MKS Mass-Flo 1500 Series User manual

114173-P1
Rev D, 9/96
Instruction Manual
MKS Type 1500 Series
Mass-Flo®Controller
Six Shattuck Road
Andover, MA 01810-2449
[phone] or [phone]
Fax: [phone]
E-mail: [e-mail]
Web site: http://www.mksinst.com

WARRANTY
Type 1500 Series Equipment
MKS Instruments, Inc. (MKS) warrants that the equipment described above (th
e
“equipment”) manufactured by MKS shall be free from defects in materials and
workmanship for a period of one year from date of shipment and will for a period of tw
o
years from the date of shipment, correctly perform all date-related operations, including
without limitation accepting data entry, sequencing, sorting, comparing, and reporting,
regardless of the date the operation is performed or the date involved in the operation,
provided that, if the equipment exchanges data or is otherwise used with equipment,
software, or other products of others, such products of others themselves correctl
y
perform all date-related operations and store and transmit dates and date-related dat
a
in a format compatible with MKS equipment. THIS WARRANTY IS MKS’SOLE
WARRANTY CONCERNING DATE-RELATED OPERATIONS.
For the period commencing with the date of shipment of this equipment and ending one
year later in the case of defects in materials and workmanship, but two years later in the
case of failure to comply with the date-related operations warranty, MKS will, at its
option, either repair or replace any part which is defective in materials or workmanship
or with respect to the date-related operations warranty without charge to the purchaser.
The foregoing shall constitute the exclusive and sole remedy of the purchaser for an
y
breach by MKS of this warranty.
The purchaser, before returning any equipment covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrangements
with respect to the responsibility for shipping the equipment and handling any othe
r
incidental charges with the MKS sales representative or distributor from which the
equipment was purchased or, in the case of a direct purchase from MKS, with the MKS
home office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and used
in accordance with the specifications recommended by MKS for the proper and normal
use of the equipment. MKS shall not be liable under any circumstances for indirect,
special, consequential, or incidental damages in connection with, or arising out of, th
e
sale, performance, or use of the equipment covered by this warranty.
MKS recommends that all MKS pressure and flow products be calibrated periodicall
y
(typically every 6 to 12 months) to ensure accurate readings. When a product is
returned to MKS for this periodic re-calibration it is considered normal preventativ
e
maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF
MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR
A
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT O
F
ANY PATENT.
11-98 114173-P1

114173-P1
Rev D, 9/96
MKS Type 1500 Series
Mass-Flo®Controller

Copyright © 1996 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.
Mass-Flo®is a registered trademark of MKS Instruments, Inc., Andover, MA
Cajon® , VCR®, and VCO®are registered trademarks of Cajon Company, Macedonia, OH
Kalrez®, Neoprene®, and Viton®are registered trademarks of E.I. DuPont Co., Inc., Wilmington,
DE
Swagelok®is a registered trademark of Crawford Fitting Company, Solon, OH

Table of Contents
iii
Table of Contents
Safety Procedures and Precautions.......................................................................................... 1
Chapter One: General Information.......................................................................................... 5
Introduction............................................................................................................... 5
How This Manual is Organized.................................................................................. 6
Customer Support...................................................................................................... 7
Chapter Two: Installation.......................................................................................................9
How To Unpack the 1500 Series Unit........................................................................ 9
Environmental Requirements..................................................................................... 9
Setup ......................................................................................................................... 10
Gas Line Connections................................................................................................ 12
Standard Fittings........................................................................................... 12
Optional Fittings ........................................................................................... 13
Standard Materials......................................................................................... 13
Optional Seals............................................................................................... 13
Chapter Three: Overview........................................................................................................ 15
1500 Series Mass-Flo Meter/Controllers.................................................................... 15
Control Valve................................................................................................ 15
Electrical Connections ............................................................................................... 16
Valve Drive/Test Point.................................................................................. 17
Optional Input............................................................................................... 17
Interface Cables ......................................................................................................... 17
Chapter Four: Operation.........................................................................................................19
Warm Up and Start Up ..............................................................................................19
Set Point Command...................................................................................................21
Adjusting Speed to Set Point......................................................................... 21
Valve Override .......................................................................................................... 21
Chapter Five: Theory of Operation......................................................................................... 23

Table of Contents
iv
Flow Path...................................................................................................................23
Measurement Technique.............................................................................................23
Control Circuitry........................................................................................................24
The Gas Correction Factor (GCF)...............................................................................25
Chapter Six: Maintenance.......................................................................................................27
Valve Adjustment.......................................................................................................27
1559 Flow Controller.....................................................................................29
1562 Flow Controller.....................................................................................30
Repair ........................................................................................................................31
Chapter Seven: Troubleshooting.............................................................................................33
Troubleshooting Chart................................................................................................33
Appendix A: Product Specifications........................................................................................35
General Specifications................................................................................................35
Electrical Specifications .............................................................................................36
Mechanical Specifications..........................................................................................36
Appendix B: Type 558 Dimensions .......................................................................................37
Dimensions................................................................................................................37
Appendix C: Gas Correction Factors.......................................................................................39
Gas Correction Factor Table.......................................................................................39
Index ......................................................................................................................................43

List of Fi
g
ures and Tables
v
List of Figures and Tables
Figures
Figure 1: 1500 Series Flow Controller Dimensions................................................................ 11
Figure 2: 1500 Series Flow Controller Mounting Holes......................................................... 11
Figure 3: Standard Compression Fittings............................................................................... 12
Figure 4: Side View of the 1500 Series Flow Controller........................................................ 28
Figure 5: Type 558 Dimensions............................................................................................. 37
Figure 6: Type 558 Mounting Holes...................................................................................... 37
Tables
Table 1: Type D Connector Pinout ...........................................................................................16

List of Figures and Tables
vi

Safety Procedures and Precautions
1
Safety Procedures and Precautions
The following general safety precautions must be observed during all phases of operation of this
instrument. Failure to comply with these precautions or with specific warnings elsewhere in
this manual violates safety standards of intended use of the instrument. MKS Instruments, Inc.
assumes no liability for the customer's failure to comply with these requirements.
Warning Before performing mass flow controller valve adjustments,
you MUST purge your process equipment and the MFC with
an inert gas, such as argon or nitrogen, and isolate the MFC
from toxic and hazardous gases. Use an inert surrogate gas
while adjusting the valve preload as a safeguard against
inadvertent exposure to any toxic or hazardous gas. A
release of hazardous or toxic gas could cause serious injury.
If necessary, remove the MFC from the process equipment to
adjust the valve.
Questions concerning the safe handling of toxic or hazardous
gases may be answered by consulting your corporate policy,
a government agency such as OSHA or NIOSH, or experts
familiar with your process gas.
MKS assumes no liability for safe handling of toxic or
hazardous gases.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to an MKS Calibration and Service Center for service and repair to ensure
that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not remove instrument covers. Component replacement and internal
adjustments must be made by qualified service personnel only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, users must take responsibility to observe the proper safety
precautions, completely purge the instrument when necessary, and insure that the material used is
compatible with sealing materials.

Safet
y
Procedures and Precautions
2
PURGE THE INSTRUMENT
After installing the unit, or before its removal from a system, be sure to purge the unit completely
with a clean dry gas to eliminate all traces of the previously used flow material.
DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES
To avoid explosion, do not operate this product in an explosive atmosphere unless it has been
specifically certified for such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the
intended use of the instrument. Assemble and tighten fittings according to manufacturer's
direction.
CHECK FOR LEAK-TIGHT FITTINGS
Before proceeding to instrument set up, carefully check all plumbing connections to the
instrument to insure leak-tight installation.
OPERATE AT SAFE INLET PRESSURES
This unit should never be operated at pressures higher than the rated maximum pressure (refer to
the product specifications for the maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, a suitable burst disc should be installed in the
vacuum system to prevent system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants of any kind to enter the unit before or during use. Contamination
such as dust, dirt, lint, glass chips, and metal chips may permanently damage the unit.
ALLOW THE UNIT TO WARM UP
If the unit is used to control dangerous gases, they should not be applied before the unit has
completely warmed up. A positive shutoff valve can be employed to ensure that no erroneous
flow can occur during warm up.

Safety Procedures and Precautions
3
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning The WARNING sign denotes a hazard. It calls attention to a
procedure, practice, condition, or the like, which, if not
correctly performed or adhered to, could result in injury to
personnel.
Caution The CAUTION sign denotes a hazard. It calls attention to an
operating procedure, practice, or the like, which, if not correctly
performed or adhered to, could result in damage to or destruction of
all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.

Safet
y
Procedures and Precautions
4
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Chapter One: General Information Introduction
5
Chapter One: General Information
Introduction
The MKS Mass-Flo®Meter and Controller 1500 Series of instruments accurately measure and
control the mass flow rate of gases. Based on a patented flow sensing technique (U.S. Patent
Nos. 4464932, 4679585; Foreign Patents - Patents Pending), the flow controllers provide
continuous monitoring and closed-loop control of gas flows. Because it is mass flow that is
being measured, it is not necessary to correct for variations in gas temperature and pressure. The
instruments also utilize a patented balanced forces control valve to provide fast response and to
eliminate oscillation.
The MKS 1500 Series Flow Meter/Controllers are designed for general, industrial, and process
applications within a range of 20 to 200 slm (400 scfh). The flow meter/controllers offer
excellent RFI protection, digital open/close valve commands, and a safety shutoff feature for set
points under 0.2% of Full Scale. Accuracy is better than 1.0% of Full Scale in most ranges and
the settling time is less than 2 seconds (to within 2% of set point).
The 1500 Series includes the following types:
•Type 1559A Mass Flow Controller (valve normally closed)
•Type 1562A Mass Flow Controller (valve normally open)
•Type 558C Mass Flow Meter configured in Types 1559A and 1562A

How This Manual is Organized Cha
p
ter One: General Information
6
How This Manual is Organized
This manual is designed to provide instructions on how to set up and install 1500 Series Flow
Meter/Controller instrument.
Before installing your 1500 Series Flow Meter/Controller in a system and/or operating it,
carefully read and familiarize yourself with all precautionary notes in the Safety Messages
and Procedures section at the front of this manual. In addition, observe and obey all
WARNING and CAUTION notes provided throughout the manual.
Chapter One, General Information, (this chapter) introduces the product and describes the
organization of the manual.
Chapter Two, Installation, explains environmental requirements and practical considerations to
take into account when determining the location for the flow instrument. Once the mass flow
controller is placed in an appropriate environment, refer to the mechanical dimensions in the
Set Up section and follow the instructions for gas line connections.
Chapter Three gives an Overview of the 1500 Series Flow Meter/Controller instruments. It
describes the components of the instruments and lists the electrical pinouts of their Type “D”
connectors.
Chapter Four, Operation, explains how to start up and operate the flow meter/controller. Once
the instrument is in operation, review the next two sections to understand how the controller
adjusts flow rate to set point and to learn how to override the control valve.
Chapter Five, Theory of Operation, describes in a general way how the Flow Meter/Controller
operates in a gas flow system. This chapter also provides information on how to use a Gas
Correction Factor when interpreting the output signal for a gas other than nitrogen.
Chapter Six, Maintenance, provides instructions on how to adjust the control valves in the
1559/1562 units.
Chapter Seven, Troubleshooting, contains a checklist for reference in the event that your unit
does not produce consistently good results.
Appendix A lists Product Specifications for the Flow Meter/Controller instruments.
Appendix B shows Type 558 Meter Dimensions and Mounting Holes.
Appendix C provides Gas Correction Factors for the most commonly used gases.

Chapter One: General Information Customer Su
pp
ort
7
Customer Support
Standard maintenance services are available at all of our regional MKS Calibration and Service
Centers, listed on the back cover. In addition, MKS accepts the instruments of other
manufacturers for recalibration using the Primary and Transfer Standard calibration equipment
located at all of our regional service centers. Should any difficulties arise in the use of your 1500
Series instrument, or to obtain information about companion products MKS offers, contact any
authorized MKS Calibration and Service Center. If it is necessary to return the instrument to
MKS, please obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Calibration and Service Center before shipping. The ERA Number expedites handling and
assures proper servicing of your instrument.
Please refer to the inside of the back cover of this manual for a list of MKS Calibration and
Service Centers.
Warning All returns to MKS Instruments must be free of harmful,
radioactive, corrosive, or toxic materials.

Customer Support Cha
p
ter One: General Information
8
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Chapter Two: Installation How To Un
p
ack the 1500 Series Unit
9
Chapter Two: Installation
How To Unpack the 1500 Series Unit
MKS has carefully packed the Series 1500 Flow Meter/Controller so that it will reach you in
perfect operating order. Upon receiving the unit, however, you should check for defects, cracks,
broken connectors, etc., to be certain that damage has not occurred during shipment.
Note Do not discard any packing materials until you have completed your
inspection and are sure the unit arrived safely.
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the
unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Service Center before shipping. Please refer to the inside of the back cover of this manual for a
list of MKS Calibration and Service Centers.
Environmental Requirements
Install and operate a 1500 Series Flow Meter/Controller according to the following requirements.
1. The normal ambient operating temperature should remain between 15°C and 40°C
(59 to 104°F).
2. The maximum gas inlet pressure is 150 psig.
3. Maximum voltage/current at startup is:
A. ± 15 VDC (± 5%) @ 300 mA for the meter (Type 558).
B. ± 15 VDC (± 5%) @ 450 mA for the controllers (Types 1559/1562).
4. Typical steady state voltage/current should be:
A. ± 15 VDC @ 200 mA for the meter (Type 558).
B. ± 15 VDC @ 350 mA for the controllers (Types 1559/1562).
5. The warm-up time is 30 minutes.
6. For optimal performance, the instrument should remain powered at all times.
For additional 1500 Series Flow instrument requirements refer to Appendix A, Product
Specifications, page 35.

Setup Cha
p
ter Two: Installation
10
Setup
Follow these guidelines when setting up a 1500 Series Flow instrument.
1. Place the Flow Meter/Controller where it will be connected to a gas supply and process
chamber.
2. Mount the flow component into position.
Mounting of flow components in other than the position in which they are calibrated
(typically horizontal) will cause a small zero shift. The zero offset can be adjusted
according to the instructions in Warm Up and Start Up, page 19.
3. Install the instrument in the gas stream such that the flow will be in the direction of the
arrow on the side of the controller's base.
4. Be sure to allow clearance for the cable connector and tubing.
A. Straight Shielded connectors require approximately 3”height.
B. Right Angle connectors require approximately 2”height.
5. Be sure to allow access to the zero potentiometer and to the coil nut at the top of the
control valve.
Refer to Figures 1 and 2, page 11, for the location of the mounting holes and the overall
dimensions.

Chapter Two: Installation Setu
p
11
15-pin Type "D" Connector
Controller Gain
Zero Adjust
Swa
g
elok® Fittin
g
s
(without nuts or ferrules)
0.750 in.
6.00 in.
x
where x = 8.25 in. with ½
" Swa
g
elok
8.62 in. with 8-VCR®
8.31 in. with 8-VCO®
5.31 in.
Figure 1: 1500 Series Flow Controller Dimensions
0.25 in.
1.00 in.
1.625 in. 1.625 in.
2.875 in.
1.00 in.
#8-32 UNC - 2B x 0.19 Deep (2 places)
Center Line
#10-24 UNC - 2B x 0.22 Deep
& C'Sink 820to 0.25 in. DIa. (2 places)
Figure 2: 1500 Series Flow Controller Mounting Holes
Note Refer to Appendix B: Type 558 Dimensions, page 37, for mechanical
dimensions of the meter only.

Gas Line Connections Cha
p
ter Two: Installation
12
Gas Line Connections
Standard Fittings
Swagelok®compression fittings (½inch) are standard. To connect the fittings, follow the steps
below.
1. Be sure the tubing is clean and free of axial scratches.
2. Insert the tubing through the compression nut and ferrules all the way to the shoulder.
Refer to Figure 3.
Nut Front Ferrule Body
Back Ferrule Shoulder
Figure 3: Standard Compression Fittings
Caution Tighten the nut only 11/4turns past finger tight. When remaking,
tighten the nut only 1/6turn. Overtightening may damage the tubing
and fitting, and destroy a normally leak-tight fitting.
3. Connect the fitting on the other side of the instrument (one fitting is for gas input and the
other fitting is for gas output).