MKS 651D Series User manual

118965-P1
Preliminary, 5/02
MKS Type 651D
Pressure Controller

Copyright © 2001 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by
MKS Instruments, Inc.
Baratronis a registered trademark of MKS Instruments, Inc., Andover, MA
This manual is for firmware version: pre-release

Table of Contents
iii
Table of Contents
Safety Information..................................................................................................................1
Symbols Used in This Instruction Manual ..................................................................1
Symbols Found on the Unit........................................................................................2
Safety Procedures and Precautions.............................................................................3
Chapter One: General Information.........................................................................................5
Introduction ...............................................................................................................5
How This Manual is Organized...................................................................................6
Customer Support......................................................................................................7
Chapter Two: Installation.......................................................................................................9
How To Unpack the Type 651 Unit.............................................................................9
Unpacking Checklist......................................................................................9
Product Location and Requirements...........................................................................10
Operating Environmental Requirements.........................................................10
Safety Conditions...........................................................................................10
Product Compatibility.................................................................................................11
Valves............................................................................................................11
Transducers...................................................................................................11
Interface Cables..........................................................................................................12
Interface Cables.............................................................................................12
Adapter Cables...............................................................................................13
Generic Shielded Cables ................................................................................14
Setup..........................................................................................................................16
Mounting Instructions....................................................................................16
Power and Fuse Requirements.......................................................................16
Grounding.....................................................................................................17
How To Set the Line Voltage .........................................................................17
Connectors.................................................................................................................19
Rear Panel Connectors...................................................................................19

Table of Contents
iv
RS-232 Serial Interface Connector.................................................................20
Interface (I/O) Connector..............................................................................21
Transducer Connector...................................................................................23
Valve Connector............................................................................................24
Chapter Three: Overview ......................................................................................................25
Control Mode.............................................................................................................25
Gain and Phase..............................................................................................25
Set Points...................................................................................................................28
Softstart Rates............................................................................................................28
Process Limit Relays..................................................................................................29
Front Panel Components............................................................................................30
Display Window............................................................................................30
Key Lock Switch...........................................................................................30
Arrow Keys...................................................................................................31
Adjust Knob..................................................................................................31
Learn Key......................................................................................................31
Valve Position Control Keys..........................................................................31
Set Point Selection Keys................................................................................31
Rear Panel Components.............................................................................................32
Valve Connector -Slot 4...............................................................................32
Transducer Connectors -Slot 3.....................................................................32
Interface Connector -Slot 2...........................................................................32
RS-232 Serial Interface Connector -Slot 1....................................................32
Power ON/OFF Switch .................................................................................32
Line Voltage Selector Switch.........................................................................33
Fuse Holder...................................................................................................33
Optional Valve Failsafe Battery Back-Up ...................................................................34
Battery Voltage..............................................................................................34
Valve Positions..............................................................................................34
Threshold Voltage Check ..............................................................................35
Expected Battery Life.....................................................................................35
Battery Storage..............................................................................................36

Table of Contents
v
Labels.........................................................................................................................37
Voltage and Fuse Label..................................................................................37
Serial Number Label......................................................................................37
Attention Label ..............................................................................................37
Chapter Four: Local Operation...............................................................................................39
General Information...................................................................................................39
Startup........................................................................................................................40
Optional Valve Failsafe Battery Back-Up .......................................................40
How To Check the Battery Voltage ................................................................42
Setup..........................................................................................................................43
How to Select and Calibrate the Valve............................................................43
How To Set the Operating Parameters............................................................43
How To Adjust the Set Point Parameters........................................................51
Operation...................................................................................................................59
How To Activate a Set Point..........................................................................59
How To Control the Valve.............................................................................60
How To Use the Sensor Zero .........................................................................61
To change the displayed sensor......................................................................61
How To Use the Special Zero.........................................................................61
How To Remove the Zero Correction Factors................................................63
How To Zero the Analog Set Point.................................................................63
How To Calibrate the Full Scale of the Analog Set Point................................64
Chapter Five: Remote RS-232 Operation ...............................................................................67
General Information...................................................................................................67
RS-232 Protocol.........................................................................................................68
Message Syntax..............................................................................................69
Priority and Timing of Command Execution..................................................69
Setup Messages ..........................................................................................................70
How To Read the Pressure Control Mode......................................................74
How to Set the Pressure Units........................................................................75
How To Enable Backfill Valve Control..........................................................76
How To Set the Set Point Backfill Limit.........................................................76

Table of Contents
vi
How To Set the Backfill Threshold Pressure Value........................................77
How To Set the Valve Position Signal Output Range.....................................77
How To Set the Valve Battery Back-Up Control............................................77
How To Read the Sensor Type......................................................................79
How To Set the Sensor Signal Input Range...................................................80
How To Set the Sensor Range.......................................................................81
How To Set the Type of Set Point Control.....................................................86
How To Set the Analog Set Point Range........................................................87
How To Set the Set Point Values...................................................................88
How To Set the Gain Values..........................................................................90
How To Set the Gain Compensation Factor...................................................91
How To Set the Phase Values........................................................................92
How To Set the Phase Compensation Factor .................................................93
How To Set the Softstart Rates......................................................................94
How To Set the Process Limit Relays ............................................................96
Control Messages.......................................................................................................97
How To Activate a Set Point..........................................................................99
How To Control the Valve.............................................................................100
How To Use the Sensor Zero.........................................................................101
How To Use the Special Zero ........................................................................101
How To Remove the Sensor and Special Zeros .............................................101
How To Zero the Analog Set Point................................................................102
How To Calibrate the Full Scale of the Analog Set Point...............................103
Informational Messages .............................................................................................104
How To Report the Pressure Reading............................................................106
How To Report the Valve Position Value......................................................107
How To Report the System Status .................................................................108
How To Report the Voltage Status of the Valve Battery Back-Up ..................109
How To Report the Firmware Version...........................................................110
How To Report the Checksum Status............................................................110
Chapter Six: Remote Digital Logic Control............................................................................111
General Information...................................................................................................111

Table of Contents
vii
How To Select the Digital Input Functions .................................................................111
How To Set the Analog Set Point Inputs........................................................113
Digital Input Priorities....................................................................................114
How To Select the Digital Output Functions...............................................................115
How To Activate the Softstart Rate.............................................................................117
Chapter Seven: Maintenance and Troubleshooting.................................................................119
General Information...................................................................................................119
Maintenance...............................................................................................................119
How to Replace the Fuses..............................................................................119
How To Replace the Memory (RAM) Module................................................121
How To Replace the Optional Valve Failsafe Battery.....................................124
Troubleshooting.........................................................................................................126
How To Identify an Out-of-Range Pressure Condition...................................126
How To Respond to a Checksum Error..........................................................127
How To Calibrate the Span of the A/D Converter ..........................................128
Appendix A: Product Specifications.......................................................................................131
Appendix B: Model Code Explanation ...................................................................................133
Model Code................................................................................................................133
Appendix C: Initial Settings ...................................................................................................135
Appendix E: RS-232 Message Summary................................................................................139
Index ......................................................................................................................................147

List of Figures
ix
List of Figures
Figure 1: Preferred Method To Connect an Overall Metal Braided Shielded Cable................. 15
Figure 2: Alternate Method To Connect an Overall Metal Braided Shielded Cable ................. 15
Figure 3: Line Voltage Selector.............................................................................................. 17
Figure 4: Gain Set Too High................................................................................................... 26
Figure 5: Gain Set Too Low................................................................................................... 26
Figure 6: Phase Set Too High................................................................................................. 27
Figure 7: Phase Set Too Low................................................................................................. 27
Figure 8: Front Panel of the 651 Controller............................................................................ 30
Figure 9: Rear Panel of the 651 Controller ............................................................................. 32
Figure 10: Voltage and Fuse Labels........................................................................................ 37
Figure 11: Serial Number Label.............................................................................................. 37
Figure 12: Initial Display Screen ............................................................................................ 40
Figure 13: Pressure and Position Display Screen.................................................................... 40
Figure 14: Battery Voltage Low Message................................................................................ 41
Figure 15: Battery Voltage High Message................................................................................ 41
Figure 16: I/O Board Digital Input Circuitry..........................................................................111
Figure 17: I/O Board Digital Output Circuitry.......................................................................115
Figure 18: Fuse Holder..........................................................................................................120
Figure 19: Location of the Battery-Backed RAM Module ......................................................122

Safety Information Symbols Used in This Instruction Manual
ix
List of Tables
Table 1: Definition of Symbols Found on the Unit...................................................................2
Table 2: Transducer Current Available................................................................................... 11
Table 3: System Interface Cables............................................................................................ 12
Table 4: Adapter Cables......................................................................................................... 13
Table 5: Power and Fuse Requirements ................................................................................. 16
Table 6: Rear Panel Connector Slot Labels............................................................................. 19
Table 7: RS-232 Serial Interface Connector Pinout................................................................ 20
Table 8: Interface Connector Pinout....................................................................................... 22
Table 9: Transducer Connector Pinout................................................................................... 23
Table 10: Valve Connector Pinout.......................................................................................... 24
Table 11: Expected Battery Life.............................................................................................. 35
Table 12: Capacity Loss of Stored Battery.............................................................................. 36
Table 13: Full Scale Sensor Ranges........................................................................................ 46
Table 14: RS-232 Setup Messages ......................................................................................... 71
Table 15: Sensor Range Values.............................................................................................. 81
Table 16: RS-232 Set Point Messages..................................................................................... 84
Table 17: RS-232 Informational Messages.............................................................................104
Table 18: Digital Input Functions..........................................................................................112
Table 19: Priority of Digital Inputs........................................................................................114
Table 20: Digital Output Functions........................................................................................116
Table 21: Initial Settings........................................................................................................135
Table 22: RS-232 Message Summary.......................................Error! Bookmark not defined.

Safety Information Symbols Used in This Instruction Manual
1
Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning The WARNING sign denotes a hazard. It calls attention to a
procedure, practice, condition, or the like, which, if not
correctly performed or adhered to, could result in injury to
personnel.
Caution
The CAUTION sign denotes a hazard. It calls attention to an
operating procedure, practice, or the like, which, if not correctly
performed or adhered to, could result in damage to or destruction
of all or part of the product.
Note
The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.

Symbols Found on the Unit Safety Information
2
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No.5007
Off (Supply)
IEC 417, No.5008
Earth (ground)
IEC 417, No.5017
Protective earth
(ground)
IEC 417, No.5019
Frame or chassis
IEC 417, No.5020
Equipotentiality
IEC 417, No.5021
Direct current
IEC 417, No.5031
Alternating current
IEC 417, No.5032
Both direct and
alternating current
IEC 417, No.5033-a
Class ll equipment
IEC 417, No.5172-a
Three phase
alternating current
IEC 617-2 No.020206
Caution, refer to
accompanying
documents
ISO 3864, No.B.3.1
Caution, risk of
electric shock
ISO 3864, No.B.3.6
Caution, hot surface
IEC 417, No.5041
Table 1: Definition of Symbols Found on the Unit

Safety Information Safety Procedures and Precautions
3
Safety Procedures and Precautions
Observe the following general safety precautions during all phases of operation of this
controller. Failure to comply with these precautions or with specific warnings elsewhere in this
manual violates safety standards of intended use of the controller and may impair the
protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the
customer’s failure to comply with these requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY CONTROLLER
Do not install substitute parts or perform any unauthorized modification to the controller.
Return the controller to an MKS Calibration and Service Center for service and repair to ensure
that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not attempt component replacement and internal adjustments. Any
service must be made by qualified service personnel only.
GROUNDING THE PRODUCT
This product is grounded through the grounding conductor of the power cord. To avoid
electrical shock, plug the power cord into a properly wired receptacle before connecting it to the
product input or output terminals. A protective ground connection by way of the grounding
conductor in the power cord is essential for safe operation.
DANGER ARISING FROM LOSS OF GROUND
Upon loss of the protective-ground connection, all accessible conductive parts (including knobs
and controls that may appear to be insulating) can render an electrical shock.
GROUND AND USE PROPER ELECTRICAL FITTINGS
Dangerous voltages are contained within this controller. All electrical fittings must be of the type
specified, and in good condition. All electrical fittings must be properly connected and
grounded.
USE THE PROPER POWER CORD
Use only a power cord that is in good condition and which meets the input power requirements
specified in the manual.
Use only a detachable cord set with conductors that have a cross-sectional area equal to or
greater than 0.75 mm2. The power cable should be approved by a qualified agency such as
VDE, Semko, or SEV.

Safety Procedures and Precautions Safety Information
4
USE THE PROPER POWER SOURCE
This product is intended to operate from a power source that does not apply more voltage
between the supply conductors, or between either of the supply conductors and ground, than
that specified in the manual.
USE THE PROPER FUSE
Use only a fuse of the correct type, voltage rating, and current rating, as specified for your
product.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been
specifically certified for such operation.

Chapter One: General Information Introduction
5
Chapter One: General Information
Introduction
The MKS Type 651D Pressure Controller controls and supplies power to MKS type 253 and 653
throttle valves. The unit has a high-powered driver to operate most MKS throttle valves,
including valves with vacuum shut-off capability up to 100 mm (4”) and non-sealing valves up
to 320 mm (13”). The 651 controller, available with a low capacity or optional high capacity
power supply, can supply ±15 Volts to power and provide a readout for an attached capacitance
manometer. The system pressure (in units of Torr, mTorr, mBar, µBar, Pascal, kPa, cmH2O, or
inH2O) and valve position (as a % of full scale) display in the window on the front panel. The
651D’s dual channel input extends the dynamic control range to support widely varying process
pressure recipes. This dual channel input allows controlled pump down from atmosphere.
The 651 controller controlsa vacuum system using PID. The PID mode uses a Proportional,
Integral, and Derivative (PID) algorithm which uses two programmable gain parameters to
control at different set points over a wide range of pressures.
The 651 unit allows you to control its communication parameters; sensor and valve parameters;
five internal programmable set points (each one having the option of being setup for pressure or
position control); one external analog set point; an adjustable softstart function (to minimize
turbulence in the chamber and contamination of the process); two process limit relays (each with
high and low trip levels) to indicate if the pressure deviates from the desired trip point levels;
and valve open, close, and stop functions for use in system setup and diagnostics.
You can operate the 651 controller using front panel (Local), or rear panel (Remote RS-232 or
digital logic) control. A Key Lock switch located on the front panel is used to select between the
two options, and can lock the front panel controls as a safety measure to prevent accidental
command entries.
Two types of batteries are used in the 651 controller: a lithium battery and an optional lead-acid
battery. The lithium battery (battery-backed memory module) is a standard component of the
651 unit and is used to power memory for storage of configuration and learned system
information while power is off. An optional lead-acid battery (valve failsafe battery back up)
allows you to configure the controller to drive a valve open or closed upon an AC power failure.
All MKS unheated and 45° C temperature-controlled, linear Baratron®transducers are
compatible with the low power 651 controller. The 100° C temperature-controlled, linear
Baratron transducers are compatible with the high power unit. Refer to Product Compatibility,
page 11, for a complete listing of the MKS products that are compatible with the 651 controller.

How This Manual is Organized Chapter One: General Information
6
How This Manual is Organized
This manual is designed to provide instructions on how to set up, install, and operate a Type 651
unit.
Before installing your Type 651 unit in a system and/or operating it, carefully read and
familiarize yourself with all precautionary notes in the Safety Messages and Procedures
section at the front of this manual. In addition, observe and obey all WARNING and
CAUTION notes provided throughout the manual.
Chapter One, General Information, (this chapter) introduces the product and describes the
organization of the manual.
Chapter Two, Installation, explains the environmental requirements and describes how to
mount the controller in your system.
Chapter Three, Overview, gives a brief description of the controller and its functionality.
Chapter Four, Local Operation, describes how to operate the controller using the front panel
controls.
Chapter Five, Remote RS-232 Operation, describes the protocol and messages used to operate
the unit through RS-232 communications.
Chapter Six, Remote Digital Logic Control, describes how to control the unit through the
Interface connector on the rear panel.
Chapter Seven, Maintenance and Troubleshooting, describes basic maintenance procedures and
how to troubleshoot a problem should the unit malfunction.
Appendix A, Product Specifications, lists the specifications of the controller.
Appendix B, Model Code Explanation, describes the controller’s ordering code.
Appendix C, Initial Settings, lists the controller’s initial, factory-set operating parameters.
Appendix D, Gain Conversions, explains how to convert the gain and lead parameters used with
the 651C unit to the integral and gain values used with the 651D unit.
Appendix E, RS-232 Message Summary, lists all of the RS-232 commands and requests,
alphabetically by command.

Chapter One: General Information Customer Support
7
Customer Support
Standard maintenance and repair services are available at all of our regional MKS Calibration
and Service Centers, listed on the back cover. In addition, MKS accepts the controllers of other
manufacturers for recalibration using the Primary and Transfer Standard calibration equipment
located at all of our regional service centers. Should any difficulties arise in the use of your
Type 651 controller, or to obtain information about companion products MKS offers, contact
any authorized MKS Calibration and Service Center. If it is necessary to return the controller to
MKS, please obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Calibration and Service Center before shipping. The ERA Number expedites handling and
ensures proper servicing of your controller.
Please refer to the inside of the back cover of this manual for a list of MKS Calibration and
Service Centers.
Warning
All returns to MKS Instruments must be free of harmful, corrosive,
radioactive, or toxic materials.

Customer Support Chapter One: General Information
8
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