MKS 350 Series User manual

Series 350
Instruction Manual
UHV Gauge Controller
Instruction manual part number 350010
Revision G - March 2020

Instruction Manual
Series 350
This Instruction Manual is for use with Series 350 Ultra High
Vacuum Gauge Controllers. A list of applicable catalog
numbers is provided on the following page.
© 2020 MKS Instruments, Inc. All rights reserved.
Granville-Phillips®, Stabil-Ion®, and Convectron®are registered trademarks, and mksinstTM
is a trademark of MKS Instruments Inc. All other trademarks and registered trademarks are
the properties of their respective owners.
UHV Gauge Controller
Customer Service / Technical Support:
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: [phone]
Email: [e-mail]
Visit our website at www.mksinst.com

Series 350 UHV Gauge Controller
Catalog numbers for Series 350 Ultra High Vacuum Gauge Controllers
Controller configured for a Series 274 UHV nude Bayard-Alpert gauge, with 1-line display, electron
bombardment degas, and remote input/output interface
Half-rack mount 350501 - # - # #
Left mount for 19-inch rack 350502 - # - # #
Center mount for 19-inch rack 350503 - # - # #
Options:
None 0
RS-232 A
RS-232 or RS-485 switchable with 4 setpoints F
2 setpoint relays for the ionization gauge G
Measurement Units:
Torr T
mbar M
pascal P
Power cord options:
North American 115 V 1
North American 240 V 2
Universal Europe 220 V 3
United Kingdom 240 V 4
Controller configured for a Series 274 UHV nude Bayard-Alpert gauge and dual Convectron gauge operation,
with 3-line display, electron bombardment degas, and remote input/output interface
Half-rack mount 350507 - # - # #
Left mount for 19-inch rack 350508 - # - # #
Center mount for 19-inch rack 350509 - # - # #
Options:
None 0
RS-232 or RS-485 switchable with 4 setpoints F
Measurement Units:
Torr T
mbar M
pascal P
Power cord options:
North American 115 V 1
North American 240 V 2
Universal Europe 220 V 3
United Kingdom 240 V 4

350 UHV Gauge Controller Instruction Manual - 350010 5
Contents
Chapter 1 Before You Begin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.1 About These Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.2 Caution and Warning Statements . . . . . . . . . . . . . . . . . . . . 9
1.3 Read and Follow These Instructions . . . . . . . . . . . . . . . . . . 10
1.4 System Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.5 Explosive Gases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.6 Implosion / Explosion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.7 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.8 Customer Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Chapter 2 350 Gauge Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.1 General Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Available Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
IG Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Mounting Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Line Voltage Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Mounting Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . 17
EMC Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Ionization Gauge Types and Installation . . . . . . . . . . . . . . . 19
Cable Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.3 Wiring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
System Ground Test Procedure . . . . . . . . . . . . . . . . . . . . . . 24
2.4 Controls and Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Units of Measure [1] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Power On/Off [4] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Ion Gauge On/Off [2] . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Degas On/Off [3] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Remote Input/Output [5] . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
2.5 Ionization Gauge Theory of Operation . . . . . . . . . . . . . . . . 28
350 UHV Gauge Controller Specifications . . . . . . . . . . . . . 29
Chapter 3 Electrometer Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
3.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
3.2 Units of Measure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
3.3 Display Update Rate Switch [8] . . . . . . . . . . . . . . . . . . . . . 34
3.4 Degas Timer Override [6] . . . . . . . . . . . . . . . . . . . . . . . . . . 34
3.5 Calibration Switch [9] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
3.6 Emission Range Switch [10] . . . . . . . . . . . . . . . . . . . . . . . . 35
3.7 Emission Adjustment [11] . . . . . . . . . . . . . . . . . . . . . . . . . . 35
3.8 Sensitivity Adjustment [12] . . . . . . . . . . . . . . . . . . . . . . . . . 36
3.9 Relative Gas Sensitivities . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
3.10 Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
3.11 Electrometer Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

350 UHV Gauge Controller Instruction Manual - 350010 6
Electrometer Span Adjustment [13] . . . . . . . . . . . . . . . . . . . 39
Overpressure Shutdown Adjustment [14] . . . . . . . . . . . . . . 39
A/D calibration [15] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
Chapter 4 Process Control Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
4.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
4.2 Process Control System Connections . . . . . . . . . . . . . . . . . . 41
4.3 To Display a Setpoint . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
4.4 To Modify a Setpoint . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
4.5 Relay Polarity Setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
4.6 Relay Disable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
4.7 Pin Assignments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
4.8 Process Control Operation . . . . . . . . . . . . . . . . . . . . . . . . . 44
Setpoint Display and Adjustment . . . . . . . . . . . . . . . . . . . . 44
Manual Override [16] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
4.9 Process Control Theory of Operation . . . . . . . . . . . . . . . . . 45
Process Control Specifications . . . . . . . . . . . . . . . . . . . . . . 45
Chapter 5 RS-232 Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
5.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
5.2 RS-232 Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
Selecting the Byte Format . . . . . . . . . . . . . . . . . . . . . . . . . . 47
Baud Rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
Character Framing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
Talk-Only Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
Handshake Line Control Switches . . . . . . . . . . . . . . . . . . . . 48
Invert RTS Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
5.3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
Command Syntax . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
DG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
DGS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
DS IG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
IG1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
IG2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
5.4 RS-232 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . 51
Handshaking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
CTS, DSR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
DCD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
DTR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
RTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
5.5 Reversing the Polarity of RTS . . . . . . . . . . . . . . . . . . . . . . . 52
5.6 RS-232 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
RS-232 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53

350 UHV Gauge Controller Instruction Manual - 350010 7
Chapter 6 Digital Interface Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
6.1 Process Control Installation . . . . . . . . . . . . . . . . . . . . . . . . . 55
6.2 Process Control System Connections . . . . . . . . . . . . . . . . . . 55
6.3 To Display a Setpoint . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
6.4 To Modify a Setpoint . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
6.5 Process Control Connector . . . . . . . . . . . . . . . . . . . . . . . . . 57
6.6 Process Control Display Assignment . . . . . . . . . . . . . . . . . . 57
6.7 Manual Override . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
6.8 RS-232/RS-485 Installation . . . . . . . . . . . . . . . . . . . . . . . . . 58
6.9 Setpoint Display and Adjustment . . . . . . . . . . . . . . . . . . . . 60
6.10 Switch Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
6.11 RS-232 Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
6.12 RS-485 Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
6.13 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
RS-232/RS-485 Command Syntax . . . . . . . . . . . . . . . . . . . . 66
DG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
DGS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
IGB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
RD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
F1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
F2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
PC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
RS-232/RS-485 Signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
RS-232 and RS-485 Start Characters . . . . . . . . . . . . . . . . . . 70
6.14 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Host Computer Interface Specifications . . . . . . . . . . . . . . . . 71
Chapter 7 Convectron Gauge Module . . . . . . . . . . . . . . . . . . . . . . . . . . 73
7.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
7.2 Safety Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
7.3 Installation Considerations . . . . . . . . . . . . . . . . . . . . . . . . . 77
7.4 Orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
7.5 Mounting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
Compression Mount . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
1/8 NPT Mount . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
NW Flange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
7.6 Reading Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
Operation Below 10–3 Torr . . . . . . . . . . . . . . . . . . . . . . . . . 80
Use with Gases Other Than N2 or Air . . . . . . . . . . . . . . . . . 80
Indicated Versus True Pressure . . . . . . . . . . . . . . . . . . . . . . 81
7.7 Unit of Measure [16 and 17] . . . . . . . . . . . . . . . . . . . . . . . . 86
7.8 Display Update Rate Switch [18] . . . . . . . . . . . . . . . . . . . . 86
7.9 Analog Output [20 and 21] . . . . . . . . . . . . . . . . . . . . . . . . . 87
7.10 Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88

350 UHV Gauge Controller Instruction Manual - 350010 8
Analog Output Full Scale Adjustment [27] . . . . . . . . . . . . . 88
7.11 Analog Output Offset for Gauges A and B [28 and 29] . . . . 89
Zero Adjustment [23 and 26] . . . . . . . . . . . . . . . . . . . . . . . 90
Atmosphere Adjustment [22 and 25] . . . . . . . . . . . . . . . . . . 90

350 UHV Gauge Controller Instruction Manual - 350010 9
350 Controller Electrometer PC Module RS-232 Module PC/RS-232/RS-485
Module
Chapter 1 Before You Begin
1.1 About These Instructions These instructions explain how to install, operate, and maintain the
Series 350 UHV gauge controller.
This chapter explains caution and warning statements, which must be
adhered to at all times; explains your responsibility for reading and
following all instructions; defines the terms that are used throughout this
instruction manual; and explains how to contact customer service.
1.2 Caution and Warning
Statements
This manual contains caution and warning statements with which you must
comply to prevent inaccurate measurement, property damage, or personal
injury.
Caution and warning statements comply with American Institute of
Standards Z535.1-2002 through Z535.5-2002, which set forth voluntary
practices regarding the content and appearance of safety signs, symbols,
and labels.
Each caution or warning statement explains:
a. The specific hazard that you must prevent or unsafe practice that you
must avoid,
b. The potential result of your failure to prevent the specified hazard or
avoid the unsafe practice, and
c. What you must do to prevent the specified hazardous result.
CAUTION
Caution statements alert you to hazards or unsafe
practices that could result in inaccurate
measurement, minor personal injury or property
damage.
Each caution statement explains what you must do to prevent or
avoid the potential result of the specified hazard or unsafe
practice.
WARNING
Warning statements alert you to hazards or unsafe
practices that could result in severe property damage or
personal injury due to electrical shock, fire, or explosion.
Each warning statement explains what you must do to prevent
or avoid the potential result of the specified hazard or unsafe
practice.

Chapter 1
10 350 UHV Gauge Controller Instruction Manual - 350010
1.3 Read and Follow These
Instructions
You must comply with all instructions while you are installing, operating,
or maintaining the Series 350 UHV controller or vacuum gauges. Failure to
comply with the instructions violates standards of design, manufacture, and
intended use of the controller. MKS Instruments, Inc. disclaims all liability
for the customer's failure to comply with the instructions.
•Read instructions – Read all instructions before installing or operating the
product.
•Follow instructions – Follow all installation, operating and maintenance
instructions.
•Retain instructions – Retain the instructions for future reference.
•Heed warnings and cautions – Adhere to all warnings and caution
statements on the product and in these instructions.
•Parts and accessories – Install only those replacement parts and
accessories that are recommended by MKS. Substitution of parts is
hazardous.
Danger - High Voltage 180 Vdc is present on the Series 350 Controller on the cable and the
ionization gauge when the gauge is turned ON. Voltages as high as 700 Vdc
peak are present during degas.
1.4 System Grounding Grounding, though simple, is very important! Be certain that ground circuits
are correctly used on your ion gauge power supplies, gauges, and vacuum
chambers, regardless of their manufacturer. Safe operation of vacuum
equipment, including the Series 350 High Vacuum Gauge Controller,
requires grounding of all exposed conductors of the gauges, the controller
and the vacuum system. LETHAL VOLTAGES may be established under
some operating conditions unless correct grounding is provided.
Ion producing equipment, such as ionization gauges, mass spectrometers,
sputtering systems, etc., from many manufacturers may, under some
conditions, provide sufficient electrical conduction via a plasma to couple
a high voltage electrode potential to the vacuum chamber. If exposed
conductive parts of the gauge, controller, and chamber are not properly
grounded, they may attain a potential near that of the high voltage electrode
during this coupling. Potential fatal electrical shock could then occur
because of the high voltage between these exposed conductors and ground.
WARNING
Read these safety notices and warnings before installing,
using, or servicing this equipment. If you have any
doubts regarding the safe use of this equipment, contact
the MKS Customer Service department.