SMC Networks XLS Series User manual

Doc.no XL*****-OMI0013-B
PRODUCT NAME
High Vacuum L Type Valve
MODEL / Series / Product Number
XLS Series

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Contents
Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 2
1. Precautions on handling 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4
(Precautions on Design, Selection, Mounting, Piping, Maintenance)
2. Precautions on handling 2 - - - - - - - - - - - - - - - - - - - - - - - - - - - - 5
(Maintenance parts)
3. Specifications - - - - - - - - - - - - - - - - - - - - - - - - - - - - 7
4. Construction / Operatio - - - - - - - - - - - - -- - - -- - - - - - - - - - - - 8
5. Dimensions - - - - - - - - - - - - - -- - - -- - - - - - - - - - - 9
6. Period and Scope of Warranty - - - - - - - - - - - - - - - - - - - - - - - - - - - - 10
7. Parts Replacement Procedure - - - - - - - - - - - - - - - - - - - - - - - - - - - - 11

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Safety Instructions
These safety instructions are intended to prevent hazardous situations and/or equipment damage.
These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.”
They are all important notes for safety and must be followed in addition to International Standards
(ISO/IEC)*1) , and other safety regulations.
*1) ISO 4414: Pneumatic fluid power -- General rules relating to systems.
ISO 4413: Hydraulic fluid power -- General rules relating to systems.
IEC 60204-1: Safety of machinery -- Electrical equipment of machines .(Part 1: General requirements)
ISO 10218-1992: Manipulating industrial robots -Safety.
etc.
Caution
Caution indicates a hazard with a low level of risk which, if not avoided, could result
in minor or moderate injury.
Warning
Warning indicates a hazard with a medium level of risk which, if not avoided, could
result in death or serious injury.
Danger
Danger indicates a hazard with a high level of risk which, if not avoided, will result
in death or serious injury.
Warning
1. The compatibility of the product is the responsibility of the person who designs the equipment or
decides its specifications.
Since the product specified here is used under various operating conditions, its compatibility with specific
equipment must be decided by the person who designs the equipment or decides its specifications based on
necessary analysis and test results.
The expected performance and safety assurance of the equipment will be the responsibility of the person who
has determined its compatibility with the product.
This person should also continuously review all specifications of the product referring to its latest catalog
information, with a view to giving due consideration to any possibility of equipment failure when configuring the
equipment.
2. Only personnel with appropriate training should operate machinery and equipment.
The product specified here may become unsafe if handled incorrectly.
The assembly, operation and maintenance of machines or equipment including our products must be
performed by an operator who is appropriately trained and experienced.
3. Do not service or attempt to remove product and machinery/equipment until safety is confirmed.
1.The inspection and maintenance of machinery/equipment should only be performed after measures to
prevent falling or runaway of the driven objects have been confirmed.
2.When the product is to be removed, confirm that the safety measures as mentioned above are implemented
and the power from any appropriate source is cut, and read and understand the specific product precautions
of all relevant products carefully.
3. Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction.
4. Contact SMC beforehand and take special consideration of safety measures if the product is to
be used in any of the following conditions.
1. Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to
direct sunlight.
2. Installation on equipment in conjunction with atomic energy, railways, air navigation, space, shipping,
vehicles, military, medical treatment, combustion and recreation, or equipment in contact with food and
beverages, emergency stop circuits, clutch and brake circuits in press applications, safety equipment or
other applications unsuitable for the standard specifications described in the product catalog.
3. An application which could have negative effects on people, property, or animals requiring special safety
analysis.
4.Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a
mechanical protective function, and periodical checks to confirm proper operation.

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Safety Instructions
Caution
1.The product is provided for use in manufacturing industries.
The product herein described is basically provided for peaceful use in manufacturing industries.
If considering using the product in other industries, consult SMC beforehand and exchange specifications
or a contract if necessary.
If anything is unclear, contact your nearest sales branch.
Limited warranty and Disclaimer/Compliance Requirements
The product used is subject to the following “Limited warranty and Disclaimer” and “Compliance
Requirements”.
Read and accept them before using the product.
Limited warranty and Disclaimer
1.The warranty period of the product is 1 year in service or 1.5 years after the product is
delivered,whichever is first.2)
Also, the product may have specified durability, running distance or replacement parts. Please
consult your nearest sales branch.
2. For any failure or damage reported within the warranty period which is clearly our responsibility,
a replacement product or necessary parts will be provided.
This limited warranty applies only to our product independently, and not to any other damage
incurred due to the failure of the product.
3. Prior to using SMC products, please read and understand the warranty terms and disclaimers
noted in the specified catalog for the particular products.
2) Vacuum pads are excluded from this 1 year warranty.
A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.
Also, even within the warranty period, the wear of a product due to the use of the vacuum
pad or failure due to the deterioration of rubber material are not covered by the limited
warranty.
Compliance Requirements
1. The use of SMC products with production equipment for the manufacture of weapons of mass
destruction(WMD) or any other weapon is strictly prohibited.
2. The exports of SMC products or technology from one country to another are govemed by the
relevant security laws and regulation of the countries involved in the transaction. Prior to the
shipment of a SMC product to another country, assure that all local rules goveming that export
are known and followed.
The product is provided for use in manufacturing industries.
The product herein described is basically provided for peaceful use in manufacturing industries.
If considering using the product in other industries, consult SMC beforehand and exchange
specifications or a contract if necessary.
契約などを行ってください｡
The product is provided for use in manufacturing industries.
The product herein described is basically provided for peaceful use in manufacturing industries.
If considering using the product in other industries, consult SMC beforehand and exchange
specifications or a contract if necessary.
契約などを行ってください｡

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1. Product Specific Precautions 1
Precautions 1 Be sure to read before handling.
Design
Warning
●All models
1. The body material is A6063, the bellows is SUS316L, and other metal material is SUS304.
The seal material for vacuum environment is FKM. The armature assembly for vacuum
uses fluorine type resin (PFA). Use fluids those are compatible with using materials after
confirming. A valve for vacuum environment uses vacuum grease (fluorine type
grease:Y-VAC3).
2. If no control power is provided, apply starting voltage only for 0.15 to 0.2s. After that,
be sure to apply holding voltage (25% of starting voltage). If this operation is neglected,
it will cause coil burning and fire.
3. When starting voltage is applied, large current runs. Therefore, select a circuit
component after checking the current on the specifications.
4. Be sure to place a fuse or an earth leakage breaker for a power supplying circuit.
5. Leakage current from a circuit should be 70mA or less. If the voltage between coil
terminals becomes DC1V or more, the valve will not be closed.
6. Fluctuation of each voltage should be +/- 10% or less.
Selection
Caution
●All models
1. Use within the limits of the operating pressure range.
Mounting
Caution
● All models
1. In high humidity environments, keep the valve packed until the time of installation.
2. Perform piping so that excessive force is not applied to the flange sections. When there is
vibration from heavy objects or attachments, etc., fix piping so that vibration will not apply
torque directly to the flange section.
Piping
Caution
1. Before mounting, clean the surface of the flange seal and the O-ring with ethanol, etc.
2. There is an indentation of 0.1 to 0.2mm designed to protect the flange seal surface.
Be careful when handling the product to prevent any damage to the seal surface .
3. If a control power supply is provided, DC specification has polarity. Follow the
indication shown on the end of lead wire.
4. A wire for wiring should be 0.5 to 1.25mm2or more as reference.
5. Give enough curvature to the lead wire not to have excessive force when it is fixed.
6. Fluid containing foreign matters and oil will cause malfunction and sealing failure.
Remove such things from the fluid.

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Maintenance
Warning
If the fluid or reaction product (deposit) may cause the valve to become unsafe, the valve
should be disassembled, cleaned and re-assembled by an operator who has sufficient
knowledge and experience (e.g. a specialist).
Caution
1.When removing deposits from the valve, take care not to damage any part of the valve.
2.Replace the core assembly and the armature assembly when the end of its service.
Refer to Chapter 6, “Period and Scope of Warranty” (P. 10) for details regarding endurance
cycles.
3.If potential damages are suspected prior to the end of the service life, perform maintenance
earlier than noted.
4.SMC specified parts should be used for service. Refer to the Construction / Maintenance
parts table.
5.When removing the external seal, take care not to damage the sealing surfaces. When
installing the external seal, be sure that the O-ring is not twisted. (Refer to Chapter 7, “Parts
Replacement Procedure” (P. 11 to 12) for details.)

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2. Product Specific Precautions 2
Precautions 2 Be sure to read before handling
Maintenance Parts
Caution
SMC specified parts should be used for maintenance service.
Maintenance can be done without removing a pipe. Remove the four hexagon socket head
cap screws on the top of the cover. When the sealant is replaced, be careful not to give a
flawon the sealing face such as a body.
When they are assembled again, the work can be done easily and accurately with the
armature assemblyabsorbed to the core assembly. Check the operation and leakage after
assembling.
Service parts See “Construction Drawing” for the construction number.
Construction
no.
Description
XLS-16-□□
XLS-16-P□□
XLS-25-□□
XLS-25-P□□
(2)
Coil
assembly
XLS16-20-*G,C,D,T
XLS16-20-P*G
XLS25-20-*G,C,D,T
XLS25-20-P*G
(6)
Core
assembly
XLS16-30-1
XLS25-30-1
(4)
Armature
assembly
XLS16-30-2
XLS25-30-2
(3-1)
Core O-ring
AS568-018V
AS568-018V
(3-2)
Bonnet
O-ring
AS568-025V
AS568-030V
Note) Enter voltage no *
* mean the symbol showing an electrical entry.

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3. Specifications
Table 1 Valve specifications
Table 2 Power/ Current With rated voltage applied
Model
XLS-16
XLS-25
XLS-16-P*G
XLS-25-P*G
Flange (valve) size
16
25
16
25
Actuating type
Normally closed (N.C.)
Fluid
Vacuum of inert gas
Operating temperature oC
5 to 40
Exhausting direction
Free
Operating pressure Pa
1×10-6 (absolute pressure) to 0.1MPa (G)
Conductance l/s Note 1
5
8
5
8
Leakage
Pa･m3/s
Internal
1.3 x 10-8
at ambient temperatures , excluding gas permeation
External
1.3 x 10-11
at ambient temperatures , excluding gas permeation
Main material
Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304,
SUS405 equivalent, Seal: FKM and resin (PFA) Note 2
Surface treatment for body
Outside: hard anodized Inside: basis material
Control power supply
Not provided
Provided
Operating power voltage
(starting/ holding) V
DC24/6, DC48/12, DC100/24
DC24, AC100, AC200
Allowable voltage fluctuation %
+/- 10
Electrical entry
Type G, C, D, and T
Type G
Type of coil isolation
Type B
Max. operating frequency
10 cycle times/ min.
Weight kg
0.4
0.7
0.7
1.0
Note 1 The conductance is “molecular flow” measured with an elbow pipe which has the same
dimension with each flange.
Note 2 The valve for vacuum has vacuum grease (fluorine type: Y-VAC3).
Model
Starting
Holding
Power(W)
Current(A)
Power(W)
Current(A)
XLS-16-
*G/C/D/T , P5G
36
1.5
4.8
0.38
P1G
50Hz
30.5
0.47
14.8
0.35
60Hz
10
0.27
P2G
50Hz
30
0.24
4.9
0.11
60Hz
2.3
0.10
XLS-25-
*G/C/D/T , P5G
47
2.0
5.3
0.5
P1G
50Hz
42
0.62
20
0.46
60Hz
13.5
0.36
P2G
50Hz
45
0.35
6.7
0.15
60Hz
3.0
0.12

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4. Construction / Operation
Armature assembly includes (7), (8), and (9).
<Operation Description>
4-1 XLS-**-** (without control power supply)
Valve (9) opens when the coil assembly
is carrying starting voltage for approx.
0.15 to 0.2s.
The valve keeps opening with voltage by
25% of the starting voltage (see right).
Do not apply the starting voltage for
0.3s or more. It will cause coil burning.
When energizing to the coil assembly is
stopped, valve (9) closes.
Ex.) For DC24. DC6 V specification,
The time to apply starting voltage is same
for all voltage.
4-2 XLS-**-P*G (with control power supply)
Valve (9) opens when the coil assembly is applied the rated voltage.
Valve (9) closes when the coil assembly is stopped being energized.
As this product has pressure balanced construction, the exhausting direction is free.
0.15～0.2 s
DC 6V±10%
DC24V±10%
3-2
3-1
5
4
6
2
1
7
8
9
10
Retainer
Coil assembly
(maintenance service part)
Core assembly
(maintenance service part)
Armature assembly
(maintenance service part)
Cover
Core O-ring external seal
(maintenance service part)
Bonnet O-ring external seal
(maintenance service part)
Spring
Bellows
Valve
Body
Control power supply
Time s
Holding
Starting

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5.Dimensions
mm
Model
A
B
C
D
E
F
G
J
K
L
M
XLS-16-*G
40
104
113
38
30
35
17
23
-
-
25.5
XLS-16-*C
96
41
-
-
XLS-16-*D
60
48
-
XLS-16-*T
129
95
62
-
XLS-25-*G
50
128.5
138.5
48
40
40
26
25.5
-
-
28
XLS-25-*C
121.5
43
-
-
XLS-25-*D
120.5
63
51
-
XLS-25-*T
121.5
154.5
97
66
-
XLS-16-P*G
40
96
113
38
30
35
17
23
87
66.5
-
XLS-25-P*G
50
121.5
138.5
48
40
40
26
25.5
89.5
69
-
J M 290±10
C
B
A
A
D
D
φE
φG
J K
C
B
G1/2
270±10
K±2J
L
25
G1/2
B
C
33
OPERATION
INPUT
□□□V
K J
B
C
26 41
72530±10
グロメット( G ) コンジット( C ) ターミナル( T )
L
KJ
39
B
C
φ6～9
G1/2
DIN形ターミナル( D )
XLS-**-** (制御電源無)
F
XLS-**-P*G (制御電源付)
L
XLS-**-P*G
(with control power supply)
XLS-**-**
(without control power supply)
DIN terminal (D)
Grommet (G)
Conduit (C)
Terminal (T)

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6.Period and Scope of Warranty
The waranty period is 0.5 million cycles (under SMC’s endurance test conditions), 1 year in
service or within 1.5 years after delivery, whichever comes first.
If the valve has been used outside of the specifications, or if a failure occurs as a result of
mounting onto a machine or replacement of an assembly, seals, or etc. by the user, the warranty
will not be applied.
Note) The endurance of the product will depend on the operating conditions (such as if the flow
rate is large).
For any failure reported within the warranty period which is clearly our responsibility, the whole
valve will be replaced. This guarantee does not apply to any damage incurred due to the failure of
the valve.
Result of endurance test
(Using the circuit shown on the right)
The valve was opened and closed in an internal
vacuum state at nominal (room) temperature and
checked for internal and external leakage and proper
operation.
We confirmed that the product satisfies the product
specifications of 0.5 million cycles.
The test was performed with FKM, the standard
sealant material.
<Reference>
The pumping direction is not limited, but if the
pumping creates a flow stream, the durability of the
product could be impaired.
Therefore, the pumping direction shown on the
right figure (bellows side pumping) is recommended.
Also, the operating conditions should be checked
prior to use, as this affects the life of the product.
Chamber
Recommended
direction of air exhaust
Bellows side
Vacuum
pump
Valve side
ブランクフランジ
1～10 Pa 真空ポンプ
耐久試験条件
試験品姿勢:横向き
Blank flange
Test product orientation:
Horizontal
Endurance test conditions
Vacuum pump
1 to 10 Pa

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7.Parts Replacement Procedure
7-1. Precautions
Be sure to adhere to the instructions given in “1. Precautions 2“, when disassembling the product
for maintenance. Along with the precautions listed in Chapter 2, the user should comply with
those listed below.
Warning
If it is expected that product materials may get stuck to the product, ensure safety is
confirmed before handling. It is recommended that the user wear gloves and a mask.
Pay attention to the handling of components in accordance with the procedures outlined,
hereafter. Do not apply excessive force or impact. This may damage the product, as well as,
decrease its performance and life expectancy.
Do not disassemble the parts that are not explained in this operation manual. This may
decrease the performance and life expectancy of these parts. In addition, disassembly
may cause danger.
Torque values specified in this manual must be followed. Not adhering to these
specifications, can result in damage to the product.

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7-2. Replacement Procedure
1:Replacementof coil
assembly
2:Replacement of other parts
Procedure 1
Procedure 2
Procedure 3
Procedure 4
Procedure 5
core
Retainer
Pull out
Pull out the retainer to the
side with the coil assembly
pressed downward.
Pull out the coil assembly
from the body.
When it is assembled again,
mount the retainer on the
groove of the core securely.
Loosen the bolts gradually in
numerical order.
If the core assembly is not
replaced, the coil assembly
does not need to be removed
in advance.
①②
④
③
Check the operation and
internal and external leakage.
①②
④
③
Tighten the bolts in numerical
order without a flaw and dust on
each part.
Apply holding voltage
If the coil assembly is applied
holding voltage with the above
condition (Mount the core
assembly on the cover, and fix
the coil assembly with the
retainer.
After that, press the armature
assembly until the absorbing
position.) when it is assembled
again, thearmature assembly
is fixed at the absorbed
position.
The procedure 4 can be done
easily and accurately.
Parts excepting the wave washer
and the cover are the service
parts.
Replace a part which needs to be
maintained. Wipe out dust on the
surface of each part with a clean
cloth (such as BENCOT) soaked
into ethanol.
ｱｰﾏﾁｬAss'y
ﾎﾞﾝﾈｯﾄOﾘﾝｸﾞ
ｺｱOﾘﾝｸﾞ
ｺｱAss'y
ｶﾊﾞｰ
ｳｪｰﾌﾞﾜｯｼｬ
Wave washer
Cover
Core assembly
Core O-ring
Bonnet O-ring
Armature
assembly

XL*****-OMI0013-B
Revision
□
B RENEWAL 2018.9
4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN
Tel: + 81 3 5207 8249 Fax: [phone]
URL http://www.smcworld.com
Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.
© 2011 SMC Corporation All Rights Reserved