PI A-62 Series User manual

User Manual
A620D0001 Rev 1.2
30-July-2019
Page 1 of 32
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
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A-62x Series Rotary Air Bearing Stage
PIglide RM, Direct-drive Torque Motor Driven with Encoder Feedback
This document describes the A-62x.xxxxx Series of Rotary Air Bearing Motorized Stages.

User Manual
A620D0001 Rev 1.2
30-July-2019
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PI (Physik Instrumente) L.P.
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Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®, NanoCube®, NanoAutomation®,
Picoactuator®, PInano®, PIMag®
PI owns the following patents or patent applications for the technology field Magnetic Direct Drives (PIMag®):
WO212146709A2, DE102012207082A1
© 2019 PI (Physik Instrumente) L.P. The text, photographs and drawings in this manual are protected by
copyright. With regard thereto, PI (Physik Instrumente) L.P. retains all the rights. Use of said text, photographs
and drawings is permitted only in part and only upon citation of the source.
Subject to change without notice. This manual is superseded by any new release. PI continually improves its
product offerings, and listed options and specifications may be superseded at any time.

User Manual
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Table of Contents
1. About this Document ____________________________________________________________________5
1.1. Objective and Target Audience of this User Manual ________________________________________5
1.2. Symbols and Typographic Conventions __________________________________________________5
1.3. Other Applicable Documents __________________________________________________________5
2. Safety ________________________________________________________________________________6
2.1. Intended Use ______________________________________________________________________6
2.2. General Safety Instructions ___________________________________________________________6
2.3. Warnings and Safety Notices __________________________________________________________7
2.4. Organizational Measures _____________________________________________________________8
3. Product Description _____________________________________________________________________9
3.1. Model Overview and Part Numbering ___________________________________________________9
3.2. Product Features _________________________________________________________________ 10
3.3. Product Labeling__________________________________________________________________ 11
3.4. Scope of Delivery _________________________________________________________________ 12
3.5. Accessories ______________________________________________________________________ 12
3.6. Controllers ______________________________________________________________________ 12
4. Technical Features ____________________________________________________________________ 13
4.1. Air Bearing ______________________________________________________________________ 13
4.2. Torque Motor____________________________________________________________________ 13
4.3. Encoder_________________________________________________________________________ 13
4.4. Index Mark (Incremental encoders only)_______________________________________________ 13
5. Unpacking and Handling________________________________________________________________ 14
6. Installation __________________________________________________________________________ 15
6.1. Mounting Surface Quality and Preparation _____________________________________________ 15
6.2. Mounting Orientation _____________________________________________________________ 15
6.3. Mounting Procedure ______________________________________________________________ 16
6.4. Removing the shipping restraint _____________________________________________________ 16
6.5. Air Supply _______________________________________________________________________ 17
6.6. Affixing the Payload to the Stage _____________________________________________________ 18

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6.7. Multi-Axis Configurations___________________________________________________________ 18
6.8. Connecting the Stage to Protective Earth ______________________________________________ 19
6.9. Connecting the Cables _____________________________________________________________ 20
7. Startup and Operation of the Stage _______________________________________________________ 21
8. Maintenance_________________________________________________________________________ 22
8.1. Cleaning the Stage ________________________________________________________________ 22
8.2. Preparing the Stage for Transport ____________________________________________________ 22
9. Customer Service _____________________________________________________________________ 23
10. Technical Data _____________________________________________________________________ 24
10.1. Sizes and Load Capacities _________________________________________________________ 24
10.2. Performance Specifications _______________________________________________________ 24
10.3. Motor Electrical Specifications_____________________________________________________ 25
10.4. Encoder Specifications ___________________________________________________________ 25
10.5. Ambient Conditions _____________________________________________________________ 26
10.6. Dimensions____________________________________________________________________ 26
10.7. Pin Assignments ________________________________________________________________ 31
11. EC Declaration of Conformity__________________________________________________________ 32
12. Old Equipment Disposal ______________________________________________________________ 32
Table of Figures
Figure 1 - Product Features, A-62x ___________________________________________________________ 10
Figure 2 - Product Labeling Example__________________________________________________________ 11
Figure 3 - Mounting Surface Quality___________________________________________________________ 15
Figure 4 - Shipping Restraint ________________________________________________________________ 16
Figure 5 - Air Inlet Fitting Location ____________________________________________________________ 17
Figure 6 - Air Exhaust Port Location___________________________________________________________ 17
Figure 7 - Earth ground connection point location ________________________________________________ 19
Figure 8 - Mounting of the protective earth conductor (profile view) __________________________________ 19
Figure 9 - Stage Electrical Cable Connectors ___________________________________________________ 20
Figure 10 - A-621.025x1 Stage Dimensions ____________________________________________________ 26
Figure 11 - A-623.xxxx1 Stage Dimensions_____________________________________________________ 27
Figure 12 - A-624.050x1 Stage Dimensions ____________________________________________________ 28
Figure 13 - A-625.065x1 Stage Dimensions ____________________________________________________ 29
Figure 14 - A-627.075x1 Stage Dimensions ____________________________________________________ 30

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1. About this Document
1.1. Objective and Target Audience of this User Manual
This manual contains information on the intended use of the A-62x series of linear motor-driven air bearing
stages. It assumes that the reader has a fundamental understanding of basic servo systems as well as motion
control concepts and applicable safety procedures.
1.2. Symbols and Typographic Conventions
The following symbols and markings are used in this User Manual:
Symbol
Meaning
If not avoided, the situation could result in damage to the equipment.
Failure to observe these precautions could result in serious injury to
those performing the procedures and damage to the equipment.
1.
2.
Action consisting of several steps whose sequential order must be
observed

Action consisting of one or several steps whose sequential order is
irrelevant
1.3. Other Applicable Documents
None at this time

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2. Safety
2.1. Intended Use
The A-62x is a laboratory device as defined by DIN EN 61010. It is intended to be used in interior spaces and in
an environment which is free of dirt, oil and lubricants.
In accordance with its design and realization, the A-62x is intended for single-axis positioning of loads at different
velocities. The A-62x is not intended for applications in areas in which a failure would present severe risks to
human beings or the environment.
The intended use of the A-62x is only possible when completely mounted and connected.
The A-62x must be operated with a suitable controller. The controller is not included in the scope of delivery of
the A-62x.
2.2. General Safety Instructions
The A-62x is built according to state-of-the-art technology and recognized safety standards. Improper use can
result in personal injury and/or damage to the A-62x.
Only use the A-62x for its intended purpose, and only use it if it is in a good working order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect safety.
The operator is responsible for the correct installation and operation of the A-62x.

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2.3. Warnings and Safety Notices
The following statements apply throughout this manual. Failure to observe these precautions could result in
serious injury to those performing the procedures and damage to the equipment. This manual and any additional
instructions included with the stage should be retained for the lifetime of the stage.
To minimize the possibility of electrical shock and bodily injury or death, disconnect all electrical
power prior to making any electrical connections.
To minimize the possibility of electrical shock and bodily injury or death when any electrical circuit
is in use, ensure that no person comes in contact with the circuitry when the stage is connected to
a power source.
To minimize the possibility of bodily injury or death, disconnect all electrical power prior to making
any mechanical adjustments.
To minimize the possibility of bodily injury or death from electric shock in the case of malfunction
or failure of the system, make sure a protective earth conductor is properly connected.
Moving parts of the stage can cause crushing or shearing injuries. All personnel must remain clear
of any moving parts.
The stage table should never be moved without the air supply turned on. Moving the stage table
with no air supply, causing sliding metal-to-metal contact, may damage the bearing surfaces.
Improper use of the stage can cause damage, shock, injury, or death. Read and understand this
manual before operating the stage.
If the stage is used in a manner not specified by the manufacturer, the protection provided by the
stage can be impaired.
Stage cables can pose a tripping hazard. Securely mount and position all stage cables to avoid
potential hazards.
Do not expose the stage to environments or conditions outside the specified range of operating
environments. Operation in conditions other than those specified can cause damage to the
equipment.
The stage must be mounted securely. Improper mounting can result in injury and damage to the
equipment.
Use care when moving the stage. Manually lifting or transporting stages can result in injury.
Use care when moving the stage. Avoid any shocks, drops or bumps that can cause scratches,
dings, dents, or distortion of the stage.

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The stage contains high power magnets that can attract ferrous objects, such as loose screws.
Attracted objects can damage the stage. Make sure that there are no movable, ferrous objects
within a radius of at least 10 cm around the stage.
The stage contains high power magnets that can damage magnetically sensitive objects such as
magnetic data carriers and electronic devices. Make sure that there are no magnetically sensitive
objects within a radius of at least 10 cm around the stage.
Dirt, oil, lubricants and condensation will damage the stage. Keep the stage clean and free of dirt,
debris, oil, lubricants, and moisture.
2.4. Organizational Measures
User manual
Always keep this user manual available near the A-62x.
Add all information given by the manufacturer to the user manual, for example supplements or
Technical Notes.
If you pass the A-62x on to other users, also turn over this user manual as well as other relevant
information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing information due to an
incomplete user manual can result in minor injury and property damage.
Only install and operate the A-62x after having read and understood this user manual.
Personnel qualification
The A-62x may only be installed, started up, operated, maintained and cleaned by authorized and
appropriately qualified personnel.

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3. Product Description
3.1. Model Overview and Part Numbering
The A-62x series offers various models, defined by the stage size, encoder type, and motor option. The
dimensions of the various models vary. Encoder and motor options do not affect the dimensions.
Model
Table Diameter
Journal Length
Encoder Option
Motor
A-62
1 = 50mm
025 = 25mm
A = Incremental, Sine (1 Vp-p) output
1 = Standard motor
option, slotless
3 = 100mm
025 = 25mm
B = Absolute BiSS-C serial output
050 = 50mm
4 = 150 mm
050 = 50mm
5 = 200mm
065 = 65mm
7 = 300mm
075 = 75mm

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3.2. Product Features
The A-62x series stages all incorporate completely non-contact fully preloaded air bearings, direct-drive torque
motors, and optical position feedback encoders to provide a maintenance free stage. There is no mechanical
contact to wear or require lubrication, making these stages ideal for clean room and medical applications. The
brushless torque motor uses an ironless slotless motor coil, which means there is zero cogging and no attractive
forces –resulting in unsurpassed smoothness of motion. This is especially useful in applications where velocity
control is important.
The air bearing, motor, and encoder are housed in the internals of the stage and are not visible to the user.
Figure 1 - Product Features, A-62x
#
Description
1.
Stage base
2.
Moving table
3.
Motor electrical connection
4.
Encoder electrical connection
5.
Air supply inlet
6.
Air exhaust port

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3.3. Product Labeling
Figure 2 - Product Labeling Example
#
Description
1.
Product model number (example)
2.
Serial number (example), individual for each A-62x
Meaning of the places (counting from left):
A = PIglide Air Bearing Product
17 = year of manufacture (i.e. 2017)
160501 = unique number, 6-digit
3.
Warning sign "Observe manual"
4.
Old equipment disposal warning sign
5.
CE conformity mark
6.
Protective earth grounding location
7.
Air supply inlet location
8.
Motor electrical connection
9.
Encoder electrical connection
10.
Country of origin
11.
Manufacturer's address (website)
12.
Manufacturer's logo

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3.4. Scope of Delivery
Item ID
Component
A-62x.xxxxxx
Stage according to the order
---
Stage Mounting Screws (size will depend on the stage
model ordered)
---
Shipping restraint
A620D0001
User manual (this document)
3.5. Accessories
The following accessories are offered to complement the A-62x stage. Contact PI for all available configurations.
Part #
Description
A-80x.xxx
Air Preparation and Filtration Kit
A-851.xxx
Cable sets for integration with various controllers
3.6. Controllers
The A-62x must be connected to a suitable motion controller to be operated. The following standard controllers
are available from PI to operate the A-62x. Other controllers are also available, contact PI for options.
Part #
Description
C-891.120200
PIMag® Motion Controller for magnetic direct drives,
1 channel, 24 V, 3 A, USB and RS-232 interfaces
A-81x.xxxxx
A-82x.xxxxx
PIglide Family of Motion Controllers (1, 2, 4, 6, or 8 Axes)

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4. Technical Features
4.1. Air Bearing
The A-62x series stage features fully preloaded, non-contact, frictionless air bearings to guide the motion of the
stage and support the payload. This air bearing is a highly accurate precision instrument. The non-contact
nature of the air bearings will provide years of accurate and reliable use if treated properly. Keep the bearing
clean and avoid any shocks, drops or bumps that can cause scratches, dings or distortion of the bearing.
The A-62x incorporates opposing axial and radial preload mechanisms. This sort of preload makes the A-62x
suitable for various mounting orientations, such as horizontal, vertical, and inverted. Be careful not to apply
excess cantilever loads to the stage table.
4.2. Torque Motor
The A-62x series stage features a brushless, ironless, slotless 3-phase torque motor. This type of motor
technology is completely non-contact and is ideally suited to high speeds; high accelerations; fine resolution
positioning; and smooth, constant-velocity scanning. The motor must be commutated by an external motor drive.
Hall Effect sensors are not included, so the drive and/or controller must be capable of encoder-based (sine)
commutation.
4.3. Encoder
The A-62x series stage features an optical non-contact position encoder for direct measurement of the stage
position. This feedback signal is used by an external motion controller to close the servo loop for position and
velocity control.
The A-62x series stage offers two types of encoders:
Incremental with analog (sine) output: Suitable for use with controllers using on-board encoder interpolation.
Absolute with BiSS-C 32-bit serial output: Eliminates the need for startup homing routines and limit switches.
4.4. Index Mark (Incremental encoders only)
When equipped with either of the incremental encoder options, the A-62x series stage features a non-contact
home index marker. The index is integral to the encoder electronics. The index mark is optical; there is one
index per revolution of the stage.

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5. Unpacking and Handling
Carefully unpack the air bearing stage and other components from the shipping packaging. Inspect the contents
for signs of damage. If there is any sign of damage or missing parts, contact PI immediately. Compare the
package contents to packing list and notify PI immediately if any parts are missing or incorrect. Keep all
packaging materials in case the product needs to be returned.
Before mounting or using the stage, it is recommended to let the stage stabilize at room temperature for at least
24 hours. Clean any dust or shipping debris off the stage by blowing it off with pressurized nitrogen or clean, oil-
free air.
If the stage will be mounted in such a way as to block the product label, it is recommended to record the stage
serial number for future reference.
The A-62x stage must always be transported and shipped with the shipping restraint installed.
Failure to use the shipping restraint when moving, transporting, or shipping the stage may allow
movement between the stage table and stage base, causing damage.
The stage table should never be moved without the air supply turned on. Moving the stage table
with no air supply, causing sliding metal-to-metal contact, may damage the bearing surfaces.
Use care when moving the stage. Manually lifting or transporting stages can result in injury.
Use care when moving the stage. Avoid any shocks, drops or bumps that can cause scratches,
dings, dents, or distortion of the stage.
When lifting the A-62x, take care to lift only by the base plate of the stage. Do not lift using any
other part of the mechanical system, or damage may occur.
The A-62x stage weighs up to 50 kg in its largest size. Use care when lifting and use two people to
lift.

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6. Installation
6.1. Mounting Surface Quality and Preparation
The surface to which the stage will be mounted should be flat and have adequate stiffness in order to achieve the
maximum performance from the A-62x. When the A-62x series stage is mounted to a non-flat surface, the stage
can be distorted as the mounting screws are tightened. This distortion will decrease the overall accuracy of the
stage. The effects of flatness on mounting are illustrated below.
To maintain accuracy, the mounting surface should be flat within 1 µm per 150 mm. A laboratory grade AA
granite surface plate is recommended. Do not shim under the stage base.
Figure 3 - Mounting Surface Quality
Prepare the mounting surface and bottom of the stage base with precision flat stones to remove any burrs or high
spots. Clean the mounting surface and bottom of the stage with the appropriate cleaners (isopropyl alcohol).
6.2. Mounting Orientation
The A-62x is suitable for various mounting orientations, such as horizontal, vertical, and inverted. PI
recommends that you review your payload and orientation conditions with a PI engineer before purchasing this
product.

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6.3. Mounting Procedure
1. Place the stage on the mounting surface.
2. Remove the shipping restraint.
3. Connect the compressed air supply and turn on the air.
4. Affix the stage base to the mounting surface using the four mounting screws provided. Screw size and length
will depend on the stage model, see the table below.
5. Torque the mounting screws (begin from the center out for best accuracy). The typical maximum torque
value for the mounting screws is shown in the table below.
The stage should now be securely mounted. Make sure to allow sufficient clearance to attach the motor and
encoder cables to the stage.
Model
Mounting Screw (4x)
Max. Screw Torque (N-m)
A-621.xxxxx
M3 SHCS, 30mm long (minimum)
2
A-623.xxxxx
M6 SHCS, 30mm long (minimum)
20
A-624.xxxxx
M6 SHCS, 40mm long (minimum)
20
A-625.xxxxx
M6 SHCS, 30mm long (minimum)
20
A-627.xxxxx
M8 SHCS, 40mm long (minimum)
48
6.4. Removing the shipping restraint
The stage is shipped with a shipping restraint installed to prevent unwanted motion between the stage table and
the stage base. To remove the shipping restraint, unscrew the SHCS using an Allen key. Make sure to safely
store the parts for later use, in case the stage ever needs to be moved or transported.
Figure 4 - Shipping Restraint
The shipping restraint kit for the A-62x consists of:
#
Description
1.
Shipping bracket for A-62x
2.
Flat washer
3.
SHCS
4.
Shipping restraint label
Screw sizes used in shipping restraint kits:
Model
Screw Size and Length
A-621
M3 SHCS, 5mm long
A-623
M5 SHCS, 8mm long
A-624
M6 SHCS, 8mm long
A-625
M6 SHCS, 16mm long
A-627
M8 SHCS, 10mm long

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6.5. Air Supply
Air Requirements
The A-62x stage requires clean, oil-free, and dry compressed air to operate properly. See Section 10.2 for
detailed air supply requirements.
It is recommended that a pressure switch is installed to monitor air supply pressure and to remove power from
the stage motor if supply pressure drops below 40 psi to prevent damage to the air bearing surfaces.
The air inlet fitting to the A-62x stage accepts flexible polyurethane pneumatic tubing:
4mm OD for the model A-621 & A-623
6mm OD for the models A-624, A-625 & A-627.
Figure 5 - Air Inlet Fitting Location
Figure 6 - Air Exhaust Port Location
As air flows through the stage, it must eventually exhaust to atmosphere. There is an
exhaust port located on the side of the stage. Do NOT allow this exhaust port to
become blocked or covered.
Turning off the air supply when not in use
When the stage is not in use, the air supply may be turned off to preserve compressed air and energy.
The stage table should never be moved without the air supply turned on. Moving the
stage table with no air supply, causing sliding metal-to-metal contact, may damage the
bearing surfaces.

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6.6. Affixing the Payload to the Stage
The payload should be flat, rigid, and comparable to the stage in quality. For valid system performance, the
mounting interface surface should be flat within 1 µm per 50 mm.
The stage tabletop features tapped holes for mounting the user’s payload. These are the only features that
should be used to attach a payload to the stage. Mounting-hole sizes and patterns will depend on the stage
model ordered; see the CAD drawings in Section 10.6 for details.
Prepare the payload mounting surface and the stage table with precision flat stones to remove any burrs or high
spots. Clean the payload mounting surface and the stage table with the appropriate cleaners (isopropyl alcohol).
For optimum performance, the payload center of mass should be centered on the stage tabletop. If the payload
is not centered, the rotating mass will not be balanced about the axis of rotation. Imbalance, especially at higher
rotational speeds, can cause vibration, excessive error motion, and possibly damage to the stage.
Do not attempt to modify the stage table in any way. Customer modifications may damage the
stage.
The screws used to attach the payload to the stage table should not thread into the stage
tabletop any more than the depth shown on the CAD drawing. Longer screws may damage the
table.
Do not overtighten the payload mounting screws.
Do not exceed the maximum payload specified for the A-62x stage.
6.7. Multi-Axis Configurations
Multi-axis configurations of the A-62x series stage are not available at this time without customization. Please
contact PI for a quote if you require a multi-axis system.

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6.8. Connecting the Stage to Protective Earth
To minimize the possibility of bodily injury or death from electric shock in the case of malfunction or
failure of the system, make sure a protective earth conductor is properly connected.
The A-62x has an M4 threaded hole for connecting the protective earth conductor. This hole is marked with the
symbol for the protective earth ground . The hole is located on the end plate of the stage near the air inlet.
Figure 7 - Earth ground connection point location
Figure 8 - Mounting of the protective earth conductor (profile view)
#
Description
1.
Base plate of the A-62x
2.
Flat washer (2x)
3.
Internal tooth washer (2x)
4.
M4 Screw
5.
Cable lug
6.
Protective earth conductor
1. If necessary, fasten a suitable cable lug to the protective earth conductor. Note that the conductor and lug
are not in the scope of delivery of the stage.
2. Fasten the cable lug of the protective earth conductor to the protective earth connection of the A-62x as
shown in the profile view using the M4 screw proved. You will need a 2mm Allen key.
3. Tighten the M4 screw with a torque of 1.2 Nm to 1.5 Nm.
4. Make sure that the contact resistance at all connection points relevant for mounting the protective earth
conductor is <0.1 Ω at 25 A.

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6.9. Connecting the Cables
Stage interconnect cables are not in the scope of delivery of the A-62x series stage. However, PI offers several
standard cable sets that can be used, depending on the motion controller being used. Contact PI for a quote.
See Section 10.7 for connector pin assignments.
Only use the interconnect cables that have been designed for the combination of stage and
controller being used. Connection using the wrong cable may result in damage to the stage and
the controller.
To minimize the possibility of electrical shock and bodily injury or death, disconnect all electrical
power prior to making any electrical connections.
To minimize the possibility of electrical shock and bodily injury or death when any electrical
circuit is in use, ensure that no person comes in contact with the circuitry when the stage is
connected to a power source.
To minimize the possibility of bodily injury or death, disconnect all electrical power prior to
making any mechanical adjustments.
1. Connect the stage cables for the motor and encoder to the connectors on the end plate of the A-62x stage.
2. Tighten the jack screws with a flat head screwdriver to secure the cables. Do not overtighten the screws.
Figure 9 - Stage Electrical Cable Connectors
On the models A-621 and A-623, the electrical connectors are external to the stage body, as shown on the left
photo above. Care should be taken to properly secure the connectors after installation so they do not move and
damage the cables or stage body.