Agilent Technologies TPS-compact User manual

TPS-compact User Manual
239/314
Instructions for Use
Safety Guideline for Turbomolecular Pumps 240
General Information 241
Symbols used 243
Storage 244
Preparation for Installation 245
Installation 246
Use 248
Switching on and Use of TPS-Compact 249
TPS-Compact Switching off 250
Emergency Stop 250
Maintenance 251
Disposal 252
Original Instructions

16
Instructions for Use
Safety Guideline for Turbomolecular Pumps
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Safety Guideline for Turbomolecular Pumps
Turbomolecular pumps as described in the following operating
manual contain a large amount of kinetic energy due to the high
rotational speed in combination with the specific mass of their
rotors.
In case of a malfunction of the system for example rotor/stator
contact or even a rotor crash the rotational energy may be released.
WARNING!
To avoid damage to equipment and to prevent injuries to operating personnel
the installation instructions as given in this manual should be strictly
followed!

Instructions for Use
General Information
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General Information
This equipment is destined for use by professionals. The user should
read this instruction manual and any other additional information
supplied by Agilent before operating the equipment. Agilent will not be
held responsible for any events occurring due to non-compliance, even
partial, with these instructions, improper use by untrained persons,
non-authorized interference with the equipment or any action contrary
to that provided for by specific national standards.
The TPS-compact is an integrated system with a turbo-molecular pump
for high and ultra-high vacuum applications associated with its relevant
controller and its primary pump. The system can pump any type of gas
or gas compound. It is not suitable for pumping liquids or solid particles.
The pumping action is obtained through a high speed turbine driven by
a high-performance 3-phase electric motor. The TPS-compact is free of
contaminating agents and, therefore, is suitable for applications
requiring a "clean" vacuum.
The TPS-compact is equipped with auxiliary connectors to control the
vent valve, to be controlled from a remote site by means of an host
computer connected through a serial line.
The following paragraphs contain all the information necessary to
guarantee the safety of the operator when using the equipment. Detailed
information is supplied in the appendix "Technical Information".

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Instructions for Use
General Information
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This manual uses the following standard protocol:
WARNING!
The warning messages are for attracting the attention of the operator to a
particular procedure or practice which, if not followed correctly, could lead to
serious injury.
CAUTION!
The caution messages are displayed before procedures which, if not followed,
could cause damage to the equipment.
NOTE
The notes contain important information taken from the text.

Instructions for Use
General Information
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Symbols used
The following symbols are used consistently throughout in all
illustration:
Warning “see
installation/operating”
Protective conductor
terminal
Hot surface “Danger of
burns if hot parts are
touched”
On (Power)
Caution, risk of electric
shock
Off (Power)
WARNING!
When employing the pump for pumping toxic, flammable, or radioactive
gases, please follow the required procedures for each gas disposal. Do not
use the pump in presence of explosive gases. The pump is designed to pump
high throughput of N2, Ar and lighter gas. Should you need to pump gases
heavier than Ar, please contact Agilent technical support for informations.

16
Instructions for Use
Storage
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Storage
In order to guarantee the maximum level of performance and
reliability of Agilent pumping systems, the following guidelines must
be followed:
▪when shipping, moving and storing pumps, the following
environmental specifications should not be exceeded:
▪temperature range: refer to the manuals of the single TPS
components
▪relative humidity range: refer to the manuals of the single
TPS components
▪the turbomolecular pumps must be always soft-started when
received and operated for the first time by the customer
▪the shelf life of a turbomolecular pump is 12 months from the
shipping date.
CAUTION!
If for any reason the shelf life time is exceeded, the pumping system has to be
returned to the factory. Please contact the local Agilent Vacuum Sales and
Service representative for informations.

Instructions for Use
Preparation for Installation
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Preparation for Installation
The TPS-compact is supplied in a special protective packing. If this
shows signs of damage which may have occurred during transport,
contact your local sales office. When unpacking the system, be sure
not to drop it and avoid any kind of sudden impact or shock
vibration to it.
Do not dispose of the packing materials in an unauthorized manner.
The material is 100 % recyclable and complies with EEC Directive
85/399.
CAUTION!
In order to prevent outgassing problems, do not use bare hands to handle
components which will be exposed to vacuum. Always use gloves or other
appropriate protection.
NOTE
Normal exposure to the environment cannot damage the TPS-compact.
Nevertheless, it is advisable to keep it closed until it is installed in the system,
thus preventing any form of pollution by dust.

16
Instructions for Use
Installation
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Installation
CAUTION!
Do not remove the adhesive and protective cap before connecting the turbopump
to the system.
Do not install or use the pumping system in an environment exposed
to atmospheric agents (rain, snow, ice), dust, aggressive gases, or in
explosive environments or those with a high fire risk. During
operation, the following environmental conditions must be respected:
▪maximum pressure: 2 bar above atmospheric pressure
▪temperature: refer to the manuals of the single TPS components
▪relative humidity: refer to the manuals of the single TPS
components
In the presence of magnetic fields the pumping system must be
protected using a ferromagnetic shield.
The TPS-compact can be installed in any position. Fix the TPS-
compact in a stable position connecting the inlet flange of the
turbopump to a fixed counter-flange capable of withstanding a torque
of 50 Nm around its axis.
The turbopump with ISO inlet flange must be fixed to the vacuum
chamber by means of clamps or claws. The following table shows, for
each fixing device, the necessary number of clamps or claws and the
relevant fixing torque.
WARNING!
The System must be installed in a way that allows an easy interruption of the
line voltage.

Instructions for Use
Installation
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Power supply cord: The correct cable for electrical wiring is a three
wires (Ph+N+Earth) cable. The wire section has to be at least 0.75
mm2(AWG18).
CAUTION!
Assure a free space all around the system at minimum of 20cm to allow proper
air circulation.
FLANGE
FIXING DEVICE
N.
FIXING TORQUE
ISO 63
M10 clamps
4
22 Nm
ISO 100 K
M10 clamps
4
22 Nm
ISO 160 K
M10 clamps
4
22 Nm
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Agilent hardware. See
the appendix "Technical Information" for a detailed description.
NOTE
The TPS-compact cannot be fixed by means of its base.
For installation of optional accessories, see "Technical Information".

16
Instructions for Use
Use
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Use
This paragraph details the fundamental operating procedures.
Make all electrical an pneumatic connections before the use of the
system. While heating the vacuum chamber, the temperature of the
inlet flange must not exceed 120 °C with ConFlat flanging and 80 °C
with ISO flanging.
WARNING!
Never use the pumping system when the turboinlet flange is not connected to
the vacuum chamber or is not blanked.
WARNING!
Do not touch the turbopump or any of its accessories during the heating
process. The high temperatures may cause burns.
WARNING!
Avoid impacts or harsh movements of the pump when in operation. The
bearings may become damaged and damages to the persons or the things
could be taken place.

Instructions for Use
Use
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CAUTION!
Use inert gas free from dust, particles or humidity (like Nitrogen) for venting the
pump. The pressure at the vent port must be less than 2 bar (above atmospheric
pressure).
WARNING!
When employing the pump for pumping toxic, flammable, or radioactive
gases, please follow the required procedures for each gas disposal. Do not
use the pumping system in presence of explosive gases
Switching on and Use of TPS-Compact
To switch on the TPS-compact it is sufficient to supply the mains and
then move the external switch to ON position. The integrated
controller automatically recognizes the mains presence and start up
the pump.
At the first start up it is recommended to use the "Soft Start" mode by
enabling it on the controller. For the following start ups it is
recommended to disable the "Soft Start" mode. For the "Soft Start"
mode activation procedure, see the paragraph "Signal Description" in
the chapter "Technical Information".
The blue LED “STATUS” located on the TPS-compact base rear panel
indicates with its flashing frequency the system operating conditions:
▪with no flashing: the pump is normally rotating;
▪slowly flashing (period of about 400 ms): the system is in ramp,
or in braking, or in Stop, or in “Waiting for interlock” status;
▪fast flashing (period of about 200 ms): error condition.
See the appendix "Technical Information" for a detailed description
of the TPS-compact control panel.

16
Instructions for Use
Use
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TPS-Compact Switching off
To switch off the TPS-compact it is sufficient to move the external
switch to OFF position. The integrated controller immediately stops
the pumping system.
Emergency Stop
To immediately stop the TPS-compact in an emergency condition it is
necessary to remove the supply cable from the mains plug or moving
the external switch to OFF position.

Instructions for Use
Maintenance
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Maintenance
The TPS-compact does not require any maintenance (except Tip-seal
replacement). Any work performed on the system must be carried
out by authorized personnel.
WARNING!
Before carrying out any work on the system, disconnect it from the mains,
vent the pump by opening the appropriate valve, wait until the rotor has
stopped turning and wait until the surface temperature of the pump falls
below 50 °C.
In the case of breakdown, contact your local Agilent service center.
NOTE
Before returning the system to the constructor for repairs, the "Request for
Return" sheet attached to this instruction manual must be filled-in and sent to
the local sales office. A copy of the sheet must be inserted in the system
package before shipping.
If a system is to be scrapped, it must be disposed of in accordance
with the specific national standards.

16
Instructions for Use
Disposal
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Disposal
Meaning of the "WEEE" logo found in labels.
The following symbol is applied in accordance with the EC WEEE
(Waste Electrical and Electronic Equipment) Directive.
This symbol (valid only in countries of the European Community)
indicates that the product it applies to must NOT be disposed of
together with ordinary domestic or industrial waste but must be sent
to a differentiated waste collection system.
The end user is therefore invited to contact the supplier of the device,
whether the Parent Company or a retailer, to initiate the collection
and disposal process after checking the contractual terms and
conditions of sale.
For more information refer to:
http://www.agilent.com/environment/product/index.shtml

TPS-compact User Manual
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Technical Information
Description of the TPS-Compact 255
Turbopump Description 257
Controller Description 258
Control Panel Description 258
Scroll Pump Description 260
Technical Specification 261
TPS-Compact Outline 263
Inlet Screen Installation 267
High Vacuum Flange Connection 269
High Vacuum Flange Connection Configurations 271
ASDF –Adaptive Scroll Driving Firmware 272
Interconnections 274
Input Power Connector 274
P3 –Vent 274
Gauge Connector 275
Pressure Display Module 277
J5 –In-Out 278
Signal Description 279
How to Connect the Open Collector Input of the Controller
283
How to Connect the Outputs of the Controller 287
J6 –Serial 287
Original Instructions

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Technical Information
Disposal
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RS 232/RS 485 Communication Description 288
Communication Format 288
Serial Communication Descriptions 290
Window Protocol 291
Description 291
Communication Format 291
Communication Protocol 291
Examples 294
Window Meanings 297
Service Options 301
Cleaning 301
Exterior 301
Interior 301
Tip-Seal Replacement 302
To Remove the Worn Tip-Seals 303
To Install the new Seals and O-Rings 304
To test the Pumping System 305
Troubleshooting Chart 306
Replacement Parts and Accessories 307

Technical Information
Description of the TPS-Compact
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Description of the TPS-Compact
The TPS-compact pumping system consists of a pump with an
integrated controller and a forepump and is available in twenty-four
models which differ in the TPM size, high vacuum flange and voltage.
The models are:
P/N
TMP
Flange
Foreline
Voltage
X3580-64000
74 FS
KF40
3.6 m3/h Scroll
115V 60Hz
X3580-64001
74 FS
CFF 2.75
3.6 m3/h Scroll
115V 60Hz
X3580-64002
74 FS
ISO63
3.6 m3/h Scroll
115V 60Hz
X3580-64003
74 FS
CFF 4.5
3.6 m3/h Scroll
115V 60Hz
X3580-64004
304 FS
ISO100
3.6 m3/h Scroll
115V 60Hz
X3580-64005
304 FS
CFF6
3.6 m3/h Scroll
115V 60Hz
X3580-64006
304 FS
ISO160
3.6 m3/h Scroll
115V 60Hz
X3580-64007
304 FS
CFF8
3.6 m3/h Scroll
115V 60Hz
X3580-64010
74 FS
KF40
3.0m3/h Scroll
230V 50-60Hz
X3580-64011
74 FS
CFF 2.75
3.0m3/h Scroll
230V 50-60Hz
X3580-64012
74 FS
ISO63
3.0m3/h Scroll
230V 50-60Hz
X3580-64013
74 FS
CFF 4.5
3.0m3/h Scroll
230V 50-60Hz
X3580-64014
304 FS
ISO100
3.0m3/h Scroll
230V 50-60Hz
X3580-64015
304 FS
CFF6
3.0m3/h Scroll
230V 50-60Hz
X3580-64016
304 FS
ISO160
3.0m3/h Scroll
230V 50-60Hz
X3580-64017
304 FS
CFF8
3.0m3/h Scroll
230V 50-60Hz
X3580-64020
74 FS
KF40
3.6 m3/h Scroll
115V 60Hz
X3580-64021
74 FS
CFF 2.75
3.6 m3/h Scroll
100V 60Hz
X3580-64022
74 FS
ISO63
3.6 m3/h Scroll
100V 60Hz
X3580-64023
74 FS
CFF 4.5
3.6 m3/h Scroll
100V 60Hz
X3580-64024
304 FS
ISO100
3.6 m3/h Scroll
100V 60Hz
X3580-64025
304 FS
CFF6
3.6 m3/h Scroll
100V 60Hz
X3580-64026
304 FS
ISO160
3.6 m3/h Scroll
100V 60Hz
X3580-64027
304 FS
CFF8
3.6 m3/h Scroll
100V 60Hz

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Technical Information
Description of the TPS-Compact
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74 FS or 304 FS

Technical Information
Description of the TPS-Compact
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Turbopump Description
The turbopump consists of a high frequency motor driving a turbine
fitted with many bladed stages and Twistorr drag stages. The turbine
rotates in an anticlockwise direction when viewed from the high
vacuum flange end.
The turbine is made of high-strength, light aluminium alloy, and is
machined from a single block of aluminium. The Twistorr stages are
in the form of discs.
The turbine rotor is supported by permanently lubricated high
precision ceramic ball bearings installed on the forevacuum side of
the pump.
The static blades of the stator are fabricated in stainless steel. These
are supported and accurately positioned by spacer rings.
The TwisTorr stators are in the form of selfpositioning machined
disks. On each disk there are parallel spiral pumping channels
designed to pump in centrifugal direction on one side and in
centripetal direction on the other side. These are made of aluminium
alloy.
During normal operation, the motor functions with a power feed at
54 Vac three-phase at 1167 Hz (74 FS) or 1010 Hz (304 FS). To reduce
losses during start-up to a minimum, the frequency increases
according to a ramp with a higher initial voltage/frequency ratio.
A thermistor sensor is mounted near the upper bearing to prevent
the pump from overheating. The pump is balanced after assembly
with a residual vibration amplitude less than 0.01 µm.

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Technical Information
Description of the TPS-Compact
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Controller Description
The integrated controller is a solid-state frequency converter which is
driven by a single chip micro-computer and is composed of a PCB
which includes a power supply with a 3-phase AC output, analog and
input/output section, microprocessor and digital section. The
controller recognizes the mains presence and converts the single
phase AC mains supply into a 3-phase, medium frequency output
which is required to power the pump.
The controller can be operated by a remote host computer via the
serial connection.
Control Panel Description
The following picture shows the TPS-compact control panel; the
associated table lists the avail-able commands. For a detailed
description see the following paragraphs.