Pfeiffer Vacuum UVH 016 VI User manual

BP 5277 BEN (2010-11)
A PASSION FOR PERFECTION
UVH 016 … 063 VI
Angle Valve, manually operated, bellows sealed, FPM valve seat seal
Operating Instructions

2BP 5277 BEN (2010-11) UVH 016 … 063 VI
In all communications with Pfeiffer Vacuum, please specify the information on the
product nameplate. For convenient reference copy that information into the space
provided below.
Typ:
No:
F-No:
Pfeiffer Vacuum, D-35614 Asslar
This document applies to products with part numbers
PF C32 032 (UVH 016 VI DN 016 CF)
PF C52 032 (UVH 040 VI DN 040 CF)
PF C62 032 (UVH 063 VI DN 063 CF)
The part number (No) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document apply to
valves with the nominal diameter DN 040. They apply to valves with other nominal
diameters by analogy.
We reserve the right to make technical changes without prior notice.
The product is used as shut-off valve for UHV and HV applications. It can be baked
out at 180 °C. The welded housing is suited for high-purity and toxic gases.
Product Identification
Validity
Intended Use

BP 5277 BEN (2010-11) UVH_016-063_VI.oi 3
Contents
Product Identification 2
Validity 2
Intended Use 2
1Description 4
2Safety 5
2.1 Symbols Used 5
2.2 Personnel Qualifications 5
2.3 General Safety Instructions 5
2.4 Liability and Warranty 5
3Technical Data 6
4Installation 8
4.1 Installation 8
4.1.1 Space Requirements 8
4.1.2 Flange Connection 9
5Start-Up 10
5.1 Bakeout 10
5.2 Bringing the Valve Plate Into the Defined Position 11
6Operation 12
6.1 Closing the Angle Valve 12
6.2 Opening the Angle Valve 14
6.3 Installing/Removing the Rotary Knob 14
7Deinstallation 15
8Maintenance 16
8.1 Bakeout 16
8.2 Replacing the O-Ring of the Valve Plate 16
8.2.1 Deinstalling the Valve Plate 16
8.2.2 Replacing the O-Ring of the Valve Plate 18
8.2.3 Reinstalling the Valve Plate 19
8.3 Cleaning the Angle Valve 20
8.4 Actuator 20
8.5 Leak Detection 21
9Repair 21
10 Spare Parts 21
11 Accessories 22
12 Storage 22
13 Returning the Product 22
14 Disposal 23
For cross-references within this document, the symbol (→XY) is used, for cross-
references to further documents the symbol (→[Z]).

4BP 5277 BEN (2010-11) UVH 016 … 063 VI
1 Description
Valve plate
Valve plate base
Rotary knob (removable)
O-ring
CF flange DN 16 ... 63 CF-R
(rotatable)
Leak detection bore
Mechanical stop
Bellows

BP 5277 BEN (2010-11) UVH_016-063_VI.oi 5
2 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
•Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials (→6) and the process
media.
•Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.
•Before beginning to work, find out whether any vacuum components are con-
taminated. Adhere to the relevant regulations and take the necessary precau-
tions when handling contaminated parts.
Communicate the safety instructions to all other users.
Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the
end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.) on the product
•use the product with accessories not listed in the corresponding product
documentation.
The end-user assumes the responsibility in conjunction with the process media
used.
Failures due to contamination or wear and tear, as well as expendable parts (e.g.
seals), are not covered by the warranty.
2.1 Symbols Used
2.2 Personnel Qualifications
2.3 General Safety
Instructions
2.4 Liability and Warranty

6BP 5277 BEN (2010-11) UVH 016 … 063 VI
3 Technical Data
Connection flanges, rotatable
UVH 016 VI
UVH 040 VI
UVH 063 VI
DN 16 CF-R
DN 40 CF-R
DN 63 CF-R
Installation angle any
Flow direction any
Tightness 1×10-9 mbarl/s
Pressure range
Bursting pressure
1×10-8 mbar … 4 bar (absolute)
8 bar
Conductance
UVH 016 VI
UVH 040 VI
UVH 063 VI
3 l/s
38 l/s
100 l/s
Temperatures
Ambiance
Operation
Bakeout
Without rotary knob
With rotary knob
Rotary knob
Continuous
Temporary
Storage
Temperature increase
UVH 016 VI
UVH 040 VI
UVH 063 VI
0 °C … 55 °C
≤180 °C
≤180 °C
≤100 °C
≤100 °C
100 … 110 °C
+5 … +45 °C
-15 … +45 °C 1)
≤4 °C/minute
≤4 °C/minute
≤4 °C/minute
Closing torque
UVH 016 VI
UVH 040 VI
UVH 063 VI
0.1 … 0.3 Nm
0.2 … 0.4 Nm
0.4 … 0.8 Nm 2)
Service life O-ring
cold closing operations 50'000 cycles 3)
Lift (opening)
UVH 016 VI
UVH 040 VI
UVH 063 VI
12 mm
23 mm
33 mm
Materials
Housing
Spindle
Spindle flange
Bellows
Valve plate base
Valve plate
Sealing plate
O-ring
Rotary knob
stainless steel 1.4301
CuSn8 2.1030.26 4)
stainless steel 1.4301
stainless steel 1.4541
stainless steel 1.4301 ESU
stainless steel 1.4301
FPM75
PA 15% GF
Weight
UVH 016 VI
UVH 040 VI
UVH 063 VI
0.35 kg
1.8 kg
4.8 kg
1) Ambiance free of condensable gases.
2) Preliminary information.
3) Cycles without expandable parts (seals) and under clean operating conditions. If the
valve is operated under harsh or dirty conditions, it should be cleaned / maintained before
the specified service time to maintenance has been reached.
4) Permanent lubrication, requires no maintenance.

BP 5277 BEN (2010-11) UVH_016-063_VI.oi 7
69.6
25.6
104.2
AF 8
38
38
35
ø 62
119.2
Spindle lift
15
DN 16 CF-R (rotatable)
DN 16 CF-R (rotatable)
63
63
70
107.6
34.6
Spindle lift
27
150.9
ø 62
177.9
AF 17
DN 40 CF-R (rotatable)
DN 40 CF-R (rotatable)
105
105
Spindle lift
36
231.2
ø100
61
267.2
ø74
182
AF 22
DN 63 CF-R (rotatable)
DN 63 CF-R (rotatable)
Dimensions [mm]
UVH 016 VI
UVH 040 VI
UVH 063 VI

8BP 5277 BEN (2010-11) UVH 016 … 063 VI
4 Installation
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
•The valve is delivered in closed condition and with the rotary knob installed.
•The protective packaging should not be removed until shortly before installa-
tion. Even the slightest contamination could cause leaks.
Make sure the valve can be operated without any risk of bodily injury.
Spindle lift
Spindle lift
UVH 016 VI 15 mm
UVH 040 VI 27 mm
UVH 063 VI 36 mm
4.1 Installation
4.1.1 Space Requirements

BP 5277 BEN (2010-11) UVH_016-063_VI.oi 9
Hex nut
Hex hesd srcew
Washer
Protective lid
Seal
CF flange
Keep the protective lids.
Flange Seal Pieces Ordering number
DN 16 CF Copper 10 PF 501 401-T
DN 40 CF Copper 10 PF 501 404-T
DN 63 CF Copper 10 PF 501 406-T
Flange Hex head screw Number of screws Required torque
DN 16 CF M4 × 20 mm 6 per flange 4 Nm
DN 40 CF M6 × 35 mm 6 per flange 10 Nm
DN 63 CF M8 × 50 mm 8 per flange 20 Nm
4.1.2 Flange Connection
Flange seals
(Accessories →22)
Screws
(Accessories →22) / Torque

10 BP 5277 BEN (2010-11) UVH 016 … 063 VI
5 Start-Up
It is good practice to bake out new valves and valves the inner parts of which have
been exposed to atmosphere for some time, e.g. with a heating jacket.
DANGER
DANGER: hot surface
Touching the hot surface (>55 °C) can cause burns.
Do not touch the hot surface.
Caution
Caution: bakeout at atmosphere
Bakeout with the inner parts of the valve exposed to atmosphere may
lead to the formation of oxides and thus cause leaks.
Bake out the valve only if
•the pressure in the vacuum system is <1×10-4 mbar or
•the vacuum system has been vented with inert gas.
nPrior to baking the valve at temperatures >100 °C, remove the rotary knob
(→15).
oBake the valve out.
p < 10-4 mbar or
vacuum system vented with inert gas
Heating sleave 1)
Temperature increase:
DN 016 ≤4 °C/minute
DN 040 ≤4 °C/minute
DN 063 ≤2 °C/minute
Maximum bakeout temperature: 180 °C
p < 10-4 mbar or
vacuum system vented with inert gas
1) Not enclosed in the delivery.
pIf the rotary knob has been removed, wait until the valve has cooled down
(<50 °C) and reinstall the rotary knob (→14).
5.1 Bakeout

BP 5277 BEN (2010-11) UVH_016-063_VI.oi 11
Close the valve by turning the rotary knob until the stop position is reached.
The valve is closed and ready for use now.
5.2 Bringing the Valve Plate
Into the Defined Position

12 BP 5277 BEN (2010-11) UVH 016 … 063 VI
6 Operation
Prevent the entry of dirt, dust, or other abrasive contamination into the valve. Even
very small particles on the sealing surfaces may cause leaks.
°C
DANGER
DANGER: hot surface
Touching the hot surface (>55 °C) can cause burns.
Wear protective gloves.
Caution
Caution: bakeout at atmosphere
Bakeout with the inner parts of the valve exposed to atmosphere may
lead to the formation of oxides and thus cause leaks.
Bake out the valve only if
•the pressure in the vacuum system is <1×10-4 mbar or
•the vacuum system has been vented with inert gas.
Depending on the operating temperature, close the angle valve with the rotary
knob or a ring wrench.
Close the valve by turning the rotary knob clockwise until the stop position is
reached.
6.1 Closing the Angle Valve
Operating temperature ≤55 °C

BP 5277 BEN (2010-11) UVH_016-063_VI.oi 13
Precondition: rotary knob removed.
Caution
Caution: excessive closing force
Only little force is required to close the valve. If the hex head is turned
beyond the stop position, the sealing surfaces and/or the spindle may
get damaged.
•Do not turn the hex head beyond the mechanical stop.
Close the valve by turning the ring wrench clockwise until the stop position is
reached. Remove the ring wrench.
°C
Use the ring wrench only temporarily
Operating temperature >55 °C

14 BP 5277 BEN (2010-11) UVH 016 … 063 VI
Depending on the operating temperature, open the valve with the rotary knob or a
ring wrench. The maximum opening of the valve is limited by a mechanical stop.
Open the valve by turning the rotary knob counter-clockwise.
Precondition: rotary knob deinstalled.
Open the valve by turning the ring wrench counter-clockwise. Remove the ring
wrench.
°C
Use the ring wrench only temporarily
Using a screwdriver (size 4 mm), loosen/fasten the screw.
M4×8
DN 016 CF
DN 040 CF
DN 063 CF
M4×25
6.2 Opening the Angle Valve
Operating temperature ≤55 °C
Operating temperature >55 °C
6.3 Installing/Removing the
Rotary Knob

BP 5277 BEN (2010-11) UVH_016-063_VI.oi 15
7 Deinstallation
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Vent the vacuum system and wait until the valve has cooled down to
<50 °C.
Detach the flanges and put the protective lids in place.
Hex nut
Hex head screw
Washer
Protective lid
Seal
CF flange
When the valve is reinstalled, replacing the seals is recommended
(→9).

16 BP 5277 BEN (2010-11) UVH 016 … 063 VI
8 Maintenance
The valve is baked in order for its inner parts to be degassed. Undesirable gases
can thus be pumped. The pumping time is reduced and the final pressure is
reached faster.
It is good practice to bake out valves after cleaning (→20) and when their inner
parts have been exposed to atmosphere for some time, e.g. with a heating jacket
(→10).
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
The O-ring can only be replaced when the valve is deinstalled (→15).
nOpen the valve until the stop position is reached.
8.1 Bakeout
8.2 Replacing the O-Ring of
the Valve Plate
8.2.1 Deinstalling the Valve
Plate

BP 5277 BEN (2010-11) UVH_016-063_VI.oi 17
oPlace the valve on the rotary knob and carefully unscrew the valve plate by
turning it counter-clockwise with the supplied tool.
Supplied tool
Valve plate

18 BP 5277 BEN (2010-11) UVH 016 … 063 VI
pTake out the valve plate with the supplied tool.
Caution
Caution: mechanical stop
The mechanical stop can easily get damaged by the tool or
valve plate. If it is hurt, the angle valve is no longer tight and
must be replaced.
Be careful not to damage the mechanical stop when dein-
stalling and reinstalling the valve plate..
Valve plate
Sealing edge
Valve plate Carefully slide the tool
under the valve plate.
Do not damage the seal-
ing edge.
Tool
Lift the valve plate and
take it out with the tool.
nRemove the O-ring from the valve plate.
E.g. wood or
plastic toothpick
Do not damage
the sealing surface
8.2.2 Replacing the O-Ring of
the Valve Plate

BP 5277 BEN (2010-11) UVH_016-063_VI.oi 19
oInsert a new O-ring.
O-ring
Do not twist
Be careful to insert the O-ring level into the sealing groove with-
out twisting it.
Ordering number →21.
nUsing the supplied tool, place the valve plate on the threaded tapped hole of
the valve plate base.
Carefully slide the tool
under the valve plate.
Do not damage the seal-
ing edge.
Valve plate
Tool
Sealing edge
Place the valve plate on the
threaded tapped hole of the
valve plate base.
8.2.3 Reinstalling the Valve
Plate

20 BP 5277 BEN (2010-11) UVH 016 … 063 VI
oCarefully screw the valve plate in by turning it clockwise with the supplied
tool. Fasten it hand-tight.
Hand-tight
pCheck tightness.
DANGER
DANGER: cleaning agents
Cleaning agents can be detrimental to health and environment.
Adhere to the relevant regulations and take the necessary precautions
when handling and disposing of cleaning agents. Consider possible
reactions with the product materials (→6).
Clean the valve with alcohol, if possible in an ultrasonic bath. Let it dry thoroughly.
Prior to putting the valve into operation, preferably bake it out (→10).
The actuator has a permanent lubrication and therefore does not require any
maintenance.
8.3 Cleaning the Angle
Valve
8.4 Actuator