MKS 649B User manual

MKS TYPE 649B (ROHS COMPLIANT)
PRESSURE CONTROLLER WITH
INTEGRAL MASS FLOW METER
User Manual
PART 1023590-001 REV- C
E-MAIL: [email protected]
WWW.MKS.COM
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ANDOVER, MA 01810
[phone] OR [phone]

2 649B USER MANUAL
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Copyright © 2023 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means,
electronic or mechanical, including photocopying and recording, or by any information storage or
retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.
mksinst™ is a trademark of MKS Instruments, Inc.
Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA
Swagelok®, VCO®, and VCR® are registered trademarks of Swagelok Company, Solon, OH
Inconel® is a registered trademark of Inco Alloys, Inc. Huntington, WV
Viton® is registered trademark of DuPont Dow Elastomers, Inc., Wilmington, DE
Kel-F® is a registered trademark of 3M, Minneapolis, MN
Elgiloy® is a registered trademark of Elgiloy Limited Partnership, Elgin, IL
Protected by U. S. Patent 5461913; foreign patents pending.
All other product names herein are used for identification purposes only and are recognized as
properties (including trademarks, registered trademarks, and referenced copyrighted materials) of their
respective companies.

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Table of Contents
List of Figures and Tables ......................................................................................................................... 7
1Warranty ............................................................................................................................................... 8
2Safety ................................................................................................................................................... 9
2.1 Safety Information ....................................................................................................................... 9
2.1.1 Symbols Used in This Instruction Manual ............................................................................ 9
2.1.2 Symbols Found on the Unit................................................................................................ 10
2.1.3 Safety Procedures and Precautions .................................................................................. 11
2.2Sicherheitshinweise .................................................................................................................. 13
2.2.1 In dieser Betriebsanleitung vorkommende Symbole ......................................................... 13
2.2.2 Erklärung der am Gerät angebrachten Symbole ............................................................... 14
2.2.3 Sicherheitsvorschriften und Vorsichtsmaßnahmen ........................................................... 15
2.3Informations de Sécurité ........................................................................................................... 17
2.3.1 Symboles utilisés dans ce manuel d'utilisation .................................................................. 17
2.3.2 Symboles figurant sur l'unité .............................................................................................. 18
2.3.3 Mesures de sécurité et précautions ................................................................................... 19
2.4Medidas de Seguridad .............................................................................................................. 21
2.4.1 Símbolos usados en este manual de instrucciones .......................................................... 21
2.4.2 Símbolos hallados en la unidad ......................................................................................... 22
2.4.3 Procedimientos y precauciones de seguridad ................................................................... 23
2.5安全に関する情報 ..................................................................................................................... 25
2.5.1 本取扱説明書のマーク ....................................................................................................... 25
2.5.2 本機器のマーク .................................................................................................................. 26

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2.5.3 安全対策について .............................................................................................................. 27
2.6장치 안전 정보 ........................................................................................................................... 29
2.6.1 본 지침 매뉴얼에 사용되는 기호들 .................................................................................... 29
2.6.2 장치에 표시된 기호들 ......................................................................................................... 30
2.6.3 안전 절차 및 예방조치 ........................................................................................................ 31
3Chapter 3 General Information ........................................................................................................... 33
3.1 Introduction................................................................................................................................ 33
3.1.1 Design Features of the Integral Mass Flow Meter ............................................................. 33
3.1.2 Cleanliness Features ......................................................................................................... 34
3.2 How This Manual is Organized ................................................................................................. 34
3.2.1 Manual Conventions .......................................................................................................... 35
3.3 Customer Support ..................................................................................................................... 35
4Chapter 4 Installation ......................................................................................................................... 36
4.1 How To Unpack the Type 649 Unit ........................................................................................... 36
4.1.1 Opening the Package ........................................................................................................ 36
4.1.2 Unpacking Checklist .......................................................................................................... 36
4.2Interface Cables ........................................................................................................................ 37
4.2.1Generic Shielded Cable Description .................................................................................. 37
4.3Product Location and Requirements ......................................................................................... 38
4.4Dimensions................................................................................................................................ 39
4.4.1 Front and Back Views ........................................................................................................ 39
4.4.2 Side View ........................................................................................................................... 41

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4.4.3 Bottom View ....................................................................................................................... 41
4.5Dimensions................................................................................................................................ 42
4.5.1 Fittings ................................................................................................................................ 42
4.5.2 Mounting Hardware ............................................................................................................ 42
4.5.3 Gas Pressure ..................................................................................................................... 42
4.5.4 Installing the Unit ............................................................................................................... 43
4.6Electrical Information ................................................................................................................. 43
4.6.1 I/O Connector ..................................................................................................................... 43
4.7Initial Configuration ................................................................................................................... 46
5Chapter 5 Overview ............................................................................................................................ 47
5.1 General Information .................................................................................................................. 47
5.1.1 Pressure Control Range .................................................................................................... 47
5.1.2 Flow Range ........................................................................................................................ 47
5.1.3 A Typical Control System ................................................................................................... 48
5.2 How The 649 Pressure Controller Works ................................................................................. 48
5.3 Flow Measurement Overview .................................................................................................... 49
5.3.1 Flow Path ........................................................................................................................... 49
5.3.2 Measurement Technique ................................................................................................... 49
5.4 Tuning the 649B Pressure Controller ........................................................................................ 50
5.4.1 Proportional Term .............................................................................................................. 50
5.4.2 Integral Term ...................................................................................................................... 51
5.4.3 Tuning the 649B Controller ................................................................................................ 51
5.5 Priority of Commands ................................................................................................................ 54
5.6 Trip Points ................................................................................................................................. 55

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5.6.1Action of the Trip Points ..................................................................................................... 55
5.7 Applications with a Large Differential Pressure ........................................................................ 56
5.8 Labels ........................................................................................................................................ 56
6Chapter 6 Operation ........................................................................................................................... 57
6.1 How To Check the Pressure Transducer Zero ......................................................................... 57
6.2 How To Adjust the Pressure Transducer Span ......................................................................... 58
6.3 How To Zero the Integral Mass Flow Meter .............................................................................. 58
6.4 How To Tune the 649B Controller ............................................................................................ 59
6.5 How To Adjust the Trip Point Values ........................................................................................ 59
6.6 How To Select the Trip Point Action ......................................................................................... 61
6.7 How To Use Trip Points as Error Indicators .............................................................................. 62
6.8 How To Change the Pressure Output Signal Range ................................................................ 64
7Chapter 7 Maintenance ...................................................................................................................... 66
7.1 General Information .................................................................................................................. 66
7.2 Zero Adjustment ........................................................................................................................ 66
Appendix .................................................................................................................................................. 67
Appendix A: Product Specifications .................................................................................................. 67
Appendix B: Model Code Explanation ............................................................................................... 70
Appendix C: Valve Orifice Selection.................................................................................................. 73
Index ........................................................................................................................................................ 76

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List of Figures and Tables
Figure 1: Front View ................................................................................................................................ 40
Figure 2: Rear View ................................................................................................................................. 40
Figure 3: Side View .................................................................................................................................. 41
Figure 4: Bottom View ............................................................................................................................. 42
Figure 5: Downstream Pressure Control ................................................................................................. 43
Figure 6: Top View ................................................................................................................................... 47
Figure 7: Location of Flow Meter Adjustments ........................................................................................ 48
Figure 8: Effects of the Proportional Control Term .................................................................................. 50
Figure 9: Effects of the Integral Control Term ......................................................................................... 51
Figure 10: Controller Response with Initial P Term and I Term Values .................................................. 52
Figure 11: Controller Response with Increased P Term ......................................................................... 53
Figure 12: Controller Response with Increased I Term ........................................................................... 53
Figure 13: Serial Number Label ............................................................................................................... 56
Figure 14: Jumper Positions on the Transducer Board ........................................................................... 62
Figure 15: Valve Orifice Index Number ................................................................................................... 74
Table 1: Connector Pin Assignments ...................................................................................................... 44
Table 2: - Initial Configuration .................................................................................................................. 46
Table 3: - Highest Pressure for Zero Adjustment of the Pressure Transducer ....................................... 58
Table 4: - Valve Orific Sizes .................................................................................................................... 73
Table 5 - Valve Orifice Index Number ..................................................................................................... 74

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1 Warranty
MKS Instruments, Inc. (MKS) warrants that for one (1) year from the date of shipment the equipment,
which is described above and manufactured by MKS, shall be free from defects in materials and
workmanship.
For the period commencing with the date of shipment of this equipment and ending one (1) year later,
MKS will, at its option, either repair or replace any part which is defective in materials or workmanship
without charge to the purchaser. The foregoing shall constitute the exclusive and sole remedy of the
purchaser for any breach of MKS of this warranty.
The purchaser, before returning any equipment covered by this warranty, which is asserted to be
defective by the purchaser, shall make specific written arrangements with respect to the responsibility
for shipping the equipment and handling any other incidental charges with the MKS Sales
Representative or distributor from which the equipment was purchased or, in the case of a direct
purchase from MKS, with the MKS home office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and used in accordance
with the specifications recommended by MKS for the proper and normal use of the equipment. MKS
shall not be liable under any circumstances for indirect, special, consequential, or incidental damages
in connection with, or arising out of, the sale, performance, or use of the equipment covered by this
warranty.
MKS recommends that all MKS pressure and flow products be calibrated periodically (typically) every 6
to 12 months) to ensure accurate readings. When a product is returned to MKS for this periodic re-
calibration it is considered normal preventative maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES, EXPRESSED OR
IMPLIED, INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIED
WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST
INFRINGEMENT OF ANY PATENT.

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2 Safety
2.1 Safety Information
The following general safety precautions must be observed during all phases of operation of this
instrument. Failure to comply with these precautions or with specific warnings elsewhere in this manual
violates safety standards of intended use of the instrument and may impair the protection provided by
the equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply with
these requirements.
2.1.1 Symbols Used in This Instruction Manual
The following are definitions of WARNING, CAUTION, and NOTE messages used throughout the
manual.
NOTE
The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to
highlight.
CAUTION
The CAUTION sign denotes a hazard. It calls attention to an operating
procedure, practice, or the like, which, if not correctly performed or
adhered to, could result in damage to or destruction of all or part of the
product.
WARNING
The WARNING sign denotes a hazard. It calls attention to a procedure,
practice, condition, or the like, which, if not correctly performed or
adhered to, could result in injury to personnel.
DANGER
The DANGER sign Indicates an imminently hazardous situation that, if
not avoided, will result in death or serious injury.

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2.1.2 Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
ON (Supply)
IEC 417, No. 5007
OFF (Supply)
IEC 417, No. 5008
Earth (ground)
IEC 417, No. 5017
Protective earth
(ground)
IEC 417, No. 5019
Frame or Chassis
IEC 417, No. 5020
Equipotentiality
IEC 417, No. 5021
Direct current
IEC 417, No. 5031
Alternating current
IEC 417, No. 5032
Both direct and
alternating current
IEC 417, No. 5019
Class II equipment
IEC 417, No. 5172-a
Three phase
alternating current
IEC 617-2, No. 020206
Caution refers to
acompanying
documents
ISO 3864, No. B.3 1
Caution risk of
electric shock
ISO 3864, No. B.3 6
Caution hot surface
IEC 417, No. 5021