Pfeiffer Vacuum EVB 160 PA User manual

Operating Instructions
BP 5291 BE (2008-06) 1
Angle Valve
pneumatically actuated
bellows sealed
with non-contact position indicator
with pilot valve
EVB 160 PA

2BP 5291 BE (2008-06) EVB 160 PA.oi
In all communications with Pfeiffer Vacuum, please specify the information on the
product nameplate. For convenient reference copy that information into the space
provided below.
Pfeiffer Vacuum, D-35614 Asslar
Typ:
No:
F-No:
V W
This document applies to products with the part number
PF B38 201A
The part number (No) can be taken from the product nameplate.
We reserve the right to make technical changes without prior notice.
All dimensions in mm.
The Angle Valves are used as shut-off and venting devices for vacuum
applications.
Vacuum connection
DN 160 ISO–K
Compressed air
outlet with silencer Visual position indicator
Connector for electrical
position indicator and
pilot valve (enclosed)
Compressed air inlet
Instant push-in fitting for
educting the compressed
air (enclosed)
Product Identification
Validity
Intended Use
Description

BP 5291 BE (2008-06) EVB 160 PA.oi 3
When the pilot valve is activated, the pneumatic actuator opens the angle valve.
The visual position indicator becomes visible, and the electrical position indicator
"valve open" is activated.
Valve open
Position indicator
"valve open" activated
Compressed air inlet
Pilot valve
activated
Visual position indicator
visible
Compressed air
supply
When the pilot valve is de-energized, the pneumatic actuator is vented, and the
angle valve is closed by the pressure spring. The visual position indicator is no
longer visible, and the electrical position indicator "valve closed" is activated.
Pilot valve
deactivated
Compressed air outlet
Valve closed
Position indicator
"valve closed" activated
Visual position indicator
not visible
Pressure spring
Functional Principle

4BP 5291 BE (2008-06) EVB 160 PA.oi
Contents
Product Identification 2
Validity 2
Intended Use 2
Description 2
Functional Principle 3
1Safety 5
1.1 Symbols Used 5
1.2 Personnel Qualifications 5
1.3 General Safety Instructions 5
1.4 Liability and Warranty 5
2Technical Data 6
3Installation 8
3.1 Vacuum Connection 8
4.2 Compressed Air Connection 9
3.3 Electrical Connection 10
4Operation 13
5Deinstallation 14
5.1 Electrical Connection 14
5.2 Compressed Air Connection 14
5.3 Vacuum Connection 15
6Maintenance / Repair 17
6.1 Removing the Cover 18
6.2 Minor Maintenance 19
6.3 Major Maintenance 27
6.4 Installing the Cover 45
6.5 Functional Check 45
6.5.1 Leak Detection at the Bellows 46
7Spare Parts 47
8Returning the Product 48
9Disposal 49
Declaration of Contamination 50
For cross-references within this document, the symbol (→XY) is used.

BP 5291 BE (2008-06) EVB 160 PA.oi 5
1 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
•Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials (→6) and the process
media.
•Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.
•Before beginning to work, find out whether any vacuum components are con-
taminated. Adhere to the relevant regulations and take the necessary precau-
tions when handling contaminated parts.
Communicate the safety instructions to all other users.
Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if
end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.) on the product
•use the product with accessories and options not listed in the corresponding
product documentation.
The end-user assumes the responsibility in conjunction with the process media
used.
1.1 Symbols Used
1.2 Personnel Qualifications
1.3 General Safety
Instructions
1.4 Liability and Warranty

6BP 5291 BE (2008-06) EVB 160 PA.oi
2 Technical Data
Pilot valve
Type of connection
Nominal voltage
Pickup/holding power
Duty cycle
Nominal diameter
soldered joints
24 VDC
1.6 / 1.6 W
100%
4
Position indicator
Rating 50 VDC / 12.5 W / 0.25 A
Vacuum connection DN 160 ISO-K
Actuation opening: pneumatic
closing: by pressure spring
Compressed air connection
Tube connection
Purity classes
Pressure range
ø6 mm
2 4 1 (ISO 8573-1)
4 … 8 bar overpressure
Piston displacement 570 cm3
Stroke of the valve plate 35 mm
Conductance 1) 800 l/s
Switching frequency 2)
Opening time 2)
Closing time 2)
40 / min
600 ms
650 ms
Cycle life 3) 1 million
Tightness 1×10-9mbar l/s (He)
Pressure range 1×10-8mbar … 1.5 bar (absolute)
Resistance to pressure 4 bar (absolute)
Pressure difference Δp
In closing direction
In opening direction
Opens to a pressure difference 4)
1.5 bar
1.5 bar
1.5 bar
Temperatures
Ambiance
Bakeout
Housing
Actuator
Pilot valve
5 °C … 60 °C
80 °C
60 °C
60 °C
Type of protection
Protection class
IP 54 according to DIN 40 050
II
Installation angle
Flow direction 5)
any
any
Materials
Housing
Bellows / valve plate
Pressure spring
Seals
Cover
Cylinder unit
Protective lids
Packing
DIN 3.2373.62
DIN 1.4541 / DIN 1.4301
DIN 1.1200
FPM
styrene-butadiene
DIN 3.2371.61
PE
carton box, PE, PU
Weight 11.4 kg
1) For air with molecular flow
2) In a vacuum, pressure difference Δp = 0, and compressed air = 6 bar (overpressure)
3) Cycles without expendable parts (seals) and under clean operating conditions
4) Compressed air = 4 bar (overpressure)
5) Recommended mounting orientation: valve seat toward vacuum chamber

BP 5291 BE (2008-06) EVB 160 PA.oi 7
DN 160 ISO-K
DN 160 ISO-K
Protective lid Visual position indicator
Compressed air inlet Valve seat site
Electrical connection for
position indicator
Leak detection opening
(below the collar seal)
Dimensions

8BP 5291 BE (2008-06) EVB 160 PA.oi
3 Installation
DANGER
DANGER: overpressure in the vacuum system >1 bar
Injury caused by released parts and harm caused by escaping process
gases can result if clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum system is pressurized. Use
the type of clamps which are suited to overpressure.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
Remove the protective lids and install the valve to the vacuum system.
Centering ring with O-ring
4 clamps
(for all nominal diameters)
ISO-K connection flange
Protective lid
Keep the protective lids.
3.1 Vacuum Connection

BP 5291 BE (2008-06) EVB 160 PA.oi 9
p
DANGER
DANGER: compressed air
Unprofessionally handling compressed air can cause physical injury.
Adhere to the relevant regulations and take the necessary precautions
when handling compressed air.
The plastic tube must meet the following specifications:
•OD 6 mm
•bursting pressure ≥10 bar overpressure
•material: PA soft or PU
To ensure leak tightness of the instant push-in fitting
•cut the plastic tube perpendicularly
•make sure the outside of the plastic tube is not damaged
The compressed air must meet the following specifications:
•Purity classes 2 4 1 (ISO 8573-1)
•4 … 8 bar overpressure
Push the tube into the instant push-in fitting until the mechanical stop is reached.
Check that it is correctly mounted by slightly pulling.
Plastic tube OD 6 mm
Instant push-in fitting
4.2 Compressed Air
Connection
Compressed air inlet

10 BP 5291 BE (2008-06) EVB 160 PA.oi
If necessary, unscrew the silencer and screw in the enclosed instant push-in fitting
(ø6 mm) for educting the compressed air. Push the tube into the instant push-in
fitting until the mechanical stop is reached. Check that it is correctly mounted by
slightly pulling.
For educting the compressed air,
unscrew the silencer from the
compressed air outlet
Screw in the enclosed
instant push-in fitting
Push in the plastic tube OD 6 mm
DANGER
DANGER: moving parts
When the product is connected to the supply media, parts can start
moving. Moving parts can catch parts of the body and cause injuries.
The connection to the power supply may only be established if
•the power supply is de-energized
•the product is installed in a vacuum system or
•the moving parts are protected to avoid accidental contact.
Caution
Caution: mains voltage
The pilot valve can get destroyed if a wrong mains voltage is applied.
The local mains power rating must correspond with the nominal volt-
age of the pilot valve (→2). If they do not correspond, exchange the
pilot valve (→27 ff.).
Compressed air outlet
3.3 Electrical Connection