MKS Granville-Phillips 358 series User manual

Series 358
Instruction manual part number 358013
Revision B - November 2014
Granville-Phillips®Series 358 Micro-Ion®
Vacuum Gauge Controller
Instruction Manual

This Instruction Manual is for use with all Granville-Phillips
Series 358 Micro-Ion Vacuum Gauge Controllers.
A list of applicable catalog numbers is provided on the
following page.
Granville-Phillips®Series 358 Micro-Ion®
Vacuum Gauge Controller
Series 358
Instruction Manual
© 2014 MKS Instruments, Inc. All rights reserved. Granville-Phillips®, Micro-Ion®, and
Convectron®are registered trademarks of MKS Instruments, Inc. All other trademarks and
registered trademarks are the properties of their respective owners.
For Customer Service or Technical Support 24 hours per day,
7 days per week, every day of the year including holidays:
Phone: [phone] or [phone]
MKS, Granville-Phillips Division
6450 Dry Creek Parkway
Longmont, CO 80503 USA
Phone: [phone] or 1-800-776-6543
FAX: [phone]
Email: [email protected]
Corporate Office
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Phone: [phone]
www.mksinst.com

Granville-Phillips®Series 358 Micro-Ion®
Vacuum Gauge Controllerule
Catalog numbers for Series 358 Micro-Ion Controllers
Controller for a Micro-Ion gauge, with 3-line display, electron bombardent degas,
and remote input/output interface - CE Marked (1)
Half-rack mount: 358501 - # # # - # #
Left mount for 19-inch rack: 358502 - # # # - # #
Center mount for 19-inch rack: 358503 - # # # - # #
Black Case & Half-rack mount: 358504 - # # # - # #
Black Case & Left mount for 19-inch rack: 358505 - # # # - # #
Interface options (Slot X):
None 0
RS-232 A
RS-485/422 B
Gauge options (Slot Y):
None 0
Dual Convectron 1
Capacitance Manometer/Convectron (1) 2
Setpoint options (Slot Z):
None 0
2 setpoint relays for Micro-Ion gauge A
6 setpoint relays, 2 per channel B
Display options (Measurement units):
Torr T
mbar M
Pascal P
Powercord options:
North America 115 V 1
North America 240 V 2
Universal Europe 220 V 3
United Kingdom 240 V 4
NOTE: (1) The Capacitance Manometer/Convectron Gauge option is not CE Marked.

Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B 5
Table of Contents
Chapter 1 Before You Begin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.1 Caution and Warning Statements . . . . . . . . . . . . . . . . . . . . 9
1.2 Reading and Following Instructions . . . . . . . . . . . . . . . . . . 9
1.3 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.4 Pressure Relief Devices . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.5 Certification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.6 Warranty Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.7 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.8 FCC Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Chapter 2 System Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.1 Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
2.2 RS-232 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.3 RS-485 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.5 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
2.6 Mounting Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Chapter 3 Initial Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.1 Controller Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.2 Top Cover Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.3 Pressure Units Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
3.4 Changing Units of Measure for Electrometer Module . . . . . 28
3.5 Overpressure Shutdown Adjustment . . . . . . . . . . . . . . . . . . 30
3.6 Changing Display Update Rate on Electrometer Module . . . 30
3.7 Changing Units of Measure for Convectron Gauge . . . . . . . 30
3.8 Display Update Rate Switch on Convectron Module . . . . . . 31
3.9 Changing Units of Measure for a Capacitance Manometer . 31
3.10 Process Control Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
3.11 Relay Polarity Setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
3.12 RS-232 Computer Interface Setup . . . . . . . . . . . . . . . . . . . . 37
3.13 RS-485 Computer Interface Setup . . . . . . . . . . . . . . . . . . . . 42
3.14 Replacing the Controller Cover . . . . . . . . . . . . . . . . . . . . . . 47

Table of Contents
6Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B
Chapter 4 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
4.1 Gauge Installation Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
4.2 FCC and EU Installation Requirements . . . . . . . . . . . . . . . . 49
4.3 Cable Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
4.4 Environmental Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . 50
4.5 Controller Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
4.6 Mounting Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . 51
4.7 Line Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
4.8 Fuse Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
4.9 Vacuum Gauge Installation . . . . . . . . . . . . . . . . . . . . . . . . . 53
4.10 Mounting Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
4.11 Grounding the System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
4.12 Connecting Analog Outputs . . . . . . . . . . . . . . . . . . . . . . . . 59
4.13 Connecting a Capacitance Manometer . . . . . . . . . . . . . . . . 60
4.14 Connecting Process Control Relays . . . . . . . . . . . . . . . . . . . 63
4.15 Connecting the RS-232 Computer Interface Handshake Lines 65
4.16 Connecting RS-485 Computer Interface . . . . . . . . . . . . . . . 66
Chapter 5 Preparing for Operation . . . . . . . . . . . . . . . . . . . . . . . . . 67
5.1 Preparing for Pressure Measurement . . . . . . . . . . . . . . . . . . 67
5.2 Alternate ON/OFF Gauge Control . . . . . . . . . . . . . . . . . . . . 68
5.3 Micro-Ion Gauge Remote Input/Output . . . . . . . . . . . . . . . . 68
5.4 Micro-Ion Analog Output Signal . . . . . . . . . . . . . . . . . . . . . 69
5.5 Preparing for Convectron Gauge Operation . . . . . . . . . . . . 71
5.6 Gases other than Nitrogen or Air . . . . . . . . . . . . . . . . . . . . . 71
5.7 Micro-Ion Gauge Auto ON/OFF . . . . . . . . . . . . . . . . . . . . . 80
5.8 Filament Auto ON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
5.9 Gauge Zero and Atmospheric Pressure Adjustment . . . . . . . 81
5.10 Convectron Gauge Analog Output Signal . . . . . . . . . . . . . . 82
5.11 Preparing for Capacitance Manometer Operation . . . . . . . . 84
5.12 Preparing for Process Control Operation . . . . . . . . . . . . . . . 85
5.13 Preparing to use RS-232 Computer Interface . . . . . . . . . . . . 87
5.14 RS-232 Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
5.15 Preparing to Use RS-485 Computer Interface . . . . . . . . . . . 90
5.16 RS-485 Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
Chapter 6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
6.1 Controller Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
6.2 Micro-Ion Gauge ON/OFF . . . . . . . . . . . . . . . . . . . . . . . . . 97
6.3 Degas ON/OFF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97
6.4 Special Considerations for Use Below 10–3 Torr . . . . . . . . . 98
6.5 Gauge Electrometer Operation . . . . . . . . . . . . . . . . . . . . . . 98
6.6 Filament Selection for Electrometer Module . . . . . . . . . . . . 100

Table of Contents
Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B 7
Chapter 7 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
7.1 Micro-Ion Gauge Theory of Operation . . . . . . . . . . . . . . . . 101
7.2 Convectron Gauge Theory of Operation . . . . . . . . . . . . . . . 102
7.3 Microcontrollers and Bus Structure . . . . . . . . . . . . . . . . . . . 103
7.4 Capacitance Manometer Theory of Operation . . . . . . . . . . 103
7.5 Process Control Theory of Operation . . . . . . . . . . . . . . . . . 103
Chapter 8 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
8.1 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
8.2 Customer service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
8.3 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . 106
8.4 Returning a Damaged Product . . . . . . . . . . . . . . . . . . . . . . 106
8.5 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107
8.6 Overpressure Shutdown . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
8.7 Troubleshooting the Convectron Gauge Module . . . . . . . . . 110
8.8 Capacitance Manometer Troubleshooting . . . . . . . . . . . . . . 112
8.9 Process Control Troubleshooting . . . . . . . . . . . . . . . . . . . . . 112
8.10 RS-232 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . 113
8.11 RS-485 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . 114
8.12 Field Installation of a Module . . . . . . . . . . . . . . . . . . . . . . . 115

Table of Contents
8Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B

Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B 9
System Components Initial Setup InstallationBefore You Begin
Chapter 1 Before You Begin
1.1 Caution and Warning
Statements
This manual contains caution and warning statements with which you must
comply to prevent inaccurate measurement, property damage, or personal
injury.
Caution and warning statements comply with American Institute of
Standards Z535.1–2002 through Z535.5–2002, which set forth voluntary
practices regarding the content and appearance of safety signs, symbols,
and labels.
Each caution or warning statement explains:
a. The specific hazard that you must prevent or unsafe practice that you
must avoid,
b. The potential result of your failure to prevent the specified hazard or
avoid the unsafe practice, and
c. What you must do to prevent the specified hazardous result.
1.2 Reading and Following
Instructions
You must comply with all instructions while you are installing, operating,
or maintaining the module. Failure to comply with the instructions violates
standards of design, manufacture, and intended use of the module. MKS
Instruments, Inc./ Granville-Phillips disclaim all liability for the customer's
failure to comply with the instructions.
•Read instructions – Read all instructions before installing or operating the
product.
•Retain instructions – Retain the instructions for future reference.
CAUTION
Caution statements alert you to hazards or unsafe
practices that could result in minor personal injury or
property damage.
Each caution statement explains what you must do to prevent or
avoid the potential result of the specified hazard or unsafe
practice.
WARNING
Warning statements alert you to hazards or unsafe
practices that could result in severe property damage or
personal injury due to electrical shock, fire, or explosion.
Each warning statement explains what you must do to prevent
or avoid the potential result of the specified hazard or unsafe
practice.

Chapter 1
10 Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B
•Follow instructions – Follow all installation, operating and maintenance
instructions.
•Heed warnings and cautions – Adhere to all warnings and caution
statements on the product and in these instructions.
•Parts and accessories – Install only those replacement parts and
accessories that are recommended by Granville-Phillips. Substitution of
parts is hazardous.
1.3 Damage Requiring
Service
Disconnect the product from the wall outlet and all power sources and refer
servicing to qualified service personnel under the following conditions:
1. When any cable or plug is damaged.
2. If any liquid has been spilled onto, or objects have fallen into, the
product.
3. If the product has been exposed to rain or water.
4. If the product does not operate normally even if you follow the
operating instructions. Adjust only those controls that are covered by
the operation instructions. Improper adjustment of other controls may
result in damage and will often require extensive work by a qualified
technician to restore the product to its normal operation.
5. If the product has been dropped or the enclosure has been damaged.
6. When the product exhibits a distinct change in performance. This
indicates a need for service.
WARNING
Substitution or modifying parts can result in product
damage or personal injury due to electrical shock or fire.
• Install only those replacement parts that are specified by
Granville−Phillips.
• Do not install substitute parts or perform any unauthorized
modification to the controller.
• Do not use the controller if unauthorized modifications
have been made.

Before You Begin
Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B 11
System Components Initial Setup InstallationBefore You Begin
1.4 Pressure Relief Devices
Suppliers of pressure relief valves and pressure relief disks can be located
via an online search, and are listed on ThomasNet.com under “Relief
Valves” and “Rupture Discs. Confirm that these safety devices are properly
installed before installing and operating the product. In addition, check
that:
1. the proper gas cylinders are installed,
2. gas cylinder valve positions are correct on manual systems, and
3. the automation is correct on automated gas delivery systems.
Vacuum gauges with compression fittings may be forcefully ejected if the
vacuum system is pressurized.
1.5 Certification MKS Instruments, Inc./ Granville-Phillips certifies that this product met its
published specifications at the time of shipment from the factory. MKS
Instruments, Inc./ Granville-Phillips further certifies that its calibration
measurements are traceable to the National Institute of Standards and
Technology to the extent allowed by the Institute's calibration facility. See
also CE Declaration of Conformity inside envelope for CE tests performed.
1.6 Warranty Information MKS Instruments, Inc. provides an eighteen (18) month warranty from the
date of shipment for new Granville-Phillips products. The MKS Instruments,
Inc./ Granville-Phillips general terms and conditions of sale provide the
complete and exclusive warranty for MKS,Granville-Phillips Division
products. This document is located on our web site at www.mksinst.com,
or may be obtained by a contacting an MKS. Granville-Phillips Division
customer service representative.
1.7 Service Guidelines If the product requires service, contact the MKS, Granville-Phillips Division
Customer Service Department at [phone] or [phone]
for troubleshooting help over the phone.
If the product must be returned to the factory for service, request a Return
Material Authorization (RMA) from Granville-Phillips. Do not return
products without first obtaining an RMA. In some cases a hazardous
materials document may be required. The MKS/Granville-Phillips Customer
WARNING
Failure to install appropriate pressure relief devices for
high−pressure applications can cause product damage
or personal injury.
For automatic backfilling and other applications in which
malfunction or normal process conditions can cause high
pressures to occur, install appropriate pressure relief devices.

Chapter 1
12 Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B
Service Representative will advise you if the hazardous materials document
is required.
When returning a products to Granville-Phillips, be sure to package the
products to prevent shipping damage. Circuit boards and modules
separated from the gauge assembly must be handled using proper anti-static
protection methods and must be packaged in anti-static packaging.
Granville-Phillips will supply return packaging materials at no charge upon
request. Shipping damage on returned products as a result of inadequate
packaging is the Buyer's responsibility.
For Customer Service or Technical Support 24 hours per day, 7 days per
week, every day of the year including holidays:
Phone: [phone] or [phone]
Email: [email protected]
MKS, Granville-Phillips Division
6450 Dry Creek Parkway
Longmont, CO 80503 USA
Phone: [phone] or 1-800-776-6543
FAX: [phone]
1.8 FCC Verification This equipment has been tested and found to comply with the limits for a
Class A digital device, pursuant to Part 15 of the U.S. Federal
Communications Commission (FCC) Rules. These limits are designed to
provide reasonable protection against harmful interference when the
equipment is operated in a commercial environment. This equipment uses
and can radiate radio frequency energy and, if not installed and used in
accordance with this instruction manual, may cause harmful interference to
radio communications. However, there is no guarantee that interference
will not occur in a particular installation. Operation of this equipment in a
residential area is likely to cause harmful interference in which case the user
will be required to correct the interference at his own expense. If this
equipment does cause harmful interference to radio or television reception,
which can be determined by turning the equipment OFF and ON, the user
is encouraged to try to correct the interference by one or more of the
following measures:
• Reorient or relocate the receiving antenna.
• Increase the separation between the equipment and the receiver.
• Connect the equipment into an outlet on a circuit different from that to
which the receiver is connected.
• Consult the dealer or an experienced radio or television technician for
help.
For information about FCC and EU compliance, see FCC and EU Installation
Requirements on page 49.

Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B 13
System Components Initial Setup InstallationBefore You Begin
Chapter 2 System Components
The Series 358 Micro-Ion Vacuum Measurement System can operate one
Micro-Ion Gauge along with two Convectron Gauges simultaneously, or
one Micro-Ion Gauge along with one Convectron Gauge and one
Capacitance Manometer Gauge simultaneously.
Pressure readout is via three front panel displays, analog output, and
available computer interface.
The Series 358 Micro-Ion Vacuum Measurement Controller is a modular
instrument that can easily be customized to fit most user's exact needs.
Infrequently used controls are housed behind a hinged front panel, reducing
front panel clutter and allowing the Controller to reside in a half rack space.
Figure 2-1 Micro-Ion Vacuum Measurement System
1
2
3
4
1. 358 Controller
2. Micro-Ion Gauge
3. Convectron Gauges
4. Capacitance Manometer Gauge

Chapter 2
14 Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B
Figure 2-2 Controller Front Panel
9
86
1
2
3
45
7
1. Micro-Ion display 6. Degas “momentary” ON/OFF switch
2. Convectron Gauge A display 7. Degas LED
3. Convectron Gauge B or Capacitance
Manometer display
8. Process control channel labels
4. Unit of measure label: Torr, mbar or pascal,
user selectable
9. Process control channel indicator lights
5. Micro-Ion Gauge “momentary” ON/OFF switch

System Components
Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B 15
System Components Initial Setup InstallationBefore You Begin
Figure 2-3 Controller Front Panel with Door Open
13
10
9
84 5
27
14 11
12
3
16
1. Filament select switch: filament 1, filament 2, or both
2. Pressure range selector
3. Sensitivity adjustment
4. Atmosphere adjustment, Convectron or Capacitance Manometer gauge B
5. Vacuum zero adjustment, Convectron or Capacitance Manometer gauge B
6. Process control setpoint 3-position manual override switches.
Center = relay is controlled automatically.
Left = relay is deactivated.
Right = relay is activated.
7. Process control channel indicator
8. Process control channel selector thumbwheel
9. “Down” process control setpoint pressure set pushbutton
10. “Up” process control setpoint pressure set pushbutton
11. Vacuum zero adjustment, Convectron gauge A
12. Atmosphere adjustment, Convectron gauge A
13. Micro-Ion gauge auto ON switch (via Convectron gauge)
14. Calibration / sensitivity ON switch

Chapter 2
16 Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B
Figure 2-4 Controller Top View with Cover Removed
1
2
3
4
5
6
1. Power supply board
2. Process control setpoint option board
3. Convectron or Capacitance Manometer gauge option board
4. Electrometer board
5. Filament/grid supply board
6. Interface option board (RS-232 or RS-485)

System Components
Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B 17
System Components Initial Setup InstallationBefore You Begin
2.1 Options
Process Control Relay A 2-setpoint or 6-setpoint relay option can either be factory installed or
added at any time by the user. The set points are adjustable from
atmosphere to 1 x 10–10 Torr with override switches and front panel status
indication.
RS-232 or RS-485/422
Computer Interface
Module
Provides readout of pressure, process control relay status, and Micro-Ion
Gauge control.
Figure 2-5 Controller Rear Panel (with RS-232 Option)
1
12
23 54 8 9
7
10
1113
6
1. Power switch 8. Micro-Ion Gauge power connector
2. Power input connector 9. DB25S connector for RS-232 computer interface
3. Grounding lug to be connected to Earth ground
with 12 AWG conductor
10. DE9S connector for remote parameter selection
inputs/outputs
4. 20-pin connector for process control relay
contacts
11. Collector connector for Micro-Ion gauge
5. Connector for analog output voltage from
Convectron or Capacitance Manometer gauge B
12. Connector for analog output voltage from
Convectron gauge A
6. DA15P connector for Dual Convectron or
Capacitance Manometer gauge cable
13. Fuse holder
7. Connector for analog output voltage from
Micro-Ion Gauge

Chapter 2
18 Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B
2.2 RS-232 Specifications
Figure 2-6 RS-232 Wiring Connector
DB–25S connector
See Section 3.12 for
connector pin assignments.
Table 2-1 RS-232 Specifications
Item Specification
Format EIA standard RS-232-C, half duplex, asynchronous
Data Rates 75,150,300,600,1200,2400,4800,9600 baud
Character length 7 or 8 bit ASCII, switch selectable
Parity Odd, even, or none, switch selectable
Stop bits 1 or 2. 8 character bits plus parity allows only 1 stop bit
Handshake Outputs: DTR,RTS. RTS polarity selectable. Inputs: DSR, CTS, DCD. May be
forced to logic “TRUE” with switches
Logic levels Inputs: Logic 1, 2.0 Vdc minimum,15 Vdc maximum, logic 0, –15 Vdc minimum,
0.75 VDC maximum
Input Current: 4.0 mA max @ Vin = +15 Vdc, –4.0 mA max @ Vin = –15 Vdc

System Components
Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B 19
System Components Initial Setup InstallationBefore You Begin
2.3 RS-485 Specifications
Figure 2-7 RS-485 Wiring Connector
1
3
2
1) J 1 DE9P
Connector for
RS-485/422
computer interface
2) Address dial
3) J 2 DE9P
Connector for
RS-485/422
computer interface
59
16
See Section 3.12 for connector pin assignments
Table 2-2 RS-485 Specifications
Item Specification
Format Half duplex, asynchronous.
Data Rates 19200, 9600, 4800, 2400, 1200, 600, 300,
150 baud
Character Length 8 bit or 7 bit ASCII
Parity No parity, even, or odd
Stop Bits 1 or 2
Handshake None.
Address 256 selectable combinations
Number of Connections Up to 32 devices
Total Cable Length 4000 ft. maximum

Chapter 2
20 Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B
2.4 Specifications
Table 2-3 Specifications
Micro-Ion System
Pressure Range for N2or air*
Lower Measurement Limit
Upper Measurement Limit
< 1 x 10–9 Torr (1.3 x 10–9 mbar) (1.3 x 10–7 pascal) at 4 mA emission
Atmosphere
Controller
Electronic accuracy Typical ± 3% of reading at ambient temperature of 25 ± 5 °C
Display
Units
Update Rate
Digital, green LED, 2 digits plus exponent
Torr, mbar, pascal (user selectable)
0.5 sec. typical as shipped. Internal switch selectable to 3 sec./reading averaged
Filament Control Switch selectable: filament 1, filament 2, or both
Degas Electron bombardment, approximately 4 W with 2 minute timer
Maximum Micro-Ion Gauge
Cable Length 15 m (50 ft) with standard cable
Remote I/O
Gauge and Degas On/Off Inputs
Filament Status Relay Contact Rating
Momentary ground controls filament selection and degas
Less than 0.4 Vdc @ 10 μA for 25 msec (minimum). Must be greater than 3.5 Vdc
for 105 msec (minimum) before next low state
Micro-Ion gauge status relay rated at 1.0 A, 30 Vdc
Environment Indoor use
Altitude up to 2000 meters
Temperature 0 °C to 40 °C
Maximum relative humidity 80% for temperatures up to 31 °C decreasing linearly
to 50% relative humidity at 40 °C
Transient overvoltages according to installation category (overvoltage category) II
Pollution degree 2 in accordance with IEC 664
Operating Temperature 0 °C to +40 °C ambient, noncondensing
Non-operating Temperature –40 °C to +70 °C
Analog Output 0 to 10 Vdc, logarithmic, 1 V/decade
Overpressure Protection Gauge turns OFF if pressure rises above factory set upper pressure limit
Emission Current Settings 0.02 mA (MV), 1 mA (HV), 4 mA (UHV)
Operating Voltage and Power 100 to 240 VAC, 50 to 60 Hz, 50 W maximum
Fuse Rating 250 V, 1.6 A, 5 x 20mm Time Lag (T), low breaking capacity
Weight 1.8 kg (4 lb)
*Measurement limits are determined by the controller emission current setting and X-ray limit of the gauge.