Pfeiffer Vacuum RME 005 A User manual

BP 5059 BEN (2011-10)
A PASSION FOR PERFECTION
RME 005 A
Control Valve
Operating Instructions

2BP 5059 BEN (2011-10)
Product Identification
In all communications with Pfeiffer Vacuum please specify the
information on the product nameplate. For convenient reference
copy that information into the space provided below:
Pfeiffer Vacuum, D-35614 Asslar
Typ:
Range:
No:
F-No:
V W
Validity
This document applies to products with part numbers
PF I13 936 (10 sccm)
PF I13 935 (50 sccm)
PF I13 934 (100 sccm)
PF I13 933 (500 sccm)
PF I13 932 (1000 sccm)
PF I13 931 (5000 sccm)
The part number (No) can be taken from the product nameplate.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended Use
The RME 005 A Control Valve is used in conjunction with the
RVC 300 Controller or another control device for controlling gas
flows and thus maintaining a desired pressure in a vacuum
system.
It must not be used for controlling liquid gases.

BP 5059 BEN (2011-10) 3
Functional Principle
The RME 005 A Control Valve opens and closes as a function of
the control voltage.
It will close or remain closed in the event of a power loss.
Example of a control loop:
RME 005 A
Control Valve
Controller
(e.g. RVC 300)
Vacuum pump
Pressure
sensor
Gas inlet Vacuum
system
Scope of Delivery
1× Control valve
1× Operating Instructions German
1× Operating Instructions English
1× Safety Guide

4BP 5059 BEN (2011-10)
Contents
Product Identification 2
Validity 2
Intended Use 2
Functional Principle 3
Scope of Delivery 3
1Safety 5
1.1 Symbols Used 5
1.2 Personnel Qualifications 5
1.3 General Safety Instructions 6
1.4 Liability and Warranty 6
2Technical Data 7
3Installation 10
3.1 Vacuum Connection 10
3.1.1 Flange Connections 11
3.1.2 Tube Connections 13
3.2 Power Connection 17
4Operation 17
5Deinstallation 18
6Maintenance / Repair 22
6.1 Replacing the Filter 22
7Accessories 25
8Returning the Product 26
9Disposal 27
For cross-references within this document, the symbol (→XY)
is used.

BP 5059 BEN (2011-10) 5
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and
environmental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the
necessary experience or who have been instructed by the end-
user of the product.

6BP 5059 BEN (2011-10)
1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions between the materials and the
process media.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
Pfeiffer Vacuum assumes no liability and the warranty becomes
null and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the
corresponding product documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Failures due to contamination or wear and tear, as well as ex-
pendable parts (e.g. seals, filter), are not covered by the
warranty.

BP 5059 BEN (2011-10) 7
2 Technical Data
Vacuum connection M14×1
Adapters (accessories)
flange fitting
tube fitting
DN 10 ISO-KF
OD ¼", OD 6 mm
Installation angle any, preferably perpendicular
Pressure range 1×10-8 … 2 bar (absolute)
Tightness 1×10-9 mbar l/s
Gas flow 1)
PF I13 936
PF I13 935
PF I13 934
PF I13 933
PF I13 932
PF I13 931
10 sccm F.S.
50 sccm F.S.
100 sccm F.S.
500 sccm F.S.
1000 sccm F.S.
5000 sccm F.S.
Response time <30 ms
Supply voltage
Control range
Power
Duty cycle
0 … 24 VDC
20 … 70 mA, 1 … 100% F.S.
2.5 W
100%
Degree of protection IP51
Temperature
Ambiance
Bakeout
5 °C … 50 °C
80 °C (with idle coil)
Materials
Housing
Armature
Guiding tube
Springs
Seals
stainless steel 1.4301
stainless steel 1.4105 IL
stainless steel 1.4305, 1.4105 IL
stainless steel 1.4310
FPM
Weight 96 g
1) For air at a pressure difference Δp = 1 bar

8BP 5059 BEN (2011-10)
Dimensions [mm]
6.5
(17)
88
33
M14×1
2.8×0.5
14.5
OD 1/4"
14.5
OD 6 mm
DN 10 ISO-KF
18
49
17
AF 17
49
23.5
35
Electrical connection
Protective lid

BP 5059 BEN (2011-10) 9
Flow rate curve
Example of a flow rate curve (mean values 500 sccm F.S) at a
pressure difference Δp = 1 bar
Current (solenoid coil) [mA]
Gas flow [sccm]
Control valve closed
Control valve open
0
100
200
300
400
500
600
0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80

10 BP 5059 BEN (2011-10)
3 Installation
3.1 Vacuum Connection
Caution
Caution: vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.