Pfeiffer Vacuum EVN 116 User manual

BP 5005 BEN (2011-11)
A PASSION FOR PERFECTION
EVN 116
Dosing Valve
Operating Instructions

2BP 5005 BEN (1111) EVN 116.oi
In all communications with Pfeiffer Vacuum, please
specify the information on the product nameplate. For
convenient reference copy that information into the
space provided below.
Type:
No:
F-No:
Pfeiffer Vacuum, D-35614 Asslar
This document applies to products with part number
PF I32 031.
The part number (No) can be taken from the product
nameplate.
The manually actuated EVN 116 Dosing valve is used
for both, gas dosing and shutting off a defined gas flow
without changing the gas flow setting.
The EVN 116 must not be used in connection with liquid
gases.
Dosing knob
for setting the gas flow
Open/close ring
for opening and closing the valve
Rotating the dosing knob translates into a linear
movement and places the dosing needle reproducibly in
the desired position.
Rotating the Open/close ring positions the valve plate.
These movements are independent of each other.
Product Identification
Validity
Intended Use
Functional Principle

BP 5005 BEN (2011-11) EVN 116.oi 3
1× valve
1× Operating Instructions German
1× Operating Instructions English
1× Safety Guide
Scope of Delivery

4BP 5005 BEN (1111) EVN 116.oi
Contents
Product Identification 2
Validity 2
Intended Use 2
Functional Principle 2
Scope of Delivery 3
1Safety 5
1.1 Symbols Used 5
1.2 Personnel Qualifications 5
1.3 General Safety Instructions 6
1.4 Liability and Warranty 6
2Technical Data 7
3Installation 9
4Operation 11
5Gas Flow 13
5.1 Gas Flow Curve 13
5.2 Conversion Table 13
6Deinstallation 14
7Maintenance 16
8Repair 19
9Accessories 20
10 Storage 21
11 Returning the Product 21
12 Disposal 22
For cross-references within this document, the symbol
(→XY) is used, for cross-references to other docu-
ments, the symbol (→[Z]).

BP 5005 BEN (2011-11) EVN 116.oi 5
1 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and
environmental damage.
Caution
Information on correct handling or use. Disregard can
lead to malfunctions or minor equipment damage.
Skilled personnel
All work described in this document may only be
carried out by persons who have suitable technical
training and the necessary experience or who have
been instructed by the end-user of the product.
1.1 Symbols Used
1.2 Personnel
Qualifications

6BP 5005 BEN (1111) EVN 116.oi
•Adhere to the applicable regulations and take the
necessary precautions for the process media used.
•Adhere to the applicable regulations and take the
necessary precautions for all work you are going to
do and consider the safety instructions in this docu-
ment.
•Before beginning to work, find out whether any
vacuum components are contaminated. Adhere to
the relevant regulations and take the necessary pre-
cautions when handling contaminated parts.
Communicate the safety instructions to all other users.
Pfeiffer Vacuum assumes no liability and the warranty
becomes null and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications,
alterations etc.) on the product
•use the product with accessories not listed in the
corresponding product documentation.
The end-user assumes the responsibility in conjunction
with the process media used.
Failures due to contamination or wear and tear, as well
as expendable parts (e.g. seals, filter), are not covered
by the warranty.
1.3 General Safety
Instructions
1.4 Liability and
Warranty

BP 5005 BEN (2011-11) EVN 116.oi 7
2 Technical Data
Connection flanges DN 16 ISO-KF
Mounting orientation any
Dosing range 5×10-6 … 1000 mbar l/s
Tightness 1×10-9 mbar l/s
Pressure difference ≤2.5 bar
Operating temperature
Bakeout temperature
Storage temperature
≤80 °C
≤150 °C *)
5 … 40 °C
Dead volume 0.032 cm³
Materials
Housing, needle, filter
Dosing sleeve
Seal
stainless steel
fluor plastomer
FPM75
Weight 400 g
*) at the flange connections
Gas flow with standard filter 1250 mbar l/s
Gas flow without standard filter 3100 mbar l/s
117.5
30
DN 16 ISO-KF
30
DN 16 ISO-KF
130
ø42
Preferred flow
direction
Valve seat
Inlet filter (standard)
Dimensions

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Gas flow 700 mbar l/s
Filter vacuum side
Accessories → 19
Inlet filter (standard)
Gas flow 1000 mbar l/s
Filter vacuum side
Accessories → 19
6.2
ø10
Inlet filter (standard)
Accessories
Filter
Filter

BP 5005 BEN (2011-11) EVN 116.oi 9
3 Installation
DANGER
DANGER: overpressure in the vacuum
system >1 bar
Injury caused by released parts and harm
caused by escaping process gases can result
if clamps are opened while the vacuum
system is pressurized.
Do not open any clamps while the vacuum
system is pressurized. Use the type of
clamps which are suited to overpressure.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with
bare hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
Caution
Caution: vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take
appropriate measures to ensure cleanliness
and prevent damages.
Keep the protective lids.

10 BP 5005 BEN (1111) EVN 116.oi
Preferred
flow direction
Remove the protective lids and connect the valve to the
vacuum system using the small flange connections.
Seal with
centering ring
DN 16 ISO-KF
Clamp
Protective lid
Flow direction
Vacuum connection