Zeiss GeminiSEM Series User manual

Instruction Manual
ZEISS GeminiSEM series
Field Emission Scanning Electron Microscope

ZEISS GeminiSEM series
Original Manual
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Promenade 10
07745 Jena
Germany
[email protected]
www.zeiss.com/microscopy
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Straße 22
73447 Oberkochen
Germany
Document Name: ZEISS GeminiSEM series Instruction Manual
Order Number: 349500-8138-000
Revision: 2
Language: en-US
Effective from: 11/2020
© 2020 Without the prior written consent of ZEISS, this document or any part of it must neither be translated nor reproduced or
transmitted in any form or by any means - including electronic or mechanic methods, by photocopying, recording or by any in-
formation or filing system. The right to make backup-copies for archiving purposes shall remain unaffected thereby. Any viola-
tions may be prosecuted as copyright infringements.
The use of general descriptive names, registered names, trademarks, etc. in this document does not imply that such names are
exempt from the relevant intellectual property laws and regulations and therefore free for general use. This shall also apply if
this is not specifically referred to. Software programs shall entirely remain the property of ZEISS. No program or subsequent up-
grade thereof may be disclosed to any third party, copied or reproduced in any other form without the prior written consent of
ZEISS, even if these copies or reproductions are destined for internal use at the customer's only, the only exception being one
single back-up copy for archiving purposes.
ZEISS reserves the right to make modifications to this document without notice.

ZEISS  Table of Contents
Table of Contents
1 General Information........................................................................ 7
1.1 Text Conventions and Link Types ........................................................................ 7
1.2 Explanation on Warnings and Additional Information ......................................... 8
1.3 Further Applicable Documents ............................................................................ 9
1.4 Contact............................................................................................................... 9
2 Safety ............................................................................................. 10
2.1 Intended Use ...................................................................................................... 10
2.2 General Safety Information ................................................................................. 11
2.2.1 Safe Operation Conditions .................................................................... 11
2.2.2 Requirements for Personnel .................................................................. 11
2.2.3 Preventive Maintenance ........................................................................ 12
2.2.4 Safe Handling of Spare Parts ................................................................. 12
2.3 Prevention of Hazards ......................................................................................... 12
2.3.1 Biological Hazards................................................................................. 12
2.3.2 Burn Hazards ........................................................................................ 13
2.3.3 Chemical Hazards.................................................................................. 13
2.3.4 Electrical Hazards .................................................................................. 14
2.3.5 High Pressure Hazards........................................................................... 14
2.3.6 Magnetic Field Hazards ......................................................................... 15
2.3.7 Mechanical Hazards .............................................................................. 15
2.3.8 Radiation Hazards ................................................................................. 16
2.3.9 Suffocation Hazards .............................................................................. 16
2.4 Warning Labels and Lights .................................................................................. 17
2.4.1 Warning Labels ..................................................................................... 17
2.5 Safety Devices and Interlocks .............................................................................. 20
2.5.1 Protective Cover Panels ......................................................................... 20
2.5.2 Main Switch.......................................................................................... 21
2.5.3 Circuit Breaker ...................................................................................... 22
2.5.4 Emergency Off (EMO) Option External................................................... 22
2.5.5 Emergency Off (EMO) Option Internal ................................................... 23
2.5.6 Locking Devices .................................................................................... 24
2.5.7 Lockout/Tagout Equipment ................................................................... 25
3 Product and Functional Description ................................................ 26
3.1 System Overview................................................................................................. 26
3.2 Main Components .............................................................................................. 28
3.2.1 Vacuum System .................................................................................... 28
3.2.2 Vacuum System Pressure Modes ........................................................... 29
3.2.3 Electron Optical Column | Gemini 1....................................................... 34
3.2.4 Electron Optical Column | Gemini 2....................................................... 36
3.2.5 Electron Optical Column | Gemini 3....................................................... 38
3.2.6 Gun Modes ........................................................................................... 39
3.2.7 Detectors .............................................................................................. 40
3.2.8 Specimen Stage .................................................................................... 44
3.2.9 Dual Joystick ......................................................................................... 45
3.3 Optional Components and Accessories................................................................ 46
3.3.1 Optional Detectors................................................................................ 46
3.3.2 Control Panel ........................................................................................ 60
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 3

 Table of Contents ZEISS
3.4 Software Description........................................................................................... 62
3.4.1 SmartSEM ............................................................................................. 62
4 Installation...................................................................................... 67
5 Commissioning and First Operating Steps....................................... 68
5.1 Prerequisites for Commissioning and Operation .................................................. 69
5.2 Switching On the Microscope System.................................................................. 69
5.2.1 Energizing the Microscope .................................................................... 69
5.2.2 Starting the Microscope ........................................................................ 71
5.3 Starting the Software.......................................................................................... 72
5.3.1 Calling up the Help................................................................................ 72
5.3.2 Keyboard Shortcuts............................................................................... 72
5.4 Acquiring an Image............................................................................................. 74
5.4.1 Preparing the Specimen Holder ............................................................. 74
5.4.2 Loading the Specimen Chamber............................................................ 76
5.4.3 Locating the Specimen.......................................................................... 79
5.4.4 Switching on the Gun ........................................................................... 80
5.4.5 Switching on the EHT............................................................................ 80
5.4.6 Acquiring an Image............................................................................... 81
5.4.7 Optimizing the Image............................................................................ 83
5.4.8 Saving the Image .................................................................................. 85
5.5 Modifying Gun Parameters.................................................................................. 85
5.5.1 Selecting the Gun Mode........................................................................ 85
5.5.2 Setting the Probe Current...................................................................... 86
5.5.3 Continuously Modifying the Probe Current (License: OPTIPROBE) .......... 86
5.5.4 Measuring the Probe Current ................................................................ 87
5.5.5 Changing the Extractor Voltage ............................................................ 88
5.6 Working with Different Aperture Configurations and Beam Modes .................... 89
5.6.1 Determining the Installed Aperture Configuration | Gemini 1 Column
and Gemini 3 Column ........................................................................... 89
5.6.2 Determining the Installed Aperture Configuration | Gemini 2 Column.... 89
5.6.3 Selecting the Aperture .......................................................................... 90
5.6.4 Selecting the Column Mode .................................................................. 90
5.7 Finding Appropriate Detector Settings................................................................. 91
5.7.1 Selecting a Detector.............................................................................. 91
5.7.2 Setting up the InLens SE Detector ......................................................... 92
5.7.3 Setting up the SE Detector .................................................................... 92
5.7.4 Setting up the VPSE Detector ................................................................ 93
5.7.5 Setting up the C2D Detector ................................................................. 94
5.7.6 Setting up the AsB Detector .................................................................. 95
5.7.7 Setting up the AsB4 Detector ................................................................ 96
5.7.8 Setting up the aBSD/aBSD-LH/VP-BSD Detector..................................... 98
5.7.9 Setting up the YAG BSD Detector.......................................................... 99
5.7.10 Setting up the EsB Detector................................................................... 100
5.7.11 Setting up the SCD Detector ................................................................. 101
5.7.12 Setting up the aSTEM Detector ............................................................. 101
5.7.13 Setting up the CL Detector.................................................................... 103
5.8 Working with Variable Pressure...........................................................................103
5.8.1 Changing to Standard VP Mode............................................................ 104
5.8.2 Using Nano VP or XVP Mode ................................................................ 105
5.8.3 Returning to HV Mode .......................................................................... 111
5.9 Shutting down the System ..................................................................................112
5.9.1 Finishing the Work Session.................................................................... 112
5.9.2 De-energizing the Microscope............................................................... 112
4 Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000

ZEISS  Table of Contents
5.9.3 Performing a Lockout/Tagout................................................................ 113
5.10 Performing an Emergency Shutdown ..................................................................113
6 Care and Maintenance ....................................................................114
6.1 Safety During Cleaning and Maintenance............................................................114
6.2 Maintenance Schedule........................................................................................114
6.3 Maintenance Work .............................................................................................114
6.3.1 Change of Consumables and Chemicals ................................................ 114
6.4 Care and Cleaning Work .....................................................................................115
6.4.1 Cleaning the Microscope....................................................................... 115
7 Troubleshooting .............................................................................117
7.1 Overall System ....................................................................................................118
7.1.1 Checking the CAN Communication ....................................................... 118
7.2 Chamber.............................................................................................................119
7.2.1 Initializing the Stage.............................................................................. 119
7.2.2 Defining the Post Initialization Position of the Stage.............................. 119
7.2.3 Changing the Joystick TV Angle ............................................................ 120
7.2.4 Replacing the Chamber Door Seal ......................................................... 120
7.2.5 Resetting the Touch Alarm .................................................................... 122
7.2.6 Checking the Water Flow and Temperature .......................................... 122
7.3 Column...............................................................................................................122
7.3.1 Baking out the Gun Head...................................................................... 122
7.3.2 Calibrating the Probe Current................................................................ 123
7.3.3 Calibrating the Stigmator ...................................................................... 124
7.4 Power Circuit ......................................................................................................124
7.4.1 Checking the Position of the Circuit Breakers ........................................ 124
7.5 Detectors ............................................................................................................125
7.5.1 Lubricating the Rod............................................................................... 125
7.6 Apertures............................................................................................................126
7.6.1 Cleaning the Beamsleeve Apertures....................................................... 126
7.7 PC.......................................................................................................................127
7.7.1 Cleaning up the PC ............................................................................... 127
8 Decommissioning and Disposal.......................................................128
8.1 Decommissioning................................................................................................128
8.2 Transport and Storage ........................................................................................129
8.3 Disposal ..............................................................................................................132
8.4 Decontamination ................................................................................................132
9 Technical Data and Conformity.......................................................133
9.1 System Layout.....................................................................................................133
9.2 Performance Data and Specifications | GeminiSEM 360.......................................133
9.3 Performance Data and Specifications | GeminiSEM 460.......................................139
9.4 Performance Data and Specifications | GeminiSEM 560.......................................145
9.5 Installation Requirements....................................................................................151
9.5.1 Layout and Connections........................................................................ 153
9.6 Applicable Standards and Regulations.................................................................154
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 5

 Table of Contents ZEISS
10 Parts and Tools...............................................................................155
10.1 Tools and Accessories .........................................................................................155
Glossary ..........................................................................................157
Index...............................................................................................161
6 Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000

ZEISS 1 General Information | 1.1 Text Conventions and Link Types
1 General Information
This Instruction Manual is considered to be part of the SEM workstation. Herein after referred to
as Microscope System.
This Instruction Manual contains basic steps and safety information that must be observed during
operation and maintenance. Therefore, it must be read by the operator prior to commissioning
and must always be available at the place of use of the Microscope System. This Instruction Man-
ual is a permanent part of the Microscope System and, if resold, must remain with the Microscope
System or be handed over to the new owner.
This manual contains the following chapters:
Chapter Content
General Information Explains the function and structure of this manual.
Safety Summarizes important safety details.
Product and Func-
tional Description
Describes the microscope and its main hardware components and
provides an overview of the user interface.
Installation Refers to the ZEISS service representatives.
Commissioning and
First Operating Steps
Contains information about starting the microscope and the software,
obtaining a first image, adjusting important parameters, and power-
ing down the microscope, also in emergency.
Care and Mainte-
nance
Informs you about preventive maintenance work and intervals and the
change of consumables.
Troubleshooting Describes common issues and how to resolve them.
Decommissioning
and Disposal
Summarizes notes on shutdown and disposal.
Technical Data and
Conformity
Lists hardware specifications as well as the manufacturer’s declaration
that the equipment is in conformity with all applicable European Di-
rectives.
Parts and Tools Lists consumables, spare parts, tools, and accessories.
Glossary Lists important technical terms.
Index Lists keywords to help you find relevant information quickly.
1.1 Text Conventions and Link Types
The following text conventions and link types are used:
Text convention Meaning
Click Start.
Press the STANDBY button.
Press [Enter] on the keyboard.
The names of controls and important infor-
mation are shown in bold letters.
Press <Ctrl+Alt+Del> Press several keys on the keyboard simultane-
ously.
Select Tools > Goto Control Panel > Air-
lock.
Follow a path in the software.
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 7

1 General Information | 1.2 Explanation on Warnings and Additional Information ZEISS
Text convention Meaning
Text input Text to be entered by the user
Programming and Macros Anything typed in literally during program-
ming, including, for example, macro codes,
keywords, data types, method names, vari-
ables, class names, and interface names.
Tab.1: Text convention
Link type Meaning
See: Text Conventions and Link Types [ } 7].Link to further information for this topic.
https://www.zeiss.com/corporate/int/
home.html
Link to a website on the internet.
Tab.2: Link types
1.2 Explanation on Warnings and Additional Information
DANGER, WARNING, CAUTION, and NOTICE are standard signal words used to determine the lev-
els of hazards and risks of personal injury and property damage. Not only the safety instructions
and warnings in the Safety chapter are to be considered but also the safety instructions and
warnings in other chapters. Failure to comply with these instructions and warnings can result in
both personal injury and property damage and involve the loss of any claims for damages.
The following symbols and warnings indicating dangerous situations and hazards are used in this
document.
DANGER
Type and source of danger
DANGER indicates an imminently hazardous situation which, if not avoided, will result in death
or serious injury.
WARNING
Type and source of danger
WARNING indicates a potentially hazardous situation which, if not avoided, may result in
death or serious injury.
CAUTION
Type and source of danger
CAUTION indicates a potentially hazardous situation which, if not avoided, may result in minor
or moderate injury.
NOTICE
Type and source of danger
NOTICE indicates a potentially harmful situation which, if not avoided, may result in property
damage.
8 Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000

ZEISS 1 General Information | 1.3 Further Applicable Documents
Info
Provides additional information or explanations to help users better understand the contents
of this Instruction Manual.
1.3 Further Applicable Documents
Please take also note of the following documents:
Brochures and
Certificates
For Brochures, ISO certificates, CSA certificates and EU declarations of conformity ask your ZEISS
Sales & Service Partner.
Installation
Requirements
For more details on technical data, refer to the corresponding Installation Requirements.
Local and National
health and safety
regulations
Local and national health and safety regulations should be adhered to for the site and the use of
the Microscope System. Please consult with your ZEISS Sales & Service Partner in the event of
these regulations conflicting with the installation requirements of the Microscope System.
Safety data sheets Observe the enclosed safety data sheets. The instructions and guidelines given in the respective
safety data sheets must be complied with.
Software For more detailed information on how to use Smart SEM, please refer to its Online Help. Software
and firmware updates can be found at https://www.zeiss.com/microscopy/int/downloads.html or
ask your ZEISS Sales & Service Partner.
System and 3rd
Party Components,
Accessories
The Microscope System can be configured in many ways. Information about the individual com-
ponents, enhancements and accessories can be obtained from your ZEISS Sales & Service Partner.
Also refer to the 3rd Party documentation of the manufacturer.
1.4 Contact
If you have any questions or problems, please contact your local ZEISS Sales & Service Partner or
one of the following addresses:
Headquarter
Phone: [phone]
Fax: [phone]
Email: [email protected]
Service Germany
Phone: [phone]
Fax: [phone]
Email: [email protected]
Courses and training
Email: [email protected]
ZEISS Sales & Service Partner
You can find a ZEISS Sales & Service Partner in your area under https://www.zeiss.de/mikroskopie/
website/forms/sales-and-service-contacts.html.
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 9

2 Safety | 2.1 Intended Use ZEISS
2 Safety
This chapter contains general requirements for safe working practices. Any person using the Mi-
croscope System or commissioned with installation or maintenance must read and observe these
general safety instructions. Knowledge on basic safety instructions and requirements is a precon-
dition for safe and fault-free operation. Operational safety of the supplied Microscope System is
only ensured if it is operated according to its intended use.
If any work is associated with residual risks, this is mentioned in the relevant parts of this docu-
ment in a specific note. When components must be handled with special caution, they are
marked with a warning label. These warnings must always be observed.
2.1 Intended Use
The microscope has been designed to generate an image or to analyze appropriate specimens,
which is achieved by scanning a focused electron beam across the specimen (SEM Imaging).
In addition to microscopic examination, the microscope also allows for the modification of appro-
priate specimens. For these purposes, the specimen is placed in the evacuated specimen chamber.
The microscope has been designed for the following applications:
§Imaging
Image generation and specimen analysis can be performed by means of a focused electron
beam that is scanned across the specimen.
This application allows for the analysis of surface structures and near-surface structures of ap-
propriate specimens.
§Analytics
Elemental analysis with optional EDS spectroscopy at the focused electron beam position.
Crystal structure and orientation with optional EBSD detectors.
In combination with a gas injection system option, the microscope has been designed for the fol-
lowing applications:
§Gas-assisted deposition
A process gas in combination with a focused electron beam can be used to deposit material
onto the specimen surface.
§Gas-assisted etching
This application enables an accelerated material removal by a focused electron beam in com-
bination with process gas.
Info
Not for therapeutic, treatment or medical diagnostic evidence.
Info
Not all products are available in every country. Contact your local ZEISS representative for
more information.
SmartSEM
Software
The SmartSEM software is intended for the operation of scanning electron microscopes (SEMs).
The SmartSEM software has to be run exclusively on a personal computer delivered by ZEISS. Any
other applications are not allowed.
Regarding the operation of the microscope, the following regulations must be met:
§Only operate the microscope according to the operating conditions after correct installation
by a ZEISS service representative.
10 Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000

ZEISS 2 Safety | 2.2 General Safety Information
§The microscope is only to be used by operators who have been trained by a ZEISS service rep-
resentative. Basic operator training and safety instructions will be provided within the scope
of the initial start-up by ZEISS. Make sure that everyone who operates the microscope only
performs the tasks for which he/she is trained.
§Operators of the microscope must not deviate from the instructions provided in this manual.
§Only perform preventive maintenance tasks described in this manual. All tasks of mainte-
nance, service, and repair not described in this manual have to be performed by an authorized
ZEISS service representative.
§The microscope is to be used in a laboratory environment for commercial and scientific pur-
poses only.
Using the microscope for any other purpose is not allowed and can be hazardous.
Improper use can easily lead to impairment of its function or even damage to the Microscope Sys-
tem. Damage caused by incorrect operation, negligence or unauthorized intervention, in particu-
lar by removing, modifying or replacing parts of the device, can not be held liable by the device
manufacturer. Third-party devices or components that are not expressly approved by ZEISS may
not be used.
2.2 General Safety Information
This Instruction Manual must be read before commissioning in order to ensure safe and uninter-
rupted operation. Pay particular attention to all listed safety notes. Make sure, that
§the operating personnel has read and understood this Instruction Manual, associated docu-
ments and particularly all safety regulations and instructions, and applies the same.
§the local and national safety and accident prevention regulations must be observed, as well as
the applicable laws and regulations in your country.
§this Instruction Manual is always available with/together with the Microscope System.
§the Microscope System is always in perfect condition.
§the Microscope System is secured against access by unauthorized persons.
§maintenance and repair work, remodeling, removal or replacement of components, as well as
any other intervention in the Microscope System not described in this Instruction Manual, may
only be carried out by the manufacturer ZEISS or persons expressly authorized by ZEISS to do
so.
2.2.1 Safe Operation Conditions
If the product safety labels are covered or worn or if any of the safety devices are not in proper
working condition, operation of the microscope can be hazardous.
§Periodically check the function of safety equipment and that all protective cover panels are in-
stalled.
§Always follow the instructions given on the safety labels.
§Inspect and clean the product safety labels to maintain good legibility.
2.2.2 Requirements for Personnel
Deviating from the instructions given in this manual and on the safety labels can be hazardous or
can lead to property damage.
§Do not operate the microscope until you have completely read and understood the entire user
documentation delivered with the microscope.
§Observe all safety labels on the microscope and within this manual.
§Only operate the microscope according to the operating conditions after correct installation
by a ZEISS service representative.
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 11

2 Safety | 2.3 Prevention of Hazards ZEISS
§Only ZEISS service representatives, who have specialized knowledge of radiation protection,
are permitted to service the microscope.
Operator Training
Within the scope of initial start-up, the ZEISS service representative will perform a basic operator
training. The basic operator training consists of fundamental operation procedures including
safety instructions. Besides, an introduction to basic maintenance tasks will be given for an ad-
vanced operator, who has to be an electrically skilled person. The training performed must be
documented appropriately.
Special application training is offered on request.
2.2.3 Preventive Maintenance
Deviating from the maintenance and repair tasks described in this manual can be hazardous or
can lead to property damage:
§Only perform preventive maintenance and repair tasks described in this manual.
§All tasks of maintenance, service, and repair not described in this manual have to be per-
formed by an authorized ZEISS service representative.
§To maintain best performance of the microscope, it is essential to perform preventive mainte-
nance on a regular basis. Moreover, it is recommended that you conclude a service contract
with your local ZEISS service representative or organization.
2.2.4 Safe Handling of Spare Parts
Using spare parts that are not provided by ZEISS can be hazardous or can lead to property dam-
age:
§Only genuine parts supplied by ZEISS are to be used in servicing the microscope.
§Contact your ZEISS service representative for information regarding how to order spare parts.
§Unless authorized by ZEISS, all spare parts should be installed by a ZEISS service representa-
tive.
2.3 Prevention of Hazards
This section summarizes potential hazards and recommended safety precautions. Failure to follow
the safety instructions and instructions may result in personal injury and property damage.
2.3.1 Biological Hazards
WARNING
Biological hazards
Biological substances may pose a threat to the health of humans and other living organisms.
4Keep a logbook of the biological substances loaded into the microscope and show it to
the ZEISS service representatives before they perform any work on the microscope.
12 Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000

ZEISS 2 Safety | 2.3 Prevention of Hazards
2.3.2 Burn Hazards
NOTICE
Hot surfaces during bakeout
Parts of the enclosure in the upper range of the column may become hot during bakeout, par-
ticularly after a long bakeout cycle.
4Do not place any combustible objects on the grids of the electron optical column during
bakeout.
4After the bakeout procedure, let surfaces cool down before working around the column.
4Only advanced operators are allowed to perform the bakeout procedure.
2.3.3 Chemical Hazards
WARNING
Aggressive or toxic chemicals
Aggressive or toxic chemicals can cause chemical burns.
4When handling aggressive or toxic chemicals, wear suitable protective clothing, gloves,
and eye/face protection.
4Do not eat, drink, or smoke while handling toxic chemicals.
4Refer to local safety regulations.
4Read and follow the instructions in the material safety data sheet of the chemical. The ma-
terial safety data sheet can be obtained from the supplier of the chemicals.
WARNING
Reaction products
Dangerous reaction products can be present in the specimen chamber during or after opera-
tion.
4Ensure that there is an appropriate exhaust gas line to remove the waste gas of the pre-
vacuum pump and to transmit it to the outside.
4Wear lint-free gloves when touching the inner parts of the specimen chamber or the speci-
men.
CAUTION
Irritant gases
If a gas injection system (GIS) is used, irritant gases might be released from the precursors.
Gases can cause irritation to eyes, skin, and respiratory system.
4Do not remove a reservoir from the gas injection system.
4Contact your ZEISS service representative to have an empty reservoir replaced.
4Never try to open a reservoir.
4For further information, refer to the GIS instruction manual.
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 13

2 Safety | 2.3 Prevention of Hazards ZEISS
NOTICE
Environmental risk due to disposal of aggressive or toxic chemicals
When disposing of aggressive or toxic chemicals, there is a threat of damage to the environ-
ment.
4When disposing of waste that has been generated during a service operation (e.g. used ro-
tary pump oil), comply with all national and local safety and environmental protection reg-
ulations.
2.3.4 Electrical Hazards
WARNING
Hazardous voltage inside the microscope
High voltages are present inside the microscope. Contact may cause burn or electrical shock.
4Do not remove any parts.
4Only authorized ZEISS service representatives are allowed to service the microscope.
4Do not try to service the microscope yourself.
4Disconnect power before opening.
WARNING
High leakage current
High leakage currents are present in the microscope. Contact may cause burn or electrical
shock.
4Ensure proper grounding. For more information, refer to the Installation Requirements
document.
4Do not operate the microscope without the separate ground connection.
2.3.5 High Pressure Hazards
WARNING
High pressure in gas cylinders
Gas cylinders containing for example nitrogen or compressed air have a high internal pressure
of approximately 200bar. If not properly handled, the contained gas can abruptly escape and
cause the gas cylinder to move in an uncontrollable manner.
4Observe all safety labels on the gas cylinders and all safety instructions given by the gas
cylinder manufacturer.
4Always operate gas cylinders in an upright position and secure them so they will not tip
over.
4Before transporting gas cylinders, place protective caps on them.
14 Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000

ZEISS 2 Safety | 2.3 Prevention of Hazards
2.3.6 Magnetic Field Hazards
WARNING
Malfunction of medical devices near ion getter pumps
Magnetic fields present at the ion getter pumps may disturb the function of medical devices.
The magnetic fields are also present if the microscope is switched off.
If you wear medical implants that are susceptible to magnetic fields (e.g. cardiac pacemakers),
do the following:
4Keep a distance of at least 30cm from the ion getter pumps.
4Follow the safety instructions provided by the pump manufacturer.
2.3.7 Mechanical Hazards
CAUTION
Moving the specimen stage
Fingers can be trapped by the moving specimen stage.
4Always close the chamber door before moving the specimen stage.
4To remove parts fallen into or near to the stage use a tool (e.g. tweezers) instead of your
fingers.
CAUTION
Closing the chamber door
Fingers can be pinched when closing the chamber door.
4Use the door handle to close the chamber door.
4Ensure not to get your fingers caught in the chamber door gap.
NOTICE
Short working distance
When opening the chamber door, the microscope or specimen can be damaged if the speci-
men stage is at a short working distance. If a BSD detector is inserted, it can be damaged as
well.
4Always retract any retractable detectors before opening the chamber door.
4However, in NanoVP and XVP mode, the beamsleeve should stay inserted.
4Always move the specimen stage to a long working distance before opening the chamber
door.
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 15

2 Safety | 2.3 Prevention of Hazards ZEISS
2.3.8 Radiation Hazards
WARNING
Radiation hazard due to X-rays
X-rays are generated inside the microscope during operation. This is unavoidable because elec-
trons are accelerated by voltages up to 30kV.
4Do not remove any parts around the column and chamber that are essential for radiation
protection.
4Use genuine ZEISS parts exclusively.
4Ensure that all local safety and X-ray protection regulations are met.
4Only authorized ZEISS service representatives are allowed to service the microscope.
The microscope is equipped with several radiation protection devices, which, under regular oper-
ating conditions, ensure that the microscope operates in accordance with the German X-ray pro-
tection regulation (RöV), the German radiation protection regulation (StrSchV) as well as with the
EC Directive 2013/59/EURATOM.
In the EU, the operation of the microscope is permission-free as the following requirements are
fulfilled:
§The acceleration voltage is limited to 30 kV.
§The local dose rate at a distance of 0.1 m from the accessible surface of the microscope does
not exceed 1 μSv/h.
§A respective label is attached to the microscope.
Outside the EU, the user of the microscope has to comply with the local regulations of the coun-
try where the microscope is operated.
Contact Radiation
Protection
For questions regarding radiation protection, contact the ZEISS Radiation Safety Officer, Carl Zeiss
AG, 73447 Oberkochen, Germany
phone: [phone]
2.3.9 Suffocation Hazards
WARNING
Suffocation hazard due to lack of oxygen
Gaseous dry nitrogen is used to vent the specimen chamber during specimen exchange. Inhal-
ing nitrogen may cause unconsciousness.
4During specimen exchange, keep the chamber door open as short as possible.
4Do not inhale the air from within the specimen chamber.
4Ensure that the area around the microscope is sufficiently vented.
4If you begin to experience symptoms of asphyxia (for example: rapid breathing, loss of
mental alertness and/or muscular coordination, depression of sensations, emotional insta-
bility, fatigue) leave the room immediately and inform the facility’s safety officer.
Concerning the hazards of nitrogen installations and associated safety precautions refer to the
current version of the guideline IGC Doc 44/18: Hazards of Oxygen-Deficient Atmospheres, pub-
lished by EIGA (European Industrial Gases Association).
To download the document:
1. Go to EIGA homepage www.eiga.eu.
2. Select Publications > EIGA Documents.
3. From the list, select Doc. 44/18.
16 Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000

ZEISS 2 Safety | 2.4 Warning Labels and Lights
4. Click Download.
2.4 Warning Labels and Lights
All locations that may pose specific hazards are marked with additional warning labels (pic-
tograms) on the Microscope System. These warning labels indicate potential hazards and form
part of this Instruction Manual. They are to be kept in clean and easily legible condition. Damaged
or illegible warning labels must be replaced immediately. Always observe all warning labels on the
complete Microscope System.
2.4.1 Warning Labels
Appropriate safety labels on the microscope warn operators of hazards. Each safety label is af-
fixed close to the point where a particular hazard exists. Several labels also provide legal informa-
tion.
Front Side of
Microscope
1
2
3
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 17

2 Safety | 2.4 Warning Labels and Lights ZEISS
Rear Side of
Microscope
Contactmay cause burn or electric
shock.Only authori sed service
Staffis allowed to serv ice the
equipment.
Disconnectpower before openin g.
Hazardousvoltage in side
WARNING
Burnha zard
CAUTION
347800-0033-000-05en
Hotsurfaces inside duri ng bakeout
procedure.
Donot place any combu stible
objectson the grids of the el ectron
opticalcolumn. Only authorised
servicestaff is allo wed to servic e
theequipment.
Disconnectpower and let su rfaces
coolbefore opening.
347800-0033-000-06en
X-raysare generated inside th e
electronmicroscope during
operation.
Donot remove any parts.
Usegenuine ZEISS parts
exclusively.
Observelocal safety and X -ray
protectionregulations.
Radiationhazard
CAUTION
Suffocationhazard
CAUTION
Thespecimen c hamber is
ventilatedwith gaseous nitrogen.
Ensurethat the area around the
electronmicroscope is sufficiently
ventilated.
Highle akage current
CAUTION
Ensureproper grounding .
Donot operate the electron
microscopewithout a separate
groundconnecti on.
347800-0033-000-10en
InGermany, the operation of the FESEM is permissionfree
asthe following requirem ents are fulfilled:
islimited to 30 kV.
Theacceleration voltage of this electro nm icroscope
accessiblesurface of theelectron microscope does not
Thelocal dose rate at a distance of 0.1 m from the
exceed1 µS/h.
4
5
6
7
8
9
The safety labels always need to be attached to the correct spots at the microscope. If a safety la-
bel is lost or unreadable, it needs to be reordered via the following reorder numbers:
Position and Figure of the Safety La-
bel
Description
1
At the front of the chamber door.
Risk ofinjury
WARNING
347800-0033-000-02en
Fingers could be trapped.
Always close the chamber door
before you move the stage.
Risk of injury
Fingers could be trapped. Always close the cham-
ber door before you move the stage.
Reorder no. 347800-0033-000-02en
2
At the front of the chamber door.
Risk ofdamage
CAUTION
347800-0033-000-04en
The FESEM or specimen could be
damaged if specimen stage is at a
short working distance.
Move the specimen stage to a long
working distance before opening
the chamber door.
Risk of damage
The FESEM or specimen could be damaged if
specimen stage is at a short working distance.
Move the specimen stage to a long working dis-
tance before opening the chamber door.
Reorder no. 347800-0033-000-04en
3
At the front of the plinth
Avoid injury
CAUTION
347800-0033-000-01en
Make sure you have read and
understood the instruction
manual before operating this
product.
Avoid injury
Make sure you have read and understood the in-
struction manual before operating this product.
Reorder no. 347800-0033-000-01en
18 Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000

ZEISS 2 Safety | 2.4 Warning Labels and Lights
Position and Figure of the Safety La-
bel
Description
4
At the rear of the electron optical
column
Contact may cause burn or electric
shock. Only authorised service
Staff is allowed to service the
equipment.
Disconnect power before opening.
Hazardous voltage inside
WARNING
347800-0033-000-03en
Hazardous voltage inside
Contact may cause burn or electric shock. Only
authorized service Staff is allowed to service the
equipment.
Disconnect power before opening.
Reorder no. 347800-0033-000-03en
5
At the rear of the electron optical
column
Burn hazard
CAUTION
347800-0033-000-05en
Hot surfaces inside during bakeout
procedure.
Do not place any combustible
objects on the grids of the electron
optical column. Only authorised
service staff is allowed to service
the equipment.
Disconnect power and let surfaces
cool before opening.
Burn hazard
Hot surfaces inside during bakeout procedure.
Do not place any combustible objects on the
grids of the electron optical column. Only autho-
rised service staff is allowed to service the equip-
ment.
Disconnect power and let surfaces cool before
opening.
Reorder no. 347800-0033-000-05en
6
At the rear of the plinth
Suffocation hazard
CAUTION
347800-0033-000-08en
The specimen chamber is
ventilated with gaseous nitrogen.
Ensure that the area around the
electron microscope is sufficiently
ventilated.
Suffocation hazard
The specimen chamber is ventilated with gaseous
nitrogen.
Ensure that the area around the electron micro-
scope is sufficiently ventilated.
Reorder no. 347800-0033-000-08en
7
At the rear of the plinth
High leakage current
CAUTION
347800-0033-000-07en
Ensure proper grounding.
Do not operate the electron
microscope without a separate
ground connection.
High leakage current
Ensure proper grounding.
Do not operate the electron microscope without
a separate ground connection.
Reorder no. 347800-0033-000-07en
8
At the rear of the plinth
347800-0033-000-10en
In Germany, the operation of the FESEM is permissionfree
as the following requirements are fulfilled:
is limited to 30 kV.
The acceleration voltage of this electron microscope
accessible surface of theelectron microscope does not
The local dose rate at a distance of 0.1 m from the
exceed 1 µS/h.
In Germany, the operation of the FESEM is per-
missionfree as the following requirements are ful-
filled:
The acceleration voltage of this electron micro-
scope is limited to 30kV.
The local dose rate at a distance of 0.1m from
the accessible surface of the electron microscope
does not exceed 1μS/h.
9
At the rear of the plinth
347800-0033-000-06en
X-rays are generated inside the
electron microscope during
operation.
Do not remove any parts.
Use genuine ZEISS parts
exclusively.
Observe local safety and X-ray
protection regulations.
Radiation hazard
CAUTION
Radiation hazard
X-rays are generated inside the electron micro-
scope during operation.
Do not remove any parts.
Use genuine ZEISS parts exclusively.
Observe local safety and X-ray protection regula-
tions.
Reorder no. 347800-0033-000-06en
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 19

2 Safety | 2.5 Safety Devices and Interlocks ZEISS
Position and Figure of the Safety La-
bel
Description
Liquid nitrogen
CAUTION
347800-0033-000-09en
Contact with liquid or cold vapors
can cause freeze burns or severe
frostbite.
Wear face, eye and skin protection.
For relevant options:
Liquid nitrogen
Contact with liquid or cold vapors can cause
freeze burns or severe frostbite.
Wear face, eye and skin protection.
Reorder no. 347800-0033-000-09en
Underneath the cover panels of the microscope, there are some more safety labels, which are ad-
dressed to authorized ZEISS service representatives. These safety labels are described in the docu-
ments for ZEISS service representatives.
Position and Figure of the Type Plate Description
At the rear of the microscope Type plate
Order no. 349599-9100-010 (GeminiSEM 360)
Order no. 349599-9100-020 (GeminiSEM 460)
Order no. 349599-9100-030 (GeminiSEM 560)
2.5 Safety Devices and Interlocks
In order to prevent injuries and/or property damage, the Microscope System is equipped with sev-
eral safety devices and interlocks. Defects and other damaged safety devices may cause injuries
and property damage. In case of damage or defect, the affected parts of the Microscope System
must be taken out of operation immediately and be secured against unintentional use.
For verifying the safety of the Microscope System, please contact your ZEISS service representa-
tive. Please keep the service logs and logbooks.
2.5.1 Protective Cover Panels
Due to hazardous voltages and X-rays inside the microscope, the microscope is equipped with
protective cover panels.
20 Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000