PI A-62 Series User manual

User Manual
A620D0001 Rev 1.2
30-July-2019
Page 1 of 32
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: [phone] Fax: [phone]
Email: [e-mail]
A-62x Series Rotary Air Bearing Stage
PIglide RM, Direct-drive Torque Motor Driven with Encoder Feedback
This document describes the A-62x.xxxxx Series of Rotary Air Bearing Motorized Stages.

User Manual
A620D0001 Rev 1.2
30-July-2019
Page 2 of 32
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: [phone] Fax: [phone]
Email: [e-mail]
Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®, NanoCube®, NanoAutomation®,
Picoactuator®, PInano®, PIMag®
PI owns the following patents or patent applications for the technology field Magnetic Direct Drives (PIMag®):
WO212146709A2, DE102012207082A1
© 2019 PI (Physik Instrumente) L.P. The text, photographs and drawings in this manual are protected by
copyright. With regard thereto, PI (Physik Instrumente) L.P. retains all the rights. Use of said text, photographs
and drawings is permitted only in part and only upon citation of the source.
Subject to change without notice. This manual is superseded by any new release. PI continually improves its
product offerings, and listed options and specifications may be superseded at any time.

User Manual
A620D0001 Rev 1.2
30-July-2019
Page 3 of 32
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: [phone] Fax: [phone]
Email: [e-mail]
Table of Contents
1. About this Document ____________________________________________________________________5
1.1. Objective and Target Audience of this User Manual ________________________________________5
1.2. Symbols and Typographic Conventions __________________________________________________5
1.3. Other Applicable Documents __________________________________________________________5
2. Safety ________________________________________________________________________________6
2.1. Intended Use ______________________________________________________________________6
2.2. General Safety Instructions ___________________________________________________________6
2.3. Warnings and Safety Notices __________________________________________________________7
2.4. Organizational Measures _____________________________________________________________8
3. Product Description _____________________________________________________________________9
3.1. Model Overview and Part Numbering ___________________________________________________9
3.2. Product Features _________________________________________________________________ 10
3.3. Product Labeling__________________________________________________________________ 11
3.4. Scope of Delivery _________________________________________________________________ 12
3.5. Accessories ______________________________________________________________________ 12
3.6. Controllers ______________________________________________________________________ 12
4. Technical Features ____________________________________________________________________ 13
4.1. Air Bearing ______________________________________________________________________ 13
4.2. Torque Motor____________________________________________________________________ 13
4.3. Encoder_________________________________________________________________________ 13
4.4. Index Mark (Incremental encoders only)_______________________________________________ 13
5. Unpacking and Handling________________________________________________________________ 14
6. Installation __________________________________________________________________________ 15
6.1. Mounting Surface Quality and Preparation _____________________________________________ 15
6.2. Mounting Orientation _____________________________________________________________ 15
6.3. Mounting Procedure ______________________________________________________________ 16
6.4. Removing the shipping restraint _____________________________________________________ 16
6.5. Air Supply _______________________________________________________________________ 17
6.6. Affixing the Payload to the Stage _____________________________________________________ 18

User Manual
A620D0001 Rev 1.2
30-July-2019
Page 4 of 32
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: [phone] Fax: [phone]
Email: [e-mail]
6.7. Multi-Axis Configurations___________________________________________________________ 18
6.8. Connecting the Stage to Protective Earth ______________________________________________ 19
6.9. Connecting the Cables _____________________________________________________________ 20
7. Startup and Operation of the Stage _______________________________________________________ 21
8. Maintenance_________________________________________________________________________ 22
8.1. Cleaning the Stage ________________________________________________________________ 22
8.2. Preparing the Stage for Transport ____________________________________________________ 22
9. Customer Service _____________________________________________________________________ 23
10. Technical Data _____________________________________________________________________ 24
10.1. Sizes and Load Capacities _________________________________________________________ 24
10.2. Performance Specifications _______________________________________________________ 24
10.3. Motor Electrical Specifications_____________________________________________________ 25
10.4. Encoder Specifications ___________________________________________________________ 25
10.5. Ambient Conditions _____________________________________________________________ 26
10.6. Dimensions____________________________________________________________________ 26
10.7. Pin Assignments ________________________________________________________________ 31
11. EC Declaration of Conformity__________________________________________________________ 32
12. Old Equipment Disposal ______________________________________________________________ 32
Table of Figures
Figure 1 - Product Features, A-62x ___________________________________________________________ 10
Figure 2 - Product Labeling Example__________________________________________________________ 11
Figure 3 - Mounting Surface Quality___________________________________________________________ 15
Figure 4 - Shipping Restraint ________________________________________________________________ 16
Figure 5 - Air Inlet Fitting Location ____________________________________________________________ 17
Figure 6 - Air Exhaust Port Location___________________________________________________________ 17
Figure 7 - Earth ground connection point location ________________________________________________ 19
Figure 8 - Mounting of the protective earth conductor (profile view) __________________________________ 19
Figure 9 - Stage Electrical Cable Connectors ___________________________________________________ 20
Figure 10 - A-621.025x1 Stage Dimensions ____________________________________________________ 26
Figure 11 - A-623.xxxx1 Stage Dimensions_____________________________________________________ 27
Figure 12 - A-624.050x1 Stage Dimensions ____________________________________________________ 28
Figure 13 - A-625.065x1 Stage Dimensions ____________________________________________________ 29
Figure 14 - A-627.075x1 Stage Dimensions ____________________________________________________ 30

User Manual
A620D0001 Rev 1.2
30-July-2019
Page 5 of 32
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: [phone] Fax: [phone]
Email: [e-mail]
1. About this Document
1.1. Objective and Target Audience of this User Manual
This manual contains information on the intended use of the A-62x series of linear motor-driven air bearing
stages. It assumes that the reader has a fundamental understanding of basic servo systems as well as motion
control concepts and applicable safety procedures.
1.2. Symbols and Typographic Conventions
The following symbols and markings are used in this User Manual:
Symbol
Meaning
If not avoided, the situation could result in damage to the equipment.
Failure to observe these precautions could result in serious injury to
those performing the procedures and damage to the equipment.
1.
2.
Action consisting of several steps whose sequential order must be
observed

Action consisting of one or several steps whose sequential order is
irrelevant
1.3. Other Applicable Documents
None at this time

User Manual
A620D0001 Rev 1.2
30-July-2019
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PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: [phone] Fax: [phone]
Email: [e-mail]
2. Safety
2.1. Intended Use
The A-62x is a laboratory device as defined by DIN EN 61010. It is intended to be used in interior spaces and in
an environment which is free of dirt, oil and lubricants.
In accordance with its design and realization, the A-62x is intended for single-axis positioning of loads at different
velocities. The A-62x is not intended for applications in areas in which a failure would present severe risks to
human beings or the environment.
The intended use of the A-62x is only possible when completely mounted and connected.
The A-62x must be operated with a suitable controller. The controller is not included in the scope of delivery of
the A-62x.
2.2. General Safety Instructions
The A-62x is built according to state-of-the-art technology and recognized safety standards. Improper use can
result in personal injury and/or damage to the A-62x.
Only use the A-62x for its intended purpose, and only use it if it is in a good working order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect safety.
The operator is responsible for the correct installation and operation of the A-62x.

User Manual
A620D0001 Rev 1.2
30-July-2019
Page 7 of 32
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: [phone] Fax: [phone]
Email: [e-mail]
2.3. Warnings and Safety Notices
The following statements apply throughout this manual. Failure to observe these precautions could result in
serious injury to those performing the procedures and damage to the equipment. This manual and any additional
instructions included with the stage should be retained for the lifetime of the stage.
To minimize the possibility of electrical shock and bodily injury or death, disconnect all electrical
power prior to making any electrical connections.
To minimize the possibility of electrical shock and bodily injury or death when any electrical circuit
is in use, ensure that no person comes in contact with the circuitry when the stage is connected to
a power source.
To minimize the possibility of bodily injury or death, disconnect all electrical power prior to making
any mechanical adjustments.
To minimize the possibility of bodily injury or death from electric shock in the case of malfunction
or failure of the system, make sure a protective earth conductor is properly connected.
Moving parts of the stage can cause crushing or shearing injuries. All personnel must remain clear
of any moving parts.
The stage table should never be moved without the air supply turned on. Moving the stage table
with no air supply, causing sliding metal-to-metal contact, may damage the bearing surfaces.
Improper use of the stage can cause damage, shock, injury, or death. Read and understand this
manual before operating the stage.
If the stage is used in a manner not specified by the manufacturer, the protection provided by the
stage can be impaired.
Stage cables can pose a tripping hazard. Securely mount and position all stage cables to avoid
potential hazards.
Do not expose the stage to environments or conditions outside the specified range of operating
environments. Operation in conditions other than those specified can cause damage to the
equipment.
The stage must be mounted securely. Improper mounting can result in injury and damage to the
equipment.
Use care when moving the stage. Manually lifting or transporting stages can result in injury.
Use care when moving the stage. Avoid any shocks, drops or bumps that can cause scratches,
dings, dents, or distortion of the stage.

User Manual
A620D0001 Rev 1.2
30-July-2019
Page 8 of 32
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: [phone] Fax: [phone]
Email: [e-mail]
The stage contains high power magnets that can attract ferrous objects, such as loose screws.
Attracted objects can damage the stage. Make sure that there are no movable, ferrous objects
within a radius of at least 10 cm around the stage.
The stage contains high power magnets that can damage magnetically sensitive objects such as
magnetic data carriers and electronic devices. Make sure that there are no magnetically sensitive
objects within a radius of at least 10 cm around the stage.
Dirt, oil, lubricants and condensation will damage the stage. Keep the stage clean and free of dirt,
debris, oil, lubricants, and moisture.
2.4. Organizational Measures
User manual
Always keep this user manual available near the A-62x.
Add all information given by the manufacturer to the user manual, for example supplements or
Technical Notes.
If you pass the A-62x on to other users, also turn over this user manual as well as other relevant
information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing information due to an
incomplete user manual can result in minor injury and property damage.
Only install and operate the A-62x after having read and understood this user manual.
Personnel qualification
The A-62x may only be installed, started up, operated, maintained and cleaned by authorized and
appropriately qualified personnel.

User Manual
A620D0001 Rev 1.2
30-July-2019
Page 9 of 32
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: [phone] Fax: [phone]
Email: [e-mail]
3. Product Description
3.1. Model Overview and Part Numbering
The A-62x series offers various models, defined by the stage size, encoder type, and motor option. The
dimensions of the various models vary. Encoder and motor options do not affect the dimensions.
Model
Table Diameter
Journal Length
Encoder Option
Motor
A-62
1 = 50mm
025 = 25mm
A = Incremental, Sine (1 Vp-p) output
1 = Standard motor
option, slotless
3 = 100mm
025 = 25mm
B = Absolute BiSS-C serial output
050 = 50mm
4 = 150 mm
050 = 50mm
5 = 200mm
065 = 65mm
7 = 300mm
075 = 75mm

User Manual
A620D0001 Rev 1.2
30-July-2019
Page 10 of 32
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: [phone] Fax: [phone]
Email: [e-mail]
3.2. Product Features
The A-62x series stages all incorporate completely non-contact fully preloaded air bearings, direct-drive torque
motors, and optical position feedback encoders to provide a maintenance free stage. There is no mechanical
contact to wear or require lubrication, making these stages ideal for clean room and medical applications. The
brushless torque motor uses an ironless slotless motor coil, which means there is zero cogging and no attractive
forces –resulting in unsurpassed smoothness of motion. This is especially useful in applications where velocity
control is important.
The air bearing, motor, and encoder are housed in the internals of the stage and are not visible to the user.
Figure 1 - Product Features, A-62x
#
Description
1.
Stage base
2.
Moving table
3.
Motor electrical connection
4.
Encoder electrical connection
5.
Air supply inlet
6.
Air exhaust port