Agilent Technologies TwisTorr 305 FSQ User manual

Agilent TwisTorr 305 FSQ & 305 SF
User Manual

2 Agilent TwisTorr 305 FSQ & 305 SF User Manual
Notices
Manual Part Number
D0006288
Edition A.00, November 2020
Copyright
© Agilent Technologies, Inc. 2020
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Vacuum Products Division
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10040 Leinì (TO)
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Instrument Manufacturing
Manufactured by Agilent Technologies
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Via F.lli Varian, 54, 10040 Leinì (TO),
ITALY
Printed in Italy
Operating Temperature
Operating Temperature: 5°C ÷35°C
Storage Temperature: -40°C ÷70°C
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Contents
Agilent TwisTorr 305 FSQ & 305 SF User Manual 3
Contents
1Istruzioni per l’uso 13
Informazioni su questo manuale 14
Validità 14
Definizioni e terminologia 15
Definizione di Attenzione, Avvertenza e Nota 15
Simboli di avvertenza 16
Sicurezza 18
Uso corretto 18
Uso improprio 19
Attrezzatura di protezione 20
Linee guida di sicurezza per pompe turbomolecolari 21
Trasporto & Immagazzinamento 22
Descrizione del prodotto 23
Installazione 24
Preparazione per l’installazione 24
Apertura 26
Fissaggio della TwisTorr 305 FSQ & 305 SF 27
Collegamento della flangia per alto vuoto 28
Installazione della flangia ISO-K 29
Collegamento della pompa di pre-vuoto 30
Avvio e funzionamento della TwisTorr 305 FSQ & 305 SF 31
Arresto della TwisTorr 305 FSQ & 305 SF 32

Contents
4 Agilent TwisTorr 305 FSQ & 305 SF User Manual
Arresto di emergenza 32
Manutenzione 33
Vita del rotore 33
Soft Start 34
Pulizia 34
Smaltimento 35
Servizio Post Vendita 36
2Betriebsanleitung 37
Informationen über diese Betriebsanleitung 38
Gültigkeit 38
Definitionen und Terminologie 39
Definition von Vorsicht, Warnung und Hinweis 39
Warnsymbole 40
Sicherheit 42
Sachgemäße Verwendung 42
Unsachgemäße Anwendung 43
Schutzausrüstung 44
Sicherheitsrichtlinie für Turbomolekularpumpen 45
Transport und Lagerung 46
Produktbeschreibung 47
Installation 48
Vorbereitung zum Einbau 48
Einrichten 50
Montage von TwisTorr 305 FSQ & 305 SF 51
Anschluss des Hochvakuumflansches 52
Installation des ISO-K-Flansches 53

Contents
Agilent TwisTorr 305 FSQ & 305 SF User Manual 5
Anschluss der Vorvakuumpumpe 54
Inbetriebnahme und Betrieb des TwisTorr 305 FSQ & 305 SF 55
Stoppen des TwisTorr 305 FSQ & 305 SF 56
Notausschaltung 56
Wartung 57
Rotordauer 57
Sanftanlauf 58
Reinigung 58
Entsorgung 59
Service 60
3Mode d’emploi 61
À propos de ce manuel 62
Validité 62
Définitions et terminologie 63
Signification des messages d’attention, d’avertissement et des notes 63
Symboles d'avertissement 64
Sécurité 66
Utilisation appropriée 66
Utilisation inappropriée 67
Équipements de protection individuelle 68
Consignes de sécurité pour les pompes turbomoléculaires 69
Transport et entreposage 70
Description du produit 71
Installation 72
Préparation pour l’installation 72
Configuration 74

Contents
6 Agilent TwisTorr 305 FSQ & 305 SF User Manual
Montage de la TwisTorr 305 FSQ & 305 SF 75
Raccordement de la bride à vide élevé 76
Installation de la bride ISO-K 77
Raccordement de la bride à vide préliminaire 78
Démarrage et utilisation de la TwisTorr 305 FSQ & 305 SF 79
Arrêt de la TwisTorr 305 FSQ & 305 SF 80
Arrêt d’urgence 80
Entretien 81
Durée de vie du rotor 81
Démarrage progressif 82
Nettoyage 82
Élimination 83
Service 84
4Instrucciones de uso 85
Acerca del manual 86
Validez 86
Definiciones y terminología 87
Definición de Precaución, Advertencia y Nota 87
Símbolos de advertencia 88
Seguridad 90
Uso correcto 90
Uso incorrecto 91
Equipo de protección 92
Pautas de seguridad para bombas turbomoleculares 93
Transporte y almacenamiento 94
Descripción del producto 95

Contents
Agilent TwisTorr 305 FSQ & 305 SF User Manual 7
Instalación 96
Preparación para instalación 96
Puesta en marcha 98
Montaje de la TwisTorr 305 FSQ & 305 SF 99
Conexión de la brida de alto vaciado 100
Instalación de la brida ISO-K 101
Conexión de la bomba pre-vaciad 102
Puesta en marcha y funcionamiento de TwisTorr 305 FSQ & 305 SF 103
Parada de la TwisTorr 305 FSQ & 305 SF 104
Parada de emergencia 104
Mantenimiento 105
Vida del rotor 105
Arranque suave 106
Limpieza 106
Eliminación 107
Servicio 108
5使用说明109
关于本手册 110
有效性 110
定义与术语 111
小心、警告和注意的定义111
警告符号 112
安全 114
正确使用 114
使用不当 115

Contents
8 Agilent TwisTorr 305 FSQ & 305 SF User Manual
防护设备 116
涡轮分子泵安全指南 117
运输及存储118
产品描述 119
安装 120
安装准备120
设置122
TwisTorr 305 FSQ & 305 SF 的安装 123
高真空法兰的连接124
ISO-K 法兰的安装 125
前真空泵的连接126
TwisTorr 305 FSQ & 305 SF 的启动和运行 127
停止 TwisTorr 305 FSQ & 305 SF 128
紧急停止 128
维护 129
转子寿命 129
慢启动130
清洗 130
处置131
服务132

Contents
Agilent TwisTorr 305 FSQ & 305 SF User Manual 9
6取扱説明書 133
この説明書について 134
有効期 134
定義と用語 135
警告・注意・注の定義 135
警告の記号 136
安全性 138
適切な使用 138
不適切な使用 139
保護用装備 140
ターボ分子ポンプ用安全ガイドライン 141
移送＆保管 142
製品説明 143
取り付け 144
取り付けの準備 144
セットアップ 146
TwisTorr 305 FSQ & 305 SF 実装 147
高真空フランジの接続 148
ISO-K フランジの取り付け 149
フォア真空ポンプの接続 150
TwisTorr 305 FSQ & 305 SF の起動開始と操作 151
TwisTorr 305 FSQ & 305 SF を停止する 152
緊急停止 152
メンテナンス 153
ローターの寿命 153

Contents
10 Agilent TwisTorr 305 FSQ & 305 SF User Manual
ソフトスタート 154
クリーニング 154
処分 155
サービス 156
7Instructions for Use 157
About this manual 158
Validity 158
Definitions and terminology 159
Definition of Caution, Warning and Note 159
Warning Symbols 160
Safety 162
Proper use 162
Improper use 163
Protective equipment 164
Safety guideline for Turbomolecular Pumps 165
Transport & Storage 166
Product description 167
Installation 168
Preparation for installation 168
Set-up 170
TwisTorr 305 FSQ & 305 SF Mounting 171
Connection of the High Vacuum Flange 172
Installation of ISO-K Flange 173
Connection of the Fore-Vacuum Pump 174
Startup and Operation of the TwisTorr 305 FSQ & 305 SF 175
Stopping the TwisTorr 305 FSQ & 305 SF 176