Pfeiffer Vacuum PM Z01 290 User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
VENTING VALVE

Dear customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new Pfeiffer Vacuum accessory
should support you in your individual application with full performance and without
malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. With this
expertise, we have acquired a multitude of skills contributing to an efficient and secure
implementation of our product.
Knowing that our product must not interfere with your actual work, we are convinced that our
product offers you the solution that supports you in the effective and trouble-free execution of
your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
2/18

Table of contents
1 About this manual 6
1.1 Validity 6
1.1.1 Applicable documents 6
1.1.2 Variants 6
1.2 Target group 6
1.3 Conventions 6
1.3.1 Instructions in the text 6
1.3.2 Pictographs 6
1.3.3 Stickers on the product 7
1.3.4 Abbreviations 7
2 Safety 8
2.1 General safety information 8
2.2 Safety instructions 8
2.3 Safety precautions 8
2.4 Proper use 9
2.5 Foreseeable misuse 9
2.6 Personnel qualification 9
3 Product description 10
3.1 Function 10
3.2 Scope of delivery 10
4 Installation 11
5 Operation 13
6 Accessories 14
7 Technical data and dimensions 15
7.1 Technical data 15
7.2 Dimensions 16
Declaration of conformity 17
Table of contents
3/18

List of tables
Tbl. 1: Applicable documents 6
Tbl. 2: Stickers on the product 7
Tbl. 3: Abbreviations used in this document 7
Tbl. 4: Parameter settings in the electronic drive unit of the turbopump 13
Tbl. 5: Factory settings for delayed venting in turbopumps 13
Tbl. 6: Optional accessories 14
Tbl. 7: Technical data for venting valve 15
List of tables
4/18

List of figures
Fig. 1: Position of the stickers on the product 7
Fig. 2: Layout of venting valve 10
Fig. 3: Example: Connecting the venting valve to HiPace and TC 110 11
Fig. 4: Example: Connecting the venting valve to HiPace and TC 400 12
Fig. 5: Dimensions of venting valve with straight power supply plug 16
Fig. 6: Dimensions of venting valve M12 with angled power supply plug 16
List of figures
5/18

1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-
scribe the functions of the named product and provide the most important information for the safe use of
the device. The description is written in accordance with the valid directives. The information in this op-
erating instructions refers to the product's current development status. The document shall remain valid
provided that the customer does not make any changes to the product.
1.1.1 Applicable documents
Designation Document
Declaration of conformity (Component of these instructions)
Tbl. 1: Applicable documents
1.1.2 Variants
●Venting valve, screened | M8 | straight valve connector
●Venting valve, screened | M12 | straight valve connector
●Venting valve, screened | M12 | 90° angled valve connector
●Venting valve, unscreened | C industry (micro)
1.2 Target group
This operating instructions is intended for persons who
●install,
●operate,
The work described in this document may be carried out only by people who have completed suitable
technical training (experts), or who have received equivalent training from Pfeiffer Vacuum.
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
Pictographs used in the document indicate useful information.
About this manual
6/18

Note
Tip
1.3.3 Stickers on the product
This section describes all the stickers on the product along with their meaning.
Mod.: Venting valve
Mod.-Nr.: PM Z01 290 -T
D-35641 Asslar
Made in Germany
Input: 24 V DC
2020/05
Rating plate (example)
The rating plate is located on the valve housing
Tbl. 2: Stickers on the product
1
Fig. 1: Position of the stickers on the product
1.3.4 Abbreviations
DN Nominal diameter as size description
ISO Flange: Connector in accordance with ISO 1609 and ISO 2861
LED Illuminating diode
M8 Connector assembly with M8 thread
M12 Connector assembly with M12 thread
TC Turbopump electronic drive unit (turbo controller)
TCP External electronic drive unit for the turbopump (turbo controller) with current supply
TM Drive and magnetic bearing controller of the Turbopump
WAF width across flats
Tbl. 3: Abbreviations used in this document
About this manual
7/18

2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
All safety instructions in this document are based on the results of the risk assessment carried out in
accordance with Low Voltage Directive 2014/35/EU. Where applicable, all life cycle phases of the prod-
uct were taken into account.
Risks during operation
CAUTION
Risk of injuries due to contact with vacuum when venting
While venting the vacuum pump there is a risk of minor injuries due to the direct contact of body parts
with the vacuum, e.g. hematomas.
►Do not fully unscrew the venting screw out of the housing during venting.
►Keep a distance from automatic venting device, such as venting valves.
2.3 Safety precautions
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Safety
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Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the operator
changes the original product or installs additional equipment.
●Following the installation into a system, the operator is required to check and re-evalu-
ate the conformity of the overall system in the context of the relevant European Direc-
tives, before commissioning that system.
General safety precautions when handling the product
►Observe all applicable safety and accident prevention regulations.
►Check that all safety measures are observed at regular intervals.
►Never disconnect plug connections during operation.
►Keep lines and cables away from hot surfaces (> 70 °C).
►Observe the unit protection degree prior to installation or operation in other environments.
►Do not carry out your own conversions or modifications on the unit.
2.4 Proper use
►Use the venting valve only for controlled venting on the designated Pfeiffer Vacuum turbopumps.
2.5 Foreseeable misuse
Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as improper use, in particular:
●Connection to pumps or equipment which are not suitable for this purpose according to their oper-
ating instructions
●Connection to equipment with exposed live parts
2.6 Personnel qualification
The work described in this document may only be carried out by persons who have appropriate profes-
sional qualifications and the necessary experience or who have completed the necessary training as
provided by Pfeiffer Vacuum.
Training people
1. Train the technical personnel on the product.
2. Only let personnel to be trained work with and on the product when under the supervision of
trained personnel.
3. Only allow trained technical personnel to work with the product.
4. Before starting work, make sure that the commissioned personnel have read and understood
these operating instructions and all applicable documents, in particular the safety, maintenance
and repair information.
Safety
9/18

3 Product description
3.1 Function
The Pfeiffer Vacuum venting valve ensures automatic venting of a turbopump after shutting down or in
the event of a power failure.
4
5
6
7
8
9
10
2
13
Fig. 2: Layout of venting valve
1 LED control lamp 6 Gas inlet, internal thread G 1/8”
2 Valve connector 7 Solenoid valve
3 Control cable 8 Gas outlet, external thread G 1/8"
4 Power supply plug 9 Sealing ring
5 Screw plug 10 Protective cap
3.2 Scope of delivery
The scope of delivery includes the following parts:
●Venting valve
●1× sealing ring
●Operating instructions
Product description
10/18

4 Installation
NOTICE
Property damage caused by unfiltered media supply
Using unfiltered media for the gas inlet of a vacuum pump may result in particle contamination. There
is a risk of damage to, and even destruction of, vacuum components.
►Install suitable filters from the Pfeiffer Vacuum accessories range upstream of the gas inlet, be-
fore you use ambient air or other unclean media.
Connect accessory devices to the TC 110
●The use of Pfeiffer Vacuum accessories via the TC 110 electronic drive unit is only
possible using the corresponding connection cable and/or adapter on the X3 multi-
functional connection.
●Configure the required accessory output via RS-485 using Pfeiffer Vacuum display and
control units or PC.
Electronic drive unit TC 400 accessory connection
The electronic drive unit of the turbopump offers space for the connection of maximum 4
accessory devices. M12 connector sockets with the designation "accessory" are available
for this purpose.
●The accessory connections have been preconfigured ex factory.
●After connecting preconfigured accessory devices, these are immediately ready for op-
eration according to the factory settings.
●The use of other accessories for turbopumps is possible and requires settings in the
configuration of the electronic drive unit.
●The desired accessory output is configured via RS-485 using Pfeiffer Vacuum display
and control units or a PC.
●You can find detailed information in the “Electronic drive unit TC 400” operating instruc-
tions.
Prerequisites
●Turbopump switched off and vented
Required tools
●Hexagon wrench, SW 17 mm
●Calibrated torque wrench (tightening factor ≤ 1.6)
1
42
3
5
Fig. 3: Example: Connecting the venting valve to HiPace and TC 110
1 Venting valve 4 Venting screw
2 15-pin D Sub plug on multi-function connection "X3" 5 Sealing ring
3 Control cable power supply plug
Installation
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3
2
1
4
Fig. 4: Example: Connecting the venting valve to HiPace and TC 400
1 Sealing ring 3 Venting valve
2 Venting screw 4 Control cable power supply plug
Fitting the venting valve
1. Unscrew the venting screw with sealing ring out of the turbopump by hand.
2. Screw the venting valve with the outlet side into the venting connection of the turbopump.
–Tightening torque: 5 Nm
Connecting the venting valve to the electronic drive unit
The electrical connection of the venting valve depends on the turbopump electronic drive unit and its
connection variants.
►Configure the accessory output for the venting valve via the interfaces of your electronic drive unit.
–The specification in the configuration is "accessory B1". Alternatively:
–the "accessory A1"option is also possible.
►TC 110, TC 120, TCP 1200: Connect the control cable connecting plug to the electronic drive unit
using a suitable connection cable or adapter.
►TC 400, TC 1200, TM 700: Connect the control cable connecting plug directly to the correspond-
ing electronic drive unit accessory connection.
Establish the venting gas supply
In case you want to use dry ambient air as venting gas, the venting valve is ready for operation immedi-
ately.
If you wish to use a different inert gas (e.g. nitrogen N2) as the venting gas, follow the steps below.
1. Provide an external venting gas supply with a maximum inlet pressure of 1,500 hPa absolute.
2. Connect the venting gas supply to the inlet side (G 1/8") of the valve.
3. If required, use a connecting adapter from the accessory of the valve (not included in the scope of
delivery).
Installation
12/18

5 Operation
CAUTION
Risk of injuries due to contact with vacuum when venting
While venting the vacuum pump there is a risk of minor injuries due to the direct contact of body parts
with the vacuum, e.g. hematomas.
►Do not fully unscrew the venting screw out of the housing during venting.
►Keep a distance from automatic venting device, such as venting valves.
NOTICE
Damage to the turbopump due to non-permissibly fast pressure rise during venting
Non-permissibly high pressure rise rates place a significant load on the rotor and the magnetic bear-
ing of the turbopump. During venting very small volumes in the vacuum chamber or the turbopump,
there is a risk of uncontrollable pressure rises. This causes mechanical damage to the turbopump,
including potential failure.
►Observe the prescribed maximum pressure rise speed of 15 hPa/s.
►Avoid manual and uncontrolled venting of very low volumes.
►Where necessary, use a venting valve from the Pfeiffer Vacuum range of accessories.
Important settings and function-related variables are programmed ex factory as parameters of the vac-
uum pump electronic drive unit. Each parameter has a three-digit number and a description. Parameter-
driven operation and control is supported via Pfeiffer Vacuum displays and control units, or externally
via RS-485 using Pfeiffer Vacuum protocol.
Parameter Name Designation Setting
[P:036] CfgAccB1 Accessory connection
B1
1 = Venting valve, normally closed
[P:035] CfgAccA1 Accessory connection
A1
1 = Venting valve, normally closed
(As an alternative to accessory connection
B1)
[P:012] EnableVent Enable vents 1 = On
[P:030] VentMode Vent mode 0 = Delayed venting
1 = Do not vent
2 = Direct venting
Tbl. 4: Parameter settings in the electronic drive unit of the turbopump
Venting speed [P:720] Venting duration [P:721] Venting duration in the event of a power
failure
50 % of rated speed 3600 s 3600 s
Tbl. 5: Factory settings for delayed venting in turbopumps
Operation
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6 Accessories
Description Order number
Screw-on flange, DN 16 ISO-KF, G 1/8" PM 016 780 -T
Push-in fitting for 6 mm tube, G 1/8" PM 016 781 -T
Push-in fitting for 8 mm tube, G 1/8" PM 016 782 -T
Hose nozzle for 9 mm hose, G 1/8" PM 016 783 -T
TTV 001, Drier for Venting Turbopumps PM Z00 121
Tbl. 6: Optional accessories
Accessories
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7 Technical data and dimensions
7.1 Technical data
Classification Venting Valve,
Shielded
Venting Valve,
Shielded
Venting Valve,
Shielded
Venting Valve
Part number PM Z01 290 PM Z01 291 PM Z01 292 PM Z01 293
Connection flange
(in)
G 1/8" G 1/8" G 1/8" G 1/8"
Connection flange
(out)
G 1/8" G 1/8" G 1/8" G 1/8"
Weight 100 g 100 g 120 g 67 g
Inlet pressure max. 1500 hPa (abso-
lute)
1500 hPa (abso-
lute)
1500 hPa (abso-
lute)
1500 hPa (abso-
lute)
Integral leakage rate < 1 · 10-9 Pa m³/s < 1 · 10-9 Pa m³/s < 1 · 10-9 Pa m³/s < 1 · 10-9 Pa m³/s
Gas flow at atmos-
pheric pressure min.
130 hPa·l/s 130 hPa·l/s 130 hPa·l/s 130 hPa·l/s
Gas flow at atmos-
pheric pressure
max.
130 hPa·l/s 130 hPa·l/s 130 hPa·l/s 130 hPa·l/s
Electronic drive unit TC 110, TC 120,
TCP 350
TC 400,
TC 1200,
TCP 350,
TM 700
TC 400,
TC 1200,
TCP 350, TM 700
–
Electrical connection M8 M12 M12 C-Industry (Mi-
cro)
Mechanical connec-
tion
G 1/8" G 1/8" G 1/8" G 1/8"
Control voltage 24 V DC 24 V DC 24 V DC 24 V DC
Valve connector Straight 0° Straight 0° Twisted 270° –
Tbl. 7: Technical data for venting valve
Technical data and dimensions
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7.2 Dimensions
39.7
50.7
24.5
41
13.9
55.7
62.7
16.4
SW17
SW13
22.5
25.7
M12
Fig. 5: Dimensions of venting valve with straight power supply plug
62.7
55.7
53.2
42.2 16.4
G1/8"
G1/8"
SW13
SW17
M12
31.7
Fig. 6: Dimensions of venting valve M12 with angled power supply plug
Dimensions in mm
Technical data and dimensions
16/18

Declaration of conformity
Declaration for product(s) of the type:
Venting valve
Turbopumps
We hereby declare that the listed product satisfies all relevant provisions of the following
European Directives.
Electromagnetic compatibility 2014/30/EU
Low voltage 2014/35/EC
Restriction of the use of certain hazardous substances 2011/65/EU
Restriction of the use of certain hazardous substances, delegated directive
2015/863/EU
Harmonized standards and applied national standards and specifications:
DIN EN 61000-3-2 : 2014
DIN EN 61000-3-3 : 2013
DIN EN 61326-1 : 2013
DIN VDE 0580 : 2011
Signature:
Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar
Germany
(Daniel Sälzer)
Managing Director
Aßlar, 2020-04-28

*PT0228* I - Date 2006 - P/N:PT0228BEN