Table of Co te ts
1 Safety instructions......................................................................4
2 Registered trademarks.................................................................6
3 RF e posure information and statement.........................................7
4 Application.................................................................................8
5 Features....................................................................................8
6 Technical data.............................................................................9
6.1 General data.........................................................................9
6.2 Electrical data.......................................................................9
6.3 Data logger.........................................................................10
6.4 Output signals.....................................................................10
6.5 Accuracy of flow..................................................................10
6.6 Accuracy of pressure............................................................11
7 Dimensional drawing..................................................................11
8 Installation...............................................................................12
8.1 Installation considerations....................................................12
8.2 LED indicators.....................................................................12
8.3 Electrical connection ..........................................................13
9 Sensor signal outputs................................................................15
9.1 Analog output.....................................................................15
9.2 Pulse output.......................................................................15
9.3 Modbus output....................................................................17
10 Configuration..........................................................................18
11 Read and analysis of measurement data.....................................19
11.1 Features...........................................................................19
11.2 Operations........................................................................20
11.2.1 Logger configuration.....................................................20
11.2.2 Data read-out and analysis............................................20
12 Calibration..............................................................................22
13 Disposal or waste....................................................................22
14 Appendi A - Specifications.......................................................23
14.1 Vacuum flow ranges...........................................................23
14.2 Order table.......................................................................23
14.3 Error codes.......................................................................24
15 Appendi B - Modbus communication e ample............................25
S418-V 3
