Pfeiffer Vacuum TPG 300 User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
PLUG-IN BOARDS
for total pressure measuring and control units TPG 300/TPG 500

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new total pressure measuring and
control unit should support you in your individual application with full performance and without
malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. From this
extensive, practical experience we have gained a large volume of information that can
contribute to efficient deployment and to your personal safety.
In the knowledge that our product must avoid consuming work output, we trust that our
product can offer you a solution that supports you in the effective and trouble-free
implementation of your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
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Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Applicable documents 7
1.1.2 Variants 7
1.2 Target group 8
1.3 Conventions 8
1.3.1 Instructions in the text 8
1.3.2 Pictographs 8
1.3.3 Abbreviations 8
1.4 Trademark proof 9
2 Safety 10
2.1 General safety information 10
2.2 Safety instructions 10
2.3 Safety precautions 11
2.4 Proper use 11
2.5 Foreseeable improper use 11
2.6 Responsibilities and warranty 12
2.7 Owner requirements 12
2.8 Personnel qualification 12
2.8.1 Ensuring personnel qualification 12
2.8.2 Personnel qualification for maintenance and repair 13
2.8.3 Advanced training with Pfeiffer Vacuum 13
2.9 Operator requirements 13
3 Product description 14
3.1 Function 14
3.1.1 Pirani measuring system 14
3.1.2 Cold cathode measuring system 14
3.2 Identifying the product 14
3.3 Structure of the plug-in boards 14
3.4 Interfaces 15
3.4.1 "OUTPUT" connection on PI 300 and CP 300 15
3.4.2 "CONTROL" connection on PE 300DC9 15
3.4.3 "RELAY" connection on IF 300A/C/P 16
3.4.4 "RELAY" connection on IF 300B 16
3.4.5 "RS-232" connection on IF 300A 17
3.4.6 "RS-232" connection on IF 300B 17
3.4.7 "RS-422" connection on IF 300C 18
3.4.8 "Profibus" connection on IF 300P 18
3.5 Scope of delivery 19
4 Transport and storage 20
4.1 Transporting the product 20
4.2 Storing the product 20
5 Installation 21
5.1 Installing/removing plug-in boards 21
5.2 Connecting gauges 21
5.2.1 Connecting Pirani gauges 21
5.2.2 Connecting the cold cathode gauge 22
5.3 Connecting interfaces and connections 23
5.3.1 Connecting the analog signal to the measurement boards 23
5.3.2 Connecting relays to the interface boards 23
5.3.3 Connecting the "RS-232-C" interface of the IF 300A 24
5.3.4 Connecting the "RS-232-C" interface of the IF 300B 24
Table of contents
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5.3.5 Connecting the "RS-422" interface of the IF 300C 24
5.3.6 Connecting the "Profibus-DP" interface on the IF 300P 25
6 Calibrating the Pirani measuring circuit 26
7 Malfunctions 27
8 Shipping 29
9 Recycling and disposal 30
9.1 General disposal information 30
9.2 Disposing of plug-in boards 30
10 Service solutions by Pfeiffer Vacuum 31
11 Accessories 33
11.1 Accessory information 33
11.2 Ordering accessories 33
12 Technical data and dimensions 37
12.1 Technical data 37
12.2 Dimensions 41
13 Appendix 43
13.1 Relation: measuring signal and pressure 43
13.2 Gas type dependence 44
13.3 Units of pressure 46
13.4 Gas throughputs 46
Table of contents
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List of tables
Tbl. 1: Applicable documents 7
Tbl. 2: Variants 7
Tbl. 3: Abbreviations used 9
Tbl. 4: Switch functions on IF 300A/C/P 16
Tbl. 5: Switching functions on IF 300B 17
Tbl. 6: Disturbances during installation 27
Tbl. 7: Interference during operation and calibration 27
Tbl. 8: Disturbances as a result of defects 27
Tbl. 9: Disturbances with the RS-232-C interface 28
Tbl. 10: Disturbances with the RS-422 interface 28
Tbl. 11: Disturbances with the Profibus-DP interface 28
Tbl. 12: Pirani gauges 33
Tbl. 13: Cold cathode gauges 34
Tbl. 14: Measuring cable for TPR 010 34
Tbl. 15: Measuring cable for TPR 017 and TPR 018 35
Tbl. 16: Extension cable for TPR 010, TPR 017 and TPR 018 35
Tbl. 17: Measuring cable for IKR 050 and IKR 060 35
Tbl. 18: Measuring cable for IKR 070 36
Tbl. 19: Plugs and interface cable 36
Tbl. 20: Dummy plates 36
Tbl. 21: Technical data PI 300D / PI 300DN 37
Tbl. 22: Technical data PE 300DC9 37
Tbl. 23: Technical data CP 300C9/C10/T11/T11L 39
Tbl. 24: Technical data IF 300A 39
Tbl. 25: Technical data IF 300B 40
Tbl. 26: Technical data IF 300C 40
Tbl. 27: Technical data IF 300P 41
Tbl. 28: Units of pressure and their conversion 46
Tbl. 29: Gas throughputs and their conversion 46
List of tables
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List of figures
Fig. 1: "OUTPUT" connection with 2 sockets 15
Fig. 2: "CONTROL" connection on PE 300DC9 15
Fig. 3: Switch and logic on the "CONTROL" connection 15
Fig. 4: "RELAY" connection on IF 300A/C/P 16
Fig. 5: "RELAY" connection on IF 300B 16
Fig. 6: "RS-232" connection on IF 300A 17
Fig. 7: "RS-232" connection on IF 300B 17
Fig. 8: "RS-422" connection on IF 300C 18
Fig. 9: "Profibus" connection on IF 300P 19
Fig. 10: Coax cable and triax cable 22
Fig. 11: Locking the triax plug 23
Fig. 12: Folding ferrite for IF 300B 23
Fig. 13: Connecting the interface cable to IF 300B 24
Fig. 14: ATM and HIGH VAC trimming potentiometers 26
Fig. 15: Pirani measuring cable connection diagram 34
Fig. 16: Pirani extension cable connection diagram 34
Fig. 17: Dimensions of measurement boards 41
Fig. 18: Dimensions of interface and relay boards 42
Fig. 19: Relation: Measuring signal and pressure with TPR gauges 43
Fig. 20: Relation: Measuring signal and pressure with IKR gauges 44
Fig. 21: Displayed pressure for TPR gauges 45
Fig. 22: Displayed pressure for IKR gauges 45
List of figures
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1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This document describes the function of the products listed in the following and provides the most im-
portant information for safe use. The description is written in accordance with the valid directives. The
information in this document refers to the current development status of the products. The document
retains its validity assuming that the customer does not make any changes to the product.
1.1.1 Applicable documents
Designation Document
Operating instructions "Total pressure measuring and control unit"
TPG 300
BG 5970
Operating instructions "Total pressure measuring and control unit"
TPG 500
BG 6008
Communication protocol "Total pressure measuring and control unit"
TPG 300
BG 5973
Communication protocol "Total pressure measuring and control unit"
TPG 500
BG 6009
“Gauges” operating instructions
ModulLine gauges
(depending on the gauge
used)
Tbl. 1: Applicable documents
You can find these documents in the Pfeiffer Vacuum Download Center.
1.1.2 Variants
This document applies to the products with the following part numbers:
Part number Type Designation
PT 546 920-T Measurement board (Pirani) PI 300D
PT 549 214-T PI 300DN
PT 441 375-T Measurement board (cold cathode) PE 300DC9
PT 441 000-T Measurement board (Pirani/cold cathode) CP 300C9
PT 441 114-T CP 300C10
PT 441 080-T CP 300T11
PT 441 120-T CP 300T11L
PT 441 130-T Interface and relay board (RS-232-C) IF 300A
PT 441 250-T IF 300B
PT 441 390-T Interface and relay board (RS-422) IF 300C
PT 441 395-T Interface and relay board (Profibus) IF 300P
Tbl. 2: Variants
You can find the part number on the rating plate of the product.
Pfeiffer Vacuum reserves the right to make technical changes without prior notification.
The figures in this document are not to scale (dimensions in mm).
About this manual
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1.2 Target group
These operating instructions are aimed at all persons performing the following activities on the product:
●Transportation
●Setup (Installation)
●Usage and operation
●Decommissioning
●Maintenance and cleaning
●Storage or disposal
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
Pictographs used in the document indicate useful information.
Note
Tip
1.3.3 Abbreviations
Abbreviation Explanation
ASCII American Standard Code for Information Interchange
ATM Atmosphere
CNTR-P Repeater direction control signal (Profibus)
ESD Electrostatic Discharge
IF Interface
GND Ground
HV High vacuum
MHV Miniature High Voltage
(coax high voltage connector in miniature design)
NN Mean sea level
PE Penning
Profibus DP Profibus distributed periphery
About this manual
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Abbreviation Explanation
RS-232 Recommended Standard 232
(Standard for a serial interface often available on computers)
RS-422 Recommended Standard 422
(Interface standard for a wired differential serial data transfer)
RxD Received eXchange Data (incoming data line)
SHV Safe High Voltage (connector for coax cable)
TPG Total Pressure Gauge (total pressure measuring and control unit)
TxD Transmitted eXchange Data (outgoing data line)
Tbl. 3: Abbreviations used
1.4 Trademark proof
●Profibus® is a registered trading name of Profibus Nutzerorganisation e.V.
About this manual
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2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
Safety instructions according to product’s life stages
All safety instructions in this document are based on the results of a risk assessment.
Pfeiffer Vacuum has taken into account all the relevant life stages of the product.
Risks during installation
DANGER
Danger to life due to dangerous contact voltage
Voltages above 30 V (AC) or 60 V (DC) are considered dangerous in accordance with EN 61010. If
you come into contact with dangerous contact voltage, this can result in injury through electric shocks
or even death.
►Only connect the gauge to professionally grounded devices.
►Take additional safety measures on the system-side if processes in the vacuum system (e.g.
flashovers) can result in dangerous voltages at the gauge connections.
►Secure the line to the gauge.
Safety
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