1 Data Table.................................................................................................... 49
10.1.2 Maximum Ratings........................................................................................ 52
10.1.3 Ambient Conditions and Classifications ...................................................... 52
10.2 Operating Time......................................................................................................... 53
10.3 Dimensions ............................................................................................................... 54
10.3.1 Q-521.1xx..................................................................................................... 54
10.3.2 Q-521.2xx..................................................................................................... 55
10.3.3 Q-521.3xx..................................................................................................... 56
10.3.4 Q-121.80U Adapter Plate ............................................................................ 57
10.3.5 Q-121.10U Adapter Bracket ........................................................................ 58
10.3.6 Q-121.20U Adapter Bracket ........................................................................ 59
10.3.7 Q-121.30U Adapter Bracket ........................................................................ 60
10.3.8 Vacuum Feedthroughs................................................................................. 61
10.4 Pin Assignment ......................................................................................................... 67
10.4.1 Q-521.xx0 (vacuum compatible to 10-6 hPa) ............................................... 67
10.4.2 Q-521.xxU (vacuum compatible to 10-9 hPa)............................................... 68
10.4.3 C-815.VF Vacuum Feedthrough................................................................... 69
10.4.4 C-815.VFUx Vacuum Feedthrough .............................................................. 70
10.4.5 5604500041 Adapter................................................................................... 71
11 Old Equipment Disposal 73
12 EU Declaration of Conformity 75

1 About this Document
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 1
In this Chapter
Objective and Target Audience of this User Manual..................................................................... 1
Symbols and Typographic Conventions......................................................................................... 1
Definition of Terms ........................................................................................................................ 2
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 3
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This manual contains information necessary for the intended use of the Q-521.
It assumes that the reader has a fundamental understanding of basic servo systems as well as
motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injuries or damage to the
equipment.
Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
Symbol/
Label
Meaning
1.
2.
Action consisting of several steps whose
sequential order must be Pay attention tod
Action consisting of one or several steps
whose sequential order is irrelevant
 List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the
product (example: socket of the RS-232
interface)
Warning sign affixed to the product that
refers to detailed information in this
manual.
1.3 Definition of Terms
Term Explanation
Load capacity Maximum load capacity in the vertical direction when the
linear stage is mounted horizontally. The contact point of the
load is in the center of the motion platform.
Linear encoder The linear encoder is an incremental sensor for capturing
changes in position. Signals from the sensor are used for axis
position feedback. After switching on the controller a
reference point definition must be performed before
absolute target positions can be commanded and reached.
1.4 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.

1 About this Document
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 3
1.5 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in their
own manuals.
Description Document
E-872.401 Q-Motion® Piezomotor electronics,
benchtop device, drives up to 4 linear actuators via
one amplifier channel, TCP/IP, USB, USB for joystick,
digital I/O
PZ279EN User Manual
E-873.1AT Q-Motion® Controller for piezoelectric
inertia drives, 1 axis, benchtop device (industry), SPI,
TCP/IP, USB, RS-232, I/O, connector for joystick
PZ274E User Manual
E-873.3QTU Q-Motion® Controller for piezoelectric
inertia drives, 3 axes, benchtop device (industry),
TCP/IP, USB, I/O, joystick
PZ273E User Manual
E-873.10C885 Q-Motion® Controller module for
PIMotionMaster, 1 axis, for systems with
piezoelectric inertia drive
E873T0002 Technical Note
PIMikroMove SM148E Software Manual
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 47).
INFORMATION
For products that are supplied with software (CD in the scope of delivery), access to the
manuals is protected by a password. Protected content is only displayed on the website after
entering the access data.
You need the product CD to get the access data.
For products with CD: Get access data
1. Insert the product CD into the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews in the file
name).
4. Get the access data for downloading protected content in the "User login for software
download" section of the Release News. Possible methods for getting the access data:

1 About this Document
4 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
−Link to a page for registering and requesting the access data
−User name and password is specified
5. If the access data needs to be requested via a registration page:
a) Follow the link in the Release News.
b) Enter the required information in the browser window.
c) Click Show login data in the browser window.
d) Note the user name and password shown in the browser window.
Downloading manuals
If you have requested access data for protected contents via a registration page (see above):
Click the links in the browser window to change to the content for your product and log
in using the access data that you received.
General procedure:
1. Open the website www.pi.ws.
2. If access to the manuals is protected by a password:
a) Click Login.
b) Log in with the user name and password.
3. Click Search.
4. Enter the product number up to the period (e.g., P-882) or the product family (e.g.,
PICMA® Bender) into the search field.
5. Click Start search or press the Enter key.
6. Open the corresponding product detail page in the list of search results:
a) If necessary: Scroll down the list.
b) If necessary: Click Load more results at the bottom of the list.
c) Click the corresponding product in the list.
7. Click the Downloads tab.
The manuals are shown under Documentation.
8. Click the desired manual and save it to the hard disk of your PC or to a data storage
medium.

2 Safety
Q-521 Miniature Linear Stage MP145E Version: 1.0.1 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures............................................................................................................... 6
Measures for Handling Vacuum-Compatible Products ................................................................. 6
2.1 Intended Use
The Q-521 is a laboratory device as defined by DIN EN 61010-1. It is intended to be used in
interior spaces and in an environment which is free of dirt, oil, and lubricants.
In accordance with its design and realization, the Q-521 is intended for single-axis positioning,
adjusting and shifting of loads at different velocities in interval operation. The Q-521 uses a
PIShift piezomotor as a drive. When at rest, the drive is self-locking, requires no current,
generates no heat, and maintains its position.
The Q-521 can be mounted in any orientation. The specifications of the Q-521 apply to
horizontal mounting (p. 49).
The Q-521 is not intended for applications in areas in which a failure would present severe risks
to human beings or the environment. For further information on the operating conditions of
the Q-521, see "Technical Data" (p. 49).
Some models of the Q-521 are equipped with a linear encoder for direct position measurement.
The intended use of the Q-521 is only possible when completely mounted and connected. The
Q-521 must be operated with suitable electronics (p. 14). The electronics are not included in the
scope of delivery of the Q-521.
2.2 General Safety Instructions
The Q-521 is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the Q-521.
Only use the Q-521 for its intended purpose, and only use it if it is in a good working
order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect safety.
The operator is responsible for the correct installation and operation of the Q-521.
2
Safety

2 Safety
6 Version: 1.0.1 MP145E Q-521 Miniature Linear Stage
2.3 Organizational Measures
User manual
Always keep this user manual available with the Q-521.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the Q-521 to other users, also include this user manual as well as other
relevant information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing information due
to an incomplete user manual can result in minor injury and damage to equipment.
Only install and operate the Q-521 after you have read and understood this user
manual.
Personnel qualification
The Q-521 may only be installed, started up, operated, maintained, and cleaned by authorized
and appropriately qualified personnel.
2.4 Measures for Handling Vacuum-Compatible Products
When handling the vacuum version of the linear stage, attention must be paid to appropriate
cleanliness. At PI, all parts are cleaned before assembly. During assembly and measurement,
powder-free gloves are worn. In addition, the Q-521.xxU models are wipe cleaned afterwards
and then shrink-wrapped twice in vacuum-compatible film.
Touch the linear stage only with powder-free gloves.
If necessary, wipe the linear stage clean after unpacking.