Endress+Hauser Analytik Jena PlasmaQuant MS Series User manual

Service Manual
PlasmaQuant MS series
ICP MS

2
Analytik Jena GmbH
Konrad-Zuse-Str.1
07745 Jena Germany
Phone + 49 3641 / 77 70
Fax + 49 3641 / 77 92 79
Email [e-mail]
Analytik Jena GmbH
Konrad-Zuse-Str. 1
07745 Jena Germany
Phone + 49 3641 / 77-7407 (Hotline)
Email [e-mail]
http://www.analytik-jena.com
PlasmaQuant is in Germany a registered trademark of Analytik Jena GmbH.
Microsoft and Windows are registered trademarks of Microsoft Corp.
The identification with ® or TM is omitted in this manual.
01.17 (A)
Analytik Jena GmbH
© Copyright 2017, Analytik Jena GmbH
Manufacturer
Service
General information
Copyrights and
Trademarks
Edition
Implementation of the
Documentation

PlasmaQuant MS Series Contents
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Contents
Service Manual..................................................................................................................... 1
PlasmaQuant MS series ICP MS......................................................................................... 1
Contents ............................................................................................................................... 3
1Safety Practices and Hazards ...................................................................................... 9
1.1 Safety Messages and Symbols........................................................................... 9
1.1.1 Warning Symbols ......................................................................................... 10
1.2 Color Coding...................................................................................................... 10
1.3 Information Symbols........................................................................................ 11
1.4 General Safety Hazards.................................................................................... 11
1.4.1 Plasma .......................................................................................................... 11
1.4.2 Electricity ...................................................................................................... 12
1.4.3 Compressed Gas ........................................................................................... 13
1.4.4 Heat, Ozone, Vapors, and Fumes................................................................ 14
1.4.5 Hazardous Materials.................................................................................... 14
1.4.6 Radio Frequency Radiation ......................................................................... 15
1.4.7 Ultraviolet Radiation.................................................................................... 15
1.5 ICP-MS Equipment Caution Notices................................................................ 15
1.6 Regulatory Compliance .................................................................................... 16
1.6.1 Federal Communications Commission Advisory (U.S. Only)..................... 16
1.6.2 Spurious and Harmonic Radiation Compliance.......................................... 16
1.6.3 CE Compliance.............................................................................................. 17
1.7 Maintaining Records ........................................................................................ 17
2Introduction................................................................................................................ 18
2.1 Audience ........................................................................................................... 18
2.2 Before You Begin.............................................................................................. 18
2.2.1 Safety Requirements.................................................................................... 18
2.3 Additional Resources........................................................................................ 19
3Preventative Maintenance Overview ....................................................................... 20
4Sample Introduction .................................................................................................. 22
4.1 System Description........................................................................................... 22
4.2 Theory of Operation......................................................................................... 23
4.2.1 Nebulizer ...................................................................................................... 23
4.2.2 Peristaltic Pump ........................................................................................... 24
4.2.3 Spray chamber.............................................................................................. 24
4.2.4 Sheath Gas Accessory Port .......................................................................... 25
4.2.5 Torch ............................................................................................................. 25

Contents PlasmaQuant MS Series
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4.2.6 Sample Introduction PCB ............................................................................ 26
4.3 Safety and Operational Information............................................................... 26
4.4 Specifications ................................................................................................... 28
4.5 Maintenance .................................................................................................... 28
4.5.1 Cleaning the Torch ...................................................................................... 29
4.5.2Removing and Replacing the Nebulizer..................................................... 30
4.5.3 Cleaning the Concentric Nebulizer ............................................................. 30
4.5.4 Removing and Replacing the Spray chamber............................................ 31
4.5.5 Cleaning the Spray Chamber....................................................................... 32
4.5.6 Replacing the Peristaltic Pump Tubing...................................................... 32
4.5.7Removing the Peristaltic Pump Assembly ................................................. 33
5Gas Control System.................................................................................................... 34
5.1 System Description .......................................................................................... 34
5.1.1 Instrument Gas Control ............................................................................... 34
5.1.2 iCRC Gas Control .......................................................................................... 38
5.2 Theory of Operation......................................................................................... 41
5.2.1 Instrument Gas Control ............................................................................... 41
5.2.2 iCRC Gas Control .......................................................................................... 45
5.3 Safety and Operational Information............................................................... 45
5.4 Specifications ................................................................................................... 45
5.5 Replacement/Maintenance ............................................................................ 46
5.5.1 Cover Removal Procedures to Access the Gas Control Box....................... 47
5.5.2 Removal of Sample Introduction PCB ........................................................ 48
5.5.3 Removing Sheath Gas, Nebulizer and Nitrox Mass Flow Controllers ...... 49
5.5.4 Removing the Argon Inlet Manifold with RG1 and RG2 Attached .......... 50
5.5.5 Removing Plasma/Auxiliary Gas Flow Manifold....................................... 51
5.5.6 Checking Plasma Gas Flows ........................................................................ 52
5.5.7 Checking Auxiliary Gas Flows...................................................................... 53
5.5.8 Igniter Assembly .......................................................................................... 54
5.5.9 Checking Sheath Gas Flow (MFC2) ............................................................ 54
5.5.10 Checking Nebulizer Gas Flow (MFC1) ................................................... 55
5.5.11 Adjusting Gate Valve............................................................................... 55
5.5.12 Removing and Maintaining the iCRC Box Assembly............................. 56
6Plasma Generation .................................................................................................... 60
6.1 System Description .......................................................................................... 60
6.2 Theory of Operation......................................................................................... 60
6.2.1 Plasma Formation ....................................................................................... 60
6.2.2 Igniter Assembly .......................................................................................... 61

PlasmaQuant MS Series Contents
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6.2.3 RF Generator Module .................................................................................. 62
6.2.4 DC Power Supply Module ............................................................................ 64
6.2.5 Translation Mechanism............................................................................... 65
6.2.6 Plasma Start-up Procedure ......................................................................... 66
6.3 Safety and Operational Information ............................................................... 67
6.4 Specifications.................................................................................................... 68
6.5 Maintenance..................................................................................................... 69
6.5.1 Repairing RF Generator............................................................................... 69
6.5.2 Repairing DC Power Supply......................................................................... 69
6.5.3 Maintaining Translator Platform................................................................ 69
6.5.4 Replacing Torch............................................................................................ 70
6.5.5Removing and Replacing the RF Generator............................................... 70
6.5.6 Replacing, Aligning, and Adjusting the Plasma Coil.................................. 72
6.5.7 Removing RF Enclosure Filter Assembly .................................................... 80
6.5.8 Removing Translator Platform.................................................................... 81
6.5.9 Removing the X-axis drive mechanism ...................................................... 83
6.5.10 Removing the Y-axis drive mechanism.................................................. 84
6.5.11 Removing the Z-axis drive mechanism.................................................. 85
6.5.12 Replacing the DC Supply Module............................................................ 85
6.5.13 Removing Igniter Assembly .................................................................... 87
6.5.14 Calibrating Translator Platform.............................................................. 87
7Vacuum System.......................................................................................................... 90
7.1 System Description........................................................................................... 90
7.2 Theory of Operation......................................................................................... 93
7.2.1 Vacuum System Start up.............................................................................. 93
7.2.2 Vacuum System Monitor Sequence ............................................................ 95
7.2.3 Vacuum System Shutdown Sequence......................................................... 96
7.2.4 Vacuum Vent Device .................................................................................... 97
7.2.5 The Thermocouple Gauge ........................................................................... 98
7.2.6 The Penning Vacuum Gauge....................................................................... 99
7.2.7 Thermovac Transmitter (GMain)..............................................................100
7.2.8 Turbo-molecular Pumps Turbo1 and Turbo2 ..........................................102
7.3 Safety and Operational Information .............................................................103
7.4 Specifications..................................................................................................103
7.5 Maintenance...................................................................................................106
7.5.1 Removing Turbo-molecular Pumps 1 and 2 ............................................106
7.5.2 Removing Gate Valve Assembly and Gate Valve Piston Assembly .........107
7.5.3 Checking and Changing Oil in Rotary Pumps...........................................109

Contents PlasmaQuant MS Series
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7.5.4 Maintaining Turbo-molecular Pumps...................................................... 110
7.5.5 Removing Thermocouple Gauge Head (G1)............................................ 111
8Mass Spectrometer.................................................................................................. 112
8.1 Introduction.................................................................................................... 112
8.2 System Description ........................................................................................ 112
8.3 Theory of Operation....................................................................................... 113
8.3.1 Ion Source................................................................................................... 113
8.3.2 Interface Assembly .................................................................................... 114
8.3.3 Ion Optics System ...................................................................................... 117
8.3.4 Mass Analyzer Assembly........................................................................... 128
8.3.5 Detector...................................................................................................... 133
8.4 Cone Specifications ........................................................................................ 138
8.5 Safety Information and Operational Tips..................................................... 139
8.6 Maintenance .................................................................................................. 142
8.7 Removal and Replacement Procedures........................................................ 144
8.7.1 Cones .......................................................................................................... 144
8.7.2 Detector Assembly..................................................................................... 147
8.7.3 Mass analyzer Assembly ........................................................................... 150
8.7.4 Ion Lens System......................................................................................... 152
9Quadrupole Controller............................................................................................. 156
9.1.1 System Description .................................................................................... 156
9.1.2 Quadrupole DC Power Supplies ................................................................ 157
9.1.3 Quadrupole Controller Cooling ................................................................. 158
9.1.4 Control PCB ................................................................................................ 158
9.1.5 RF Modulator and Driver........................................................................... 158
9.1.6 RF Detection Circuitry................................................................................ 158
9.1.7 RF Output Transformer ............................................................................. 158
9.1.8 RF Power Amplifier PCB............................................................................ 159
9.1.9 Connection Mass Analyzer........................................................................ 159
9.2 Theory of Operation....................................................................................... 159
9.2.1 Power Supply ............................................................................................. 160
9.2.2 DC Control Circuit....................................................................................... 160
9.2.3 RF Servo-loop............................................................................................. 161
9.2.4 Error Detection........................................................................................... 161
9.2.5 RF Modulator ............................................................................................. 161
9.2.6 RF Detector ................................................................................................ 162
9.2.7 Error Generation........................................................................................ 162
9.2.8Safety and Operational Information ........................................................ 162

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9.2.9 Specifications..............................................................................................163
9.3 Maintenance...................................................................................................164
9.3.1 Removing Quadrupole Controller .............................................................164
9.3.2 Quadrupole Control Drive Looms..............................................................167
9.3.3 Setting Rest Mass.......................................................................................169
9.3.4 Adjusting Resonation ................................................................................169
10 Electronics ...........................................................................................................173
10.1 Introduction ....................................................................................................173
10.2 System description .........................................................................................173
10.2.1 Electronics System Functional Overview..............................................173
10.2.2 Vacuum System Functionality...............................................................174
10.2.3 Plasma System Functionality ................................................................176
10.2.4 Ion Signal Control and Processing ........................................................178
10.2.5 Communication Functionality...............................................................179
10.2.6 Instrument Power Supplies...................................................................180
10.2.7 Instrument Interlocks and Sensors .......................................................180
10.3 Theory of Operation.......................................................................................182
10.3.1 System Control PCB ...............................................................................182
10.3.2 Amplifier/Discriminator PCB ................................................................183
10.3.3 Sample Introduction Interconnect PCB ................................................184
10.4 Safety Information and Operational Tips .....................................................188
11 Power Supply ......................................................................................................189
11.1 Introduction ....................................................................................................189
11.2 System Description.........................................................................................189
11.2.1 Ion Optics High Voltage Power Supply.................................................189
11.2.2 Quadrupole Controller...........................................................................190
11.2.3 Electrical Box Module............................................................................190
11.2.4 RF Generator..........................................................................................191
11.2.5 Utility Module ........................................................................................191
11.3 Theory of Operation.......................................................................................192
11.3.1 Ion Optics & Detector supply PCB.........................................................192
11.4 Testing and Servicing.....................................................................................197
11.4.1 Testing at the Board Level....................................................................198
11.5 Specifications..................................................................................................202
12 Troubleshooting..................................................................................................203
13 Schematics ..........................................................................................................204
14 Parts and Equipment..........................................................................................205
14.1 Tools, Test Equipment, Software and Documentation ................................205

Contents PlasmaQuant MS Series
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14.2 Recommended Spare Parts List .................................................................... 206
15 Maintenance Forms and Checklists................................................................... 211
15.1 Routine Maintenance Schedule .................................................................... 211
15.2 Operator Checklist.......................................................................................... 213
15.3 Preventative Maintenance Checklist ............................................................ 214
Figures.............................................................................................................................. 217
Tables............................................................................................................................... 221

PlasmaQuant MS Series Safety Practices and Hazards
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1Safety Practices and Hazards
The Analytik Jena PlasmaQuant ICP-MS (ICP-MS) and accessories have been carefully
designed so that when used properly it is an accurate, fast, flexible, and safe analytical
system. If the equipment is used in a manner not specified by the manufacturer, the
protection provided by the equipment may be impaired. Information on safety
practices appears throughout the documentation provided with all instruments and
accessories. Before using or servicing the instrument or accessories, you must
thoroughly read these safety practices. Observe all relevant safety practices at all
times.
Operation of the ICP-MS involves the use of compressed gases, high voltage radio
frequency energy, and hazardous materials, including corrosive fluids and flammable
liquids. When installed and used properly, the ICP-MS and its accessories provide an
accurate, fast, flexible, and safe analytical system. If you install and use the equipment
in a manner not specified by the manufacturer, the protection provided by the
equipment may be impaired. This can cause death or serious injury to personnel, or
severe damage to equipment and property.
This chapter describes the general and specific hazards you will encounter as you
interact with the ICP-MS and prescribes safety practices that can help protect you and
your equipment. Before installing and using the instrument or accessories, you must
thoroughly read these safety practices. Observe all relevant safety practices at all
times.
The safety practices described below are provided to help you operate the instrument
safely.
The spectrometer incorporates interlocks and covers which are designed to prevent
inadvertent contact with any of the potential hazards. It is good practice, however, to
develop safe working habits which do not depend upon the correct operation of the
interlocks for safe operation. It is essential that no interlock is bypassed, damaged, or
removed.
NOTE
The safety information presented in this manual is for the ICP-MS. Refer to the
manuals of the other Products/Accessories to ensure their safe and efficient
operation. Address any questions you have about the safe and proper use of the
instrument to Analytik Jena.
1.1 Safety Messages and Symbols
Safety messages and symbols are on the instrument, accessories, and throughout all
documentation. To prevent injury or equipment damage, pay attention to all labels,
lights, and symbols and read all messages.
The service manual uses the following symbols and signal words to indicate hazards or
instructions.

Safety Practices and Hazards PlasmaQuant MS Series
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WARNING
Indicates a potentially hazardous situation which might cause fatal or very serious
injuries (deformities).
CAUTION
Indicates a potentially hazardous situation which might cause light or minor
injuries.
NOTICE
Provides indications of potential material and environmental damage.
Notes (without symbol or signal word) are used to give advice or additional
information.
1.1.1 Warning Symbols
Certain specific hazards on and inside the ICP-MS cabinet are directly identified with
labels and multilingual warnings. Observe these precautions when working near the
relevant components.
WARNING
Yellow
triangles are used on warnings attached to the instrument. When you see a
warning symbol, refer to
the relevant safety information associated with that warning.
1.2 Color Coding
Indicator lights appearing on the ICP-MS instrument and accessories have been color-
coded to represent the status of the instrument or accessory:
Green: Indicates the instrument is in normal or standby condition.
Orange: Indicates a potential hazard is present.
Red: Warns of danger or an emergency.