Zeiss MultiSEM 505 Series User manual

Instruction Manual
ZEISS MultiSEM 505/506 Series
Scanning Electron Microscope

2
Instruction Manual ZEISS MultiSEM 505/506 Series
ZEISS MultiSEM
Original Instructions
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Promenade 10
07745 Jena
Germany
[email protected]
www.zeiss.com/microscopy
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Straße 22
73447 Oberkochen
Germany
Document name: ZEISS MultiSEM Instruction Manual
Revision: 1.5
Effective from: May 2018
© Jena 2018 by Carl Zeiss Microscopy GmbH - all rights reserved
349598-8020-100
This document or any part of it must not be translated, reproduced, or transmitted in any form or by any means, electronic or mechanical, including
photocopying, recording, or by any information or retrieval system. Violations will be prosecuted.
The use of general descriptive names, registered names, trademarks, etc. in this document does not imply, even in the absence of a specific
statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. Software programs will
fully remain the property of ZEISS. No program, documentation, or subsequent upgrade thereof may be disclosed to any third party, unless prior
written consent of ZEISS has been procured to do so, nor may be copied or otherwise duplicated, even for the customer's internal needs apart from
a single back-up copy for safety purposes.
ZEISS reserves the right to make modifications to this document without notice.

Table of Contents

Table of Contents
4Instruction Manual ZEISS MultiSEM 505/506 Series|ZEN MultiSEM v1.5

Table of Contents
Instruction Manual ZEISS MultiSEM 505/506 Series|ZEN MultiSEM v1.5 5
1 About this Instruction Manual 11
1.1 Introduction 11
1.2 Conventions in this Document 12
2 Safety 17
2.1 Intended Use 17
2.2 General Information 17
2.3 Safety Procedures 18
2.3.1 Safe Operation Conditions 18
2.3.2 Requirements for Personnel 19
2.3.3 Preventive Maintenance 20
2.3.4 Safe Handling of Spare Parts 20
2.4 Prevention of Hazards 21
2.4.1 Burn Hazards 21
2.4.2 Chemical Hazards 21
2.4.3 Electrical Hazards 22
2.4.4 Mechanical Hazards 23
2.4.5 High Pressure Hazards 25
2.4.6 Radiation Hazards 25
2.4.7 Suffocation Hazards 26
2.5 Safety Equipment 26
2.5.1 Safety Devices 26
2.5.1.1 Protective Cover Panels 26
2.5.1.2 Interlock System 27
2.5.1.3 Main Switch 27
2.5.1.4 EMO Button 28
2.5.1.5 POWER ON Button (EMO Function) 28
2.5.1.6 Main Shut-off Valves 29
2.5.2 Safety Labels and Labels 29
2.5.2.1 At the Microscope Cabinet 30
2.5.2.2 At the Power Supply Rack 32
2.5.2.3 At the Image Acquisition Rack 34
2.5.2.4 Inside the Microscope Cabinet 35
2.5.3 Material Safety Data Sheets 35
2.5.4 Safety Information for Operation with the Cabinet Removed 35
3 Device Description 41
3.1 Introduction 41
3.2 About ZEISS MultiSEM 41
3.3 Main Hardware Components 43
3.4 ZEISS MultiSEM Microscope Cabinet 44
3.4.1 Specimen Chamber 47

Table of Contents
6Instruction Manual ZEISS MultiSEM 505/506 Series|ZEN MultiSEM v1.5
3.4.2 Airlock 50
3.4.3 Plasma Cleaner 51
3.4.4 Specimen Stage 51
3.4.5 Specimen Holder 55
3.4.6 Chamber CCD Camera 57
3.4.7 Detection CCD Camera 59
3.5 Workstation 60
3.5.1 Control Panel 61
3.5.2 Dual Joystick Panel 64
3.6 Power Supply Rack 66
3.7 Image Acquisition Rack 67
3.8 Vacuum System 69
3.9 Overview of Auxiliary Supply Systems 72
3.10 Integration into Laboratory Environment 73
4 Software Overview 77
4.1 Introduction 77
4.2 Screen Layout 77
4.3 Basic Software Functions 78
4.3.1 Workspace Configuration Area 78
4.3.2 Adjusting the Tool Windows 79
4.3.3 Show or Hide Areas 80
4.3.4 2D Controls 80
4.3.5 Adding Meta Information to an Image 83
4.3.6 Saving an Image 84
4.4 User Management 85
4.5 Access Rights of Super Users 86
4.6 Message List 86
4.7 Starting the Software 87
4.8 Closing the Software 88
5 Principle of Operation 91
5.1 Introduction 91
5.2 Functional Principle (Overview) 91
5.3 Illumination and Detection Optics 92
5.3.1 Components in the Illumination Column 93
5.3.2 Beam Splitter, Scan Deflector, and Objective Lens 94
5.3.3 Components in the Detection Column 96
5.4 Applied Voltages 98
5.5 Source of the Detection Signal 100

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Instruction Manual ZEISS MultiSEM 505/506 Series|ZEN MultiSEM v1.5 7
5.6 Overview of Coordinate Systems 102
6 Powering Down/Up the Microscope 109
6.1 Introduction 109
6.2 Handling the High Voltage 109
6.3 STANDBY Mode and OFF Mode 110
6.4 Powering Down the Microscope 111
6.5 Powering Up the Microscope 111
6.6 Emergency Off (EMO) 112
6.6.1 Switching Off the Microscope in an Emergency 112
6.6.2 Switching the Microscope On after an Emergency Off 113
7 Handling of the Specimen 117
7.1 Requirements for the Specimen 117
7.2 Mounting of the Specimen 117
7.3 Using the Plasma Cleaners 119
8 Alignment 125
8.1 Introduction 125
8.2 Purpose of Alignment 125
8.3 Auto Tuning Routines 126
8.4 Single Routines 128
8.5 Manual Operation 129
8.5.1 Moving the Stage 129
8.6 Detector Equalization 131
8.6.1 Purpose of Detector Equalization 131
8.7 Single Beam Contrast 132
8.7.1 Purpose of Single Beam Contrast 132
8.8 Adjustment of Scan Rotation 132
8.8.1 Scan Rotation 132
9 Specimen Registration 137
9.1 Introduction 137
9.2 Loading and Unloading the Specimen Chamber 137
9.2.1 Unloading the Specimen Chamber 137
9.2.2 Loading the Specimen Chamber 141
9.3 Pre-Adjustment 144
9.3.1 Pre-Adjustment via Chamber CCD Camera 144

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8Instruction Manual ZEISS MultiSEM 505/506 Series|ZEN MultiSEM v1.5
9.4 Vertical Adjustment of the Specimen Stage 146
9.4.1 Vertical Adjustment via the Detection CCD Camera 146
9.4.2 Working Distance 147
10 Troubleshooting 151
11 Maintenance, Shutdown, and Disposal 157
11.1 Introduction 157
11.2 General Maintenance Information 157
11.3 Basic Preventive Maintenance 157
11.4 Column Bakeout 158
11.5 Shutdown 158
11.6 Disposal 158
11.6.1 Disposing of Consumables 158
11.6.2 Disposing of the Microscope 159
11.7 Support 159
12 Technical Data 163
12.1 Declaration of Conformity 163
12.2 Warranty 164
12.3 Technical Data 164
Index 167

1About this Instruction Manual

1. About this Instruction Manual
10 Instruction Manual ZEISS MultiSEM 505/506 Series|ZEN MultiSEM v1.5

1 About this Instruction Manual|1.1 Introduction
Instruction Manual ZEISS MultiSEM 505/506 Series|ZEN MultiSEM v1.5 11
1 About this Instruction Manual
1.1 Introduction
|
1.1
Introduction
Welcome Welcome to the ZEISS MultiSEM Instruction Manual.
ZEISS MultiSEM is the multi-beam scanning electron microscope from ZEISS.
Its multi-beam design and the intuitive workflow-oriented user interface allow you
to scan large specimen areas much faster than with conventional scanning electron
microscopes.
Content This Instruction Manual contains all the information you need to start the ZEISS
MultiSEM system as well as to start ZEN MultiSEM.
This Instruction Manual is part of the ZEISS MultiSEM multi-beam scanning electron
microscope, hereinafter referred to as "microscope". Read the instructions carefully.
This Instruction Manual is designed for operators who have been trained to operate
the microscope by a ZEISS service representative. Basic operator training and safety
instructions will be provided within the scope of initial start up by ZEISS. Operators
of the microscope must not deviate from the instructions provided in this
Instruction Manual.
The Instruction Manual contains the following chapters:
Chapter Content
About this Instruction
Manual
Introduction and overview of the documentation
Safety Important safety information and legal information
about the appropriate usage of ZEISS MultiSEM
Read these instructions before working with
ZEISS MultiSEM
Device Description Overview of the ZEISS MultiSEM microscope and
its main hardware components
Overview of the Software Basic concepts including an overview of the ZEN
MultiSEM user interface
Principle of Operation Basic principles of ZEISS MultiSEM and a brief
description about the main electron-optical
components inside the microscope
Powering down/up the
Microscope
Instructions for powering down/up ZEISS
MultiSEM into/from standby

1 About this Instruction Manual|1.2 Conventions in this Document
12 Instruction Manual ZEISS MultiSEM 505/506 Series|ZEN MultiSEM v1.5
Chapter Content
Handling of the
Specimen
Information about physical constraints of a
specimen and about mounting it onto a specimen
holder.
Alignment Information about aligning ZEISS MultiSEM with
the help of a specially designed calibration pattern
Specimen Registration Information about loading/unloading the
specimen and the registration of the specimen
Imaging Workflow Information about defining the scan plan and
executing the experiment
Maintenance and
Disposal
Instructions for ensuring optimum operation of
ZEISS MultiSEM
Technical Data and
Conformity
Hardware specifications of the components,
conformity, and regulations
Index List of keywords to help you find relevant
information quickly
The figures in this document are for illustration purposes only. The appearance of
your hardware components may vary slightly from that shown in this document.
Electronic Manual The Electronic Manual contains a complete guide to using the software as well as
additional background concepts and descriptions.
You can start the Electronic Manual at any time by clicking the Help icon or by
pressing F1. The Electronic Manual opens at the appropriate section that is relevant
to your current workflow.
It also contains an index and full-text search to help you find the desired
information quickly and easily.
Reference to Related
Documents
For technical data, refer to the documents Product Information and Installation
Requirements. For details on the pre-vacuum components, refer to the
corresponding manual delivered with the ZEISS MultiSEM.
1.2 Conventions in this Document
|
1.2
Conventions in this Document
Text Conventions The following text conventions are used in this document:
Example Description
Save icon Clickable user interface elements, e.g. buttons and
icons
ON button Hardware buttons on the microscope

1 About this Instruction Manual|1.2 Conventions in this Document
Instruction Manual ZEISS MultiSEM 505/506 Series|ZEN MultiSEM v1.5 13
Example Description
Image panel Non-clickable user interface elements, e.g. name of a
dialog box
Input text Text to be entered by the user
Link [}12] Link to further information
Info and Tip Additional information and tips are indicated as follows:
INFO
Helpful additional information, e.g. about necessary additional actions.
TIP
Useful information, e.g. about alternative methods for achieving an aim.

1 About this Instruction Manual|1.2 Conventions in this Document
14 Instruction Manual ZEISS MultiSEM 505/506 Series|ZEN MultiSEM v1.5

2Safety

2. Safety
16 Instruction Manual ZEISS MultiSEM 505/506 Series|ZEN MultiSEM v1.5

2 Safety|2.1 Intended Use
Instruction Manual ZEISS MultiSEM 505/506 Series|ZEN MultiSEM v1.5 17
2 Safety
2.1 Intended Use
|
2.1
Intended Use
ZEISS MultiSEM is to be used in a laboratory environment for scientific and/or
commercial purposes.
ZEISS MultiSEM is designed for large-area microscopic examinations in the
following applications:
¢Neuroscience and life sciences
¢Nanotoxicology
¢Semiconductor research and development
¢Materials Science
¢Geosciences
INFO
ZEISS MultiSEM must not be used for therapeutic, treatment or medical
diagnostic evidence. Not all products are available in every country. Contact your
local ZEISS representative for more information.
INFO
The Instruction Manual is considered to be part of the microscope.
Users of the microscope must follow the instructions provided in this document.
Using the microscope for any purpose other than described is not allowed and
could be hazardous.
2.2 General Information
|
2.2
General Information
Comprehensive knowledge of the hardware and software is essential for the safe
operation of the microscope.
Only authorized ZEISS service representatives must unpack, install, and initially start
up the product.

2 Safety|2.3 Safety Procedures
18 Instruction Manual ZEISS MultiSEM 505/506 Series|ZEN MultiSEM v1.5
INFO
The user of the microscope must observe the local regulations concerning X-ray
protection. According to German law, the operation of this microscope in
Germany is subject to an official individual authorization process. Technical
modifications may result in forfeiture of the operational approval. Outside
Germany, the user of the microscope has to comply with the local regulations of
the country where the microscope is installed. The microscope is equipped with
several radiation protection devices, which ensure that - under regular operation
conditions - the microscope operates in compliance with the German X-ray
protection regulation (RöV) as well as within the EC Directive 96/29/EURATOM.
INFO
The manufacturer assumes no liability for malfunctions or damage due to either
improper use of the microscope or attributed to repair and other service work
performed or attempted by unauthorized service staff. Such actions shall render
all warranty claims invalid, including parts which were not directly affected by
this action.
INFO
The operator must observe all relevant legal accident prevention regulations.
Since the system is predominantly controlled by a computer, you should be
experienced with the Windows operating system. For more information, see the
Windows operating system instructions supplied with the operating system.
2.3 Safety Procedures
|
2.3
Safety Procedures
2.3.1 Safe Operation Conditions
INFO
Only authorized ZEISS service representatives must unpack, install, and initially
start up the product.

2 Safety|2.3 Safety Procedures
Instruction Manual ZEISS MultiSEM 505/506 Series|ZEN MultiSEM v1.5 19
WARNING
Risk of injury: Unsafe operation condition
If the product safety labels are covered or worn or if any of the safety devices
are not in proper working condition, operation of the microscope can be
hazardous.
uPeriodically check the function of safety equipment.
uPeriodically check that all protective cover panels are installed.
uPlease ask your ZEISS service representative if you have questions
concerning the periodical checks. The periodical checks are also performed
by ZEISS service staff during each preventive maintenance.
uAlways follow the instructions given on the safety labels.
uInspect and clean the product safety labels to maintain good legibility.
2.3.2 Requirements for Personnel
WARNING
Risk of injury: Improper operation of the microscope
Deviating from the instructions given in this Instruction Manual and on the
safety labels can be hazardous.
uDo not operate the microscope until you have completely read and
understood this Instruction Manual.
uObserve all safety labels on the microscope.
uOnly ZEISS service representatives, who have specialized knowledge of
radiation protection, are permitted to service the microscope.
Operator Training Within the scope of initial start-up, the ZEISS service representative will perform a
basic operator training. This consists of fundamental operating procedures
including safety instructions. Additionally, an introduction to basic maintenance
tasks will be given for an advanced operator. This person should have reasonable
overall knowledge of the system. The training performed shall be documented
appropriately.
Special application trainings are offered upon request.

2 Safety|2.3 Safety Procedures
20 Instruction Manual ZEISS MultiSEM 505/506 Series|ZEN MultiSEM v1.5
2.3.3 Preventive Maintenance
WARNING
Risk of injury: Improper maintenance
Deviating from the maintenance tasks described in this Instruction Manual can
be hazardous.
uOnly perform preventive maintenance tasks described in this Instruction
Manual.
uAll maintenance, service, and repair tasks not described in this Instruction
Manual have to be performed by an authorized ZEISS service representative.
To ensure the optimal performance of the microscope, it is essential to perform
preventive maintenance on a regular basis. Moreover, it is recommended that you
conclude a service contract with your local ZEISS service representative or
organization.
2.3.4 Safe Handling of Spare Parts
WARNING
Risk of injury: Spare parts
Using spare parts that are not provided by ZEISS can be hazardous.
uOnly genuine parts supplied by ZEISS are to be used in servicing the
microscope.
uContact your ZEISS service representative for information regarding how to
order spare parts.
uUnless authorized by ZEISS, all spare parts should be installed by a ZEISS
service representative.