MKS Convectron 316 Series User manual

Series 316
Instruction Manual
Convectron®Vacuum Gauge
Controller
Instruction manual part number 316059
Revision D - March 2020

Instruction Manual
Series 316
This Instruction Manual is for use with Granville-Phillips
Series 316 Convectron Gauge Controllers, catalog numbers
20316046 and 316035.
© 2020 MKS Instruments, Inc. All rights reserved.
Granville-Phillips®and Convectron®are registered trademarks, and mksinstTM is a trademark
of MKS Instruments, Inc. All other trademarks and registered trademarks are the properties of
their respective owners.
Convectron®Vacuum Gauge
Controller
Customer Service / Technical Support:
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: [phone]
Email: [e-mail]
Visit our website at www.mksinst.com

Catalog numbers for Granville-Phillips®
Convectron®Vacuum Gauge Controller
20316046 and 316035

Series 316 Vacuum Gauge Controller Installation and Operation Instructions
P/N 316059 5
Table of Contents
Safety
Section 1 - The 316 Vacuum Gauge Controller
1.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.2 Available Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.2.1 Convectron Gauge (CG) Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.3 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.3.1 Line Voltage Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.3.2 Mounting Configurations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
1.3.3 Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.3.3 Instrument Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.4 Summary of Controls and Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.5 Theory Of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.5.1 Microcontrollers and Bus Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.5.2 Gauge Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.6 Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.7 Basic 316 VGC Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.7.1 Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.8 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
1.9 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Section 2 - The Convectron Gauge Module
2.1 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.2 Explosive Gases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.3 Limitation on Use of Compression Mounts . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.4 Tube Mounting Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.5 Overpressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.6 High Indicated Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.1.7 Chemical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.1.8 Sensor Failure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.1.9 Tube Contamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2 Convectron Module Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2 Convectron Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.1 Convectron Gauge Tube Installation. . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.2 Gauge Tube Orientation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2.4 Compression Mount (Quick Connect). . . . . . . . . . . . . . . . . . . . . . . . . 2-6
2.2.5 1/8 NPT Mount . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
2.2.6 NW16KF Flange Mount . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
2.2.7 Other Mounting Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
2.3 Convectron Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7

Series 316 Vacuum Gauge Controller Installation and Operation Instructions
6P/N 316059
Table of Contents (continued)
2.3.1 Reading Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
2.3.2 Special Considerations For Use Below 10 -3 Torr . . . . . . . . . . . . . . . . . . 2-7
2.3.3 Use With Gases Other Than N2 and Air . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.3.4 Indicated vs. True Pressure Curves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.3.5 Example 1 - Maximum Safe Indicated Pressure . . . . . . . . . . . . . . . . . 2-9
2.3.6 Example 2 - Indicated to True Pressure Conversion . . . . . . . . . . . . . . 2-9
2.3.7 Example 3 - True to Indicated Pressure Conversion . . . . . . . . . . . . . 2-10
2.3.8 Example 4 - True to Indicated Pressure Conversion . . . . . . . . . . . . . 2-17
2.4 Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
2.5 Convectron Calibration and Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
2.5.1 Zero Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19
2.5.2 Atmosphere Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19
2.5.3 Analog Output Full Scale Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20
2.5.4 Analog Output Offset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20
2.6 Cleaning the Gauge Tube . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21
2.7 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22
2.8 Convectron Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23
2.8.1 Transducer Test Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23
3.0 Convectron Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28
Appendix A - Customer Support Centers
Figures
Figure 1-1: Line Voltage Select Jumpers, Power Supply PC Board . . . . . . . . . 1-2
Figure 1-2: Mounting Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Figure 1-3: 316 VGC Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Figure 1-4: Correct System Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Figure 1-5: 316 VGC Control Unit Front Panel . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Figure 1-6: Power Supply Board Top View . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Figure 2-1: Convectron Gauge Mounting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Figure 2-2: Indicated Pressure of a Convectron Gauge (1 to 100 mTorr) . . . . 2-11
Figure 2-3: Indicated Pressure of a Convectron Gauge (0.1 to 1000 Torr) . . . 2-12
Figure 2-4: Indicated Pressure of a Convectron Gauge (0.1 to 1000 Torr) . . . 2-13
Figure 2-5: Indicated Pressure of a Convectron Gauge (10-3 to 10-1 mbar) . 2-14
Figure 2-6: Indicated Pressure of a Convectron Gauge (0.1 to 1000mbar) . . . 2-15
Figure 2-7: Indicated Pressure of a Convectron Gauge (0.1 to 1000 mbar) . . 2-16

Series 316 Vacuum Gauge Controller Installation and Operation Instructions
P/N 316059 7
Table of Contents (continued)
Figure 2-8: Convectron Module Rear Panel . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
Figure 2-9: Convectron Gauge Pressure Analog Output . . . . . . . . . . . . . . . . . 2-18
Figure 2-10: Convectron Modules Front Panel . . . . . . . . . . . . . . . . . . . . . . . . 2-19
Figure 2-11: Convectron Modules Top View . . . . . . . . . . . . . . . . . . . . . . . . . 2-20
Figure 2-12: Simplified Schematic Convectron Gauge Module . . . . . . . . . . . 2-22
Figure 2-13: Convectron Module, Top view . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25
Figure 2-14: Convectron Cable Wiring (Single Filament) . . . . . . . . . . . . . . . 2-26
Figure 2-15: Convectron Cable Wiring (Dual Filament) . . . . . . . . . . . . . . . . . 2-27
Tables
Table 1-1: 316 VGC Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Table 1-2: 316 VGC Physical Specifications . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Table 1-3: 316 VGC Electrical Specifications . . . . . . . . . . . . . . . . . . . . . . . . 1-11
Table 2-1: True Pressure vs. Indicated Pressure Figures . . . . . . . . . . . . . . . . . . 2-8
Table 2-2: 275 Transducer Pin Resistance . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23
Table 2-3: Convectron Troubleshooting Guide . . . . . . . . . . . . . . . . . . . . . . . . 2-23
Table 2-4: Convectron Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28
Table A-1: Customer Support Centers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-2

Series 316 Vacuum Gauge Controller Installation and Operation Instructions
8P/N 316059

Series 316 Vacuum Gauge Controller Installation and Operation Instructions
P/N 316059 1-1
Section 1 - The 316 Vacuum Gauge Controller
1.1 Introduction
The 316 Vacuum Gauge Controller (VGC) measures pressures from
1 x 10-4 Torr (1 x 10-4 mbar or 1 x 10-2 Pa) to atmosphere, depending on
modules and transducers used.
Modules are available to operate Convectron, capacitance manometer, and
thermocouple gauges with three pressures displayed simultaneously.
Pressure readout is via 3 front panel displays, analog output, and available
computer interface.
The 316 VGC is a modular instrument which can be easily customized to
fit most user's exact needs. Infrequently used controls are housed behind a
hinged front panel, reducing front panel clutter and allowing the control
unit to reside in a half-rack space.
1.2 Available Configurations
1.2.1 Convectron Gauge (CG) Module
Permits pressure measurements from 1 x 10-4 to 999 Torr of N2from up to
three MKS Series 275 Convectron Gauges simultaneously provides analog
output of each indicated pressure.
1.3 Installation
1.3.1 Line Voltage Selection
Line voltages of 90-110 or 105-125 or 220-240 volts are user selectable via
jumpers on the power supply PC board within the controller. The factory
preset line voltage and fuse rating are marked on the rear panel. Compare
your unit to Figure 1-1 to determine if it is configured for your
requirements. Do not apply power until the correct configuration is
achieved.

The 316 Vacuum Gauge Controller
1-2 P/N 316059
Figure 1-1: Line Voltage Select Jumpers, Power Supply PC Board
316 POWER SUPPLY
009425-100
100/
100
115
100/
115
115/230
LINE VOLTAGE
LED
100/
115
115
100/
115
115
100/
230
100
100/
115/230
230
100
100/
115
115/230
230
100
100/
115
115/230
100VAC230VAC115VAC
230
HOLDER
FUSE
IEC
CONN
1
4
2
3
5
6
7
8
3
1
2
1
10
4
1
3
2
4
1
3
2