MKS 651D Series User manual

118965-P1
Preliminary, 5/02
MKS Type 651D
Pressure Controller

Copyright © 2001 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by
MKS Instruments, Inc.
Baratronis a registered trademark of MKS Instruments, Inc., Andover, MA
This manual is for firmware version: pre-release

Table of Contents
iii
Table of Contents
Safety Information..................................................................................................................1
Symbols Used in This Instruction Manual ..................................................................1
Symbols Found on the Unit........................................................................................2
Safety Procedures and Precautions.............................................................................3
Chapter One: General Information.........................................................................................5
Introduction ...............................................................................................................5
How This Manual is Organized...................................................................................6
Customer Support......................................................................................................7
Chapter Two: Installation.......................................................................................................9
How To Unpack the Type 651 Unit.............................................................................9
Unpacking Checklist......................................................................................9
Product Location and Requirements...........................................................................10
Operating Environmental Requirements.........................................................10
Safety Conditions...........................................................................................10
Product Compatibility.................................................................................................11
Valves............................................................................................................11
Transducers...................................................................................................11
Interface Cables..........................................................................................................12
Interface Cables.............................................................................................12
Adapter Cables...............................................................................................13
Generic Shielded Cables ................................................................................14
Setup..........................................................................................................................16
Mounting Instructions....................................................................................16
Power and Fuse Requirements.......................................................................16
Grounding.....................................................................................................17
How To Set the Line Voltage .........................................................................17
Connectors.................................................................................................................19
Rear Panel Connectors...................................................................................19

Table of Contents
iv
RS-232 Serial Interface Connector.................................................................20
Interface (I/O) Connector..............................................................................21
Transducer Connector...................................................................................23
Valve Connector............................................................................................24
Chapter Three: Overview ......................................................................................................25
Control Mode.............................................................................................................25
Gain and Phase..............................................................................................25
Set Points...................................................................................................................28
Softstart Rates............................................................................................................28
Process Limit Relays..................................................................................................29
Front Panel Components............................................................................................30
Display Window............................................................................................30
Key Lock Switch...........................................................................................30
Arrow Keys...................................................................................................31
Adjust Knob..................................................................................................31
Learn Key......................................................................................................31
Valve Position Control Keys..........................................................................31
Set Point Selection Keys................................................................................31
Rear Panel Components.............................................................................................32
Valve Connector -Slot 4...............................................................................32
Transducer Connectors -Slot 3.....................................................................32
Interface Connector -Slot 2...........................................................................32
RS-232 Serial Interface Connector -Slot 1....................................................32
Power ON/OFF Switch .................................................................................32
Line Voltage Selector Switch.........................................................................33
Fuse Holder...................................................................................................33
Optional Valve Failsafe Battery Back-Up ...................................................................34
Battery Voltage..............................................................................................34
Valve Positions..............................................................................................34
Threshold Voltage Check ..............................................................................35
Expected Battery Life.....................................................................................35
Battery Storage..............................................................................................36

Table of Contents
v
Labels.........................................................................................................................37
Voltage and Fuse Label..................................................................................37
Serial Number Label......................................................................................37
Attention Label ..............................................................................................37
Chapter Four: Local Operation...............................................................................................39
General Information...................................................................................................39
Startup........................................................................................................................40
Optional Valve Failsafe Battery Back-Up .......................................................40
How To Check the Battery Voltage ................................................................42
Setup..........................................................................................................................43
How to Select and Calibrate the Valve............................................................43
How To Set the Operating Parameters............................................................43
How To Adjust the Set Point Parameters........................................................51
Operation...................................................................................................................59
How To Activate a Set Point..........................................................................59
How To Control the Valve.............................................................................60
How To Use the Sensor Zero .........................................................................61
To change the displayed sensor......................................................................61
How To Use the Special Zero.........................................................................61
How To Remove the Zero Correction Factors................................................63
How To Zero the Analog Set Point.................................................................63
How To Calibrate the Full Scale of the Analog Set Point................................64
Chapter Five: Remote RS-232 Operation ...............................................................................67
General Information...................................................................................................67
RS-232 Protocol.........................................................................................................68
Message Syntax..............................................................................................69
Priority and Timing of Command Execution..................................................69
Setup Messages ..........................................................................................................70
How To Read the Pressure Control Mode......................................................74
How to Set the Pressure Units........................................................................75
How To Enable Backfill Valve Control..........................................................76
How To Set the Set Point Backfill Limit.........................................................76

Table of Contents
vi
How To Set the Backfill Threshold Pressure Value........................................77
How To Set the Valve Position Signal Output Range.....................................77
How To Set the Valve Battery Back-Up Control............................................77
How To Read the Sensor Type......................................................................79
How To Set the Sensor Signal Input Range...................................................80
How To Set the Sensor Range.......................................................................81
How To Set the Type of Set Point Control.....................................................86
How To Set the Analog Set Point Range........................................................87
How To Set the Set Point Values...................................................................88
How To Set the Gain Values..........................................................................90
How To Set the Gain Compensation Factor...................................................91
How To Set the Phase Values........................................................................92
How To Set the Phase Compensation Factor .................................................93
How To Set the Softstart Rates......................................................................94
How To Set the Process Limit Relays ............................................................96
Control Messages.......................................................................................................97
How To Activate a Set Point..........................................................................99
How To Control the Valve.............................................................................100
How To Use the Sensor Zero.........................................................................101
How To Use the Special Zero ........................................................................101
How To Remove the Sensor and Special Zeros .............................................101
How To Zero the Analog Set Point................................................................102
How To Calibrate the Full Scale of the Analog Set Point...............................103
Informational Messages .............................................................................................104
How To Report the Pressure Reading............................................................106
How To Report the Valve Position Value......................................................107
How To Report the System Status .................................................................108
How To Report the Voltage Status of the Valve Battery Back-Up ..................109
How To Report the Firmware Version...........................................................110
How To Report the Checksum Status............................................................110
Chapter Six: Remote Digital Logic Control............................................................................111
General Information...................................................................................................111

Table of Contents
vii
How To Select the Digital Input Functions .................................................................111
How To Set the Analog Set Point Inputs........................................................113
Digital Input Priorities....................................................................................114
How To Select the Digital Output Functions...............................................................115
How To Activate the Softstart Rate.............................................................................117
Chapter Seven: Maintenance and Troubleshooting.................................................................119
General Information...................................................................................................119
Maintenance...............................................................................................................119
How to Replace the Fuses..............................................................................119
How To Replace the Memory (RAM) Module................................................121
How To Replace the Optional Valve Failsafe Battery.....................................124
Troubleshooting.........................................................................................................126
How To Identify an Out-of-Range Pressure Condition...................................126
How To Respond to a Checksum Error..........................................................127
How To Calibrate the Span of the A/D Converter ..........................................128
Appendix A: Product Specifications.......................................................................................131
Appendix B: Model Code Explanation ...................................................................................133
Model Code................................................................................................................133
Appendix C: Initial Settings ...................................................................................................135
Appendix E: RS-232 Message Summary................................................................................139
Index ......................................................................................................................................147

List of Figures
ix
List of Figures
Figure 1: Preferred Method To Connect an Overall Metal Braided Shielded Cable................. 15
Figure 2: Alternate Method To Connect an Overall Metal Braided Shielded Cable ................. 15
Figure 3: Line Voltage Selector.............................................................................................. 17
Figure 4: Gain Set Too High................................................................................................... 26
Figure 5: Gain Set Too Low................................................................................................... 26
Figure 6: Phase Set Too High................................................................................................. 27
Figure 7: Phase Set Too Low................................................................................................. 27
Figure 8: Front Panel of the 651 Controller............................................................................ 30
Figure 9: Rear Panel of the 651 Controller ............................................................................. 32
Figure 10: Voltage and Fuse Labels........................................................................................ 37
Figure 11: Serial Number Label.............................................................................................. 37
Figure 12: Initial Display Screen ............................................................................................ 40
Figure 13: Pressure and Position Display Screen.................................................................... 40
Figure 14: Battery Voltage Low Message................................................................................ 41
Figure 15: Battery Voltage High Message................................................................................ 41
Figure 16: I/O Board Digital Input Circuitry..........................................................................111
Figure 17: I/O Board Digital Output Circuitry.......................................................................115
Figure 18: Fuse Holder..........................................................................................................120
Figure 19: Location of the Battery-Backed RAM Module ......................................................122