GEM C53 iComLine User manual

GEMÜ C53 iComLine
Motorized control valve
Operating instructions
EN
further information
webcode: GW-C53

All rights including copyrights or industrial property rights are expressly reserved.
Keep the document for future reference.
© GEMÜ Gebr. Müller Apparatebau GmbH & Co. KG
25.08.2020
www.gemu-group.com2 / 24GEMÜ C53

Contents
1 General information .................................................. 4
1.1 Information .......................................................... 4
1.2 Symbols used ...................................................... 4
1.3 Definition of terms .............................................. 4
1.4 Warning notes ..................................................... 4
2 Safety information .................................................... 5
3 Product description ................................................... 5
4 Correct use ............................................................... 6
5 Order data ................................................................. 7
5.1 Order codes ......................................................... 7
5.2 Order example ..................................................... 7
6 Technical data .......................................................... 8
6.1 Medium ................................................................ 8
6.2 Temperature ........................................................ 8
6.3 Pressure ............................................................... 8
6.4 Product conformities .......................................... 10
6.5 Mechanical data .................................................. 10
6.6 Duty cycle and service life .................................. 10
6.7 Electrical data ...................................................... 10
7 Dimensions ............................................................... 12
8 Manufacturer's information ....................................... 13
8.1 Delivery ................................................................ 13
8.2 Packaging ............................................................ 13
8.3 Transport ............................................................. 13
8.4 Storage ................................................................. 13
9 Installation in piping .................................................. 13
9.1 Preparing for installation .................................... 13
9.2 Installation with flare connections ..................... 14
9.3 Installation with Pillar Super 300 Type .............. 14
9.4 Installation with PrimeLock connections .......... 14
10 Electrical connection ................................................. 15
10.1 Position of the connectors ................................. 15
10.2 Electrical connection ........................................... 15
11 Commissioning ......................................................... 16
11.1 Initialization ......................................................... 16
12 Inspection and maintenance ...................................... 17
13 Behaviour in the event of an error .............................. 17
14 Troubleshooting ........................................................ 18
15 Removal from piping ................................................. 19
16 Disposal .................................................................... 19
17 Returns ..................................................................... 19
18 Declaration of Incorporation according to 2006/42/
EC (Machinery Directive) ........................................... 20
19 Declaration of conformity according to 2014/30/EU
(EMC Directive) ......................................................... 21
20 Manufacturer's declaration ........................................ 22
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1 General information
1 General information
1.1 Information
– The descriptions and instructions apply to the stand-
ard versions. For special versions not described in this
document the basic information contained herein ap-
plies in combination with any additional special docu-
mentation.
– Correct installation, operation, maintenance and repair
work ensure faultless operation of the product.
– Should there be any doubts or misunderstandings, the
German version is the authoritative document.
– Contact us at the address on the last page for staff
training information.
1.2 Symbols used
The following symbols are used in this document:
Symbol Meaning
Tasks to be performed
Response(s) to tasks
– Lists
1.3 Definition of terms
Working medium
The medium that flows through the GEMÜ product.
Control PD
Control plug diaphragm = control plug diaphragm
Error position
The position of the valve that is approached in the event of an
error. Reaching the error position depends on the presence of
the power supply.
1.4 Warning notes
Wherever possible, warning notes are organised according to
the following scheme:
SIGNAL WORD
Type and source of the danger
Possible
symbol for the
specific
danger
Possible consequences of non-observance.
Measures for avoiding danger.
Warning notes are always marked with a signal word and
sometimes also with a symbol for the specific danger.
The following signal words and danger levels are used:
DANGER
Imminent danger!
▶Non-observance can cause death or
severe injury.
WARNING
Potentially dangerous situation!
▶Non-observance can cause death or
severe injury.
CAUTION
Potentially dangerous situation!
▶Non-observance can cause moderate
to light injury.
NOTICE
Potentially dangerous situation!
▶Non-observance can cause damage to
property.
The following symbols for the specific dangers can be used
within a warning note:
Symbol Meaning
Danger of explosion
Corrosive chemicals!
Hot plant components!

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2 Safety information
The safety information in this document refers only to an indi-
vidual product. Potentially dangerous conditions can arise in
combination with other plant components, which need to be
considered on the basis of a risk analysis. The operator is re-
sponsible for the production of the risk analysis and for com-
pliance with the resulting precautionary measures and re-
gional safety regulations.
The document contains fundamental safety information that
must be observed during commissioning, operation and main-
tenance. Non-compliance with these instructions may cause:
– Personal hazard due to electrical, mechanical and
chemical effects.
– Hazard to nearby equipment.
– Failure of important functions.
– Hazard to the environment due to the leakage of dan-
gerous materials.
The safety information does not take into account:
– Unexpected incidents and events, which may occur
during installation, operation and maintenance.
– Local safety regulations which must be adhered to by
the operator and by any additional installation person-
nel.
Prior to commissioning:
1. Transport and store the product correctly.
2. Do not paint the bolts and plastic parts of the product.
3. Carry out installation and commissioning using trained
personnel.
4. Provide adequate training for installation and operating
personnel.
5. Ensure that the contents of the document have been fully
understood by the responsible personnel.
6. Define the areas of responsibility.
7. Observe the safety data sheets.
8. Observe the safety regulations for the media used.
During operation:
9. Keep this document available at the place of use.
10. Observe the safety information.
11. Operate the product in accordance with this document.
12. Operate the product in accordance with the specifications.
13. Maintain the product correctly.
14. Do not carry out any maintenance work and repairs not de-
scribed in this document without consulting the manufac-
turer first.
In cases of uncertainty:
15. Consult the nearest GEMÜ sales office.
3 Product description
3.1 Construction
4
2
3
1
No. Name Materials
1 Actuator External actuator
parts made of
PVDF
2 Control PD PTFE TFM™
3 Valve body PFA, PTFE
4 Electrical
connection
PPS
3.2 Description
The 2/2-way diaphragm globe valve GEMÜ C53 iComLine was
developed for precise and demanding control applications in
semiconductor production. The sealing concept of the valve
is based on the tried and tested GEMÜ PD design, whereby ac-
tuator and medium are separated by a PTFE regulating cone.
As the regulating cone contour, actuator stroke and connec-
tion size can be customized to meet customers' require-
ments, the GEMÜ C53 iComLine satisfies virtually all control
and flow requirements of the high-tech semiconductor in-
dustry. Thanks to the combination of the precise stepper mo-
tor with ultra pure body materials, it is particularly suitable for
lithography, CMP, and etching processes, as well as applica-
tions in the analysis field of any semiconductor production.
3.3 Function
The product is designed for use in piping. It controls a flowing
medium by being closed or opened by a motorized actuator.
3 Product description

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4 Correct use
4 Correct use
DANGER
Danger of explosion
▶Risk of death or severe injury.
●Do not use the product in potentially
explosive zones.
WARNING
Improper use of the product
▶Risk of severe injury or death.
▶Manufacturer liability and guarantee will be void.
●Only use the product in accordance with the operating
conditions specified in the contract documentation and in
this document.
The product is designed for installation in piping systems and
for controlling a working medium.
The product is not intended for use in potentially explosive
areas.
●Use the product in accordance with the technical data.

5 Order data
The order data provide an overview of standard configurations.
Please check the availability before ordering. Other configurations available on request.
Order codes
1 Type Code
Plastic globe valve, electrical C53
2 Connection size Code
1/4", international code: 4 4
3/8", international code: 6 6
1/2", international code: 8 8
3/4", international code: 12 12
3 Body configuration Code
2/2-way body D
4 Connection type Code
Flare connection with CPFA union nut 73
Flare connection with PVDF union nut 75
Flare connection with PFA union nut 77
Super 300 type Pillar connection 79
PrimeLock connection PL
5 Valve body material Code
PTFE, polytetrafluoroethylene 26
PFA, perfluoroalkoxy 30
6 Seal material Code
PTFE 5
7 Voltage/frequency Code
24 V DC C1
8 Control module Code
Positioner 4–20 mA
Close error position
S1
Positioner 0–10 V
Close error position
V1
9 Actuator version Code
Actuator size 2
Seat diameter 9.55 mm
2A
10 Regulating cone Code
1 m³/h – mod.EQ R3234
1 m³/h – linear R3235
11 High Purity version Code
High Purity HP
Order example
Order option Code Description
1 Type C53 Plastic globe valve, electrical
2 Connection size 12 3/4", international code: 12
3 Body configuration D 2/2-way body
4 Connection type 75 Flare connection with PVDF union nut
5 Valve body material 30 PFA, perfluoroalkoxy
6 Seal material 5 PTFE
7 Voltage/frequency C1 24 V DC
8 Control module S1 Positioner 4–20 mA
Close error position
9 Actuator version 2A Actuator size 2
Seat diameter 9.55 mm
10 Regulating cone R3235 1 m³/h – linear
11 High Purity version HP High Purity
5 Order data
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6 Technical data
6.1 Medium
Working medium: Corrosive, inert, gaseous and liquid media which have no negative impact on the physical and
chemical properties of the body and diaphragm material.
6.2 Temperature
Media temperature: 10 to 150 °C
Observe pressure/temperature diagram
Ambient temperature: 0 to 40 °C
Storage temperature: -10 to 40 °C
6.3 Pressure
Operating pressure: 0 to 6 bar
Temperature [°C]
Pressure [bar]
Temperature [°F]
Pressure [PSI]
on customer request
Permissible operating range
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6 Technical data

Kv values: Equal-percentage, regulating cone code R3234
Stroke 1/4" 3/8" 1/2" 3/4"
0% 0.0 0.0 0.0 0.0
12.5% 2.0 2.1 2.1 2.1
25% 2.1 2.3 2.3 2.3
50% 3.0 4.0 4.0 4.0
75% 3.9 7.3 7.5 7.5
100% 4.3 11.4 12.8 12.8
Kv values in l/min
Kv value in l/min
Stroke
Linear, regulating cone code R3235
Stroke 1/4" 3/8" 1/2" 3/4"
0% 0.0 0.0 0.0 0.0
12.5% 2.2 2.3 2.3 2.3
25% 2.9 3.7 3.7 3.7
50% 4.0 6.5 7.4 7.4
75% 4.2 9.8 11.1 11.1
100% 4.3 13.0 14.8 14.8
Kv values in l/min
Kv value in l/min
Stroke
Further Kv value characteristics on request
Vacuum: 400 mbar absolute
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6 Technical data

6.4 Product conformities
Machinery Directive: 2006/42/EU
EMC Directive: 2014/30/EU
Interference resistance: DIN EN 61000-6-2
Interference emission: DIN EN 61000-6-4
6.5 Mechanical data
Protection class: IP 65 acc. to EN 60529
Weight: Connection size Weight
1/4" 660 g
3/8" 660 g
1/2" 600 g
3/4" 600 g
6.6 Duty cycle and service life
Service life: Open/Close duty – Minimum 1,000,000 switching cycles at room temperature and permissible duty
cycle.
Control operation – Class C acc. to EN 15714-2 (1,800,000 start-ups).
Duty cycle: 60% duty
6.7 Electrical data
6.7.1 Supply voltage
Voltage: 24 V DC ± 10%
Rating: ≤ 24 W (24 V DC)
Reverse battery
protection:
Yes
6.7.2 Analogue input signals
6.7.2.1 Set value as current signal, control module code S1
Input signal: 4 - 20 mA
Input type: passive
Input resistance: 50 Ω
Control accuracy: ±1%
6.7.2.2 Set value as voltage signal, control module code V1
Input signal: 0–10 V
Input type: passive
Input resistance: 110 KΩ
Control accuracy: ±1%
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6 Technical data

6.7.3 Digital input signals
Function: Initialization of the positioner
Voltage: 24 V DC
Logic level "1": > 15 V DC
Logic level "0": ≤ 5 V DC
6.7.4 Analogue output signals
6.7.4.1 Actual value as current signal, control module code S1
Output signal: 4 - 20 mA
Output type: active
Load resistor: 750 Ω
Short-circuit proof: Yes
6.7.4.2 Actual value as voltage signal, control module code V1
Output signal: 0–10 V
Output type: active
Short-circuit proof: Yes
6.7.5 Behaviour in the event of an error
Function: In the event of an error the valve moves to the error position.
Notes: Moving to the error position is only possible with full power supply. This behaviour is not a
safety position. The valve must be operated with a GEMÜ 1571 emergency power supply module
(see accessories) to ensure the function in case of voltage loss.
Error position: Closed
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6 Technical data

7 Dimensions
Connection size Actuator version Connection A1 A5 ■B B1 E H2 L N1 N2 ØN
3
N4
1/4" 2A Flare 131.0 146.0 50.0 71.0 50.0 16.0 111.0 71.0 49.0 6.0 12.0
PrimeLock 131.0 146.0 50.0 71.0 50.0 16.0 109.0 71.0 49.0 6.0 12.0
Pillar 131.0 146.0 50.0 71.0 50.0 16.0 88.0 71.0 49.0 6.0 12.0
3/8" 2A Flare 131.0 146.0 50.0 71.0 50.0 16.0 117.8 71.0 49.0 6.0 12.0
PrimeLock 131.0 146.0 50.0 71.0 50.0 16.0 113.0 71.0 49.0 6.0 12.0
Pillar 131.0 146.0 50.0 71.0 50.0 16.0 100.0 71.0 49.0 6.0 12.0
1/2" 2A Flare 131.0 146.0 50.0 71.0 50.0 16.0 121.6 31.0 63.5 6.0 12.0
PrimeLock 131.0 146.0 50.0 71.0 50.0 16.0 120.0 31.0 63.5 6.0 12.0
Pillar 131.0 146.0 50.0 71.0 50.0 16.0 108.0 71.0 49.0 6.0 12.0
3/4" 2A Flare 131.0 146.0 50.0 71.0 50.0 16.0 128.0 31.0 63.5 6.0 12.0
PrimeLock 131.0 146.0 50.0 71.0 50.0 16.0 128.0 31.0 63.5 6.0 12.0
Pillar 131.0 146.0 50.0 71.0 50.0 16.0 108.0 71.0 49.0 6.0 12.0
Dimensions in mm
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7 Dimensions

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8 Manufacturer's information
The controller required for valve operation is not included in
the scope of delivery.
8.1 Delivery
●Check that all parts are present and check for any damage
immediately upon receipt.
The product's performance is tested at the factory. The scope
of delivery is apparent from the dispatch documents and the
design from the order number.
8.2 Packaging
The product is packaged in a cardboard box which can be re-
cycled as paper.
8.3 Transport
1. Only transport the product by suitable means. Do not drop.
Handle carefully.
2. After the installation dispose of transport packaging ma-
terial according to relevant local or national disposal regu-
lations / environmental protection laws.
8.4 Storage
1. Store the product free from dust and moisture in its ori-
ginal packaging.
2. Avoid UV rays and direct sunlight.
3. Do not exceed the maximum storage temperature (see
chapter "Technical data").
4. Do not store solvents, chemicals, acids, fuels or similar
fluids in the same room as GEMÜ products and their spare
parts.
9 Installation in piping
CAUTION
Fixing with suitable media resistant plastic bolts (not in-
cluded in the scope of delivery)
▶Corrosion and contamination when using metal bolts.
9.1 Preparing for installation
WARNING
The equipment is subject to pressure!
▶Risk of severe injury or death.
●Depressurize the plant.
●Completely drain the plant.
WARNING
Corrosive chemicals!
▶Risk of caustic burns.
●Wear suitable protective gear.
●Completely drain the plant.
CAUTION
Hot plant components!
▶Risk of burns.
●Only work on plant that has cooled
down.
CAUTION
Exceeding the maximum permissible pressure.
▶Damage to the product.
●Provide precautionary measures against exceeding the
maximum permitted pressures caused by pressure
surges (water hammer).
CAUTION
Use as step.
▶Damage to the product.
▶Risk of slipping-off.
●Choose the installation location so that the product can-
not be used as a foothold.
●Do not use the product as a step or a foothold.
NOTICE
Suitability of the product!
▶The product must be appropriate for the piping system
operating conditions (medium, medium concentration,
temperature and pressure) and the prevailing ambient
conditions.
9 Installation in piping

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9 Installation in piping
NOTICE
Tools
▶The tools required for installation and assembly are not
included in the scope of delivery.
●Use appropriate, functional and safe tools.
1. Ensure the product is suitable for the relevant application.
2. Check the technical data of the product and the materials.
3. Keep appropriate tools ready.
4. Wear appropriate protective gear, as specified in the plant
operator's guidelines.
5. Observe appropriate regulations for connections.
6. Have installation work carried out by trained personnel.
7. Shut off plant or plant component.
8. Secure plant or plant component against recommission-
ing.
9. Depressurize the plant or plant component.
10. Completely drain the plant (or plant component) and let it
cool down until the temperature is below the media vapor-
ization temperature and cannot cause scalding.
11. Correctly decontaminate, rinse and ventilate the plant or
plant component.
12. Lay piping so that the product is protected against trans-
verse and bending forces, and also from vibrations and
tension.
13. Only install the product between matching aligned pipes
(see chapters below).
14. Please note the flow direction.
15. Please note the installation position.
9.2 Installation with flare connections
1. For preparation and connection of the flare connections,
please refer to GEMÜ FlareStar® brochure and GEMÜ
Flare and assembly instructions.
2. Push the flared tube onto the flare connection.
3. Screw the union nut over it.
4. Depending on the ambient conditions, use resistant and
suitable connection fittings.
9.3 Installation with Pillar Super 300 Type
1. Tubing preparation by sleeve installation (observe the
manufacturer's instructions: www.nipponpillar.com/Down-
load/Fittings/S-300 Instruction manual).
2. Assemble Pillar Super 300 Type connection with prepared
tube.
3. Tighten Pillar Super 300 Type union nut.
9.4 Installation with PrimeLock connections
1. Tubing preparation by sleeve installation (observe the
manufacturer's instructions: www.entegrisfluidhand-
ling.com/Product.aspx?G=1905.
2. Assemble PrimeLock connection with prepared tube.
3. Tighten PrimeLock union nut.

10 Electrical connection
10.1 Position of the connectors
X1
10.2 Electrical connection
Connection X1
1
4
3
2
5
5-pin M12 built-in socket. A-coded
Pin Signal name
1 24 V supply voltage
2 I+/U+, set value input
3 GND
4 I+/U+, actual value output
5 Digital input 1
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10 Electrical connection

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11 Commissioning
11 Commissioning
11.1 Initialization
Initialization is already carried out for the process valve which
was fully assembled at the factory.
Initialization must be carried out in the following situations:
– Replacement of the control PD
Initialization can be carried out using the following proced-
ures:
– On-site initialization
– Initialization via digital input
11.1.1 On-site initialization of the end positions
NOTICE
Omission of the supply voltage during the initialization
●In the case of omission of the supply voltage during the
initialization, all values that have already been determined
are lost. Initialization must be carried out again after res-
toration of the supply voltage.
1
1. Connect supply voltage
2. Hold the magnet briefly (>100 ms) at the point on the
housing cover marked with INIT 1.
ðValve automatically moves into the CLOSED position.
ðValve automatically moves into the OPEN position.
ðInitialization mode is automatically ended.
ðValve moves towards the specified set value.
ðThe end positions are set.
11.1.2 Initialization via digital input
NOTICE
Omission of the supply voltage during the initialization
●In the case of omission of the supply voltage during the
initialization, all values that have already been determined
are lost. Initialization must be carried out again after res-
toration of the supply voltage.
1. Connect supply voltage
2. Set digital input to logic level 1
(>100 ms, 24 V DC).
ðValve automatically moves into the CLOSED position.
ðValve automatically moves into the OPEN position.
ðInitialization mode is automatically ended.
ðValve moves towards the specified set value.
ðThe end positions are set.

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12 Inspection and maintenance
WARNING
The equipment is subject to pressure!
▶Risk of severe injury or death.
●Depressurize the plant.
●Completely drain the plant.
CAUTION
Use of incorrect spare parts!
▶Damage to the GEMÜ product.
▶Manufacturer liability and guarantee will be void.
●Use only genuine parts from GEMÜ.
CAUTION
Hot plant components!
▶Risk of burns.
●Only work on plant that has cooled
down.
NOTICE
Exceptional maintenance work!
▶Damage to the GEMÜ product.
●Any maintenance work and repairs not described in these
operating instructions must not be performed without
consulting the manufacturer first.
The operator must carry out regular visual examination of the
GEMÜ products depending on the operating conditions and
the potential danger in order to prevent leakage and damage.
The product also must be disassembled and checked for
wear in the corresponding intervals.
1. Have servicing and maintenance work performed by
trained personnel.
2. Wear appropriate protective gear as specified in plant op-
erator's guidelines.
3. Shut off plant or plant component.
4. Secure plant or plant component against recommission-
ing.
5. Depressurize the plant or plant component.
6. Actuate GEMÜ products which are always in the same po-
sition four times a year.
13 Behaviour in the event of an error
In the event of an error the valve moves to the error position
(see Technical data).
The behaviour cannot be changed.
Moving to the error position is only possible with full power
supply. This behaviour is not a safety position. The valve must
be operated with a GEMÜ 1571 emergency power supply
module (see accessories) to ensure the function in case of
voltage loss.
13 Behaviour in the event of an error

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14 Troubleshooting
14 Troubleshooting
Error Possible cause Troubleshooting
Working medium escapes from leak
detection hole
Control PD faulty Replace valve
The product doesn't open or doesn't open
fully
Actuator defective Replace valve
Control PD incorrectly mounted Replace valve
The product leaks downstream (doesn't
close or doesn't close fully)
Operating pressure too high Operate the product with operating
pressure specified in datasheet
Control PD incorrectly mounted Replace valve
Foreign matter between control PD and
valve seat
Replace valve
Valve body leaks or is damaged Check valve body for damage, replace
valve if necessary
Control PD faulty Replace valve
The product leaks between actuator and
valve body
Control PD incorrectly mounted Replace valve
Bolting between valve body and actuator
loose
Replace valve
Control PD faulty Replace valve
Actuator/valve body damaged Replace valve
Connection between valve body and
piping leaking
Incorrect installation Check installation of valve body in piping
Valve body connection to piping leaks Sealing material faulty Replace sealing material
Valve body leaks Valve body leaks or is corroded Check valve body for damage, replace
valve if necessary
Valve doesn't open/close or doesn't
open/close fully
Voltage is not connected Connect voltage
Cable ends incorrectly wired Wire cable ends correctly
Initialization has not been carried out fully Carry out initialization again
Valve moves to error position Set value signal < 3.5 mA Check set value

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15 Removal from piping
1. Remove the clamp or screw connections in reverse order
to installation.
2. Remove welded or solvent cemented connections using a
suitable cutting tool.
3. Observe the safety information and accident prevention
regulations.
16 Disposal
1. Pay attention to adhered residual material and gas diffu-
sion from penetrated media.
2. Dispose of all parts in accordance with the disposal regu-
lations/environmental protection laws.
17 Returns
Legal regulations for the protection of the environment and
personnel require that the completed and signed return deliv-
ery note is included with the dispatch documents. Returned
goods can be processed only when this note is completed. If
no return delivery note is included with the product, GEMÜ
cannot process credits or repair work but will dispose of the
goods at the operator's expense.
1. Clean the product.
2. Request a return delivery note from GEMÜ.
3. Complete the return delivery note.
4. Send the product with a completed return delivery note to
GEMÜ.
17 Returns

18 Declaration of Incorporation according to 2006/42/EC (Machinery Directive)
Declaration of Incorporation
according to the EC Machinery Directive 2006/42/EC, Annex II, 1.B for partly
completed machinery
We, GEMÜ Gebr. Müller Apparatebau GmbH & Co. KG
Fritz-Müller-Straße 6-8
74653 Ingelfingen-Criesbach, Germany
declare that the following product
Make: GEMÜ
Commercial name: GEMÜ C53
meets the following essential requirements of the Machinery Directive 2006/42/EC:
1.1.2, 1.1.3, 1.1.5, 1.3.2, 1.3.3, 1.3.4, 1.5.1, 1.5.2
We also declare that the specific technical documentation has been compiled in accordance with part B of Annex VII.
The manufacturer or his authorised representative undertake to transmit, in response to a reasoned request by the national au-
thorities, relevant information on the partly completed machinery. This transmission takes place:
Electronically
Authorised documentation officer GEMÜ Gebr. Müller Apparatebau GmbH & Co. KG
Fritz-Müller-Straße 6-8
74653 Ingelfingen, Germany
This does not affect the industrial property rights!
Important note! The partly completed machinery may be put into service only if it was determined, where appropriate, that the
machinery into which the partly completed machinery is to be installed meets the provisions of this Directive.
2020-08-04
Joachim Brien
Head of Technical Department
www.gemu-group.com20 / 24GEMÜ C53
18 Declaration of Incorporation according to 2006/42/EC (Machinery Directive)