Agilent Technologies VS PD03 User manual

DRAFT 2/25/09
FIELD INSTALLATION
INSTRUCTIONS
vacuum technologies
VS PD03 Scroll Pump
and Components
Replacement
Part Number 699910017
Rev. A
February 2009
NOTICE:ThisdocumentcontainsreferencestoVarian.
PleasenotethatVarian,Inc.isnowpartof Agilent
Technologies.Formoreinformation,goto
www.agilent.com/chem.
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.

Varian Field Instruction Sheet
Prepared by Checked by Approved by Document No. Revision
Date Date Date
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VS PD03 Scroll Pump and Components Replacement
Preface
Documentation Standards
This manual uses the following documentation standards:
NOTE Notes contain important information.
CAUTION Cautions appear before instructions, which if not followed, could cause damage to
the equipment or data loss.
WARNING Warnings appear for a particular procedure or practice which, if not followed
correctly, could lead to serious injury or death.
Hazard and Safety Information
The common international symbols used in this manual and on the equipment are defined below.
OFF Supply (Power) Earth (Ground) Terminal
ON Supply (Power) Caution, Hot Surface
AC – Alternating Current Caution, Risk of Electrical
Shock
Warning, Risk of danger Protective Conductor Terminal
Frame or chassis Terminal
°
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Operators and service personnel must be aware of all hazards associated with this equipment. They must know how to
recognize hazardous and potentially hazardous conditions, and know how to avoid them. The consequences of
unskilled, improper, or careless operation of the equipment can be serious. Every operator or service person must read
and thoroughly understand operation/maintenance manuals and any additional information provided by Varian. All
warning and cautions must be read carefully and strictly observed. Consult local, state, and national agencies
regarding specific requirements and regulations. Address any safety, operation, and/or maintenance questions to your
nearest Varian office.
Solvents
WARNING The mechanical components of leak detectors may be cleaned with one of the
recommended solvents. When heated, sprayed, or exposed to high-temperature
equipment, these solvents become flammable and explosive, causing serious
injury or death. Do not use these solvents near a high-temperature source. Ventilate
the working area with a blower and work in a large, well-ventilated room.
Solvents are irritants, narcotics, depressants and/or carcinogens. Their inhalation
and/or ingestion may produce serious side effects. Prolonged or continued contact
with the skin results in absorption through the skin and moderate toxicity. Always
ensure that cleaning operations are carried out in large, well-ventilated rooms, and
wear eye shields, gloves, and protective clothing.
Due to the effective cleaning nature of VacuSolv solvent and its residue-free
properties, Varian’ Component and Spectrometer Cleaning Kit (Part Number
670029096), used in accordance with the kit instructions, is recommended for
cleaning spectrometer components. The kit can also be used for fine cleaning of
other parts in the leak detector’s vacuum system such as valves and fittings. No
rinsing steps or high-temperature drying is required following cleaning with
VacuSolv. Although appropriate precautions are advised, VacuSolv is compatible
with most materials and does not contain toxic chemicals or CFCs
(chlorofluorocarbons). Other acceptable solvents are isopropyl alcohol (IPA) or
Dow Corning®OS-20.
To clean the leak detector plastic enclosure, the LCD display and Front Panel
buttons, use only a soft cloth slightly dampened with water or a mild soap.
Do NOT use excess water or cleaning solvents of any kind.
Avoid splashing any cleaning solvents into the unit through the ventilation
openings or Front Panel buttons. Wipe the surface with a dry lint-free cloth.
Vacuum Equipment and Cleanliness
Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are some techniques that are
more important in leak detector servicing than in general vacuum work:
CAUTION Wear non-powdered, ESD-safe Nitride or equivalent gloves to prevent skin oils from
getting on spectrometer internal components.

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O-ring Care
When removing, checking or replacing O-rings, keep in mind the following:
NOTE Varian recommends replacing all O-rings during routine maintenance or during any
maintenance procedure requiring that O-rings be removed.
CAUTION Remove O-rings carefully with your fingers. Do not use metal tools for this task; this
prevents scratching of any sealing surfaces.
• Wipe all O-rings clean with a lint-free cloth before installation to ensure that no
foreign matter is present to impair the seal.
• Do not use grease or any other substance on O-rings that will come in contact
with the vacuum surfaces.
• Do not use alcohol, methanol or other solvents on O-rings. Doing so causes
deterioration and reduces their ability to hold a vacuum.
• Varian does not recommend the use of vacuum grease. If applicable, apply a
small amount of Apiezon®L grease and wipe the O-rings shiny dry.
Metal Seal Care
CAUTION Metal Seals must be replaced any time a spectrometer is opened. All fasteners must
be installed and torqued per assembly procedure specifications. Remove Metal
Seals carefully with your fingers or a soft tool. Metal tools scratch sealing surfaces.
• Metal Seals are supplied in pre-cleaned condition. No cleaning is required. If
necessary, Metal Seals can be cleaned using the recommended solvents. Wipe
Metal Seals clean with a lint-free cloth before installation to ensure that no for-
eign matter impairs the seal.
• Do not use grease or any other substance on Metal Seals that will come in con-
tact with the spectrometer.
Spectrometer
CAUTION Store the Ion Source/Preamplifier sub-assembly in a cool, dry area in a tightly
sealed, ESD protected container. Wear non-powdered, ESD-safe Nitride or
equivalent gloves when handling the spectrometer. Wash hands thoroughly after
handling the spectrometer filaments and especially before smoking or eating.
The spectrometer and PCB’s are static sensitive devices. Wear a grounding strap
when performing any maintenance on these units and especially when performing
maintenance of static sensitive parts.
CAUTION The spectrometer operates at a very high vacuum produced by the high vacuum
turbomolecular pump. Service of the spectrometer requires that this vacuum be
vented to the atmosphere.

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Scroll Pump Replacement
Equipment Required
• Extended Length M5 Allen Wrench
• Metric Allen Wrench Set
• M3 Phillips Head Screw Driver
For clarity, some items have been omitted from views.
WARNING Disconnect power from the unit before performing any maintenance procedure
that requires physically disconnecting any part of the system.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear plastic cover (Figure 1: Rear
and Front Cover Screws) and detach the rear plastic cover from the unit.
Figure 1: Rear and Front Cover Screws

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4. Disconnect the NW 16 connection (Figure 2: NW 16 Connection).
Figure 2: NW 16 Connection
5. Tilt the unit and unscrew the four connections underneath that hold the pump (Figure 3: Scroll Pump Mounting Con-
nections). Place the unit flat again and remove the whole pump assembly.
Figure 3: Scroll Pump Mounting Connections

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6. Disconnect the exhaust hose (Figure 4: Exhaust Hose).
Figure 4: Exhaust Hose
7. Disconnect the diaphragm, fan and motor power connectors.
8. Remove the fan assembly bracket and lay it aside (Figure 5: Fan Assembly Mounts).
Figure 5: Fan Assembly Mounts

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9. Unscrew the four M2 screws and remove the manifold block (Figure 6: Manifold Block Connections).
Figure 6: Manifold Block Connections
10.Remove the exhaust valve unit. See “Exhaust Valve Replacement” on page 10.
11. Remove the diaphragm pump. See “Diaphragm Pump Replacement” on page 12.
12.Mount the new scroll pump using the four connections seen in “Figure 3: Scroll Pump Mounting Connections” on
page 5.
13.Reattach the diaphragm pump. See “Diaphragm Pump Replacement” on page 12.
14.Reattach the exhust valve. See “Exhaust Valve Replacement” on page 10.
15.Reattach the four M2 screws to remount the manifold block.
16.Reattach the fan assembly.
17.Reconnect the diaphragm, fan and motor power connectors.
18.Reconnect the exhaust hose.
19.Attach the front cover and secure to the frame using existing hardware.
20.Connect the power cord and power up the unit.
21.Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System
Ready within ten minutes.
22.Refer to the operator's manual if the system fails to reach the System Ready mode.
Varian recommends a full calibration of the unit prior to leak test operations.

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Clippard Valve Replacement
Equipment Required
• Extended Length M5 Allen Wrench
• Metric Allen Wrench Set
• M3 Phillips Head Screw Driver
For clarity, some items have been omitted from views.
WARNING Disconnect power from the unit before performing any maintenance procedure
that requires physically disconnecting any part of the system.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear plastic cover (Figure 7: Rear
and Front Cover Screws) and detach the rear plastic cover from the unit.
Figure 7: Rear and Front Cover Screws

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4. Disconnect the two spade connectors (red arrow in Figure 8: Spade Connectors):
•Red/black
• Black/black
Figure 8: Spade Connectors
5. Use an Allen wrench to loosen valve from housing (blue arrow in Figure 8: Spade Connectors).
6. Mount the new valve and tighten.
7. Reconnect the two spade connections.
8. Attach the front cover and secure to the frame using existing hardware.
9. Attach the rear cover and secure to the unit using existing hardware.
10.Connect the power cord and power up the unit.
11. Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System
Ready within ten minutes.
Refer to the operator's manual if the system fails to reach the System Ready mode.

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Exhaust Valve Replacement
Equipment Required
• Extended Length M5 Allen Wrench
• Metric Allen Wrench Set
• M3 Phillips Head Screw Driver
For clarity, some items have been omitted from views.
WARNING Disconnect power from the unit before performing any maintenance procedure
that requires physically disconnecting any part of the system.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear plastic cover (Figure 9: Rear
and Front Cover Screws) and detach the rear plastic cover from the unit.
Figure 9: Rear and Front Cover Screws

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4. Unscrew the black cover using the Philips head screw, pull up the cover and disconnect (red arrow in Figure 10:
Unit Screws)
Figure 10: Unit Screws
5. Unscrew the two Philips head screws (blue arrow in “Figure 10: Unit Screws” on page 11) and pull the complete
black/grey body up and out.
6. Mount new unit and replace the three Philips screws.
7. Attach the front cover and secure to the frame using existing hardware.
8. Attach the rear cover and secure to the unit using existing hardware.
9. Connect the power cord and power up the unit.
10.Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System
Ready within ten minutes.
Refer to the operator's manual if the system fails to reach the System Ready mode.
11. Varian recommends a full calibration of the unit prior to leak test operations.

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Diaphragm Pump Replacement
Equipment Required
• Extended Length M5 Allen Wrench
• Metric Allen Wrench Set
• M3 Phillips Head Screw Driver
• Adjustable Wrench
For clarity, some items have been omitted from views.
WARNING Disconnect power from the unit before performing any maintenance procedure
that requires physically disconnecting any part of the system.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear plastic cover (Figure 11: Rear
and Front Cover Screws) and detach the rear plastic cover from the unit.
Figure 11: Rear and Front Cover Screws

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4. Disconnect the R3359-301 Molex connector to the Clippard valve (Figure 12: Molex Connector).
Figure 12: Molex Connector
5. Remove the ground connection to the system body (red arrow in Figure 13: Ground Connection).
Figure 13: Ground Connection
6. Disconnect the two M4 screws mounting the plate to the scroll pump assembly (blue arrow in Figure 13: Ground
Connection).

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7. Remove the diaphragm pump assembly, turn it over and unscrew the four M2 screw holding the pump to the plate
(Figure 14: Pump to Plate Connections - two shown).
Figure 14: Pump to Plate Connections
8. Reattach the new pump to the plate.
9. Reattach the plate to the scroll pump.
10.Reattach the ground and Molex connections.
11. Attach the front cover and secure to the frame using existing hardware.
12.Attach the rear cover and secure to the unit using existing hardware.
13.Connect the power cord and power up the unit.
14.Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System
Ready within ten minutes.
Refer to the operator's manual if the system fails to reach the System Ready mode.
15.Varian recommends a full calibration of the unit prior to leak test operations.

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Diaphragm and Seal Replacement
Equipment Required
For clarity, some items have been omitted from views.
WARNING Disconnect power from the unit before performing any maintenance procedure
that requires physically disconnecting any part of the system.
1. Turn off the power switch located on the back of the unit and unplug.
2. Wait 30 seconds for the high voltage to dissipate.
3. Using an extended length M5 Allen wrench, remove the four screws holding the rear plastic cover (Fgure 15: Rear
and Front Cover Screws) and detach the rear plastic cover from the unit.
Fgure 15: Rear and Front Cover Screws
NOTE Always change the valve plates, diaphragm and sealing rings at the same time.
• Extended Length M5 Allen Wrench • Metric Allen Wrench Set
• M3 Phillips Head Screw Driver • Phillips Head Screw Driver, #1
• Felt Tip Pen •

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4. Remove the pump head by (Figure 16: Pump Head Removal):
Figure 16: Pump Head Removal
a. Making a mark (M) on the head plate (3), intermediate plate (2), and housing (1) with a felt-tip pen.
b. Undoing the 4 screws (4) in the head plate and lifting the head plate, with the intermediate plate,
off the pump housing.
c. For models with:
•DC motors (no cooling fan): Removing the cover (6) from the pump housing (1) by inserting a
screwdriver into the slots on the sides, and prying the cover off (with care the adhesive gasket between
cover and housing may be reused).
•No fan: Reference is made to turning or holding the cooling fan, the necessary operations must be
carried out by turning or holding the counterweight (16).
5. Change the diaphragm by (see Figure 16: Pump Head Removal):
a. Turning the fan to bring the structured diaphragm (9) to top dead center.
b. Lifting the edge of the diaphragm and, gripping it on opposite sides, unscrewing it by turning
counterclockwise.
CAUTION Ensure that the disc s spring (12) and diaphragm spacers (11) on the threaded
portion of the diaphragm do not fall into the housing.
c. Taking the disc spring (12), diaphragm spacer(s) (11), and diaphragm support (10) off the threaded
portion of the diaphragm and retaining them.
d. Ensuring that all parts are free from dirt and clean them, if necessary.
e. Placing the diaphragm support, diaphragm spacer(s), and disc spring, in that order, on the thread
part of the new diaphragm. The concave side of the disc spring must be towards the diaphragm.

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f. Turning the fan until the connecting rod (13) is at top dead center.
g. Screwing the diaphragm, complete with diaphragm support, diaphragm spacer(s), and disc spring,
into the connecting rod (clockwise) and tightening it by hand.
6. Change the valve plates by (see Figure 16: Pump Head Removal):
a. Separating the head plate (3) from the intermediate plate (2).
b. Removing the valve plates (7) and sealing rings (8) from the intermediate plate.
c. Checking that the valve seats in the head plate and the intermediate plate are clean. If scratches,
distortion, or corrosion are evident, replace that part.
d. Laying the new valve plates in the intermediate plate recesses. The valve plates for suction and
pressure sides are identical, as are upper and lower sides of the plates.
e. Ensuring the valve plates are not deformed by moving them gently sideways in their recesses.
f. Laying the sealing rings on the intermediate plate.
7. Refit the pump heads by (see Figure 16: Pump Head Removal):
a. Turning the fan to bring the diaphragm to top dead center.
b. Placing the intermediate plate (2), with valve plates (7), sealing rings (8), and head plate (3) on the
housing, in the position indicated by the (M).
c. Checking that the head plate is centered by moving it gently sideways.
d. Gently tightening the screws (4), evenly and diagonally.
e. Turning the fan to check that the pump rotates freely.
f. Turning the fan again to bring the diaphragm to top dead center.
g. Tightening the screws (4).
h. For DC versions (no cooling fan): Reattaching the cover (6) to housing (1).
8. Attach the front cover and secure to the frame using existing hardware.
9. Attach the rear cover and secure to the unit using existing hardware.
10.Connect the power cord and power up the unit.
11. Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System
Ready within ten minutes.
Refer to the operator's manual if the system fails to reach the System Ready mode.

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04/08
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