MKS 640B User manual

MKS Type 640B/641B
(ROHS Compliant)
Pressure Controller
Instruction Manual
90 Industrial Way
Wilmington MA
01887
Main: 978.284.4000
Fax: [phone]
www.mksinst.com
1031365-001
Rev C, 12/22
Instruction Manual

WARRANTY
Type 649B Equipment
MKS Instruments, Inc. (MKS) warrants that for two years from the date of shipment
the equipment described above (the “equipment”) manufactured by MKS shall be
free from defects in materials and workmanship and will correctly perform all date-
related operations, including without limitation accepting data entry, sequencing,
sorting, comparing, and reporting, regardless of the date the operation is performed
or the date involved in the operation, provided that, if the equipment exchanges
data or is otherwise used with equipment, software, or other products of others,
such products of others themselves correctly perform all date-related operations
and store and transmit dates and date-related data in a format compatible with
MKS equipment. THIS WARRANTY IS MKS’ SOLE WARRANTY CONCERNING
DATE-RELATED OPERATIONS.
For the period commencing with the date of shipment of this equipment and ending
two years later, MKS will, at its option, either repair or replace any part which is
defective in materials or workmanship or with respect to the date-related operations
warranty without charge to the purchaser. The foregoing shall constitute the
exclusive and sole remedy of the purchaser for any breach by MKS of this
warranty.
The purchaser, before returning any equipment covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrange-
ments with respect to the responsibility for shipping the equipment and handling
any other incidental charges with the MKS sales representative or distributor from
which the equipment was purchased or, in the case of a direct purchase from MKS,
with the MKS home office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and
used in accordance with the specifications recommended by MKS for the prope
r
and normal use of the equipment. MKS shall not be liable under any circumstances
for indirect, special, consequential, or incidental damages in connection with, o
r
arising out of, the sale, performance, or use of the equipment covered by this
warranty.
MKS recommends that all MKS pressure and flow products be calibrated
periodically (typically every 6 to 12 months) to ensure accurate readings. When a
product is returned to MKS for this periodic re-calibration it is considered normal
preventative maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF
MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF
A
NY PATENT.

Copyright © 2008 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any
means, electronic or mechanical, including photocopying and recording, or by any information
storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments,
Inc.
Baratron®is a registered trademark of MKS Instruments, Inc., Andover, MA
Cajon®is a registered trademark of Cajon Company, Macedonia, OH
Kalrez®and Viton®are registered trademarks of E. I. DuPont de Nemours and Co. Inc.,
Wilmington, DE
NUPRO®is a registered trademark of Crawford Fitting Company, Solon, OH
Swagelok®, VCR®, and VCO®are registered trademarks of Swagelok Marketing Co., Solon,
OH
Inconel®is a registered trademark of Inco Alloys International, Inc., Huntington, WV
Kel-F®is a registered trademark of 3M Company, Minneapolis, MN

Table of Contents
v
Table of Contents
Pressure Transducer Safety Information......................................................................................1
Symbols Used in This Instruction Manual......................................................................1
Symbols Found on the Unit ............................................................................................2
Safety Procedures and Precautions.................................................................................3
Chapter One: General Information .............................................................................................5
Introduction.....................................................................................................................5
How This Manual is Organized......................................................................................6
Manual Conventions..........................................................................................6
Customer Support...........................................................................................................7
Chapter Two: Installation ...........................................................................................................9
How To Unpack the 640B Series Controller..................................................................9
Unpacking Checklist..........................................................................................9
Product Location and Requirements...............................................................................10
Interface Cables ..............................................................................................................11
Generic Shielded Cable Description..................................................................12
The I/O Connector ..........................................................................................................13
Gas Pressure and Control................................................................................................15
Pressure Limits ..................................................................................................15
Installing the Unit ..............................................................................................15
Dimensions .....................................................................................................................17
Side Port Version...............................................................................................17
Down Port Version ............................................................................................19
Side Port Controller Mounting Instructions....................................................................21
Fittings...............................................................................................................21
Mounting Hardware...........................................................................................21
Down Port Controller Mounting Instructions.................................................................22
How To Connect the C-Seal Fittings.................................................................23
How To Connect the W-Seal (SEMI 2878.3) Fittings.......................................26
Initial Configuration .......................................................................................................28

Table of Contents
vi
Chapter Three: Overview............................................................................................................31
General Information........................................................................................................31
Pressure Control Range .....................................................................................31
A Typical Control System .................................................................................32
How The 640B Series Pressure Controller Works..........................................................33
Tuning the 640B Series Pressure Controller...................................................................34
Proportional Term..............................................................................................34
Integral Term .....................................................................................................35
Tuning the 640B Controller...............................................................................36
Priority of Commands.....................................................................................................38
Trip Points.......................................................................................................................39
Action of the Trip Points ...................................................................................39
Applications with a Large Differential Pressure.............................................................40
Labels..............................................................................................................................40
Chapter Four: Operation.............................................................................................................41
How To Check the Zero..................................................................................................41
How To Zero a Type 640B (Absolute) Unit......................................................41
How To Zero a Type 641 (Gage) Unit...............................................................42
How to Adjust the Span..................................................................................................43
How To Tune the 640B Series Controller ......................................................................43
How to Adjust the Trip Point Values..............................................................................44
How to Select the Trip Point Action...............................................................................45
How To Use Trip Points as Error Indicators...................................................................47
How To Change the Pressure Output Signal Range.......................................................48
How to Select Upstream Control....................................................................................49
Appendix A: Product Specifications...........................................................................................51
Performance Specifications ............................................................................................51
Environmental Specifications.........................................................................................52
Trip Point Specifications ................................................................................................52
Physical Specifications ...................................................................................................53
Appendix B: Valve Orifice Selection .........................................................................................55
General Information........................................................................................................55
Checking the Orifice Size..................................................................................55

Table of Contents
vii
How to Verify the Orifice Selection...............................................................................56
Using Different Gases........................................................................................58
Appendix C: Gas Density Table.................................................................................................59
Appendix D: Model Code Explanation.......................................................................................63
Model Code Description.................................................................................................63
Index ............................................................................................................................................69

List of Fi
g
ures
ix
List of Figures
Figure 1: Downstream Pressure Control.....................................................................................16
Figure 2: Upstream Pressure Control..........................................................................................16
Figure 3: Front and Back Views of the Side Port 640B Series Controller..................................17
Figure 4: Side View of the 640B Series Controller....................................................................18
Figure 5: Top View of the Down Port Type 640B Controller....................................................19
Figure 6: Front and Side View of the Down Port Type 640.......................................................19
Figure 7: Bottom View of the Down Port 640............................................................................20
Figure 8: Bottom View of the Down Port Seals .........................................................................20
Figure 9: Bottom View of the Side Port 640B Series Controller................................................21
Figure 10: Exploded View of the C-Seal Components...............................................................24
Figure 11: Exploded View of the W-Seal Components..............................................................26
Figure 12: Top View of the 640B Series Controller....................................................................31
Figure 13: Sample Pressure Control System...............................................................................31
Figure 14: Effects of the Proportional Control ...........................................................................33
Figure 15: Effects of the Integral Control...................................................................................34
Figure 16: Controller Response with Initial P Term and I Term Values....................................35
Figure 17: Controller Response with Increased P Term.............................................................36
Figure 18: Controller Response with Increased I Term..............................................................37
Figure 19: Serial Number Label .................................................................................................40
Figure 20: Jumper Positions on the Transducer Board...............................................................40
Figure 21: Switch Settings on the Control Board........................................................................45
Figure 22: Model Code Explanation............................................................................................55
Figure 23: Flow Range Selection.................................................................................................57

List of Tables
xi
List of Tables
Table 1: Definition of Symbols Found on the Unit ........................................................................ 2
Table 2: Interface Cables..............................................................................................................11
Table 3: I/O Connector Pinout...................................................................................................... 13
Table 4: Fitting Dimension...........................................................................................................17
Table 5: SEMI Specifications for Down Port Fitting Options......................................................22
Table 6: SEMI 2787.1 C-Seal Retainer (EG&G Part Numbers) ..................................................23
Table 7: 0.445 Inch Diameter C-Seal Retainer............................................................................23
Table 8: Initial Configuration .......................................................................................................28
Table 9: Highest Pressure Suggested for Zero Adjustment of an Absolute Transducer...............42
Table 10: Orifice Size...................................................................................................................55
Table 11: Valve Orifice Index Number ........................................................................................56
Table 12: Pressure Range Selection..............................................................................................64
Table 13: Fitting Type Selection...................................................................................................64
Table 14: Valve Type....................................................................................................................65
Table 15: Seal Material Selection.................................................................................................65
Table 16: Valve Orifice Size Selection.........................................................................................66
Table 17: Trip Point Model Code Entry.......................................................................................66
Table 18: Valve Plug Material...................................................................................................... 67

Pressure Transducer Safet
y
Information S
y
mbols Used in This Instruction Manual
1
Pressure Transducer Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning
The WARNING sign denotes a hazard to personnel. It calls
attention to a procedure, practice, condition, or the like, which,
if not correctly performed or adhered to, could result in injury
to personnel.
Caution
The CAUTION sign denotes a hazard to equipment. It calls attention
to an operating procedure, practice, or the like, which, if not correctly
performed or adhered to, could result in damage to or destruction of
all or part of the product.
Note
The NOTE sign denotes important information. It calls attention to a
p
rocedure, practice, condition, or the like, which is essential to highlight.

S
y
mbols Found on the Uni
t
Pressure Transducer Safet
y
Information
2
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Definition of Symbols Found on the Unit
|
Off (Supply)
IEC 417, No.5008
A
lternating current
IEC 417, No.5032
Both direct and
alternating current
IEC 417, No.5033-a
Three phase
alternating current
IEC 617-2 No.020206
Caution, refer to
accompanying
documents
ISO 3864, No.B.3.1
Caution, risk of
electric shock
ISO 3864, No.B.3.6 Caution, hot surface
IEC 417, No.5041
Table 1: Definition of Symbols Found on the Unit
On (Supply)
IEC 417, No.5007 Earth (ground)
IEC 417, No.5017
Protective earth
(ground)
IEC 417, No.5019
Frame or chassis
IEC 417, No.5020 Equipotentiality IEC 417, No.5021 Direct current IEC 417, No.5031
Class ll equipment
IEC 417, No.5172-a

Pressure Transducer Safet
y
Information Safet
y
Procedures and Precautions
3
Safety Procedures and Precautions
Observe the following general safety precautions during all phases of operation of this
instrument. Failure to comply with these precautions or with specific warnings elsewhere in this
manual violates safety standards of intended use of the instrument and may impair the
protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the
customer’s failure to comply with these requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to an MKS Calibration and Service Center for service and repair to ensure
that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not attempt component replacement and internal adjustments. Any
service must be made by qualified service personnel only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, users must take responsibility to observe the proper safety
precautions, completely purge the instrument when necessary, and ensure that the material used is
compatible with the materials in this product, including any sealing materials.
PURGE THE INSTRUMENT
After installing the unit, or before removing it from a system, purge the unit completely with a
clean, dry gas to eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This instrument must be purged under a ventilation hood, and gloves must be worn for protection.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been
specifically certified for such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the
intended use of the instrument. Assemble and tighten fittings according to manufacturer's
directions.
CHECK FOR LEAK-TIGHT FITTINGS
Carefully check all vacuum component connections to ensure leak-tight installation.

Safet
y
Procedures and Precautions Pressure Transducer Safet
y
Information
4
OPERATE AT SAFE INLET PRESSURES
Never operate at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, install a suitable burst disc in the vacuum system
to prevent system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants to enter the unit before or during use. Contamination such as dust,
dirt, lint, glass chips, and metal chips may permanently damage the unit or contaminate the
process.
ALLOW PROPER WARM UP TIME FOR TEMPERATURE-CONTROLLED UNITS
Temperature-controlled units will only meet specifications when sufficient time is allowed for the
unit to meet, and stabilize at, the designed operating temperature. Do not zero or calibrate the
unit until the warm up is complete.

Chapter One: General Information Introduction
5
Chapter One: General Information
Introduction
The 640B Series, RoHS-compliant1version Pressure Controllers, includes the Type 640B
absolute pressure controller and the Type 641B gage pressure controller. The 640B Series
Controllers consist of a Baratron®capacitance manometer (either absolute or gage pressure), a
normally closed proportional control valve, and closed-loop control electronics. The closed-loop
control circuitry enables the unit to function as a proportional-integral (PI) controller. The unit’s
compact size and small, three-inch footprint reduce space requirements.
The 640B Series offers a variety of options including the seal material, full-scale range, and
calibration. The seal material is available in an elastomer (Viton®or Kalrez ®, refer to Appendix
D: Model Code Explanation, page 63, for information) or all-metal material. Available control
valve plug materials are Viton®, Kalrez®, Kel-F®, or metal. Full-scale ranges are available from
10 Torr to 100 psi with a flow capacity of 50 sccm (standard cubic centimeters per minute) to 50
slm (standard liters per minute).
The 640B Series Pressure Controller can be used in either upstream or downstream pressure
control applications. The transducer inlet port is identified as the “Controlled Pressure Port” to
ensure that you install the 640B Pressure Controller into your system correctly.
The 640B Series Controllers provide two user-settable alarm trip points. The trip points can be
set from 1 to 100% of full-scale. Each trip point controls an open collector transistor. An LED
light located on the top of the unit, indicates the trip point status.
Note
The proportional control valve in the 640B Pressure Controller is not a
p
ositive shutoff valve. Depending upon your application, you may need
to install a separate positive shutoff valve.
1The RoHS, “Restriction of Hazardous Substances,” directive aims to restrict certain dangerous
substances commonly used in electronic and electronic equipment.

How This Manual is Or
g
anize
d
Chapter One: General Information
6
How This Manual is Organized
This manual provides instructions on how to set up and install a 640B Series unit.
Before installing your 640B Series unit in a system and/or operating it, familiarize yourself
with all precautionary notes in the Safety Messages and Procedures section at the front of
this manual. Observe and obey all WARNING and CAUTION notes provided in the manual.
Chapter One: General Information, (this chapter) introduces the product and describes the
organization of the manual.
Chapter Two: Installation, explains the environmental requirements and describes how to mount
the instrument in your system.
Chapter Three: Overview, gives a brief description of the instrument and its functionality.
Chapter Four: Operation, describes how to use the controller with all its functions and features.
Appendix A: Product Specifications, lists the specifications of the instrument.
Appendix B: Valve Orifice Selection, presents the information used to select the appropriate flow
range for nitrogen and other gases.
Appendix C: Gas Density Table, lists the standard density of commonly used gases.
Appendix D: Model Code Explanation, explains how the model number of your 640B controller
lists the features included in the unit.
Manual Conventions
The following conventions apply throughout this manual:
XXXXXX For inputs: Indicates that the line must be pulled low to activate the function.
XXXXXX For outputs: Indicates that the output is active low.

Chapter One: General Information Customer Suppor
t
7
Customer Support
Standard maintenance and repair services are available at all our regional MKS Calibration and
Service Centers listed on the back cover. In addition, MKS accepts the instruments of other
manufacturers for recalibration using the Primary and Transfer Standard calibration equipment
located at all of our regional service centers. Should any difficulties arise in the use of your 640B
Series instrument, or to obtain information about companion products MKS offers, contact any
authorized MKS Calibration and Service Center. If it is necessary to return the instrument to
MKS, please obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Calibration and Service Center before shipping. The ERA Number expedites handling and
ensures proper servicing of your instrument.
Please refer to the inside of the back cover of this manual for a list of MKS Calibration and
Service Centers.
Warning
All returns to MKS Instruments must be free of harmful,
corrosive, radioactive, and toxic materials.

Customer Suppor
t
Chapter One: General Information
8
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