MKS G Series User manual

1046210-001, Rev A
January, 2013
MKS G-Series
Digital
Mass Flow Controllers
Instruction Manual

WARRANTY
G-Series Mass Flow Controllers
MKS Instruments, Inc. (MKS) warrants that for one (1) year from the date of shipment the equipment
described above (the “equipment”) manufactured by MKS shall be free from defects in materials and
workmanship.
For the period commencing with the date of shipment of this equipment and ending one (1) year later, MKS
will, at its option, either repair or replace any part which is defective in materials or workmanship without
charge to the purchaser. The foregoing shall constitute the exclusive and sole remedy of the purchaser for any
breach of MKS of this warranty.
The purchaser, before returning any equipment covered by this warranty, which is asserted to be defective by
the purchaser, shall make specific written arrangements with respect to the responsibility for shipping the
equipment and handling any other incidental charges with the MKS Sales Representative or distributor from
which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home
office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and used in accordance with the
specifications recommended by MKS for the proper and normal use of the equipment. MKS shall not be
liable under any circumstances for indirect, special, consequential, or incidental damages in connection with,
or arising out of, the sale, performance, or use of the equipment covered by this warranty.
MKS recommends that all MKS pressure and flow products be calibrated periodically (typically) every 6 to
12 months) to ensure accurate readings. When a product is returned to MKS for this periodic re-calibration it
is considered normal preventative maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES, EXPRESSED OR
IMPLIED, INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIED
WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST
INFRINGEMENT OF ANY PATENT.

Copyright © 2013 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means,
electronic or mechanical, including photocopying and recording, or by any information storage or retrieval
system, except as may be expressly permitted in writing by MKS Instruments, Inc.
Printed in the United States of America
Baratronand Mass-Floare registered trademarks of MKS Instruments, Inc., Andover, MA
DeviceNet™ is a trademark of Open DeviceNet Vendor Association, Inc., Coral Springs, FL
Elgiloyis a registered trademark of Elgiloy Specialty Metals, Elgin, IL
Teflonis a registered trademark of E.I. du Pont de Nemours and Company, Wilmington, DE
Swagelokand VCRare registered trademarks of Swagelok Marketing Company, Solon, OH
Protected by U. S. Patents 5314164 and 5461913 and other Patents and Patents Pending

Table of Contents
i
Table of Contents
List of References...............................................................................................................................................v
Mass Flow Device Safety Information .............................................................................................................1
Symbols Used in This Instruction Manual ....................................................................................................................1
Symbols Found on the Unit...........................................................................................................................................1
Safety Procedures and Precautions................................................................................................................................1
Sicherheitshinweise für das Massenflussgerät.................................................................................................3
In dieser Betriebsanleitung vorkommende Symbole .....................................................................................................3
Erklärung der am Gerät angebrachten Symbole............................................................................................................3
Sicherheitsvorschriften und Vorsichtsmaßnahmen .......................................................................................................3
Informations de sécurité pour appareils de mesure/contrôle de débit massique.........................................5
Symboles utilisés dans ce manuel d'utilisation..............................................................................................................5
Symboles figurant sur l'unité.........................................................................................................................................5
Mesures de sécurité et précautions ................................................................................................................................5
Medidas de seguridad del dispositivo de flujo de masa..................................................................................7
Símbolos usados en este manual de instrucciones.........................................................................................................7
Símbolos hallados en la unidad .....................................................................................................................................7
Procedimientos y precauciones de seguridad ................................................................................................................7
マスフロー機器の安全に関する情報..............................................................................................................9
本取扱説明書のマーク ...............................................................................................................................................9
本機器のマーク ...........................................................................................................................................................9
安全対策について .....................................................................................................................................................10
질량 유량 장치 안전 정보................................................................................................................................13
본지침 매뉴얼에 사용되는 기호들 .........................................................................................................................13
장치에 표시된 기호들 ...............................................................................................................................................13
안전 절차 및예방조치 ..............................................................................................................................................14
Chapter One: General Information ..............................................................................................................17
Introduction .................................................................................................................................................................17
How This Manual is Organized...................................................................................................................................18
Customer Support........................................................................................................................................................19
Chapter Two: Overview.................................................................................................................................21
General Information ....................................................................................................................................................21
How the MFC Works ..................................................................................................................................................22
Operation of the MFC with Gases other than Nitrogen...............................................................................................22
Chapter Three: Installation and Configuration...........................................................................................24
Unpacking ...................................................................................................................................................................24
Product Location and Requirements............................................................................................................................25
Product Dimensions ....................................................................................................................................................25
GE50A and GM50A – See Appendix C......................................................................................................................25
GV50A – See Appendix D..........................................................................................................................................25

Table of Contents
ii
Mounting Hardware.....................................................................................................................................................26
Installation Procedure..................................................................................................................................................26
Chapter Four: Analog and Digital Interfaces..............................................................................................29
Analog I/O Interface Cables ........................................................................................................................................29
Analog Interface Input and Output Options.................................................................................................................30
Digital Interface Input and Output Options .................................................................................................................33
Chapter Five: Ethernet Interface Setup and Configuration ......................................................................44
Step 1: Install the Java™ Plug-in (for single IP address) ............................................................................................44
Step 2: Setup Network for Communication through Ethernet.....................................................................................45
Chapter Six: Embedded Web-Based GUI and Diagnostics........................................................................54
Logging On to Your MFC...........................................................................................................................................54
Monitor Mode..............................................................................................................................................................54
Setup Mode..................................................................................................................................................................59
Chapter Seven: Maintenance ........................................................................................................................68
General Information ....................................................................................................................................................68
Recalibration................................................................................................................................................................68
Flow Zero Adjustment.................................................................................................................................................68
Chapter Eight: Troubleshooting...................................................................................................................73
Troubleshooting Chart.................................................................................................................................................73
Appendix A: Product Specifications.............................................................................................................79
Performance Specifications – GE50A/GV50A/GM50A .............................................................................................79
Specifications are subject to change without notice.Mechanical Specifications - GE50A/GV50A/GM50A.............79
Electrical Specifications for GE50A, GM50A and GV50A .......................................................................................80
Appendix B : Model Code Explanation for GE50A & GV50A..................................................................84
Model Code Description – Elastomer Sealed Products ...............................................................................................84
Appendix C: Model Code Explanation for GM50A....................................................................................90
Model Code Description – GM50A – Metal Sealed Products.....................................................................................90
Appendix D : Outline Drawings....................................................................................................................96
GE50A MFC and GM50A MFC/MFM.......................................................................................................................96
GV50A MFC w/ Integral Shut-off Valve....................................................................................................................99
Appendix D: Health and Safety Form........................................................................................................102
.........................................................................................................................................................................102

List of References
iii
List of Figures
Figure 1: Serial Number Label (sample)...........................................................................................................26
Figure 2: DeviceNet Connector Pin Diagram...................................................................................................33
Figure 3: Devicenet Top View..........................................................................................................................34
Figure 4: Devicenet Baud Rate Switch..............................................................................................................35
Figure 5: Devicenet MAC ID Switches ............................................................................................................35
Figure 6: Profibus Top View .............................................................................................................................38
Figure 7: Profibus Station Address Switches....................................................................................................39
Figure 8: RS485 Top View...............................................................................................................................41
Figure 9: Embedded GUI, MFC Device Page in Monitor Mode......................................................................55
Figure 10: Embedded GUI, Plot Page in Monitor Mode ..................................................................................56
Figure 11: Embedded GUI, Configuration Page in Monitor Mode ..................................................................57
Figure 12: Embedded GUI, RS485 Comm Page in Monitor Mode..................................................................58
Figure 13: Setup Mode (Configuration Page)...................................................................................................59
Figure 14: Embedded GUI, Device Page in Setup Mode .................................................................................60
Figure 15: Embedded GUI, Creating A New Gas Instance ..............................................................................61
Figure 16: Changing the Full Scale Flow Range ..............................................................................................61
Figure 17: Embedded GUI, Plot Page in Setup Mode ......................................................................................62
Figure 18: Embedded GUI, Configuration Page in Setup Mode ......................................................................63
Figure 19: Embedded GUI, RS485 Comm Page in Setup Mode......................................................................65
Figure 20: Embedded GUI, Diagnostics Page in Setup Mode..........................................................................66

List of References
iv
List of Tables
Table 1: Definition of Symbols Found on the Unit............................................................................................ 1
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole .............................................................................. 3
Tableau 3: Définition des symboles sur l'unité................................................................................................... 5
Tabla 4: Definición de los símbolos hallados en la unidad ................................................................................ 7
表5: 本機器に使⽤されているマークについて ........................................................................................... 9
표6: 장치에 표시된 기호들의 정의 .............................................................................................................. 13
Table 7: MKS Interface Cables ........................................................................................................................ 29
Table 8: Analog Interface Voltage I/O (0 to 5 VDC) – 9 Pin D Male Pinouts – Model Code A.................... 30
Table 9: Analog Interface Voltage I/O (0 to 5 VDC) – 15 Pin D Male Pinouts – Model Code B ................... 31
Table 10: Digital Interface - DeviceNet Connector Pinout – Model Code 6 ................................................... 33
Table 11: Network (NET) Status LED Indicators............................................................................................ 34
Table 12A: Profibus 9 Pin D Male Power Connector– Model Code 4 ............................................................ 37
Table 12B: Profibus 9 Pin D Female Communications Connector – Model Code 4 ....................................... 38
Table 13: Digital Interface – RS485 Using 9 Pin D – Model Code 5 .............................................................. 40
Table 14: RS485 Module Status LED Indicators ............................................................................................. 40
Table 15: Troubleshooting Chart...................................................................................................................... 73

List of References
v
List of References
The documents listed below are referenced throughout this manual.
[1] “DeviceNet Specification, Volume I: DeviceNet Communication Model and Protocol”, Open
DeviceNet Vendors Association, Inc. Release 2.0. ERRATA 4.0
[2] “DeviceNet Specification, Volume II: DeviceNet Profiles and Object Library”, Open DeviceNet
Vendors Association, Inc. Release 2.0. ERRATA 4.0
[3] “Sensor/Actuator Network Common Device Model”, SEMI Standards Document E54.1-0097.
[4] “Sensor/Actuator Network Communications Standard for DeviceNet”, SEMI Standards Draft
Document E54.4-0097.
[5] “Sensor/Actuator Network Specific Device Model for Mass Flow Devices”, SEMI Standards Draft
Document #2253C.
[6] “Sensor/Actuator Network Standard”, SEMI Standards Document E54-0097.
[7] SEMI E17-00-0060 Guideline for Mass Flow Controller Transient Characteristics Tests
[8] SEMI E18-00-0091. Guideline for Temperature Specifications of the Mass Flow Controller
[9] SEMI E27-00-0092. Standard for Mass Flow Controller and Mass Flow Meter Linearity
[10] SEMI E28-00-0092. Guideline for Pressure Specifications of the Mass Flow Controller
[11] SEMI E56-00-1296. Test Method for Determining Accuracy, Linearity, Repeatability, Short Term
Reproducibility, Hysteresis, and Dead Band of Thermal Mass Flow Controllers
[12] SEMI Standards Document E52-95.
[13] SEMI E80-00-0299. Test Method Determining Attitude Sensitivity of Mass Flow Controllers
[14] SEMI Standards Document E52-95. Practice for Referencing Gases and Gas Mixtures Used in Digital
Mass Flow Controllers
[15] Instruction Manual, G-Series MFC, RS845 Supplement
[16] Instruction Manual, G-Series MFC, DeviceNet Supplement
[17] Instruction Manual, G-Series MFC, Profibus Supplement

List of References
vi
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