Pfeiffer Vacuum UDV 146 User manual

BP 5281 BEN (2010-10)
A PASSION FOR PERFECTION
UDV 146
All-Metal Control Valve, thermomechanically and manually actuated
Operating Instructions

2BP 5281 BEN (2010-10) UDV 146
In all communications with Pfeiffer Vacuum, please specify the information on the
product nameplate. For convenient reference copy that information into the space
provided below.
Typ:
No:
F-No:
Pfeiffer Vacuum, D-35614 Asslar
This document applies to products with part number PF I52 034.
The part number (No) can be taken from the nameplate.
We reserve the right to make technical change without prior notice.
All dimensions in mm.
The UDV 146 All-Metal Control Valve is used (in conjunction with a controller) for
admitting a precise and reproducible gas flow into a vacuum system and is suited,
for example, for
•gas and surface analysis
•mass spectrometry
•nuclear physics, accelerators
•cathode sputtering
•vacuum and laser technology
•handling of very pure gases
Product Identification
Validity
Intended Use

BP 5281 BEN (2010-10) UDV146.oi 3
Contents
Product Identification 2
Validity 2
Intended Use 2
1Safety 4
1.1 Symbols Used 4
1.2 Personnel Qualifications 4
1.3 General Safety Instructions 4
1.4 Liability and Warranty 4
2Technical Data 5
3Installation 6
3.1 Capillary for Precisely Routing the Gas Flow 7
3.2 Installation in the Vacuum System 7
3.3 Electrical Connection 8
4Operation 9
4.1 Manual Gas Flow Setting 9
4.2 Thermomechanical Regulation 10
4.3 Operation at Low Gas Flows 11
4.4 Compensation of Temperature Variations 11
4.5 Bakeout 11
5Deinstallation 12
5.1 Electrical Connection 12
5.2 Vacuum Connection 12
6Maintenance 14
6.1 Disassembling the Valve Mechanism 14
6.2 Cleaning the Valve Mechanism 17
6.3 Replacing the Cup Springs 17
6.4 Adjusting the Prestress of the Cup Springs 18
6.5 Assembling the Valve Mechanism 18
7Troubleshooting 21
7.1 Valve Does Not Regulate 21
7.2 Valve Is Not Tight 21
7.3 Adjusting the Tightness at the Valve Seat 22
7.4 Adjusting the Lever 24
7.5 Disassembling the Sealing Elements of the Valve Seat 27
7.6 Checking and Cleaning the Valve Body and the Sealing Elements of
the Valve Seat 29
7.7 Assembling the Sealing Elements of the Valve Seat 31
8Accessories 33
9Spare Parts 34
10 Returning the Product 35
11 Disposal 35
For cross-references within this document, the symbol (→XY) is used, for cross-
references to further documents the symbol (→[Z]).

4BP 5281 BEN (2010-10) UDV 146
1 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
•Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials (→5) and the process
media.
Consider possible reactions of the process media due to the heat generated by
the product.
•Use protective gloves for actuating the valve at operating temperatures >55 °C
(→9).
•Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document
(→14, 21).
•Before beginning to work, find out whether any vacuum components are con-
taminated. Adhere to the relevant regulations and take the necessary precau-
tions when handling contaminated parts.
Communicate the safety instructions to all other users.
Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the
end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.) on the product
•use the product with accessories, options, and add-ons not listed in the corre-
sponding product documentation.
The end-user assumes the responsibility in conjunction with the process media
used.
Failures due to contamination or wear and tear, as well as expendable parts (e.g.
seals), are not covered by the warranty.
1.1 Symbols Used
1.2 Personnel Qualifications
1.3 General Safety
Instructions
1.4 Liability and Warranty

BP 5281 BEN (2010-10) UDV146.oi 5
2 Technical Data
Actuation manual
thermomechanical 1)
Connections
Vacuum side
Inlet side
DN 40 CF-F
M5 (capillary)
DN 16 CF-R
Mounting orientation any
Tightness of closed valve <10-11 mbar l/s
Pressure range <10-10 mbar … 30 bar (absolute)
Operating pressure (vacuum side) <10-10 mbar … 1.5 bar
Smallest adjustable gas flow
Air
Pure gases
<10-9 mbar l/s
<10-10 mbar l/s
<10-9 mbar l/s 1)
Highest adjustable gas flow 2) 600 mbar l/s
Temperature
Operation
With standard cable
With heat-resistant
extension cable
Bakeout
Storage
≤80 °C
≤200 °C
≤350 °C 3)
5 … 45 °C
Material
Housing, diaphragm
Valve plate
Valve seat
stainless steel
sapphire
copper alloy
Thermomechanical regulation
Connection
Voltage
Current
Heating resistance
socket, 2 pins
(W.W. Fischer)
0 … 20 VDC
≤0.5 A
≈30 Ω
Weight 1.4 kg
1) E.g. with RVG 050 C Controller
2) At an inlet pressure of 1 bar
3) Cable removed
32.5
85.5
M5
50
DN 40 CF-F
ø46
98.2
DN 16 CF-R
Recommended flow direction
Power connection
Protective lid
Valve seat side
Dimensions [mm]

6BP 5281 BEN (2010-10) UDV 146
3 Installation
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
Heating jacket
(accessory)
Shut-off valve
Supplied by end-user
DN 16 CF-F
ø18
Supplied by
end-user
Gas supply
Flange with tube
Accessory
Accessory
Accessory
RVG 050 C
Controller
Capillary
Overview

BP 5281 BEN (2010-10) UDV146.oi 7
Do not turn the
knurled nut.
M5
M5
ø2×0.5
1000
•Remove the protective lids and install the valve to the vacuum system.
•Ensure good accessibility of the knurled nut.
Gasket (accessory)
Screws, M6×35 2)
(accessories)
Do not turn the
knurled nut
Screws, M4×20 1)
(accessories)
Protective lid
DN 16 CF-F
DN 40 CF-F
Gasket (accessory)
Protective lid
1) required torque 4 Nm, thread lubricated
2) required torque 10 Nm, thread lubricated
Recommended flow direction
3.1 Capillary for Precisely
Routing the Gas Flow
3.2 Installation in the
Vacuum System

8BP 5281 BEN (2010-10) UDV 146
0.5 0.7A0
set point
valve current
fuse power on
reset time
5
10
3 30 s
20
15
limit
5
0 20 V
15
10
proportiona l gain
10 100
10001
20 50
2005
2 500
Cable for controller
(accessory)
Shut-off valve
(supplied by end-user)
RVG 050 C
Controller
Socket
RVG 050 C Controller →BG 5282 BEN.
Further technical data →5.
3.3 Electrical Connection

BP 5281 BEN (2010-10) UDV146.oi 9
4 Operation
°C
DANGER
DANGER: hot surface
Touching the hot surface can cause burns.
Wear protective gloves.
°C
55 °C
200 °C
°C
nOpen the valve by making 3 counter clockwise turns of the knurled nut.
3 turns
Locked
oSet the desired gas flow with the knurled nut.
Locked
This setting serves as basic adjustment for the thermomechanical
regulation.
4.1 Manual Gas Flow
Setting

10 BP 5281 BEN (2010-10) UDV 146
The UDV 146 has a thermomechanical controller. The valve stem is equipped with
a bifilar heating coil and is heated according to the heater voltage applied. The
resulting deformation in extension is added to the set basic adjustment of the valve
(→9) and thus reduces the conductance value accordingly.
In conjunction with a controller, e.g. the RVG 050 C, the desired gas flow can be
set and stabilized.
WARNING
WARNING: wrong heating voltage
A wrong heating voltage can damage the heating coil of the valve.
Read the manual of the controller before putting it into operation.
Caution
Caution: damage of valve plate
If heating voltage is applied at gas flows <10-8 mbar l/s or when the
valve is closed, the valve plate (sapphire) can be damaged.
Do not apply heating voltage to the closed valve.
Manual opening
Gas flow Q [mbar l/s]
10
2
101
100
10-1
10-2
10-3
10-4
10-5
10-6
10-7
10-8
10-9
10-10
Qmanual
Qx
Qmin
Vmax
Vx
Typical relationship between gas flow and
heater voltage (inlet pressure 1 bar)
The gas flow Qmanual is the result of manual adjustment of the valve opening. This
value limits the range of regulation and thus the gas flow in the event of a power
failure. By preselecting a desired value on the controller and by applying the
corresponding heater voltage Vx, any desired gas flow Qxbetween Qmanual and Qmin
may be set and kept constant.
4.2 Thermomechanical
Regulation