Agilent Technologies TwisTorr 305 FS Series User manual

TwisTorr 305 FS
Pump models:
X3513-64008, X3513-64009,
X3513-64010, X3513-64011,
X3513-64012, X3513-64013,
X3513-64014, X3513-64015
Manuale di istruzioni
Bedienungshandbuch
Notice de mode d’emploi
Manual de istrucciones
用户手册
ユーザーマニュアル
User Manual
87-901-057-01
12/2019

TwisTorr 305 FS User Manual/ 87-901-057-01
Notices
© Agilent Technologies, Inc. 2019
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Manual Part Number
Publication Number: 87-901-057-01
Edition
Edition 12/2019
Printed in ITALY
Agilent Technologies Italia S.p.A.
Vacuum Products Division
Via F.lli Varian, 54
10040 Leinì (TO)
ITALY
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CAUTION

TwisTorr 305 FS
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TwisTorr 305 FS

TwisTorr 305 FS
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Contents
Istruzioni per l’uso
Contents
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Contents
1Istruzioni per l’uso 15
Informazioni su questo manuale 17
Validità 17
Definizioni e terminologia 18
Definizione di Attenzione, Avvertenza e Nota 18
Simboli di Avvertenza 19
Sicurezza 21
Uso corretto 21
Uso improprio 22
Attrezzatura di protezione 23
Linee guida di sicurezza per pompe turbomolecolari 25
Transporto & Immagazzinamento 26
Descrizione del prodotto 27
Installazione 28
Preparazione per l’installazione 28
Apertura 30
Riparazione di TwisTorr 305 FS 32
Collegamento della flangia per alto vuoto 33
Installazione della flangia ISO-K 34
Installazione della flangia ConFlat 35
Collegamento della pompa del vuoto anteriore 36
Avvio e funzionamento di TwisTorr 305 FS 37
Arresto di TwisTorr 305 FS 38
Arresto di emergenza 38

Contents
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Manutenzione 39
Vita del rotore 39
Soft Start 40
Pulizia 40
Smaltimento 41
Servizio post vendita 42
2Gebrauchsanleitung 43
Über dieses Handbuch 45
Gültigkeit 45
Begriffsbestimmungen und Terminologie 46
Definition von Vorsicht, Warnung und Hinweis 46
Warnsymbole 47
Sicherheit 49
Sachgemäße Verwendung 49
Unsachgemäße Verwendung 50
Schutzausrüstung 51
Sicherheitsrichtlinie für Turbomolekularpumpen 53
Transport und Lagerung 54
Produktbeschreibung 55
Installation 56
Vorbereitung zum Einbau 56
Einrichten 58
Montage von TwisTorr 305 FS 60
Anschluss des Hochvakuumflansches 61
Installation des ISO-K-Flansches 62
Installation des ConFlat-Flansches 63
Anschluss der Vorvakuumpumpe 64
Inbetriebnahme und Betrieb des TwisTorr 305 FS 65

Contents
Istruzioni per l’uso
Contents
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Stoppen des TwisTorr 305 FS 66
Notausschaltung 66
Wartung 67
Rotordauer 67
Sanftanlauf 68
Reinigung 68
Entsorgung 69
Service 70
3Mode d’emploi 71
À propos de ce manuel 73
Validité 73
Définitions et terminologie 74
Définition des termes « Attention », « Avertissement » et « Note » 74
Symboles d’avertissement 75
Sécurité 77
Utilisation appropriée 77
Utilisation inappropriée 78
Équipement de protection 79
Directive de sécurité pour les pompes turbomoléculaires 81
Transport et entreposage 82
Description du produit 83
Installation 84
Préparation pour l’installation 84
Configuration 86
Montage du TwisTorr 305 FS 88
Raccordement de la bride à vide élevé 89
Installation de la bride ISO-K 90

Contents
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Installation de la bride ConFlat 91
Raccordement de la bride à vide préliminaire 92
Démarrage et utilisation du TwisTorr 305 FS 93
Arrêt du TwisTorr 305 FS 94
Arrêt d’urgence 94
Entretien 95
Durée de vie du rotor 95
Démarrage progressif 96
Nettoyage 96
Mise au rebut 97
Service 98
4Instrucciones de Uso 99
Acerca del manual 101
Validez 101
Definiciones y terminología 102
Definición de Precaución, Advertencia y Nota 102
Símbolos de advertencia 103
Seguridad 105
Uso correcto 105
Uso incorrecto 106
Equipo de protección 107
Pautas de seguridad para bombas turbomoleculares 109
Transporte y almacenamiento 110
Descripción del producto 111
Instalación 112
Preparación para instalación 112
Puesta en marcha 114
Montaje de la TwisTorr 305 FS 116

Contents
Istruzioni per l’uso
Contents
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Conexión de la brida de alto vaciado 117
Instalación de la brida ISO-K 118
Instalación de la brida ConFlat 119
Conexión de la bomba pre-vaciado 120
Puesta en marcha y funcionamiento de TwisTorr 305 FS 121
Parada de la TwisTorr 305 FS 122
Parada de emergencia 122
Mantenimiento 123
Vida del rotor 123
Arranque suave 124
Limpieza 124
Eliminación 125
Servicio 126
5使用说明 127
关于这本手册 129
有效性 129
定义和术语 130
警告、警告和注释的定义 130
警告符号 131
安全 133
正确使用 133
使用不当 134
防护设备 135
涡轮分子泵安全指南 137
运输及存储 138

Contents
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产品描述 139
安装 140
安装准备140
设置 142
TwisTor 305 FS 的安装 144
高真空法兰的连接 145
ISO-K 法兰的安装 146
ConFlat 法兰的安装 147
前真空泵的连接 148
TwisTorr 305 FS 的启动和运行 149
停止 TwisTorr 305 FS 150
紧急停止 150
维护 151
转子寿命 151
慢启动 152
清洗 152
处置方式 153
服务154
6使用方法 155
このマニュアルについて 157
定義と用語 158
警告の記号 159
安全性 161
適切な使用 161