MKS MKSINST IE500A User manual

Type IE500A / IE1000A
Mass Flow Controller
Instruction Manual
2 Tech Drive
Suite 201
Andover, MA 01810
978.645.5500
978.557.5100 FAX
www.mksinst.com
1052292-001 Rev A
07/14
MKSINST

WARRANTY
Type IE500A / IE1000A Mass Flow Controller
MKS Instruments, Inc. (MKS) warrants that for one (1) year from the date of
shipment the equipment described above (the “equipment”) manufactured by MKS
shall be free from defects in materials and workmanship.
For the period commencing with the date of shipment of this equipment and ending
one (1) year later, MKS will, at its option, either repair or replace any part which is
defective in materials or workmanship or with respect to the date-related operations
warranty without charge to the purchaser. The foregoing shall constitute the
exclusive and sole remedy of the purchaser for any breach by MKS of this
warranty.
The purchaser, before returning any equipment covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrange-
ments with respect to the responsibility for shipping the equipment and handling
any other incidental charges with the MKS sales representative or distributor from
which the equipment was purchased or, in the case of a direct purchase from MKS,
with the MKS home office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and
used in accordance with the specifications recommended by MKS for the proper
and normal use of the equipment. MKS shall not be liable under any circumstances
for indirect, special, consequential, or incidental damages in connection with, or
arising out of, the sale, performance, or use of the equipment covered by this
warranty.
MKS recommends that all MKS pressure and flow products be calibrated
periodically (typically every 6 to 12 months) to ensure accurate readings. When a
product is returned to MKS for this periodic re-calibration it is considered normal
preventative maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF
MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF
ANY PATENT.

1052292-001 Rev A
07/14
Type IE500A / IE1000A
Mass Flow Controller
2 Tech Drive
Suite 201
Andover, MA 01810
978.645.5500
978.557.5100 FAX
www.mksinst.com

ii
Copyright © 2014 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means,
electronic or mechanical, including photocopying and recording, or by any information storage or retrieval
system, except as may be expressly permitted in writing by MKS Instruments, Inc.
Printed in the United States of America
MKSINSTis a trademark of MKS Instruments, Inc. Andover, MA
Swagelokand VCRare registered trademarks of Swagelok Marketing Company, Solon, OH

Table of Contents
iii
Table of Contents
Mass Flow Device Safety Information .............................................................................................................1
Symbols Used in This Instruction Manual ....................................................................................................................1
Symbols Found on the Unit...........................................................................................................................................1
Safety Procedures and Precautions................................................................................................................................2
Sicherheitshinweise für das Massenflussgerät ................................................................................................3
In dieser Betriebsanleitung vorkommende Symbole.....................................................................................................3
Erklärung der am Gerät angebrachten Symbole............................................................................................................3
Sicherheitsvorschriften und Vorsichtsmaßnahmen .......................................................................................................4
Informations de sécurité pour appareils de mesure/contrôle de débit massique.........................................5
Symboles utilisés dans ce manuel d'utilisation..............................................................................................................5
Symboles figurant sur l'unité.........................................................................................................................................5
Mesures de sécurité et précautions ................................................................................................................................6
Medidas de seguridad del dispositivo de flujo de masa..................................................................................7
Símbolos usados en este manual de instrucciones.........................................................................................................7
Símbolos hallados en la unidad .....................................................................................................................................7
Procedimientos y precauciones de seguridad ................................................................................................................8
マスフロー機器の安全に関する情報......................................................................................................................9
本取扱説明書のマーク...................................................................................................................................................9
本機器のマーク...............................................................................................................................................................9
安全対策について ........................................................................................................................................................10
질량 유량 장치 안전 정보 ................................................................................................................................11
본지침 매뉴얼에 사용되는 기호들 .........................................................................................................................11
장치에 표시된 기호들 ...............................................................................................................................................11
안전 절차 및예방조치 ..............................................................................................................................................11

Table of Contents
iv
How This Manual is Organized......................................................................................................................13
Chapter One: General Information..............................................................................................................14
Introduction .................................................................................................................................................................15
How the MFC Works ..................................................................................................................................................15
Operation of the MFC with Gases other than Air........................................................................................................16
Chapter Two: Installation .............................................................................................................................19
Unpacking the IE1000A Mass Flow Controller ..........................................................................................................19
Verifying Use Requirements Prior to Installation .......................................................................................................19
Understanding Dimensional Constraints .....................................................................................................................20
Performing MFC Installation.......................................................................................................................................23
Chapter Three: Operation.............................................................................................................................25
Analog IO 15-pin Interface Operation.........................................................................................................................25
4-20 mA IO 15-pin Interface Operation ......................................................................................................................28
General Operational Functions....................................................................................................................................30
Chapter Four: Maintenance and Troubleshooting.....................................................................................33
General Information ....................................................................................................................................................33
Zeroing the MKS IE1000A High Flow Rate Mass Flow Controller ...........................................................................33
Customer Support........................................................................................................................................................36
Repair ..........................................................................................................................................................................36
Troubleshooting...........................................................................................................................................................37
Chapter Five: Diagnostic Interface Setup, Configuration, and Operation...............................................40
Step 1: Install the Java™ Plug-In ................................................................................................................................41
Step 2: Configure TCP/IP Settings for Communication to IE1000A ..........................................................................42
Step 3: Connect to the IE1000A High Flow Rate Mass Flow Controller....................................................................45
Monitor Mode..............................................................................................................................................................46
Setup Mode..................................................................................................................................................................51
Appendix A: Product Specifications.............................................................................................................61
Performance Specifications .........................................................................................................................................61
Physical Specifications................................................................................................................................................61
Environmental Specifications......................................................................................................................................62
Electrical Specifications ..............................................................................................................................................62
Appendix B: Model Code Explanation.........................................................................................................63
Model Code Description..............................................................................................................................................63
Appendix C: Health and Safety Form..........................................................................................................67

List of Figures
v
List of Figures
Figure 1: Front View of the IE500A / IE1000A MFC......................................................................................21
Figure 2: Bottom View of the IE500A / IE1000A MFC ..................................................................................21
Figure 3: End View of the IE500A / IE1000A MFC........................................................................................22
Figure 4: Top View of the IE500A / IE1000A MFC (analog IO Interface) .....................................................22
Figure 5: Serial Number Label..........................................................................................................................23
Figure 6: Effects of the Proportional Term (Low Proportional Term) .............................................................30
Figure 7: Effects of the Proportional Term (High Proportional Term).............................................................31
Figure 8: Effects of the Integral Term (Low Integral Term) ............................................................................31
Figure 9: Effects of the Integral Term (High Integral Term)............................................................................31
Figure 10: Java Download Window..................................................................................................................42
Figure 11: Windows 7 Network Information Window.....................................................................................43
Figure 12: Windows 7 LAN Stats Dialog Box.................................................................................................43
Figure 13: Windows 7 LAN Properties Dialog Box.........................................................................................44
Figure 14: Windows 7 IP Properties Dialog Box .............................................................................................44
Figure 15: IE1000A Embedded Interface (Monitor Mode / Device Page).......................................................46
Figure 16: IE1000A Embedded Interface (Monitor Mode / Plot Page)............................................................48
Figure 17: IE1000A Embedded Interface (Monitor Mode / Diagnostics Page) ...............................................49
Figure 18: IE1000A Embedded Interface (Monitor Mode / Configuration Page)............................................50
Figure 19: IE1000A Embedded Interface (Setup Mode / Configuration Page)................................................51
Figure 20: IE1000A Embedded Interface (Setup Mode / Device Page)...........................................................52
Figure 21: IE1000A Embedded Interface (Setup Mode / Device Page) Creating A New Gas Instance ..........53
Figure 22: IE1000A Embedded Interface (Setup Mode / Device Page) Changing Full Scale Flow Range.....53
Figure 23: IE1000A Embedded Interface (Setup Mode / Plot Page)................................................................54
Figure 24: IE1000A Embedded Interface (Setup Mode / Configuration Page)................................................55
Figure 25: IE1000A Embedded Interface (Setup Mode / Optional PC Page) ..................................................57
Figure 26: IE1000A Embedded Interface (Setup Mode / Plot Page) Enabled Optional Input .........................59
Figure 27: IE1000A Embedded Interface Calibration Sheet ............................................................................60

List of Tables
vi
List of Tables
Table 1: Definition of Symbols Found on the Unit............................................................................................ 1
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole .............................................................................. 3
Tableau 3: Définition des symboles sur l'unité...................................................................................................5
Tabla 4: Definición de los símbolos hallados en la unidad................................................................................ 7
表5: 本機器に使用されているマークについて ......................................................................................................9
표6: 장치에 표시된 기호들의 정의 ..............................................................................................................11
Table 7: MKS Interface Cables........................................................................................................................25
Table 8: Analog I/O 15-pin DSUB Pinouts (Model Code B)...........................................................................26
Table 9: 4-20 mA I/O 15-pin DSUB Pinouts (Model Code G)........................................................................28
Table 10: MFC Troubleshooting Chart............................................................................................................37

Mass Flow Device Safety Information
1
Mass Flow Device Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning
The WARNING sign denotes a hazard. It calls attention to a procedure,
practice, condition, or the like, which, if not correctly performed or adhered
to, could result in injury to personnel.
Caution
The CAUTION sign denotes a hazard. It calls attention to an operating procedure,
practice, or the like, which, if not correctly performed or adhered to, could result in
damage to or destruction of all or part of the product.
Note
The NOTE sign denotes important information. It calls attention to a procedure, practice,
condition, or the like, which is essential to highlight.
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Table 1: Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No. 5007
Off (Supply)
IEC 417, No. 5008
Earth (ground)
IEC 417, No. 5017
Protective Earth (ground)
IEC 417, No. 5019
Frame or Chassis
IEC 417, No. 5020
Equipotentiality
IEC 417, No. 5021
Direct Current
IEC 417, No. 5031
Alternating Current
IEC 417, No. 5032
Both Direct and Alternating Current
IEC 417, No. 5033-a
Class II Equipment
IEC 417, No. 5172-a
Three Phase
Alternating Current
IEC 617-2, No. 020206
Caution (refer to accompanying
documents)
ISO 3864, No. B.3.1
Caution, Risk of Electric Shock
ISO 3864, No. B.3.6
Caution, Hot Surface
IEC 417, No. 5041

Mass Flow Device Safety Information
2
Safety Procedures and Precautions
Observe the following general safety precautions during all phases of operation of this instrument.
Failure to comply with these precautions or with specific warnings elsewhere in this manual violates
safety standards for intended use of the instrument and may impair the protection provided by the
equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply with these
requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an
MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not remove instrument covers. Component replacement and internal adjustments must be
made by qualified service personnel only.
KEEP AWAY FROM LIVE CIRCUITS
Do not replace components with power cable connected. Under certain conditions, dangerous voltages may exist even
with the power cable removed. To avoid injuries, always disconnect power and discharge circuits before touching them.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, users must take responsibility to observe the proper safety precautions, completely purge
the instrument when necessary, and ensure that the material used is compatible with sealing materials.
PURGE THE INSTRUMENT
After installing the unit, or before its removal from a system, be sure to purge the unit completely with a clean dry gas to
eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This instrument must be purged under a ventilation hood, and gloves must be worn to protect personnel.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been specifically certified for
such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the intended use of the
instrument. Assemble and tighten fittings according to manufacturer's directions.
CHECK FOR LEAK-TIGHT FITTINGS
Before proceeding to instrument setup, carefully check all plumbing connections to the instrument to ensure leak-tight
installation.
OPERATE AT SAFE INLET PRESSURES
This unit should never be operated at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, a suitable burst disc should be installed in the vacuum system to prevent
system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants of any kind to enter the unit before or during use. Contamination such as dust, dirt, lint, glass
chips, and metal chips may permanently damage the unit.
ALLOW PROPER WARM UP TIME FOR TEMPERATURE-CONTROLLED UNITS
Temperature-controlled unit will only meet specifications when sufficient time is allowed for the unit to meet, and
stabilize at, the designed operating temperature. Do not zero or calibrate the unit until the warm up is complete.