Pfeiffer Vacuum EVL 063 P User manual

Operating manual
BP 805 030 BE (9902) 1
Angle valve
with control valve
with position feedback
EVL 063 P
EVL 100 P
EVL 160 P
Safety
Technical data
Installation
Operation
Maintenance
Repair
Decommissioning

2General BP 805 030BE (9902) EVL 063–160 P
In all communications with Pfeiffer Vacuum please specify the information given
on the nameplate. For convenient reference transfer this information into the
diagram below.
Typ:
No:
F-No:
V: Hz:
Pfeiffer Vacuum, D-35614 Asslar
This manual applies to manuals with part number
PF B18 701 (EVL 063 P)
PF B28 701 (EVL 100 P)
PF B38 701 (EVL 160 P)
The part number can be taken from the nameplate.
The functions described as well as the illustrations and data contained in this
manual are subject to change without notice.
The Angle valves described in this manual are used as shut off valves in vacuum
systems and vacuum pumping stations.
The Angle valves are opened by a compressed air piston and closed by at least
one pressure spring. They close automatically in the event of a power or com-
pressed air failure.
The Angle valves have a floating switchover contact for both final positions.
Product identification
Validity
Intended use
Functional principle

BP 805 030BE (9902) EVL 063–160 P Safety 3
1 Safety
DANGER
Information on preventing any kind of personal injury or extensive equipment
damage.
CAUTION
Special information on damage prevention.
Specialists
This work may only be carried out by persons with suitable technical training and
the necessary experience.
NOTE
Special information on cost-effective use.
Result O.K.
Result not as expected
Do not dispose of
→2See page ...
a) Take into account the relevant safety regulations for the gases used.
Consider possible reactions with the materials (→24).
b) Take the necessary precautions when doing installation, maintenance, or
repair work (→26, 8, 10,14).
c) Products returned for maintenance or repair should if at all possible be free of
harmful substances (e.g. radioactive, toxic, caustic, or microbiological). Other -
wise, the type of contamination has to be declared.
Products that are not clearly declared as "free of harmful substances" are
decontaminated at the expense of the customer.
Pass on the safety information to other users.
Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the
operator or third parties
• use the product in a nonconforming manner
• disregard the operating manual
• make any kind of changes (modifications, alterations, etc.) to the product
The operator assumes the responsibility in conjunction with the gases used.
1.1 Explanation of symbols
1.2 Safety information
1.3 Responsibility and
warranty

4Technical data BP 805 030BE (9902) EVL 063–160 P
2 Technical data
EVL 063 P EVL 100 P EVL 160 P
Flange connection DN 63 ISO-K DN 100 ISO-K DN 160 ISO-K
Operating voltage V≅24...240 24...240 24...240
Protection class IP 50 IP 50 IP 50
Noise level dB (A) <70 <70 <70
Conductance for air (molecular flow) l/s 160 450 1000
Tightness mbar l/s 1×10-9 1×10-9 1×10-9
Mounting orientation any any any
Max. frequency 1/min. 30 30 20
Cycles to first maintenance 1,000,0001)1,000,0001) 1,000,0001)
Pressure difference ∆p
in closing direction
in opening direction bar
bar 3 23 23 2
Pressure range mbar ... bar 1×10-8 ... 5 (abs.) 1×10-8 ... 5 (abs.) 1×10-8 ... 5 (abs.)
Can be opened to a pressure difference
∆p of bar 3 3 3
Closing time ms 7502)5002) 7502)
Opening time ms 3003)6003) 15003)
Compressed air
overpressure
volume bar cm³ 4...8 115 4...8 225 4...8 575
Starting current mA 13 13 13
Holding current mA 0.1...3.5 0.1...3.5 0.1...3.5
Load capacity of the position feedback
switches V= A25 225 225 2
Ambient temperature °C 54)...50 54) ...50 54) ...50
Bakeout temperature
housing
actuator
control valve
°C
°C
°C
150
60
60
150
60
60
150
60
60
Materials
housing Al alloy
3.2315 Al alloy 3.2315 Al alloy 3.2315
bellows stainless steel
1.4301 stainless steel 1.4301 stainless steel 1.4301
seals Viton Viton Viton
Dimensions →25 →25 →25
Weight kg 3.7 7.5 15.4
1)under clean operation conditions
2)compressed air 5 bar (abs.)
3)compressed air 9 bar (abs.)
4) –15°C, if the ambiance is free of condensable gases

BP 805 030BE (9902) EVL 063–160 P Technial data 5
Fig. 2.1
DN 63 ISO-K
260
88
237
197
20
12°
16°
DN 63 ISO-K
Fig. 2.2
DN
H
A
E
DN
12°
15°
G
Z
ADEGHZ
DN 100 ISO-K 108 ø152 293,5 264,5 316,5 25
DN 160 ISO-K 138 ø204 355 313 378 35
Electrical connection
Position feedback connection
Compressed air connection G1/8"
Position indicator
Protective cover
Valve seat side
Leak detection port
EVL 063 P
EVL 100 P
EVL 160 P

6Installation BP 805 030BE (9902) EVL 063–160 P
3 Installation
NOTE
Make sure to adhere to the special regulations concerning cleanliness and
damage prevention when working with vacuum components.
èRemove the protective covers
The protective covers may be needed for maintenance or repair.
Fig. 3.1
Make the flange connections
Clamping flange /
clamping flange Collar flange / fixed flange Clamping flange / baseplate
Nominal diameter Number of
clamping screws Number of screws Number of claw grips
DN 63 ISO-K 4 4 4
DN 100 ISO-K 4 8 8
DN 160 ISO-K 4 8 8
Please refer to the catalog for further details.
DANGER
When using compressed air make sure to adhere to the applicable handling and
safety measures.
CAUTION
The compressed air must meet the following requirements:
• free of oil
• dry
• free of particles >10 µm
• overpressure 4 ... 8 bar
3.1 Making the flange
connections
3.2 Connecting the
compressed air

BP 805 030BE (9902)) EVL 063–160 P Installation 7
G1/8"
Fig. 3.2
Fig. 3.3 G1/8"
Fig. 3.4
G1/8"
G1/8"
Fig. 3.5
EVL 063 P
Funneling the vent in a common
exhaust duct
EVL 100 P
EVL 160 P
Funneling the vent in a common
exhaust duct
Fast venting with muffler
to common exhaust duct
to common exhaust duct
to common exhaust duct
The compressed air
tube must withstand at
least 10 bar
The compressed air
tube must withstand at
least 10 bar
Venting with muffler

8Installation BP 805 030BE (9902) EVL 063–160 P
èMake the connection cable (matching connector enclosed)
Wiring dia-
gram inside
the cap
24...240 V≅
Fig. 3.6
Normally open contact
(valve open)
234
5
16
7
CAUTION
Load capacity of
the position feed-
back switches:
25 V= / 2 A
Normally closed
contact
(valve closed)
Make the electrical connection
DANGER
The valve may only be connected to the electric power supply if:
• if the angle valve is installed in a vacuum system
• the moving parts (valve plate etc.) are protected against accidental
contact.
The controller must be turned off before the valve is connected or dis-
connected.
The mains connector may only be plugged into a socket with a protective
ground. The protection must not be nullified by an extension cable without
ground conductor.
Fig. 3.7
3.3 Electrical connection
Connect according to
the local safety
regulations
Control contact

BP 805 030BE (9902)) EVL 063–160 P Operation 9
4 Operation
Position of the valve plate Optical valve position
indicator
Medium not active
lMedium active
Fig. 4.1
Pressure range
EVL 063 P
EVL 100 P
EVL 160 P 1×10-8 mbar ... 5 bar (abs.)
Fig. 4.2 Pressure difference ∆p = 2 bar
4.1 Position of the valve
plate as function of the
media
4.2 Pressure range and
pressure difference
Pressure difference
∆p = 3 bar
Compressed
air Voltage at the control
valve

l


l
ll

10 Maintenance BP 805 030BE (9902)) EVL 063–160 P
5 Maintenance
Under clean operating conditions the product requires no maintenance during the
rated cycle life (→24).
DANGER
Neither the operator nor third parties shall perform maintenance work not
described in this manual.
DANGER
Persons performing maintenance work must first receive information concerning
the state of the contaminated vacuum units and their components.
Before installing or removing the product and for all maintenance work, the elec -
tric power and the compressed air supply have to be interrupted.
The connection to the compressed air and to the electric power may only be
established if:
• the angle valve is installed in a vacuum system or
• the moving parts (valve plate etc.) are protected against accidental contact
Please note that loaded springs and air cushions in the cylinder represent
potential hazards even when the supply lines are disconnected.
When using cleaning agents make sure to adhere to the applicable handling and
disposal regulations and safety measures.
NOTE
Make sure to adhere to the special regulations concerning cleanliness and
damage prevention when working with vacuum components.
èAssess the accessibility of the product
A
Fig. 5.1
Replacing the seals of the valve
plate and the housing
Preparation
easily accessible →, , ò, ó
not easily accessible →... ó
AøD
EVL 063 P ≈250 ≈200
EVL 100 P ≈300 ≈250
EVL 160 P ≈350 ≈300

BP 805 030BE (9902)) EVL 063–160 P Maintenance 11
Remove the connector
Fig. 5.2
Disconnect the compressed air
Fig. 5.3
Remove the flange connections (only if the valve is not easily accessible)
Fig. 5.4
Place the protective covers
Fig. 5.5

12 Maintenance BP 805 030BE (9902)) EVL 063–160 P
òRemove the actuator
DANGER
The valve plate of the EVL 063 P is prestressed (spring loaded) with ≈870 N
(≈196 lbf) in the "closed" position.
max. 5 mm
A
Loosen screws "A" gradually, in several steps, and cross-
wise. The gap between the valve housing and the cylinder
part must not open to > 5 mm. Otherwise, there is a severe
problem, which will cause the spring force of the pressure
spring to release, possibly causing injury, and you should
proceed as follows:
• Immediately tighten the screws "A"
• Return the Angle valve together with a corresponding
danger note to your nearest Pfeiffer Vacuum Service
Center.
Spring force
B
A
C
X
X
Y
Fig. 5.6
Position of the valve plate: "closed"
(i.e., when the valve is installed, the valve plate is
pressed against the valve seat).
Section X - X
View "Y"
NOTE
Remove resistant residues or dirt with a cleaning agent1)in conformity with the
local regulations.
Carefully clean the sealing surfaces with a lint-free cloth wet with alcohol. Allow
to dry.
Treat O-rings "B" and "C" with a lint-free cloth slightly moist with vacuum oil.
Insert them into the lining groove without twisting them.
1) Consider possible reactions with the materials (→
2 4).
EVL 063 P
EVL 063 P
O-ring "B" AN 232, ø69.44×3.53, Viton
O-ring "C" AN 237, ø85.32×3.53, Viton
Set of seals BN 841 297-T
Watch theO-rings (AN 007,
ø3.69×1.78, Viton).
Use untreated (dry) O-rings for
the compressed air.
Push back the
position feedback
switch during
assembly.

BP 805 030BE (9902)) EVL 063–160 P Maintenance 13
DANGER
The valve plate of the EVL 100 P is prestressed (spring loaded) with ≈1500 N
(≈337 lbf) in the "closed" position, the valve plate of the EVL 160 P with ≈2900 N
(≈652 lbf).
max. 5 mm
A
Loosen screws "A" gradually, in several steps, and cross-
wise. The gap between the valve housing and the cylinder
part must not open to > 5 mm. Otherwise, there is a severe
problem, which will cause the spring force of the pressure
spring to release, possibly causing injury, and you should
proceed as follows:
• Immediately tighten the screws "A"
• Return the Angle valve together with a corresponding
danger note to your nearest Pfeiffer Vacuum Service
Center.
Sp ring forc e
B
C
A
Fig. 5.7
Position of the valve plate: "closed"
(i.e., when the valve is installed, the valve plate is
pressed against the valve seat).
NOTE
Remove resistant residues or dirt with a cleaning agent1)in conformity with the
local regulations.
Carefully clean the sealing surfaces with a lint-free cloth wet with alcohol. Allow
to dry.
Treat O-rings "B" and "C" with a lint-free cloth slightly moist with vacuum oil.
Insert them into the lining groove without twisting them.
1) Consider possible reactions with the materials (→
2
4).
óTo reassemble the Angle valve, perform the above steps in reverse
order.
EVL 100 P
EVL 160 P
EVL 063 P
EVL 100 P
EVL 160 P
EVL 100 P EVL 160 P
O-ring "B" AN 240,
ø94.84×3.53
Viton
AN -,
ø146.1×5.34
Viton
O-ring "C" AN 245,
ø110.7×3.53
Viton
AN 260,
ø164.7×3.53
Viton
Set of seals BN 841 298-T BN 841 299-T
EVL 100 P EVL 160 P
Number of screws "A" 4 6

14 Repair BP 805 030BE (9902)) EVL 063–160 P
6 Repair
We recommend to return defective products to your nearest Pfeiffer Vacuum
Service Center for repair.
DANGER
Neither the operator nor third parties shall perform repair work not described in
this manual.
DANGER
Persons performing repair work must first receive information concerning the
state of the contaminated vacuum units and their components.
Before installing or removing the product and for all maintenance work, the elec -
tric power and the compressed air supply have to be interrupted.
The connection to the compressed air and to the electric power may only be
established if:
• the angle valve is installed in a vacuum system or
• the moving parts (valve plate etc.) are protected against accidental contact
Please note that loaded springs and air cushions in the cylinder represent
potential hazards even if the supply lines are disconnected.
NOTE
Make sure to adhere to the special regulations concerning cleanliness and
damage prevention when working with vacuum components.
èAssess the accessibility of the product.
Fig. 6.1
~100
Remove the connector
Fig. 6.2
Replacing the control valve
easily accessible
→, , ò, ó,õ
not easily accessible
→... õ

BP 805 030BE (9902)) EVL 063–160 P Repair 15
Disconnect the compressed air
Fig. 6.3
Remove the flange connections (only if the valve is not easily accessible)
Fig. 6.4
Place the protective cover
Fig. 6.5
òRemove the cap
Fig. 6.6

16 Repair BP 805 030BE (9902)) EVL 063–160 P
óReplace the control valve
Fig. 6.7
NOTE
Mount untreated (dry) O-rings at the control valve.
õTo reassemble the Angle valve, perform the above steps in reverse
order.
7 Returning the valve
When returning a contaminated product for maintenance or repair:
• seal all openings of the product hermetically
• put the product in an appropriate, tight, solid packing
• enclose a completed declaration of contamination
8 Decommissioning
Ø
Pfeiffer-
Vacuum
For professional decommissioning of the product, please contact your nearest
Pfeiffer Vacuum Service Center.
Control valve for: Ordering number
EVL 063 P
EVL 100 P
EVL 160 P B 0141 075 11

BP 805 030BE (9902)) EVL 063–160 P 17
Declaration of Contamination
òLegally binding declaration:
I hereby declare that the information supplied on this form is complete and accurate. The dispatch of the contaminated product will
be in accordance with the appropriate regulations covering packaging, transportation and labelling of dangerous substances.
Name of organisation or company
Address Post code
Phone Telex
E-Mail
Name
Date and legally binding signature Company stamp

Harmful substances, gases and/or by-products
Please list all substances, gases and by-products which may have come into contact with the product:
*) Products thus conta-
minated will not be
accepted without
written evidence of
decontamination!

Process related contamination of product:
toxic no
q
yes
q
corrosive no
q
yes
q
biological hazard no
q
yes
q
*)
explosive no
q
yes
q
*)
radioactive no
q
yes
q
*)
other harmful substances no
q
yes
q

Reason for return
The repair and/or service of vacuum equipment and components will only be carried out if a correctly completed declaration has been
submitted. Non-completion will result in delay.
This declaration can only be completed and signed by authorised and qualified staff.
èDescription of product
Type
Article No.
Serial No.
Copies: Original to manufacturer or representative - 1 copy attach to consignment packaging - 1 copy for file of sender

Operating fluid(s) used
Trade/Product name
Manufacturer Chemical name
(or symbol) Dangerous
material class Measures if spillage First aid in case of
human contact

Pfeiffer Vacuum GmbH
Berliner Str. 43
D–35614 Asslar
Deutschland
Tel [phone]
Fax [phone]
Original: German BG 805 030 BD (9902) [email protected]
www.pfeiffer-vacuum.net