MKS Granville-Phillips 358 series User manual

Series 358
Instruction manual part number 358013
Revision B - November 2014
Granville-Phillips®Series 358 Micro-Ion®
Vacuum Gauge Controller
Instruction Manual

This Instruction Manual is for use with all Granville-Phillips
Series 358 Micro-Ion Vacuum Gauge Controllers.
A list of applicable catalog numbers is provided on the
following page.
Granville-Phillips®Series 358 Micro-Ion®
Vacuum Gauge Controller
Series 358
Instruction Manual
© 2014 MKS Instruments, Inc. All rights reserved. Granville-Phillips®, Micro-Ion®, and
Convectron®are registered trademarks of MKS Instruments, Inc. All other trademarks and
registered trademarks are the properties of their respective owners.
For Customer Service or Technical Support 24 hours per day,
7 days per week, every day of the year including holidays:
Phone: [phone] or [phone]
MKS, Granville-Phillips Division
6450 Dry Creek Parkway
Longmont, CO 80503 USA
Phone: [phone] or 1-800-776-6543
FAX: [phone]
Email: [email protected]
Corporate Office
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Phone: [phone]
www.mksinst.com

Granville-Phillips®Series 358 Micro-Ion®
Vacuum Gauge Controllerule
Catalog numbers for Series 358 Micro-Ion Controllers
Controller for a Micro-Ion gauge, with 3-line display, electron bombardent degas,
and remote input/output interface - CE Marked (1)
Half-rack mount: 358501 - # # # - # #
Left mount for 19-inch rack: 358502 - # # # - # #
Center mount for 19-inch rack: 358503 - # # # - # #
Black Case & Half-rack mount: 358504 - # # # - # #
Black Case & Left mount for 19-inch rack: 358505 - # # # - # #
Interface options (Slot X):
None 0
RS-232 A
RS-485/422 B
Gauge options (Slot Y):
None 0
Dual Convectron 1
Capacitance Manometer/Convectron (1) 2
Setpoint options (Slot Z):
None 0
2 setpoint relays for Micro-Ion gauge A
6 setpoint relays, 2 per channel B
Display options (Measurement units):
Torr T
mbar M
Pascal P
Powercord options:
North America 115 V 1
North America 240 V 2
Universal Europe 220 V 3
United Kingdom 240 V 4
NOTE: (1) The Capacitance Manometer/Convectron Gauge option is not CE Marked.

Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B 5
Table of Contents
Chapter 1 Before You Begin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.1 Caution and Warning Statements . . . . . . . . . . . . . . . . . . . . 9
1.2 Reading and Following Instructions . . . . . . . . . . . . . . . . . . 9
1.3 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.4 Pressure Relief Devices . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.5 Certification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.6 Warranty Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.7 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.8 FCC Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Chapter 2 System Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.1 Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
2.2 RS-232 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.3 RS-485 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.5 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
2.6 Mounting Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Chapter 3 Initial Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.1 Controller Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.2 Top Cover Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.3 Pressure Units Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
3.4 Changing Units of Measure for Electrometer Module . . . . . 28
3.5 Overpressure Shutdown Adjustment . . . . . . . . . . . . . . . . . . 30
3.6 Changing Display Update Rate on Electrometer Module . . . 30
3.7 Changing Units of Measure for Convectron Gauge . . . . . . . 30
3.8 Display Update Rate Switch on Convectron Module . . . . . . 31
3.9 Changing Units of Measure for a Capacitance Manometer . 31
3.10 Process Control Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
3.11 Relay Polarity Setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
3.12 RS-232 Computer Interface Setup . . . . . . . . . . . . . . . . . . . . 37
3.13 RS-485 Computer Interface Setup . . . . . . . . . . . . . . . . . . . . 42
3.14 Replacing the Controller Cover . . . . . . . . . . . . . . . . . . . . . . 47

Table of Contents
6Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B
Chapter 4 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
4.1 Gauge Installation Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
4.2 FCC and EU Installation Requirements . . . . . . . . . . . . . . . . 49
4.3 Cable Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
4.4 Environmental Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . 50
4.5 Controller Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
4.6 Mounting Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . 51
4.7 Line Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
4.8 Fuse Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
4.9 Vacuum Gauge Installation . . . . . . . . . . . . . . . . . . . . . . . . . 53
4.10 Mounting Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
4.11 Grounding the System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
4.12 Connecting Analog Outputs . . . . . . . . . . . . . . . . . . . . . . . . 59
4.13 Connecting a Capacitance Manometer . . . . . . . . . . . . . . . . 60
4.14 Connecting Process Control Relays . . . . . . . . . . . . . . . . . . . 63
4.15 Connecting the RS-232 Computer Interface Handshake Lines 65
4.16 Connecting RS-485 Computer Interface . . . . . . . . . . . . . . . 66
Chapter 5 Preparing for Operation . . . . . . . . . . . . . . . . . . . . . . . . . 67
5.1 Preparing for Pressure Measurement . . . . . . . . . . . . . . . . . . 67
5.2 Alternate ON/OFF Gauge Control . . . . . . . . . . . . . . . . . . . . 68
5.3 Micro-Ion Gauge Remote Input/Output . . . . . . . . . . . . . . . . 68
5.4 Micro-Ion Analog Output Signal . . . . . . . . . . . . . . . . . . . . . 69
5.5 Preparing for Convectron Gauge Operation . . . . . . . . . . . . 71
5.6 Gases other than Nitrogen or Air . . . . . . . . . . . . . . . . . . . . . 71
5.7 Micro-Ion Gauge Auto ON/OFF . . . . . . . . . . . . . . . . . . . . . 80
5.8 Filament Auto ON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
5.9 Gauge Zero and Atmospheric Pressure Adjustment . . . . . . . 81
5.10 Convectron Gauge Analog Output Signal . . . . . . . . . . . . . . 82
5.11 Preparing for Capacitance Manometer Operation . . . . . . . . 84
5.12 Preparing for Process Control Operation . . . . . . . . . . . . . . . 85
5.13 Preparing to use RS-232 Computer Interface . . . . . . . . . . . . 87
5.14 RS-232 Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
5.15 Preparing to Use RS-485 Computer Interface . . . . . . . . . . . 90
5.16 RS-485 Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
Chapter 6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
6.1 Controller Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
6.2 Micro-Ion Gauge ON/OFF . . . . . . . . . . . . . . . . . . . . . . . . . 97
6.3 Degas ON/OFF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97
6.4 Special Considerations for Use Below 10–3 Torr . . . . . . . . . 98
6.5 Gauge Electrometer Operation . . . . . . . . . . . . . . . . . . . . . . 98
6.6 Filament Selection for Electrometer Module . . . . . . . . . . . . 100

Table of Contents
Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B 7
Chapter 7 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
7.1 Micro-Ion Gauge Theory of Operation . . . . . . . . . . . . . . . . 101
7.2 Convectron Gauge Theory of Operation . . . . . . . . . . . . . . . 102
7.3 Microcontrollers and Bus Structure . . . . . . . . . . . . . . . . . . . 103
7.4 Capacitance Manometer Theory of Operation . . . . . . . . . . 103
7.5 Process Control Theory of Operation . . . . . . . . . . . . . . . . . 103
Chapter 8 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
8.1 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
8.2 Customer service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
8.3 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . 106
8.4 Returning a Damaged Product . . . . . . . . . . . . . . . . . . . . . . 106
8.5 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107
8.6 Overpressure Shutdown . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
8.7 Troubleshooting the Convectron Gauge Module . . . . . . . . . 110
8.8 Capacitance Manometer Troubleshooting . . . . . . . . . . . . . . 112
8.9 Process Control Troubleshooting . . . . . . . . . . . . . . . . . . . . . 112
8.10 RS-232 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . 113
8.11 RS-485 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . 114
8.12 Field Installation of a Module . . . . . . . . . . . . . . . . . . . . . . . 115

Table of Contents
8Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B

Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B 9
System Components Initial Setup InstallationBefore You Begin
Chapter 1 Before You Begin
1.1 Caution and Warning
Statements
This manual contains caution and warning statements with which you must
comply to prevent inaccurate measurement, property damage, or personal
injury.
Caution and warning statements comply with American Institute of
Standards Z535.1–2002 through Z535.5–2002, which set forth voluntary
practices regarding the content and appearance of safety signs, symbols,
and labels.
Each caution or warning statement explains:
a. The specific hazard that you must prevent or unsafe practice that you
must avoid,
b. The potential result of your failure to prevent the specified hazard or
avoid the unsafe practice, and
c. What you must do to prevent the specified hazardous result.
1.2 Reading and Following
Instructions
You must comply with all instructions while you are installing, operating,
or maintaining the module. Failure to comply with the instructions violates
standards of design, manufacture, and intended use of the module. MKS
Instruments, Inc./ Granville-Phillips disclaim all liability for the customer's
failure to comply with the instructions.
•Read instructions – Read all instructions before installing or operating the
product.
•Retain instructions – Retain the instructions for future reference.
CAUTION
Caution statements alert you to hazards or unsafe
practices that could result in minor personal injury or
property damage.
Each caution statement explains what you must do to prevent or
avoid the potential result of the specified hazard or unsafe
practice.
WARNING
Warning statements alert you to hazards or unsafe
practices that could result in severe property damage or
personal injury due to electrical shock, fire, or explosion.
Each warning statement explains what you must do to prevent
or avoid the potential result of the specified hazard or unsafe
practice.

Chapter 1
10 Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B
•Follow instructions – Follow all installation, operating and maintenance
instructions.
•Heed warnings and cautions – Adhere to all warnings and caution
statements on the product and in these instructions.
•Parts and accessories – Install only those replacement parts and
accessories that are recommended by Granville-Phillips. Substitution of
parts is hazardous.
1.3 Damage Requiring
Service
Disconnect the product from the wall outlet and all power sources and refer
servicing to qualified service personnel under the following conditions:
1. When any cable or plug is damaged.
2. If any liquid has been spilled onto, or objects have fallen into, the
product.
3. If the product has been exposed to rain or water.
4. If the product does not operate normally even if you follow the
operating instructions. Adjust only those controls that are covered by
the operation instructions. Improper adjustment of other controls may
result in damage and will often require extensive work by a qualified
technician to restore the product to its normal operation.
5. If the product has been dropped or the enclosure has been damaged.
6. When the product exhibits a distinct change in performance. This
indicates a need for service.
WARNING
Substitution or modifying parts can result in product
damage or personal injury due to electrical shock or fire.
• Install only those replacement parts that are specified by
Granville−Phillips.
• Do not install substitute parts or perform any unauthorized
modification to the controller.
• Do not use the controller if unauthorized modifications
have been made.