Pfeiffer Vacuum UDV 046 User manual

BP 5279 BEN (2010-10)
A PASSION FOR PERFECTION
UDV 046
All-Metal Dosing Valve, manually actuated
Operating Instructions

2BP 5279 BEN (2010-10) UDV 046
In all communications with Pfeiffer Vacuum, please specify the information on the
product nameplate. For convenient reference copy that information into the space
provided below.
Typ:
No:
F-No:
Pfeiffer Vacuum, D-35614 Asslar
This document applies to products with part number PF I52 035.
The part number (No) can be taken from the nameplate.
We reserve the right to make technical change without prior notice.
All dimensions in mm.
The UDV 046 All-Metal Dosing Valve is used for admitting a precise and
reproducible gas flow into a vacuum system and is suited, for example, for
•gas and surface analysis
•mass spectrometry
•nuclear physics, accelerators
•cathode sputtering
•vacuum and laser technology
•handling of very pure gases
Product Identification
Validity
Intended Use

BP 5279 BEN (2010-10) UDV046.oi 3
Contents
Product Identification 2
Validity 2
Intended Use 2
1Safety 4
1.1 Symbols Used 4
1.2 Personnel Qualifications 4
1.3 General Safety Instructions 4
1.4 Liability and Warranty 4
2Technical Data 5
3Installation 6
3.1 Capillary for Precisely Routing the Gas Flow 6
3.2 Installation in the Vacuum System 7
4Operation 8
4.1 Setting the Gas Flow 8
4.2 Operation at Low Gas Flows 9
4.3 Compensation of Temperature Variations 9
4.4 Bakeout 9
5Deinstallation 10
5.1 Vacuum Connection 10
6Maintenance 11
6.1 Disassembling the Valve Mechanism 11
6.2 Cleaning the Valve Mechanism 14
6.3 Replacing the Cup Springs 14
6.4 Adjusting the Prestress of the Cup Springs 15
6.5 Assembling the Valve Mechanism 15
7Troubleshooting 18
7.1 Valve Is Not Tight 18
7.2 Adjusting the Tightness at the Valve Seat 18
7.3 Adjusting the Lever 21
7.4 Disassembling the Sealing Elements of the Valve Seat 24
7.5 Checking and Cleaning the Valve Body and the Sealing Elements of
the Valve Seat 26
7.6 Assembling the Sealing Elements of the Valve Seat 28
8Accessories 30
9Spare Parts 31
10 Returning the Product 32
11 Disposal 32
For cross-references within this document, the symbol (→XY) is used, for cross-
references to further documents the symbol (→[Z]).

4BP 5279 BEN (2010-10) UDV 046
1 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
•Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials (→5) and the process
media.
•Use protective gloves for actuating the valve at operating temperatures <55 °C
(→8).
•Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document
(→11, 18).
•Before beginning to work, find out whether any vacuum components are con-
taminated. Adhere to the relevant regulations and take the necessary precau-
tions when handling contaminated parts.
Communicate the safety instructions to all other users.
Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the
end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.) on the product
•use the product with accessories, options, and add-ons not listed in the corre-
sponding product documentation.
The end-user assumes the responsibility in conjunction with the process media
used.
Failures due to contamination or wear and tear, as well as expendable parts (e.g.
seals), are not covered by the warranty.
1.1 Symbols Used
1.2 Personnel Qualifications
1.3 General Safety
Instructions
1.4 Liability and Warranty

BP 5279 BEN (2010-10) UDV046.oi 5
2 Technical Data
Actuation manual
Connections
Vacuum side
Inlet side
DN 40 CF-F
M5 (capillary)
DN 16 CF-R
Mounting orientation any
Tightness of closed valve <10-11 mbar
Pressure range <10-10 mbar … 30 bar (absolute)
Operating pressure (vacuum side) <10-10 mbar … 1.5 bar
Smallest adjustable gas flow
Air
Pure gases
<10-9 mbar l/s
<10-10 mbar l/s
Highest adjustable gas flow 1) 600 mbar l/s
Conductance of open valve 1) 0.7 l/s, molecular flow
Temperature
Operation
Bakeout
Storage
≤200 °C
≤350 °C
5 … 45 °C
Materials
Housing, diaphragm
Valve plate
Valve seat
stainless steel
sapphire
copper alloy
Weight 1.4 kg
1) At an inlet pressure of 1 bar
32.5
85.5
M5
50
DN 40 CF-F
ø46
98.2
DN 16 CF-R
Recommended flow direction
Protective lid
Valve seat side
Dimensions [mm]

6BP 5279 BEN (2010-10) UDV 046
3 Installation
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
Heating jacket
(accessory)
DN 16 CF-F
ø18
Supplied
by end-user
Gas supply
Accessory
Accessory
Flange with tube
Capillary
Do not turn
the knurled nut
M5
M5
ø2×0.5
1000
Overview
3.1 Capillary for Precisely
Routing the Gas Flow

BP 5279 BEN (2010-10) UDV046.oi 7
•Remove the protective lids and install the valve into the vacuum system.
•Ensure good accessibility of the knurled nut.
Do not turn the
knurled nut
Gasket (accessory)
Screws, M4×20 1)
(accessories)
Gasket (accessory)
Screws, M6×35 2)
(accessories)
Protective lid
DN 16 CF-F
DN 40 CF-F
Protective lid
1) required torque 4 Nm, thread lubricated
2) required torque 10 Nm, thread lubricated
Recommended flow direction
3.2 Installation in the
Vacuum System

8BP 5279 BEN (2010-10) UDV 046
4 Operation
°C
DANGER
DANGER: hot surface
Touching the hot surface can cause burns.
Wear protective gloves.
°C
55 °C
200 °C
°C
nOpen the valve by 3 counter clockwise turns of the knurled nut .
3 turns
Locked
oSet the desired gas flow with the knurled nut.
Locked
4.1 Setting the Gas Flow

BP 5279 BEN (2010-10) UDV046.oi 9
When operating the valve at gas flows ≤10-9 mbar l/s, the orifice can be contami-
nated by condensable vapors. Adsorbed vapors can be removed by baking the
valve in open position (at approx. 200 °C for 30 minutes). Such adsorption can be
prevented by heating the valve during operation, for example with a heating jacket
(→30).
At gas flows <3×10-10 mbar l/s, in addition to heating, make sure the admitted gas
is free of condensable vapors. If necessary, the gas can be admitted via a drying
device (e.g. liquid nitrogen cold trap).
Rapid changes in the environment such as draughts of air and sun irradiation can
influence the gas flow too strongly for certain experiments. To avoid this, operate
the valve at a controlled temperature ≤200 °C using, for example, a heating jacket
(→30) in conjunction with a thermocouple.
Oxidation occurs (interfering on sealing surfaces) when the valve is baked at
atmospheric pressure at temperatures above 300 ºC. This can be avoided, for
example, by using a protective gas atmosphere or an auxiliary vacuum.
Caution
Consider the information on lubricating the valve (→11).
4.2 Operation at Low Gas
Flows
4.3 Compensation of Tem-
perature Variations
4.4 Bakeout

10 BP 5279 BEN (2010-10) UDV 046
5 Deinstallation
The vacuum system must be vented, the gas inlet closed and the valve
cooled down to <55 °C.
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
Detach the flanges and put the protective lids in place.
Gasket
Gasket
Protective lid Protective lid
Use new gaskets when reinstalling the valve (→30).
5.1 Vacuum Connection