Pfeiffer Vacuum UHV 016 CU User manual

BP 5275 BEN (2010-10)
A PASSION FOR PERFECTION
UHV 016 ... 063 CU
All-Metal Angle Valve, manually operated, bellows sealed, metal valve seat seal
Operating Instructions

2BP 5275 BEN (2010-10) UHV 016 ... 063 CU
In all communications with Pfeiffer Vacuum, please specify the information on the
product nameplate. For convenient reference copy that information into the space
provided below.
Typ:
No:
F-No:
Pfeiffer Vacuum, D-35614 Asslar
This document applies to products with part numbers
PF K32 032 (UVH 016 CU DN 016 CF)
PF K52 032 (UVH 040 CU DN 040 CF)
PF K62 032 (UVH 063 CU DN 063 CF)
The part number can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document apply to
valves with the nominal diameter DN 040. They apply to valves with other nominal
diameters by analogy.
We reserve the right to make technical changes without prior notice.
The product is used as shut-off valve for UHV applications. It can be baked out at
350 °C. The welded housing is suited for high-purity and toxic gases.
Product Identification
Validity
Illustrations
Technical changes
Intended Use

BP 5275 BEN (2010-10) UVH_016-063_CU.oi 3
Contents
Product Identification 2
Validity 2
Intended Use 2
1Description 4
1.1 Overview 4
1.2 Functional Principle 4
2Safety 4
2.1 Symbols Used 4
2.2 Personnel Qualifications 5
2.3 General Safety Instructions 5
2.4 Liability and Warranty 5
3Technical Data 6
4Installation 8
4.1 Installation 8
4.1.1 Space Requirements 8
4.1.2 Flange Connection 9
5Start-Up 10
5.1 Bakeout 10
5.2 Bringing the Valve Plate Into the Defined Position 11
6Operation 12
6.1 Closing the Angle Valve 12
6.2 Opening the Angle Valve 15
7Deinstallation 16
8Maintenance 17
8.1 Bakeout 17
8.2 Replacing the Valve Plate 17
8.2.1 Deinstalling the Valve Plate 17
8.2.2 Installing a New Valve Plate 19
8.3 Adjusting the Sealing Elements 20
8.4 Adjustment Ring Setting 21
8.5 Cleaning the Angle Valve 23
8.6 Actuator 23
8.7 Leak Detection 23
9Repair 24
10 Spare Parts 24
11 Accessories 25
12 Storage 25
13 Returning the Product 25
14 Disposal 26
For cross-references within this document, the symbol (→XY) is used, for cross-
references to further documents the symbol (→[Z]).

4BP 5275 BEN (2010-10) UHV 016 ... 063 CU
1 Description
Valve plate
Valve plate base
Leak detection bore
Mark on the valve
housing
Rotary knob (enclosed)
Adjustment ring
CF flange DN 16 ... 63 CF-R
(rotatable)
Hex socket set screw
Sealing edge
Bellows
The sealing effect of the Angle valve is achieved by pressing the valve plate
against the sealing edge. The valve housing is welded.
2 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
→See page ...
1.1 Overview
1.2 Functional Principle
2.1 Symbols Used

BP 5275 BEN (2010-10) UVH_016-063_CU.oi 5
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
•Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials (→6) and the process
media.
•Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.
•Before beginning to work, find out whether any vacuum components are con-
taminated. Adhere to the relevant regulations and take the necessary precau-
tions when handling contaminated parts.
Communicate the safety instructions to all other users.
Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the
end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.) on the product
•use the product with accessories not listed in the corresponding product
documentation.
The end-user assumes the responsibility in conjunction with the process media
used.
Failures due to contamination or wear and tear, as well as expendable parts (e.g.
seals), are not covered by the warranty.
2.2 Personnel Qualifications
2.3 General Safety
Instructions
2.4 Liability and Warranty

6BP 5275 BEN (2010-10) UHV 016 ... 063 CU
3 Technical Data
Connection flanges, rotatable
UVH 016 CU
UVH 040 CU
UVH 063 CU
DN 16 CF-R
DN 40 CF-R
DN 63 CF-R
Installation angle any
Flow direction any
Tightness 1×10-12 mbarl/s
Pressure range
Bursting pressure
1×10-11 mbar … 4 bar
(absolute)
8 bar
Conductance 1)
UVH 016 CU
UVH 040 CU
UVH 063 CU
3 l/s
38 l/s
100 l/s
Temperatures
ambiance
operation
bakeout
(without rotary knob, closed, pressure
in vacuum system <1×10-4 mbar or
vacuum system vented with inert gas)
rotary knob
continuous
temporary
storage
Temperature increase
UVH 016 CU
UVH 040 CU
UVH 063 CU
0 °C … 55 °C
≤350 °C
≤350 °C
≤100 °C
100 … 110 °C
+5 … +45 °C
-15 … +45 °C 2)
≤4 °C/minute
≤4 °C/minute
≤2 °C/minute
Closing torque
UVH 016 CU
UVH 040 CU
UVH 063 CU
2 … 10 Nm
8 … 30 Nm
30 … 60 Nm
Service life of sealing plate
(cold closing operations) 1000 cycles 3)
Lift (opening)
UVH 016 CU
UVH 040 CU
UVH 063 CU
12 mm
23 mm
33 mm
Materials
housing
spindle
spindle flange
bellows
valve plate base
valve plate
forming ring
sealing plate
rotary knob
stainless steel 1.4301
CuSn8 2.1030.26 4)
stainless steel 1.4301
stainless steel 1.4541
stainless steel 1.4301 ESU
stainless steel 1.4301
copper
PA 15% GF
Weight
UVH 016 CU
UVH 040 CU
UVH 063 CU
0.4 kg
2.0 kg
5.0 kg
1) For air with molecular flow.
2) Ambiance free of condensable gases.
3) Cycles without expandable parts (seals) and under clean operating conditions. If the
valve is operated under harsh or dirty conditions, it should be cleaned / maintained before
the specified service time to maintenance has been reached.
4) Permanent lubrication, requires no maintenance.

BP 5275 BEN (2010-10) UVH_016-063_CU.oi 7
69.6
25.6
88.2
AF 8
38
38
35
ø 62
119.4
Spindle lift
15
DN 16 CF-R (rotatable)
DN 16 CF-R (rotatable)
63
63
70
107.6
34.6
Spindle lift
27
140
ø 62
177.5
AF 17
DN 40 CF-R (rotatable)
DN 40 CF-R (rotatable)
105
105
Spindle lift
36
210.7
ø100
61
267.6
AF 22
ø74
DN 63 CF-R (rotatable)
DN 63 CF-R (rotatable)
182
Dimensions [mm]
UVH 016 CU
UVH 040 CU
UVH 063 CU

8BP 5275 BEN (2010-10) UHV 016 ... 063 CU
4 Installation
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
Caution
Caution: factory adjustment
The valve is delivered
•with the adjustment ring set to the closing torque
•with the valve plate lying on the sealing edge without being
pressed against it (which ensures optimum storage).
Bear in mind that the valve is not tight in this condition. Do not loosen
the adjustment ring nor perform any opening or closing operation until
the valve is put into operation.
The protective packaging should not be removed until shortly before installation.
Even the slightest contamination could cause leaks.
Make sure the valve can be operated without any risk of bodily injury.
Spindle lift
UVH 016 CU = 15 mm
UVH 040 CU = 27 mm
UVH 063 CU = 36 mm
4.1 Installation
4.1.1 Space Requirements

BP 5275 BEN (2010-10) UVH_016-063_CU.oi 9
Seal
Hex nut
Hex head screw
Washer
Protective lid
CF flange
Keep the protective lids.
Flange Seal Pieces Ordering number
DN 16 CF Copper
Copper, silver-plated
10
10
PF 501 401-T
PF 501 501-T
DN 40 CF Copper
Copper, silver-plated
10
10
PF 501 404-T
PF 501 504-T
DN 63 CF Copper
Copper, silver-plated
10
10
PF 501 406-T
PF 501 506-T
Flange Hex head screw Pieces Required torque
DN 16 CF M4 × 20 mm 6 per flange 4 Nm
DN 40 CF M6 × 35 mm 6 per flange 10 Nm
DN 63 CF M8 × 50 mm 8 per flange 20 Nm
4.1.2 Flange Connection
Flange seals
Screws (Accessories →25)/
Torque

10 BP 5275 BEN (2010-10) UHV 016 ... 063 CU
5 Start-Up
It is good practice to bake out new valves and valves the inner parts of which have
been exposed to atmosphere for some time, e.g. with a heating jacket.
DANGER
DANGER: hot surface
Touching the hot surface (>55 °C) can cause burns.
Do not touch the hot surface.
Caution
Caution: bakeout at atmosphere
Bakeout with the inner parts of the valve exposed to atmosphere may
lead to the formation of oxides and thus cause leaks.
Bake out the valve only if
•the pressure in the vacuum system is <1×10-4 mbar or
•the vacuum system has been vented with inert gas.
Caution
Caution: bakeout temperature >100 °C
The rotary knob may be continually exposed to temperatures <100 °C
only.
Remove the rotary knob before baking out the valve.
Heating sleeve 1)
Temperature increase:
DN 016 ≤4 °C/minute
DN 040 ≤4 °C/minute
DN 063 ≤2 °C/minute
Maximum bakeout temperature: 350 °C
p < 10-4 mbar or
vacuum system vented with inert gas
p < 10-4 mbar or
vacuum system vented with inert gas
1) Not enclosed in scope of delivery.
5.1 Bakeout

BP 5275 BEN (2010-10) UVH_016-063_CU.oi 11
Using a ring wrench, turn the hex head until mark con the adjustment ring is in
line with the mark on the valve housing.
90°
Mark on valve housing
The valve is closed and ready for use now.
5.2 Bringing the Valve Plate
Into the Defined Position

12 BP 5275 BEN (2010-10) UHV 016 ... 063 CU
6 Operation
Prevent the entry of dirt, dust, or other abrasive contamination into the valve. Even
very small particles on the sealing surfaces may cause leaks.
°C
DANGER
DANGER: hot surface
Touching the hot surface (>55 °C) can cause burns.
Wear protective gloves.
Caution
Caution: bakeout at atmosphere
Bakeout with the inner parts of the valve exposed to atmosphere may
lead to the formation of oxides and thus cause leaks.
Bake out the valve only if
•the pressure in the vacuum system is <1×10-4 mbar or
•the vacuum system has been vented with inert gas.
Caution
Caution: position of the adjustment ring
Closing the valve with an incorrectly set adjustment ring may cause
damages.
Close the valve with the minimum torque using a torque wrench.
Check that the valve is tight. If it is not yet tight, gradually increase the
closing torque in small steps (Δα ≈5°) until the valve is tight. Do not
exceed the maximum closing torque.
Closing torque
minimum maximum
UHV 016 CU 2 Nm 10 Nm
UHV 040 CU 8 Nm 30 Nm
UHV 063 CU 30 Nm 60 Nm
nUsing a ring wrench, position the valve plate on the sealing edge by turning
the hex head clockwise until an increased resistance can be felt.
°C
Turn until an increased
resistance can be felt
6.1 Closing the Angle Valve
Operating temperature >55 °C

BP 5275 BEN (2010-10) UVH_016-063_CU.oi 13
Position the valve plate on the sealing edge by turning the rotary knob
clockwise until an increased resistance can be felt. Remove the rotary knob.
enclosed
Turn until an increased
resistance can be felt
oClose the valve by turning the hex head clockwise with a ring wrench until
mark con the adjustment ring is in line with the mark on the valve housing.
Remove the ring wrench.
>55 °C
°C
Mark on valve housing
Use the ring wrench
only temporarily
Operating temperature ≤55 °C

14 BP 5275 BEN (2010-10) UHV 016 ... 063 CU
pCheck that the valve is tight. If it is not yet tight, keep gradually turning the
hex head in small steps (Δα ≈5°) until the valve is tight. However, do not
turn the hex head any further when mark d(α= 90°) on the adjustment ring
is in line with the mark on the valve housing.
Caution
Caution: maximum closing torque
The maximum closing torque (mark don the adjustment ring is
in line with the mark on the valve housing) must not be
exceeded. If the maximum torque is exceeded, the sealing
surfaces of the valve and/or the spindle may get damaged.
When the maximum closing torque has been reached, it is
recommended to exchange the valve plate before running any
further processes (→17).
Δα ≈5°
αmax = 90°
Mark on valve housing
A leak test must be performed if in a process
•the temperature was significantly increased by the heater
and/or due to the process itself
•the bakeout time was significantly increased.

BP 5275 BEN (2010-10) UVH_016-063_CU.oi 15
The maximum opening of the valve is limited by a mechanical stop.
nOpen the valve by turning the hex head counter-clockwise with a ring
wrench until the resistance decreases. Remove the ring wrench.
>55 °C
°C
Turn until the resistance
decreases
Use the ring wrench
only temporarily
oContinue opening the valve by turning the hex head counter-clockwise with
the ring wrench. Remove the ring wrench.
Use the ring wrench
only temporarily
°C
Continue opening
Continue opening the valve by turning the rotary knob counter-clockwise.
Remove the rotary knob.
Continue opening
6.2 Opening the Angle Valve
Operating temperature >55 °C
Operating temperature ≤55 °C

16 BP 5275 BEN (2010-10) UHV 016 ... 063 CU
7 Deinstallation
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Vent the vacuum system and wait until the valve has cooled down to
<50 °C.
Detach the flanges and put the protective lids in place.
CF flange
Hex head screw
Hex nut
Washer
Protective lid
Seal
When the valve is reinstalled, replacing the seals is recommended
(→9).

BP 5275 BEN (2010-10) UVH_016-063_CU.oi 17
8 Maintenance
The valve is baked in order for its inner parts to be degassed. Undesirable gases
can thus be pumped. The pumping time is reduced and the final pressure is
reached faster.
It is good practice to bake out valves after cleaning (→23) and when their inner
parts have been exposed to atmosphere for some time, e.g. with a heating jacket
(→10).
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
The valve plate can only be replaced if the valve has been deinstalled (→16).
nOpen the valve until the stop position is reached.
8.1 Bakeout
8.2 Replacing the Valve
Plate
8.2.1 Deinstalling the Valve
Plate

18 BP 5275 BEN (2010-10) UHV 016 ... 063 CU
oPlace the valve on the rotary knob and carefully unscrew the valve plate by
turning it clockwise with the supplied tool.
Supplied tool
Valve plate
pTake out the valve plate with the supplied tool.
Caution
Caution: sealing edge
The sealing edge can easily get damaged by a tool or the valve
plate. If it is hurt, the angle valve is no longer tight and must be
replaced.
Be careful not to damage the sealing edge when deinstalling
and reinstalling the valve plate.

BP 5275 BEN (2010-10) UVH_016-063_CU.oi 19
Valve plate
Sealing edge
Valve plate Carefully slide the tool
under the valve plate.
Do not damage the seal-
ing edge.
Tool
Lift the valve plate and
take it out with the tool.
nUsing the supplied tool, place the valve plate on the threaded tapped hole of
the valve plate base.
Carefully slide the tool
under the valve plate.
Do not damage the seal-
ing edge.
Valve plate
Tool
Sealing edge
Place the valve plate on the
threaded tapped hole of the
valve plate base.
Ordering number →24.
8.2.2 Installing a New Valve
Plate

20 BP 5275 BEN (2010-10) UHV 016 ... 063 CU
oCarefully screw the valve plate in by turning it clockwise with the supplied
tool. Fasten it hand-tight.
Hand-tight
After the valve plate has been replaced, the sealing elements (valve plate and
sealing edge) must be adjusted.
nPosition the valve plate on the sealing edge by carefully turning the rotary
knob clockwise until an increased resistance can be felt. Remove the rotary
knob.
Turn until an increased
resistance can be felt
8.3 Adjusting the Sealing
Elements