Omron F3M-S825-1 User manual

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Silicon Wafer Mapping Sensor F3M-S825-1
Allows Simultaneous Mapping of Up
to 25 Silicon Wafers
HEconomical—one sensor detects most
wafer types
H200 mm wafer size
HAutomatic and remote teaching
capability
HSelf-diagnostic functions reduce
downtime
Ordering Information
Applicable wafer size Number of cassette slots Function Remarks Part number
8 inches (6.35-mm pitch) 25 Self-diagnosis CE marking F3M-S825-1
Application Examples
Detects Transparent Glass Wafers
With a Transparency of 92%
The F3M-S825-1 allows the mapping of cassettes that have both
silicon wafers and glass wafers.
Automatic Teaching Saves Setting Time
(Remote Teaching Available)
The F3M-S825-1 has an automatic teaching function that ensures
easy adjustments in minimal time. The remote teaching function
allows quick, on-the-fly set up.
Answer-back Alarms for Setting Errors and
Self-diagnostic Alarms for Operation Errors
These alarms help reduce system downtime and shorten
troubleshooting time.
Static Electricity Protection
OMRON’s optical system (including emitter and receiver)
prevents malfunction and damage—protecting the Sensor from
static electricity if charged on the semiconductor wafers at the
time of mapping.

F3M-S825-1
F3M-S825-1
2
Specifications
JRATINGS/CHARACTERISTICS
Item F3M-S825-1
Target object 8-inch semiconductor silicon wafers and transparent wafers
(with transparency of 92% max.) (See Note.)
Number of channels 25
Optical axis pitch 6.35 mm
Optical axis width 1.5 mm
Light source Infrared LED (940 nm)
Power supply voltage 12 to 24 VDC r10%, ripple (p-p): 10% max.
Current consumption 120 mA max.
Output Control output Load power supply voltage: 30 VDC
Load current: 20 mA max. (residual voltage: 1 V max.);
Inflow current: 20 mA.;
Parallel output from all channels, NPN open collector;
Dark-ON operation.
Answer-back output When remote teaching is ON, pin 28 will be used for this function.
Self-diagnostic output Load power supply voltage: 30 VDC max.;
Load current: 20 mA max.
(Residual voltage: 1 V max.);
Inflow current: 20 mA;
NPN open collector.
Indicators Power Green indicator is ON when power is being supplied.
Warning Red indicator is ON under the following conditions:
Teaching, no target object, insufficient light, or error.
Response time 10 ms max.
Control output interrupt input All outputs interrupted: GND and control output interrupt input terminals are
short-circuited and 0-V short-circuit current is 1 mA max.;
Output interrupt reset: GND and control output interrupt input terminals are
opened or the voltage is between 9 V and the working power supply
voltage.
Remote teaching input ON GND and remote input terminals are short-circuited and 0-V short-circuit
current is 1 mA max.
OFF GND and remote input terminals are opened or the voltage is between
9 V and the working power supply voltage.
Teaching check function Orange LED indicator
Ambient temperature Operating 0qCto40
qC(32 qF to 104qF) with no icing or condensation
p
Storage -- 2 5 qCto60
qC(--13 qF to 140qF)
Relative humidity 35% to 85% with no condensation
Ambient illumination Fluorescent lamp: 1,500 çxmax.
Noise resistance Power supply line: r480 V in normal mode with noise simulator
Static electrical noise: No malfunction or destruction at r8kV
Vibration resistance 10 to 55 Hz, 0.5 mm double amplitude for 2 hrs each in X, Y, and Z axes
Shock resistance 300 m/s2(30G) 3 times each in X, Y, and Z axes
Degree of protection IEC60529 IP40
Connection Pre-wired cable (length: 500 mm r35 mm)
IDC connector (insulation displacement)
Weight (packed state) Approx. 110 g (3.8 oz)
Material Optical axis Polycarbonate
Case ABS
Cable Vinyl-insulated, bending type
Accessories Spacer and instruction manual
Note: Operating conditions are restricted for the detection of transparent wafers. Contact your OMRON representatives for details.

F3M-S825-1 F3M-S825-1
3
The remote or manual automatic teaching of the F3M-S825-1 is
possible with the following two sensitivity settings:
1. Max. Sensitivity Setting: Detects semiconductor silicon
wafers, and SIC wafers.
2. Teaching with No Target Object: Detects transparent wafers.
The sensitivity is set to maximum before shipping. Refer to the
Instruction Manual when setting the sensitivity of the F3M-S825-1.
Power indicator Warning indicator
Teaching button RUN/TEACH mode selector Teaching indicator
JAUTOMATIC TEACHING FUNCTION
F3M-S825-1
The F3M-S825-1 has an answer-back function to warn the
user about setting errors and a self-diagnostic function to
warn the user about operational errors.
xAnswer-back Function: Normal or error teaching output
turns ON.
xSelf-diagnostic Function: Warning output turns ON for a
decrease in optical input.
JANSWER-BACK FUNCTION AND
SELF-DIAGNOSTIC FUNCTION
Operation
JOUTPUT CIRCUIT DIAGRAM
+V
Output
(OUT1)
Output (see note)
(OUT26)
0V
Main circuit
Control output interrupt input
Remote teaching input
JI/O TERMINAL ARRANGEMENT
Pin assignment
Pin Assignment Pin Assignment
1GND (0 V) 16 OUT14
2 VCC (12to24V) 17 OUT15
3OUT1 18 OUT16
4OUT2 19 OUT17
5OUT3 20 OUT18
6OUT4 21 OUT19
7OUT5 22 OUT20
8OUT6 23 OUT21
9OUT7 24 OUT22
10 OUT8 25 OUT23
11 OUT9 26 OUT24
12 OUT10 27 OUT25
13 OUT11 28 Self-diagnostic output/OUT26
(See Note.)
14 OUT12 29 Control output interrupt input
15 OUT13 30 Remote teaching input
Note: Pin 28 will have answer-back output only when remote
teaching input is turned ON. Otherwise, this output is a
self-diagnostic output.

F3M-S825-1
F3M-S825-1
4
D
i
mens
i
ons
Unit: mm (inch)
JF3M-S825-1
Optical axis
Side mark
Thirty, (19/0.08 dia.)
vinyl-insulated,
flat bending cable
500 L x 38.1 W
Pitch: 1.27
Two,
4.2-dia.
mounting
holes
OMRON XG4E-3031
Connector
Teaching button
RUN/TEACH mode selector
Warning indicator
Teaching indicator
Power indicator
Mounting Dimensions
Two, R5
Two, M4
50
(1.97)
18.5 (0.71)
170 (6.69)
14 (0.55)
(3.94)
(6.30)
18.5 (0.71)
P
recaut
i
ons
JCORRECT USE—TO AVOID DAMAGE
xDo not use the F3M-S825-1 at a voltage that exceeds the
rated voltage range.
xDo not make mistakes in wiring, such as mistakes in polarity.
xDo not short-circuit the load.
xDo not connect AC to the F3M-S825-1.
JINSTALLATION/ENVIRONMENT
Do NOT use the F3M-S825-1 in the following locations:
xLocations exposed to direct sunlight.
xLocations with high humidity that may cause condensation.
xLocations with corrosive gas.
xLocations where vibration or shock directly affects the
Sensor.
JCLEANING
Do not attempt to clean the F3M-S825-1 using paint thinner, to
avoid damaging the surface of the Sensor.
JCONNECTION AND MOUNTING
xA maximum of 24 VDC+10% can be imposed on the
F3M-S825-1. Check that the voltage of the power supply is
within the permissible range before turning on the
F3M-S825-1. The power supply must be constructed so that
the secondary circuit is insulated with an isolating
transformer.
xDo not wire power lines or high-voltage lines within the
same conduit with the lines of the F3M-S825-1, or the sensor
may be damaged or malfunction.
xAvoid mechanical impact when mounting the F3M-S825-1, or
its water-resistant properties will be reduced.
JPOWER SUPPLY
If a standard switching power supply is connected to the
F3M-S825-1, be sure to ground the FG (frame ground) and
G (ground) terminals of the power supply. If these terminals are
not grounded, the Sensor may malfunction due to switching noise
that will be generated from the power supply.
Cat. No. D063-E3-825 7/00 Specifications subject to change without notice. Printed in U.S.A.
OMRON ELECTRONICS, INC.
One East Commerce Drive
Schaumburg, IL 60173
NOTE: DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters to inches divide by 25.4.
1-800-55-OMRON
OMRON CANADA, INC.
885 Milner Avenue
Scarborough, Ontario M1B 5V8
416-286-6465
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