PI P753 User manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
PZ254E
P
-753 Positioners
User Manual
Version: 1.1.0
Date: 11.05.2022
This document describes the following products:

P-753.11C / P-753.1CD
LISA high dynamics piezo nanopositioner,
15 µm, direct position measuring, capacitive
sensor

P-753.21C / P-753.2CD
LISA high dynamics piezo nanopositioner,
30 µm, direct position measuring, capacitive
sensor

P-753.31C / P-753.3CD
LISA high dynamics piezo nanopositioner,
38 µm, direct position measuring, capacitive
sensor
Models:
.11C/.21C/.31C = with LEMO connectors
.1CD/.2CD/.3CD = with D-sub connector

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list:
https://www.physikinstrumente.com/en/about-pi/patents
© 2022 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 11.05.2022
Document number: PZ254E, CBo, Version 1.1.0
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Group of this User Manual ...................................................... 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Definition of Terms..................................................................................................... 2
1.4 Figures ........................................................................................................................ 2
1.5 Other Applicable Documents ..................................................................................... 3
1.6 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 7
3Product Description 9
3.1 Model Overview ......................................................................................................... 9
3.2 Product View ............................................................................................................ 10
3.3 Product Labeling....................................................................................................... 10
3.4 Scope of Delivery...................................................................................................... 11
3.5 Suitable Electronics .................................................................................................. 11
3.6 Accessories ............................................................................................................... 12
3.7 Technical Features.................................................................................................... 12
3.7.1 PICMA® Piezo Actuators .............................................................................. 12
3.7.2 Flexure Guides ............................................................................................. 12
3.7.3 Capacitive Sensors ....................................................................................... 12
3.7.4 ID Chip (Models with D-sub Connector Only).............................................. 12
4Unpacking 13
5Installation 15
5.1 General Notes on Installing ...................................................................................... 15
5.2 Connecting the P-753 to the Protective Earth Conductor ....................................... 16
5.3 Mounting the P-753 ................................................................................................. 18
5.4 Fixing the Load.......................................................................................................... 20
5.5 Connecting the P-753 to the Electronics.................................................................. 23
6Starting and Operating 25
6.1 General Notes on Starting and Operating................................................................ 25
6.2 Operating the P-753 ................................................................................................. 27
Contents

6.3 Discharging the P-753............................................................................................... 27
7Maintenance 29
7.1 General Notes on Maintenance ............................................................................... 29
7.2 Cleaning the P-753 ................................................................................................... 29
8Troubleshooting 31
9Customer Service 33
10 Technical Data 35
10.1 Specifications............................................................................................................ 35
10.1.1 Data Table.................................................................................................... 35
10.1.2 Maximum Ratings........................................................................................ 36
10.1.3 Ambient Conditions and Classifications ...................................................... 37
10.2 Dimensions ............................................................................................................... 38
10.3 Torque for Stainless Steel Screws (A2-70)................................................................ 41
10.4 Pin Assignment ......................................................................................................... 41
11 Old Equipment Disposal 43
12 European Declarations of Conformity 45

1 About this Document
P-753 Positioners PZ254E Version: 1.1.0 1
In this Chapter
Objective and Target Group of this User Manual.......................................................................... 1
Symbols and Typographic Conventions ......................................................................................... 1
Definition of Terms ........................................................................................................................ 2
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 3
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Group of this User Manual
This user manual contains the information required for the intended use of the P-753
(hereinafter referred to as "positioner"). The letter x in the product number stands for the
various models (p. 9).
Basic knowledge of control technology, drive technologies and suitable safety measures is
assumed.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
Failure to comply could lead to minor injury.
Precautionary measures for avoiding the risk.
NOTICE
Dangerous situation
Failure to comply could cause damage to equipment.
Precautionary measures for avoiding the risk.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 1.1.0 PZ254E P-753 Positioners
Symbol/Label Meaning
1.
2.
Action consisting of several steps with strict sequential order
 Action consisting of one or more steps without relevant sequential
order.

Bullet
p. 5
Cross-reference to page 5
RS-232
Label on the product indicating an operating element (example:
RS-232 interface socket)
Warning signs on the product that refer to detailed information in this
manual.
1.3 Definition of Terms
Term Explanation
Positioner
Electrically driven mechanics (here: P-753) with one or more motion
axes
Electronics
Piezo amplifier or piezo controller that supplies the operating voltage
for positioners or piezo actuators
Piezo amplifier
Electronics without sensor evaluation for open-loop operation of
positioners and piezo actuators
Piezo controller
Electronics with sensor evaluation for closed-loop operation of
positioners and piezo actuators
1.4 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.

1 About this Document
P-753 Positioners PZ254E Version: 1.1.0 3
1.5 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in
separate manuals.
The latest versions of the user manuals are available for download (p. 3) on our website.
Product Document
E-625.CR Piezo Servo Controller
PZ166 User Manual
E-709.1C1L Digital Piezo Controller
PZ305 User Manual
E-754 Digital Piezo Controller E754T0001 User Manual
PIMikroMove
SM148E Software Manual
P-5xx / P-6xx / P-7xx Piezo Positioners
PZ240EK Short Instructions
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 33).
Downloading Manuals
1. Open the website www.pi.ws.
2. Search the website for the product number (e.g., P-753) or the product family (e.g.,
LISA).
3. Click the corresponding product to open the product detail page.
4. Click the Downloads tab.
The manuals are shown under Documentation. Software manuals are shown under
General Software Documentation.
5. Click the desired manual and fill out the inquiry form.
The download link will then be sent to the email address entered.

2 Safety
P-753 Positioners PZ254E Version: 1.1.0 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures ............................................................................................................... 7
2.1 Intended Use
The P-753 is a laboratory device as defined by DIN EN 61010-1. It is intended to be used in
interior spaces and in an environment which is free of dirt, oil, and lubricants.
According to its design, the P-753 is intended for fine positioning as well as the fast and precise
motion of small objects. The motion takes place linearly in one axis.
The P-753 can be mounted with a horizontally or vertically oriented motion axis. Vertical
mounting is only possible under certain conditions (p. 18).
The P-753 can only be used as intended in conjunction with suitable electronics (p. 11) that are
available from PI. The electronics are not included in the scope of delivery of the P-753.
The electronics must provide the required operating voltages. To ensure proper performance of
the servo control system, the electronics must be able to read out and process the signals from
the capacitive sensors.
2.2 General Safety Instructions
The P-753 is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the P-753.
Use the P-753 for its intended purpose only, and only when it is in perfect technical
condition.
Read the user manual.
Eliminate any malfunctions that may affect safety immediately.
The operator is responsible for the correct installation and operation of the P-753.
2
Safety

2 Safety
6 Version: 1.1.0 PZ254E P-753 Positioners
The P-753 is driven by piezo actuators. Temperature changes and compressive stress can induce
charges in piezo actuators. Piezo actuators can remain charged for several hours after
disconnecting the electronics. If the P-753's connector has contacts that can be touched, or if
other parts with touchable contacts (e.g., adapter cables) are connected to the connector,
touching or short circuiting these contacts can lead to minor injuries from electric shock. The
piezo actuators can be destroyed by an abrupt contraction.
Do not open the P-753.
Discharge the piezo actuators before installing the P-753 (p. 27).
Do not pull the plug connector out of the electronics during operation.
Do not touch the contacts in the connector of the P-753 or in the parts connected to it
(e.g., adapter cables).
If possible, use screws to secure the connectors against being pulled out of the
electronics.
If a protective earth conductor is not or not properly connected, dangerous touch voltages can
occur on the P-753 in the case of malfunction or failure of the system. If there are touch
voltages, touching the P-753 can result in minor injuries from electric shock.
Connect the P-753 to a protective earth conductor (p. 16) before starting.
Do not remove the protective earth conductor during operation.
If the protective earth conductor has to be removed temporarily (e.g., in the case of
modifications), reconnect the P-753 to the protective earth conductor before restarting.
Mechanical forces can damage or misalign the P-753.
Avoid impacts that affect the P-753.
Do not drop the P-753.
Do not exceed the maximum permissible stress and load capacities according to the
specifications (p. 35).
Do not touch any sensitive parts (e.g., motion platform) when handling the P-753.
The P-753 is maintenance-free and achieves its positioning accuracy as a result of the optimal
alignment of mechanical components and piezo actuators. Loosened screws cause a loss in
positioning accuracy.
Loosen screws only when instructed in this manual.
Do not open the P-753.

2 Safety
P-753 Positioners PZ254E Version: 1.1.0 7
2.3 Organizational Measures
User manual
Always keep this user manual together with the P-753.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the P-753 to a third party, include this user manual as well as other relevant
information provided by the manufacturer.
Do the work only if the user manual is complete. Missing information due to an
incomplete user manual can result in minor injury and damage to equipment.
Install and operate the P-753 only after you have read and understood this user
manual.
Personnel qualification
The P-753 may only be installed, started, operated, maintained, and cleaned by authorized and
appropriately qualified personnel.

3 Product Description
P-753 Positioners PZ254E Version: 1.1.0 9
In this Chapter
Model Overview............................................................................................................................. 9
Product View................................................................................................................................ 10
Product Labeling .......................................................................................................................... 10
Scope of Delivery ......................................................................................................................... 11
Suitable Electronics...................................................................................................................... 11
Accessories................................................................................................................................... 12
Technical Features ....................................................................................................................... 12
3.1 Model Overview
The P-753 is available in the following versions:
LISA high dynamics piezo nanopositioner
Model Description
P-753.11C
LISA high dynamics piezo nanopositioner, 15 µm, direct position
measuring, capacitive sensor, LEMO connectors
P-753.1CD
LISA high dynamics piezo nanopositioner, 15 µm, direct position
measuring, capacitive sensor, D-sub connector
P-753.21C
LISA high dynamics piezo nanopositioner, 30 µm, direct position
measuring, capacitive sensor, LEMO connectors
P-753.2CD
LISA high dynamics piezo nanopositioner, 30 µm, direct position
measuring, capacitive sensor, D-sub connector
P-753.31C
LISA high dynamics piezo nanopositioner, 38 µm, direct position
measuring, capacitive sensor, LEMO connectors
P-753.3CD
LISA high dynamics piezo nanopositioner, 38 µm, direct position
measuring, capacitive sensor, D-sub connector
3
Product Description

3 Product Description
10 Version: 1.1.0 PZ254E P-753 Positioners
3.2 Product View
The figure serves as an example and can differ from your positioner model.
Figure 1: Example of product view
1Motion platform
2M4 hole for connecting the protective earth conductor
3Cable exit
4Base body
X Positive direction of motion of the positioner
3.3 Product Labeling
Labeling Description
P-753.1CD
Product name (example), the characters following the
period refer to the model
123456789 Serial number (example), individual for each P-753
Meaning of each position (from the left):
1 = internal information
2 and 3 = year of manufacture
4 to 9 = consecutive number
LISA
Brand name
Manufacturer's logo
Warning sign "Pay attention to the manual!"
Old equipment disposal (p. 43)
Country of origin: Germany
Country of origin
WWW.PI.WS
Manufacturer's address (website)
CE conformity mark

3 Product Description
P-753 Positioners PZ254E Version: 1.1.0 11
Labeling Description
Symbol for the protective earth conductor, marks the
protective earth connector of the P-753 (p. 16)
Figure 2: "Residual Voltage" warning sign on the connector of the P-753
Notice of risk of electric shock (p. 5) for models with D-sub plug connector
3.4 Scope of Delivery
Product number Description
P-753
Positioner according to order (p. 9)
000036450 M4 screw set for protective earth, consisting of:
One flat-head screw with cross recess, M4x8, ISO 7045
2 lock washers
2 flat washers
PZ240EK Short instructions for P-5xx / P-6xx / P-7xx piezo positioners
3.5 Suitable Electronics
You need suitable electronics to operate a P-753. Selecting the device depends on the
application and the connectors available.
Product number Description
E-625.CR
Piezo amplifier / servo controller, 1 channel, -30 to 130 V, capacitive
sensor, USB, RS-232
E-709.1C1L
Digital piezo controller, 1 axis, -30 to 130 V, capacitive sensor, monitoring
functionality, benchtop device
E-754.1CD
Single-channel, digital high-speed piezo controller for capacitive sensors,
with TCP/IP, USB, and RS-232 interface
To order, contact our customer service department (p. 33).

3 Product Description
12 Version: 1.1.0 PZ254E P-753 Positioners
3.6 Accessories
Adapter cables for models with LEMO plug connectors
Product number Description
P-895.1LDC
Adapter cable LEMO to D-sub 7W2 (m) for piezo actuator nanopositioning
systems with capacitive sensors, 1 channel, length: 0.3 m.
To order, contact our customer service department (p. 33).
3.7 Technical Features
3.7.1 PICMA® Piezo Actuators
P-753 positioners are driven by PICMA® piezo actuators. PICMA® actuators have all-ceramic
insulation and their performance and lifetime are therefore far superior to conventional
actuators. The ceramic insulation layer protects the monolithic piezoceramic block against
humidity and failure due to increased leakage current. In this way, an especially high reliability
is achieved even under extreme ambient conditions. In contrast to motorized drives, there are
no rotating parts or friction. The piezo actuators are therefore free of backlash, maintenance,
and wear.
3.7.2 Flexure Guides
P-753 positioners have flexure guides for friction-free motion and high guiding accuracy.
A flexure guide is an element that is free of static and sliding friction. It is based on the elastic
deformation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts.
Flexure elements have a high stiffness and load capacity. Flexure guides are maintenance and
wear free. They are 100% vacuum compatible, function in a wide temperature range and do not
require any lubricants.
3.7.3 Capacitive Sensors
Capacitive sensors measure the position directly on the platform (direct metrology) and work
without contact. Neither friction nor hysteresis interferes with the motion, which allows
excellent linearity values to be achieved together with the high position resolution. In
conjunction with suitable electronics, capacitive sensors achieve the best resolution, stability,
and bandwidth.
3.7.4 ID Chip (Models with D-sub Connector Only)
An ID chip is in the D-sub connector of the P-753. When the P-753 is calibrated at the factory
with digital electronics, the calibration data is saved on the ID chip together with specific
product information. After switching on, the digital electronics read the data from the ID chip of
the P-753 connected. A P-753 with an ID chip containing calibration data can therefore be
connected to any suitable digital electronics without renewed calibration.
Refer to the manual for the controller for more information on the ID chip.

4 Unpacking
P-753 Positioners PZ254E Version: 1.1.0 13
1. Unpack the P-753 with care.
2. Compare the contents with the scope of delivery according to the contract and the
delivery note.
3. Inspect the contents for signs of damage. If any parts are damaged or missing, contact
our customer service department (p. 33) immediately.
4. Keep all packaging materials in case the product needs to be returned.
4
Unpacking

5 Installation
P-753 Positioners PZ254E Version: 1.1.0 15
In this Chapter
General Notes on Installing ......................................................................................................... 15
Connecting the P-753 to the Protective Earth Conductor........................................................... 16
Mounting the P-753..................................................................................................................... 18
Fixing the Load............................................................................................................................. 20
Connecting the P-753 to the Electronics ..................................................................................... 23
5.1 General Notes on Installing
CAUTION
Dangerous voltage and residual charge in piezo actuators!
The P-753 is driven by piezo actuators. Temperature changes and compressive stress can
induce charges in piezo actuators. Piezo actuators can remain charged for several hours after
disconnecting the electronics. If the P-753's connector has contacts that can be touched, or if
other parts with touchable contacts (e.g., adapter cables) are connected to the connector,
touching or short circuiting these contacts can lead to minor injuries from electric shock. The
piezo actuators can be destroyed by an abrupt contraction.
Do not open the P-753.
Discharge the piezo actuators before installing the P-753 (p. 27).
Do not pull the plug connector out of the electronics during operation.
Touching the contacts in the connectors can lead to an electric shock (max. 130 V DC) and
minor injuries.
Do not touch the contacts in the connector of the P-753 or in the parts connected to it
(e.g., adapter cables).
If possible, use screws to secure the connectors against being pulled out of the electronics.
NOTICE
Mechanical overload due to incorrect handling!
An impermissible mechanical load on the motion platform of the P-753 can cause damage to
the piezo actuators, sensors, and flexures of the P-753 as well as loss of accuracy.
Do not touch any sensitive parts (e.g., motion platform) when handling the P-753.
5
Installation

5 Installation
16 Version: 1.1.0 PZ254E P-753 Positioners
NOTICE
Damage due to unsuitable cables!
Unsuitable cables can damage the P-753 and the electronics.
Use cables provided by PI only to connect the P-753 to the electronics.
NOTICE
Damage due to improper mounting!
Improper mounting of the P-753 or incorrectly mounted parts can damage the P-753.
Only use the holes or threads intended for the purpose of fixing the P-753 and loads.
Install the P-753 so that the platform and all parts attached to it can move freely within the
entire travel range.
NOTICE
Damage due to incorrectly tightened screws!
Incorrectly tightened screws can cause damage.
Pay attention to the torque range (p. 41) specified for the screws used during installation.
INFORMATION
Extension cables can reduce the positioning accuracy of the P-753 or affect sensor processing
by the electronics.
Do not use extension cables. If you need longer cables, contact our customer service
department (p. 33).
5.2 Connecting the P-753 to the Protective Earth Conductor
INFORMATION

Pay attention to the applicable standards for connecting the protective earth conductor.
INFORMATION

If there is any vibration in your application, secure the screw connection for the protective
earth conductor in a suitable manner (e.g., with conductive liquid adhesive) to prevent it
from unscrewing by itself. If this is not possible, check the screw connection at regular
intervals and retighten the screw if necessary.