Pfeiffer Vacuum PM Z01 310 User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
SEALING GAS VALVE

Dear customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new Pfeiffer Vacuum accessory
should support you in your individual application with full performance and without
malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. With this
expertise, we have acquired a multitude of skills contributing to an efficient and secure
implementation of our product.
Knowing that our product must not interfere with your actual work, we are convinced that our
product offers you the solution that supports you in the effective and trouble-free execution of
your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
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Table of contents
1 About this manual 4
1.1 Validity 4
1.2 Variants 4
1.3 Target group 4
1.4 Conventions 4
1.4.1 Instructions in the text 4
1.4.2 Abbreviations 4
2 Safety 6
2.1 General safety information 6
2.2 Proper use 6
2.3 Foreseeable misuse 6
3 Product description 7
3.1 Shipment 7
3.2 Functional description 7
4 Installation 8
5 Accessories 11
6 Technical data and dimensions 12
6.1 Technical data 12
6.2 Dimensions 13
Declaration of conformity 14
Table of contents
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1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-
scribe the functions of the named product and provide the most important information for the safe use of
the device. The description is written in accordance with the valid directives. The information in this op-
erating instructions refers to the product's current development status. The document shall remain valid
provided that the customer does not make any changes to the product.
1.2 Variants
Part number Selection field
PM Z01 310 Sealing gas valve, shielded for HiPace 30/60/80 with TC 110
PM Z01 311 Sealing gas valve, shielded for HiPace 300 with TC 110/120
PM Z01 312 Sealing gas valve, shielded for HiPace 300 with TC 400 and TM 700, TCP 350
PM Z01 313 Sealing gas valve, shielded for HiPace 400/700/800 P Version with TC 400 and Hi-
Pace 1200–2300 with TC 1200
PM Z01 314 Sealing gas valve, shielded for HiPace 1200–2300 with TC 1200
PM Z01 322 Sealing gas valve, shielded for HiPace 1200–2800 with TC 1200
Tbl. 1: Sealing gas valve versions
1.3 Target group
This operating instructions is intended for persons who
●install,
●operate.
The work described in this document may be carried out only by people who have completed suitable
technical training (experts), or who have received equivalent training from Pfeiffer Vacuum.
1.4 Conventions
1.4.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.4.2 Abbreviations
DN Nominal diameter as size description
ISO Flange: Connector in accordance with ISO 1609 and ISO 2861
About this manual
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LED Illuminating diode
M8 Connector assembly with M8 thread
M12 Connector assembly with M12 thread
TC Turbopump electronic drive unit (turbo controller)
TCP External electronic drive unit for the turbopump (turbo controller) with current supply
TM Drive and magnetic bearing controller of the Turbopump
WAF width across flats
Tbl. 2: Abbreviations used in this document
About this manual
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2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Proper use
►Use the sealing gas valve only for controllable inlet of inert gases to Pfeiffer Vacuum turbopumps
designated for this purpose.
►Use the sealing gas valve to protect against penetration by corrosive media.
2.3 Foreseeable misuse
Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as improper use, in particular:
●Connection to pumps or equipment which are not suitable for this purpose according to their oper-
ating instructions
●Connection to equipment with exposed live parts
Safety
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3 Product description
3.1 Shipment
The shipment includes the following parts:
●Sealing gas valve
●1 Sealing ring
●Filter
●Operating instructions
3.2 Functional description
The use of sealing gas serves to protect the vacuum pump in dusty processes or with excessive gas
throughputs. Sealing gas prevents the ingress of damaging substances into the motor and bearing area.
The Pfeiffer Vacuum sealing gas valve supplies a vacuum pump with a suitable, constant flow rate with
electric control.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
Fig. 1: Overview of Pfeiffer Vacuum sealing gas valve
1 Connection plug M8 8 Valve seat
2 LED control lamp 9 Solenoid valve
3 Control cable 10 Filter housing with capillaries
4 Connection plug M12 11 Gas outlet
5 Filter (included in shipment) 12 Protective plug
6 Screw plug 13 Sealing ring
7 Gas inlet side adapter 14 Power supply plug
Product description
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4 Installation
NOTICE
Property damage caused by unfiltered media supply
Using unfiltered media for the gas inlet of a vacuum pump may result in particle contamination. There
is a risk of damage to, and even destruction of, vacuum components.
►Install suitable filters from the Pfeiffer Vacuum accessories range upstream of the gas inlet, be-
fore you use ambient air or other unclean media.
Usage recommendation
●Pfeiffer Vacuum recommends the use of sealing gas at 50 % of the maximum vacuum
pump gas throughput or higher.
●The permissible inlet pressure for sealing gas is 1,500 hPa absolute.
1 2 3 4 5
67
8
9
10
11
Fig. 2: Example: Connecting M8 sealing gas valve to TC 110, TC 120 electronic drive units
1 Locking screw 7 Multifunction connection
2 Sealing ring 8 Electronic drive unit
3 Sealing gas connection 9 Protective plug
4 Turbopump 10 Sealing gas valve
5 Connection cable with accessory connection 11 Screw plug
6 Control line
Installation
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1 2 3 4 5 6
78910
Fig. 3: Example: Connecting M12 sealing gas valve to TCP 350, TC 400 and TM 700 electron-
ic drive units
1 Accessory connection 6 Screw plug
2 Turbopump 7 Locking screw
3 Control line 8 Sealing ring
4 Protective plug 9 Sealing gas connection
5 Sealing gas valve 10 Electronic drive unit
1 2 3 4
56
7
89
10
Fig. 4: Example: Connecting M12 sealing gas valve to TC 1200, TCP 1200 electronic drive
units
1 Turbopump 6 Sealing gas valve
2 Sealing gas connection 7 Protective plug
3 Sealing ring 8 Control line
4 Locking screw 9 Accessory connection
5 Screw plug 10 Electronic drive unit
Required tools
●Hexagon wrench, SW 17 mm
●Calibrated torque wrench (tightening factor ≤ 1.6)
Install sealing gas valve
1. Unscrew the screw plug with sealing ring out of the sealing gas connection of the turbopump.
2. Screw the sealing gas valve, with sealing ring on the outlet side, into the sealing gas connection of
the turbopump.
–Tightening torque: 5 Nm.
Installation
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Connecting the sealing gas valve
The electrical connection of the sealing gas valve is dependent on the turbopump electronic drive unit,
and its connection variants.
►Configure the accessory output for the sealing gas via the interfaces of your electronic drive unit.
►TC 110, TC 120, TCP 350, TCP 1200: Connect the control cable connecting plug to the electronic
drive unit using a suitable connection cable or adapter.
►TC 400, TM 700, TC 1200: Connect the control cable connecting plug directly to the correspond-
ing electronic drive unit accessory connection.
Establishing the sealing gas supply
1. Screw the filter (included in shipment) onto the valve inlet side by hand, if you wish to use dry am-
bient air as sealing gas.
2. Alternatively: Connect an inert gas supply (e.g., nitrogen) to the inlet side.
3. If required, use a connection adapter from the Pfeiffer Vacuum accessories range (not included in
shipment).
Installation
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5 Accessories
Description Order number
Flange with Pipe Thread, DN 16 ISO-KF, G 1/8" PM 016 780 -T
Centering ring with sintered metal filter, pore size 20 μm, FKM/stainless steel,
DN 16 ISO-KF
PF 117 216 -T
Tbl. 3: Optional accessories
Accessories
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6 Technical data and dimensions
6.1 Technical data
Gas flow
The flow rate (gas flow) increases according to inlet pressure.
mbar l/s Pa m3/s sccm Torr l/s atm cm3/s
mbar l/s 1 0.1 59.2 0.75 0.987
Pa m3/s 10 1 592 7.5 9.87
sccm 1.69 · 10-2 1.69 · 10-3 11.27 · 10-2 1.67 · 10-2
Torr l/s 1.33 0.133 78.9 1 1.32
atm cm3/s 1.01 0.101 59.8 0.76 1
Tbl. 4: Conversion table: Units for gas throughput
Selection
field
Sealing
gas valve,
shielded
for HiPace
30/60/80
with TC
110
Sealing
gas valve,
shielded
for HiPace
300 with
TC
110/120
Sealing
gas valve,
shielded
for HiPace
300 with
TC 400 and
TM 700,
TCP 350
Sealing gas
valve, shield-
ed for HiPace
400/700/800 P
Version with
TC 400 and Hi-
Pace 1200–
2300 with TC
1200
Sealing
gas valve,
shielded
for HiPace
1200–2300
with TC
1200
Sealing
gas valve,
shielded
for HiPace
1200–2800
with TC
1200
Part num-
ber
PM Z01 310 PM Z01
311
PM Z01
312
PM Z01 313 PM Z01
314
PM Z01
322
Gas flow
at atmos-
pheric
pressure
7.5 –
9.5 sccm (0
°C)
12.5 –
15 sccm (0
°C)
12.5 –
15 sccm (0
°C)
17.5 – 20 sccm
(0 °C)
22 –
27 sccm (0
°C)
45 –
60 sccm (0
°C)
Inlet pres-
sure max.
1500 hPa
(absolute)
1500 hPa
(absolute)
1500 hPa
(absolute)
1500 hPa (ab-
solute)
1500 hPa
(absolute)
1500 hPa
(absolute)
Mechani-
cal con-
nection
G 1/8" G 1/8" G 1/8" G 1/8" G 1/8" G 1/8"
Connec-
tion flange
(out)
G 1/8" G 1/8" G 1/8" G 1/8" G 1/8" G 1/8"
Electrical
connec-
tion
M8 M8 M12 M12 M12 M12
Control
voltage
24 V DC 24 V DC 24 V DC 24 V DC 24 V DC 24 V DC
Power
consump-
tion
2 W 2 W 2 W 2 W 2 W 2 W
Weight 161 g 161 g 170 g 170 g 170 g 185 g
Tbl. 5: Technical data for Pfeiffer Vacuum sealing gas valves
Technical data and dimensions
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6.2 Dimensions
2
M8
G1/8"
G1/8"
SW13
SW17
7
89.7
96.7
39.7
50.7
65.5
Fig. 5: Sealing gas valve with M8 connecting cable
Fig. 6: Sealing gas valve with M12 connecting cable
Dimensions in mm
Technical data and dimensions
13/16

Declaration of conformity
Declaration for product(s) of the type:
Sealing gas valve
HiPace turbopumps
We hereby declare that the listed product satisfies all relevant provisions of the following
European Directives.
Electromagnetic compatibility 2014/30/EU
Restriction of the use of certain hazardous substances 2011/65/EU
Restriction of the use of certain hazardous substances, delegated directive
2015/863/EU
Harmonized standards and applied national standards and specifications:
DIN EN 61000-3-2 : 2014
DIN EN 61000-3-3 : 2013
DIN EN 61326-1 : 2013
DIN VDE 0580 : 2011
Signature:
Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar
Germany
(Daniel Sälzer)
Managing Director
Asslar, 2021-05-05

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*PT0229* ed. G - Date 2105 - P/N:PT0229BEN