Pfeiffer Vacuum EVB Series User manual

BP 5239 BEN (2010-10)
A PASSION FOR PERFECTION
EVB 063 … 160 PA/PX
Angle Valve, pneumatically actuated, bellows sealed, with position indicator, without pilot
valve
Operating Instructions

2BP 5239 BEN (2010-10) EVB 063 … 160 PA/PX
In all communications with Pfeiffer Vacuum, please specify the information on the
product nameplate. For convenient reference copy that information into the space
provided below.
Typ:
No:
F-No:
Pfeiffer Vacuum, D - 35614 Asslar
This document applies to products with the following part numbers:
PF B16 002 (DN 63 ISO-K)
PF B26 002 (DN 100 ISO-K)
PF B36 002 (DN 160 ISO-K)
PF B16 032 (DN 63 ISO-K)
PF B26 032 (DN 100 ISO-K)
The part number (No) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document
correspond to Angle Valves with the vacuum connection DN 100 ISO-K. They
apply to Angle Valves with the vacuum connections DN 63 ISO–K and
DN 160 ISO–K by analogy.
We reserve the right to make technical changes without prior notice.
If not indicated otherwise, the dimensions are given in mm.
The angle valves are used as shut-off and venting devices for vacuum systems.
Product Identification
Validity
Aluminum housing
Stainless steel housing
Intended Use

BP 5239 BEN (2010-10) EVB063-160PA/PX.oi 3
Contents
Product Identification 2
Validity 2
Intended Use 2
1Description 4
1.1 Over View 4
1.2 Functional Principle 4
2Safety 5
2.1 Symbols Used 5
2.2 Personnel Qualifications 5
2.3 General Safety Instructions 5
2.4 Liability and Warranty 5
3Technical Data 6
4Installation 8
4.1 Vacuum Connections 8
4.2 Compressed Air Connection 9
4.3 Electrical Connection 11
5Operation 12
6Deinstallation 13
6.1 Electrical Connection 13
6.2 Compressed Air Connection 13
6.3 Vacuum Connection 15
7Maintenance / Repair 16
7.1 Removing the Cover 17
7.2 Minor Maintenance 18
7.3 Major Maintenance 26
7.4 Installing the Cover 45
7.5 Functional Check 46
7.5.1 Leak Detection at the Bellows 46
8Spare Parts 47
9Returning the Product 49
10 Disposal 49
For cross-references within this document, the symbol (→XY) is used.

4BP 5239 BEN (2010-10) EVB 063 … 160 PA/PX
1 Description
Leak detection opening
(below the collar seal)
Connector (enclosed)
Vacuum connection
DN 63…160 ISO–K
Visual position indicator
Compressed air inlet
The Angle Valve opens when compressed air is admitted. The visual position
indicator becomes visible, and the electrical position indicator "valve open" is
activated.
Position indicator
"valve open" activated
Pilot valve
activated
Compressed
air connection
Valve open
Visual position indicator
visible
Compressed air
supply
When no compressed air is admitted, the Angle Valve is closed by a pressure
spring. The visual position indicator is no longer visible, and the electrical position
indicator "valve closed" is activated.
Position indicator
"valve closed" activated
Pilot valve
deactivated
Valve closed
Visual position indicator
not visible
Pressure spring
Compressed
air connection
1.1 Over View
1.2 Functional Principle
Opening
Closing

BP 5239 BEN (2010-10) EVB063-160PA/PX.oi 5
2 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
•Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials (→6) and the process
media.
•Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.
•Before beginning to work, find out whether any vacuum components are con-
taminated. Adhere to the relevant regulations and take the necessary precau-
tions when handling contaminated parts.
Communicate the safety instructions to all other users.
Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if
end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.) on the product
•use the product with accessories and options not listed in the corresponding
product documentation.
The end-user assumes the responsibility in conjunction with the process media
used.
Failures due to contamination or wear and tear, as well as expendable parts (e.g.
seals), are not covered by the warranty.
2.1 Symbols Used
2.2 Personnel Qualifications
2.3 General Safety
Instructions
2.4 Liability and Warranty

6BP 5239 BEN (2010-10) EVB 063 … 160 PA/PX
3 Technical Data
Type of connection
Rating soldered joints 250 VAC / 30 VA / 0.125 A
50 VDC / 12.5 W / 0.25 A
Connection flange DN 63
ISO-K DN 100 ISO-K DN 160 ISO-K
Actuation opening: pneumatic
closing: by pressure spring
Tube connection
Pressure range
Purity classes
ø6 mm, ø¼“
4 … 8 bar overpressure
2 4 1 (ISO 8573-1)
Piston displacement 75 cm3195 cm3570 cm3
Stroke of the valve plate 20 mm 25 mm 35 mm
Conductance 1) 140 l/s 330 l/s 800 l/s
Switching frequency 2)
Opening time 2)
Closing time 2)
60 / min
300 ms
700 ms
60 / min
400 ms
700 ms
40 / min
500 ms
700 ms
Cycle life 3) 1.5 million
Tightness 1×10-9mbar l/s (He)
Pressure range 1×10-8mbar … 1.5 bar (absolute)
Resistance to pressure 4 bar (absolute)
In closing direction
In opening direction
Opens to a pressure
difference Δp 4)
1.5 bar
1.5 bar
1.5 bar
Ambiance
Bakeout
Aluminum housing
Stainless steel housing
Actuator
5 … 60 °C
80 °C
150 °C
60 °C
Degree of protection
Protection class IP 54 II
Mounting orientation 5) any
Housing
PF B16 002, PF B26 002,
PF B36 002
PF B16 032, PF B26 032
Bellows / valve plate
Pressure spring
Seals
Cover
Cylinder unit
Protective lids
Packing
3.2373.62
1.4305
1.4541 / 14301
1.1200
FPM
styrene-butadiene
3.2371.61
PE
carton box, PE, PU
PF B16 002, PF B26 002,
PF B36 002
PF B16 032, PF B26 032
4 kg
6.8 kg
6.7 kg
11.7 kg
11.4 kg
–
1) For air with molecular flow.
2) Pressure difference Δp = 0, and compressed air = 6 bar (overpressure).
3) Cycles under clean operating conditions and with recommended mounting orientation.
If the valve is operated under harsh or dirty conditions, it should be cleaned / maintained
before the specified service time to maintenance has been reached.
4) Compressed air = 4 bar (overpressure).
5) Recommended mounting orientation: valve seat toward vacuum chamber.
Position indicator
Vacuum connection
Compressed air supply
Pressure difference Δp
Temperatures
Materials
Weight

BP 5239 BEN (2010-10) EVB063-160PA/PX.oi 7
DN 63 ISO-K
DN 100 ISO-K
DN 160 ISO-K
A
264
295
380
B
175
200
267
C
140
160
186
D
124
164
215
E
88
108
138
DN
DN
DN
Protective lid
Compressed air inlet
Electrical connection for
position indicator
Visual position indicator
Valve seat site
Leak detection opening
(below the collar seal)
Dimensions [mm]

8BP 5239 BEN (2010-10) EVB 063 … 160 PA/PX
4 Installation
DANGER
DANGER: overpressure in the vacuum system >1 bar
Injury caused by released parts and harm caused by escaping process
gases can result if clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum system is pressurized. Use
the type of clamps which are suited to overpressure.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
Remove the protective lids and install the valve to the vacuum system by means of
the clamp flange fittings.
Centering ring
with O-ring
4 clamps
(for all nominal
diameters)
ISO-K connection-
flange
Protective lid
Keep the protective lids.
4.1 Vacuum Connections

BP 5239 BEN (2010-10) EVB063-160PA/PX.oi 9
p
DANGER
DANGER: compressed air
Unprofessionally handling compressed air can cause physical injury.
Adhere to the relevant regulations and take the necessary precautions
when handling compressed air.
DANGER
DANGER: movement of the valve plate
When the valve is in operation, the valve plate can catch parts of the
body and thus cause injuries.
Take appropriate measures (e.g. protective grid) to prevent access to
the inside of the installed valve.
The plastic tube must meet the following specifications:
•OD 6 mm
•bursting pressure ≥10 bar overpressure
•material: PA soft or PU
To ensure leak tightness of the instant push-in fitting
•cut the plastic tube perpendicularly
•make sure the outside of the plastic tube is not damaged
The compressed air must meet the following specifications:
•purity classes 2 4 1 (ISO 8573-1)
•4 … 8 bar overpressure
4.2 Compressed Air
Connection

10 BP 5239 BEN (2010-10) EVB 063 … 160 PA/PX
Push the tube into the instant push-in fitting until the mechanical stop is reached.
Check that it is correctly mounted by slightly pulling.
Instant push-in fitting
Plastic tube OD 6 mm
Connecting the plastic tube

BP 5239 BEN (2010-10) EVB063-160PA/PX.oi 11
Before connecting or disconnecting the product, turn off the control
system.
The cable must meet the following specifications:
•flexible
•conductor cross-section 0.75 mm2
•cable cross-section 10 mm
•5 conductors with ground conductor
nSolder the cable. Slide the insulating sleeves over the soldered
connections.
g
h
Position indicator
"valve closed"
e
f
Position indicator
"valve open"
c
d
Protective conductor
Slide the insulating
sleeves over the
soldered connections.
Guide cam
not used
not used
oPlug in the connector and secure it with the union nut.
Union nut
4.3 Electrical Connection
Preparing the connector

12 BP 5239 BEN (2010-10) EVB 063 … 160 PA/PX
5 Operation
The product is ready for operation as soon as it has been installed.
Compressed air Position indicator
open
admitted
closed
not
admitted
Valve position
Valve position

BP 5239 BEN (2010-10) EVB063-160PA/PX.oi 13
6 Deinstallation
•Vacuum system vented
Before connecting or disconnecting the product, turn off the control
system.
Unlock the connector and unplug it.
DANGER
DANGER: moving parts
When the product is disconnected from the supply media, parts can
start moving. Moving parts can catch parts of the body and cause
injuries.
The product may only be disconnected from the compressed air
supply if
•the product is installed in a vacuum system or
•the moving parts are protected to avoid accidental contact.
DANGER
DANGER: compressed air
Physical injury can result if a pressurized compressed air line is
disconnected.
Before doing any work, turn off the compressed air supply and relieve
the compressed air lines.
Precondition
6.1 Electrical Connection
6.2 Compressed Air
Connection

14 BP 5239 BEN (2010-10) EVB 063 … 160 PA/PX
Pull out the tube while depressing the thrust ring.
Thrust ring

BP 5239 BEN (2010-10) EVB063-160PA/PX.oi 15
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary pre-
cautions when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
Disassemble the clamp flange connections and place the protective lids.
ISO-K connection-
flange
Centering ring with O-ring
Clamp
Protective lid
6.3 Vacuum Connection

16 BP 5239 BEN (2010-10) EVB 063 … 160 PA/PX
7 Maintenance / Repair
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary pre-
cautions when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
The valve has been deinstalled (→13).
Removing the cover
• Replacing of seals
• Cleaning the housing
• Cleaning the bellows
Minor maintenance work Major maintenance work
7.2 7.3
7.1
Reinstalling the cover
7.4
Functional check
7.5
•Switching cycles
• Leak detection
• Replacing of seals
• Cleaning the housing
• Cleaning the bellows
• Disassembling and cleaning
the pneumatic actuator
Precondition
Maintenance work

BP 5239 BEN (2010-10) EVB063-160PA/PX.oi 17
nRemove the screws.
M4×40
M4×40
M4×45
DN 63 ISO-K
DN 100 ISO-K
DN 160 ISO-K
Cap
screw
DN
1
Protective lids
must be installed
oCarefully remove the cover.
7.1 Removing the Cover

18 BP 5239 BEN (2010-10) EVB 063 … 160 PA/PX
Minor maintenance work includes replacing the primary and secondary seal and
cleaning the housing and bellows.
Complete actuator
Primary and
secondary seal
Housing
The cover has been removed (→17).
nLoosen the four housing screws by 2 turns.
DANGER
DANGER: prestressed pressure spring
Spring force: DN 63 ISO-K = 900 N
DN 100 ISO-K = 2200 N
DN 160 ISO-K = 4100 N
Uncontrolled release of the pressure spring can cause injuries.
Loosen the housing screws by max. two turns.
Loosen by
max. 2 turns!
Protective lids
must be installed
M5
M8
M10
DN 63 ISO-K
DN 100 ISO-K
DN 160 ISO-K
Hex socket
cap screw
DN 4
6
8
AF
7.2 Minor Maintenance
Overview
Precondition
Procedure

BP 5239 BEN (2010-10) EVB063-160PA/PX.oi 19
oRemove the seal of the housing.
pRemove the two short, silvery housing screws.
Note the position of the
vacuum connection
Short,
silvery screws
Long,
black screws
M5×16
M8×20
M10×30
DN 63 ISO-K
DN 100 ISO-K
DN 160 ISO-K
Hex socket
cap screw
DN 4
6
8
AF
Remove the
short, silvery
screws only!

20 BP 5239 BEN (2010-10) EVB 063 … 160 PA/PX
qUniformly unfasten the two long, black housing screws.
DANGER
DANGER: prestressed pressure spring
Spring force: DN 63 ISO-K = 900 N
DN 100 ISO-K = 2200 N
DN 160 ISO-K = 4100 N
Uncontrolled release of the pressure spring can cause injuries.
Uniformly loosen the long, black housing screws until the pres-
sure spring is relieved.
Note the position of the
vacuum conntection
M5×65
M8×60
M10×120
DN 63 ISO-K
DN 100 ISO-K
DN 160 ISO-K
Hex socket
cap screwDN 4
6
8
AF
Uniformly unfasten the screws.
The pressure spring is relieved
after a few turns.