MKS Stabil-Ion 370 Series User manual

Series 370
Instruction Manual
Stabil-Ion®Vacuum Measurement Controller
Instruction manual part number 370119
Revision C - March 2020

Instruction Manual
Series 370
This Instruction Manual is for use with Series 370
Vacuum Measurement Controllers.
Stabil-Ion®Vacuum Measurement Controller
© 2020 MKS Instruments, Inc. All rights reserved.
Granville-Phillips®, Stabil-Ion®, and Convectron®are registered trademarks, and mksinstTM
is a trademark of MKS Instruments, Inc. All other trademarks and registered trademarks are
the properties of their respective owners.
Customer Service / Technical Support:
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: [phone]
Email: [email protected]
Visit our website at www.mksinst.com

Series 370 Stabil-Ion®Vacuum Measurement Controller
Catalog numbers for Series 370 Stabil-Ion Vacuum Measurement Controller
Left Mount, side-by-side with Power Supply: 370501 - # # # - # #
Half-Rack Mount, remote Power Supply: 370502 - # # # - # #
Interface Option:
None 0
RS-232 A
RS-485 B
Gauge Options:
None 0
Dual Convectron 1
Convectron 2
Setpoint Options:
None 0
2 Setpoints for Stabil-Ion Gauge A
6 Setpoint Relays, 2 per channel B
Display Options - Measurement Units:
Torr T
mbar M
Pascal P
Power Cord Options:
North America and Japan 115 V 1
North America 240 V 2
Universal Europe 220 V 3
United Kingdom 240 V 4

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Series 370 Stabil-Ion Instruction Manual - 370119
Table of Contents
Safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v
Chapter 1 System Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Chapter 2 Initial Setup Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
2.1 Control Unit Option Module Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
2.1.1 Top Cover Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
2.1.2 Convectron Pressure Units Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2.1.3 Process Control Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.1.3.1 Ion Gauge Assignment for Process Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1.3.2 Relay Polarity Setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.1.3.3 Process Control Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.1.4 RS-232 Computer Interface Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.1.4.1 Selecting the Byte Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.1.4.2 Handshaking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.1.5 RS-485 Computer Interface Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.1.5.1 RS-485 Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.1.5.2 Response Delay for the RS-485 Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.1.5.3 Selecting the Byte Format for RS-485 Communications . . . . . . . . . . . . . . . . . . . . . . . . 13
2.1.6 Replacing Control Unit Cover . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.2 Power Supply Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Chapter 3 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
3.1 Gauge Installation Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
3.1.1 EMC Compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
3.1.2 Cable Installation Statement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
3.1.3 Environmental Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
3.2 Stabil-Ion Gauge Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
3.3 Convectron Gauge Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
3.3.1 Compression Mount/Quick Connect . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
3.3.2 1/8 NPT Mount . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
3.3.3 VCR®/VCO®Mount . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
3.3.4 NW16KF Flange Mount . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
3.3.5 ConFlat Flange Mount . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
3.4 Installing the Control Unit and Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3.4.1 Grounding the System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3.4.2 Installation Hardware Part Numbers. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.5 Connecting Analog Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.5.1 Stabil-Ion Gauge Analog Output Signal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.5.2 Convectron Gauge Analog Output Signal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.6 Connecting Process Control Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.7 Connecting Stabil-Ion Remote Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.7.1 Definition of Input States . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.7.2 Using the Remote Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
3.7.3 Using the Remote Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
3.8 Connecting the RS-232 Computer Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
3.9 Connecting the RS-485 Computer Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
3.10 Connecting the Gauge Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
3.10.1 Convectron Gauge Cable Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
3.10.2 Stabil-Ion Gauge Cable Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
3.11 Connecting the Power Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Chapter 4 Preparing the Stabil-Ion System for Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
4.1 Preparing for Pressure Measurement with the Stabil-Ion Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
4.2 Stabil-Ion Gauge Calibration Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
4.3 Memory Module Loading and Operating Parameter Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
4.3.1 Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2

Table of Contents
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4.3.2 Loading the Stabil-Ion Memory Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
4.3.3 Control Menu Variables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
4.3.3.1 Pressure Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
4.3.3.2 Filament Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4.3.3.3 Gauge Scale Factor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4.3.3.4 Selecting Gas Type for the Stabil-Ion Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.3.3.5 Selecting Gas Type for the Convectron Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
4.3.4 Setup Menu Variables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
4.3.4.1 Units of Measure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
4.3.4.2 Selecting Degas Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
4.3.4.3 Overpressure Threshold . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
4.3.4.4 Line Frequency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
4.3.4.5 Pressure Display Update Speed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
4.4 Stabil-Ion Gauge Turn ON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
4.4.1 Alternate ON/OFF Gauge Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
4.5 Degassing the Stabil-Ion Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
4.5.1 Pressure Indication During Degas. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
4.5.2 Degas Power Limiter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
4.5.3 Gauge Bakeout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
4.6 Stabil-Ion Gauge Analog Output Signal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
4.7 Preparing for Convectron Gauge Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
4.7.1 Understanding Convectron Gauge Pressure Measurement in Gases other than Nitrogen (or Air) . 19
4.7.2 Examples. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
4.8 Ionization Gauge Auto Turn ON/OFF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
4.8.1 To Set the ON/OFF Pressure for IG1/IG2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
4.9 Adjustment of Convectron Gauge Zero and Atmospheric Pressure Indications . . . . . . . . . . . . . . . . . . . . 29
4.10 Convectron Gauge Analog Output Signal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
4.11 Preparing for Process Control Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
4.11.1 Setpoint Display and Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
4.11.2 To Display a Setpoint . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
4.11.3 To Modify a Setpoint . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
4.12 Preparing for use of the RS-232 Computer Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
4.13 Preparing for use of the RS-485 Computer Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
4.14 RS-232 and RS-485 Command Syntax . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
4.15 Gauge Serial Number Display and Channel Data Swapping . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
4.15.1 Stabil-Ion Gauge Serial Number Display and Channel Data Swapping. . . . . . . . . . . . . . . . . . . . 37
4.15.2 Convectron Gauge Serial Number Display and Memory Data Swapping . . . . . . . . . . . . . . . . . . 39
Chapter 5 Operation of a Stabil-Ion System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Chapter 6 Theory of Operation and Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
6.1 Stabil-Ion Gauge Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
6.1.1 Operating Principles of Bayard-Alpert Ionization Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
6.1.2 X Ray Limit of Bayard-Alpert Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
6.1.3 Filaments (Cathodes) used in Bayard-Alpert Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
6.1.4 Degassing Bayard-Alpert Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
6.1.5 Stabil-Ion Gauge Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
6.2 Convectron Gauge Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
6.2.1 Convectron Gauge Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Chapter 7 Service and Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
7.1 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
7.2 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
7.3 Fault Relay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
7.4 Electrometer Minimum Calibration Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
7.5 Troubleshooting the Convectron Gauge Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
7.6 Convectron Gauge Test Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
7.7 Cleaning Contaminated Convectron Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

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7.8 Troubleshooting the Electrometer Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
7.9 Overpressure Shutdown . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
7.10 Turn-OFF History . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
7.11 Troubleshooting the Process Control Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
7.12 RS-232 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
7.13 RS-485 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
7.14 Field Installation of Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
7.15 Troubleshooting Flow Charts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

Table of Contents
iv
Series 370 Stabil-Ion Instruction Manual - 370119

v
Series 370 Stabil-Ion Instruction Manual - 370119
Safety
Safety Instructions
START BY READING THESE IMPORTANT SAFETY INSTRUCTIONS AND NOTES collected here
for your convenience and repeated with additional information at appropriate points in these
instructions.
In these instructions the word “product” refers to the 370 Stabil-IonVacuum Measurement System
and all of its approved parts and accessories.
NOTE: These instructions do not and cannot provide for every contingency that may arise in
connection with the installation, operation, or maintenance of this product. If you require
further assistance, contact MKS at the address on the title page of this manual.
This product has been designed and tested to offer reasonably safe service provided it is installed,
operated, and serviced in strict accordance with these safety instructions.
These safety precautions must be observed during all phases of operation, installation, and service
of this product. Failure to comply with these precautions or with specific warnings elsewhere in this
manual violates safety standards of design, manufacture, and intended use of the instrument.
MKS disclaims all liability for the customer's failure to comply with these requirements.
■Read Instructions – Read all safety and operating instructions before operating the product.
■Retain Instructions – Retain the Safety and Operating Instructions for future reference.
■Heed Warnings – Adhere to all warnings on the product and in the operating instructions.
■Follow Instructions – Follow all operating and maintenance instructions.
■Accessories – Do not use accessories not recommended in this manual as they may be
hazardous.
These safety alert symbols in this manual or on the Product rear
panel, mean caution - personal safety, property damage or danger
from electric shock. Read these instructions carefully.
Failure to comply with these instructions may result in serious personal
injury, including death, or property damage.
The service and repair information in this manual is for the use of Qualified
Service Personnel. To avoid shock, do not perform any procedures in this
manual or perform any servicing on this product unless you are qualified to
do so.
To reduce the risk of fire or electric shock, do not expose this product to rain
or moisture.
Objects and Liquid Entry - Never push objects of any kind into this product
through openings as they may touch dangerous voltage points or short out
parts that could result in a fire or electric shock. Be careful not to spill liquid
of any kind onto the products.

Safety
vi
Series 370 Stabil-Ion Instruction Manual - 370119
Damage Requiring Service
Disconnect the product from the wall outlet and all power sources and refer servicing to Qualified
Service Personnel under the following conditions:
a. When any cable or plug is damaged.
b. If any liquid has been spilled onto, or objects have fallen into, the product.
c. If the product has been exposed to rain or water.
d. If the product does not operate normally even if you follow the operating instructions.
Adjust only those controls that are covered by the operation instructions. Improper
adjustment of other controls may result in damage and will often require extensive work
by a qualified technician to restore the product to its normal operation.
e. If the product has been dropped or the enclosure has been damaged.
f. When the product exhibits a distinct change in performance. This indicates a need for
service.
Do not substitute parts or modify instrument.
Because of the danger of introducing additional hazards, do not install
substitute parts or perform any unauthorized modification to the product.
Return the product to a service facility designated by MKS for service and
repair to ensure that safety features are maintained. Do not use this product
if it has unauthorized modifications.
Replacement Parts - When replacement parts are required, be certain to use
the replacement parts that are specified by MKS, or that have the same
characteristics as the original parts. Unauthorized substitutions may result in
fire, electric shock or other hazards.
Safety Check - Upon completion of any service or repairs to this product, ask
the Qualified Service Person to perform safety checks to determine that the
product is in safe operating order.
Finite Lifetime - After ten years of normal use or even non-use, the electrical
insulation in this product may become less effective at preventing electrical
shock. Under certain environmental conditions which are beyond the
manufacturer’s control, some insulation material may deteriorate sooner.
Therefore, periodically inspect all electrical insulation for cracks, crazing, or
other signs of deterioration. Do not use if the electrical insulation has become
unsafe.
Be aware that when high voltage is present in any vacuum system, a life
threatening electrical shock hazard may exist unless all exposed conductors
are maintained at earth ground.
This hazard is not peculiar to this product.
Be aware that an electrical discharge through a gas may couple dangerous
high voltage directly to an ungrounded conductor almost as effectively as
would a copper wire connection. A person may be seriously injured or even
killed by merely touching an exposed ungrounded conductor at high
potential.
This hazard is not unique to this product.

Safety
vii
Series 370 Stabil-Ion Instruction Manual - 370119
MKS Instruments, Inc. does not supply pressure relief valves or rupture disks. Suppliers of pressure
relief valves and pressure relief disks can be located via an online search. Confirm that these safety
devices are properly installed before installing the product.
In addition, check that (1) the proper gas cylinders are installed, (2) gas cylinder valve positions are
correct on manual systems, and (3) the automation is correct on automated gas delivery systems.
Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is
pressurized.
Proper Grounding:
All components of a vacuum system used with this or any similar high
voltage product must be maintained at Earth ground for safe operation. The
power cord of this product shall be connected only to a properly grounded
outlet. Be aware, however, that grounding this product does not guarantee
that other components of the vacuum system are maintained at Earth
ground.
Complying with the usual warning to connect the power cable only to a
properly grounded outlet is necessary but not sufficient for safe operation of
a vacuum system with this or any similar high voltage producing product.
Verify that the vacuum port to which the Stabil-Ion Gauge is mounted is
electrically grounded. It is essential for personnel safety as well as proper
operation that the envelope of the gauge be connected to a facility ground.
Use a ground lug on a flange bolt if necessary.
All conductors in, on, or around the vacuum system that are exposed to
potential high voltage electrical discharges must either be shielded at all
times to protect personnel or must be connected to earth ground at all times.
Danger, High Voltage – The high voltages present within the Power Supply
are capable of causing injury or death. To avoid electric shock, wait 3
minutes after power is removed before touching any component within the
Power Supply. This will permit charged capacitors to discharge.
Danger, high voltage – 180V is present in the Power Supply, on the cable,
and at the ion gauge when the gauge is turned ON. Voltages as high as
850V peak are present during degas.
Do not touch the Stabil-Ion Gauge during degas operation if the Guard has
been removed. Serious burns can occur.
Install suitable devices that will limit the pressure to the level that the
vacuum system can safely withstand. In addition, install suitable pressure
relief valves or rupture disks that will release pressure at a level
considerably below the pressure that the system can safely withstand.

Safety
viii
Series 370 Stabil-Ion Instruction Manual - 370119
Do not operate in an explosive atmosphere.
Do not operate the product in the presence of flammable gases or fumes.
Operation of any electrical instrument in such an environment constitutes a
definite safety hazard.
Do not use the product to measure the pressure of explosive or combustible
gases or gas mixtures. The sensor wire of the Convectron Gauge normally
operates at only 125 °C, but it is possible that Controller malfunction can
raise the sensor temperature above the ignition temperature of combustible
mixtures.
Danger of explosion or inadvertent venting to atmosphere exists on all
vacuum systems which incorporate gas sources or involve processes capable
of pressurizing the system above safe limits.
Warning - If used improperly, Convectron Gauges can supply misleading
pressure indications that can result in dangerous overpressure conditions
within the system. For use with gases other than air or N2, consult the gas
type correction charts in Section 4.7.1 on page 4-19 or use a Memory
Module programmed with data for the specific gas being used.
Using the N2calibration to pressurize a vacuum system above about 1 Torr
with certain other gases can cause dangerously high pressures which may
cause explosion of the system. See Section 4.7.1 on page 4-19 before using
with other gases.
Caution: If the overpressure shutdown point is increased from the factory
settings, an excess pressure rise may go undetected—resulting in possible
gauge and/or vacuum system damage. Consult the factory if in doubt.
It is the installer's responsibility to ensure that the automatic signals
provided by the product are always used in a safe manner. Carefully check
the system programming before switching to automatic operation.
Where an equipment malfunction could cause a hazardous situation, always
provide for fail-safe operation. As an example, in an automatic backfill
operation where a malfunction might cause high internal pressures, provide
an appropriate pressure relief device.
Do not disconnect the ionization gauge cable from either the gauge tube or
controller when the ion gauge is ON. The connectors are not rated to break
the currents and voltages delivered to the ion gauge.
Operation of the product with line voltage other than that selected by the
proper power supply switches can cause damage to the instrument and
injury to personnel.

Safety
ix
Series 370 Stabil-Ion Instruction Manual - 370119
Certification
MKS Instruments, Inc. certifies that this product met its published specifications at the time of shipment from
the factory. MKS Instruments further certifies that its calibration measurements are traceable to the National
Institute of Standards and Technology to the extent allowed by the Institute's calibration facility.
Warranty
MKS Instruments, Inc. provides a warranty period of 18 months from the date of shipment for the Series 370
Controllers. The MKS General Terms and Conditions of Sale provides the complete and exclusive warranty for
MKS products.
Service Guidelines
Some minor problems are readily corrected on site. If the product requires service, contact the MKS Technical
Support Department at [phone]. If the product must be returned to the factory for service, request a
Return Material Authorization (RMA) from MKS. Do not return products without first obtaining an RMA. In
some cases a hazardous materials disclosure form may be required. The MKS Customer Service
Representative will advise you if the hazardous materials document is required.
When returning products to MKS, be sure to package the products to prevent shipping damage. Shipping
damage on returned products as a result of inadequate packaging is the Buyer's responsibility.
For Customer Service / Technical Support:
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: [phone]
Email: [email protected]
Visit our website at: www.mksinst.com
FCC Verification
This equipment has been tested and found to comply with the limits for a Class A digital device, pursuant to
Part 15 of the FCC Rules. These limits are designed to provide reasonable protection against harmful
interference when the equipment is operated in a commercial environment. This equipment generates, uses,
and can radiate radio frequency energy and, if not installed and used in accordance with this instruction
manual, may cause harmful interference to radio communications. However, there is no guarantee that
interference will not occur in a particular installation. Operation of this equipment in a residential area is
likely to cause harmful interference in which case the user will be required to correct the interference at his
own expense. If this equipment does cause harmful interference to radio or television reception, which can
be determined by turning the equipment OFF and ON, the user is encouraged to try to correct the
interference by one or more of the following measures:
■Reorient or relocate the receiving antenna.
■Increase the separation between the equipment and the receiver.
■Connect the equipment into an outlet on a circuit different from that to which the receiver is connected.
■Consult the dealer or an experienced radio or television technician for help.

Safety
x
Series 370 Stabil-Ion Instruction Manual - 370119
Canadian Users
This Class B digital apparatus meets all requirements of the Canadian Interference-Causing Equipment
Regulations.
Cet appareil numerique de la classe B respecte toutes les exigences du Reglement sur le material broilleur du
Canada.
UL Listed
This product, when labeled, is Listed to UL 3101 Standard for Safety, Laboratory Equipment by Underwriters
Laboratories Inc. (UL).

1-1
Series 370 Stabil-Ion Instruction Manual - 370119
Chapter 1
1System Components
Figure 1-1 Stabil-Ion Vacuum Measuring System
1. Stabil-Ion Control Unit 5. Stabil-Ion Gauges
2. Interconnect cable 6. Stabil-Ion cables
3. Stabil-Ion Power Supply 7. Dual Convectron cable
4. Power cable 8. Convectron Gauges
Figure 1-2 Stabil-Ion Gauge
1. Stabil-Ion Gauge mounting flange 6. Pin guard
2. Mounting bolt 7. Connector shell
3. Cable 8. Serial No. tag
4. Connector locating pin 9. Ventilation slots
5. Memory module 10. Guard

1System Components
1-2
Series 370 Stabil-Ion Instruction Manual - 370119
Figure 1-3 Mounting and Installing Hardware
1. Units, Gas and chamber labels 8. Washer (4 ea.)
2. Rubber stick-on feet 9. Screw 10–32 x .50 in. (4 ea.)
3. Connector, 1/8 in. phone 10. Screwdriver
4. Mounting Bracket (4 ea.) 11. Connector, DA-26P, remote input
5. Screw 10–32 x .31 in. (4 ea.) 12. Connector, DA-15S, remote output
6. Fuses: 3.0 amp, 2.0 amp 13. Connector, process control
7. Fuses: 1.6 amp, 1.0 amp 14. Connector, DB-25S, RS-232
Figure 1-4 Stabil-Ion Vacuum Gauge Control Unit Front Panel
1. Stabil-Ion display, for gauge 1 or 2 8. Stabil-Ion Gauge 2 power switch
2. Convectron Gauge A display 9. Stabil-Ion Gauge 1 power switch
3. Convectron Gauge B display 10. Process Control channel indicator lights
4. Unit of measure label, Torr, mbar or Pascal, user selectable 11. Process Control channel labels
5. Degas power switch 12. Gas selection indicator label
6. Controller power switch 13. Gas selection indicator lights
7. Front door closure
He
N2
Air
H2
Ar
Kr
Hg
H2O
Ne
N2
Air
O2
Ar
SF
NO
D2
N2
Air
CO
Ar
Xe
CO2
chamber 1
chamber 2
chamber 3
roughing
backfill
source
beam line
annealing
residual
e-beam
sputtering
accelerator
system 1
system 2
system 3
implant
diffusion
etching
deposition
metalizing
process 1
process 2
process 3
vent
TORR
PASCAL
MBAR 12 3 4 5 6 7 8
1011121314
9
IG 2.13 -8
A
B
5.67 -2
745
1
2
3
4
5
6
O
IG1
O
DEGAS
O
POWER
O
IG2
O
TORR
12 11 9 8
1
2
3
7
4 5 6
Chamber 1
Chamber 2
Chamber 3
Chamber 4
Chamber 5
Chamber 6
N2
N2
N2
Ar
Ar
1013

1System Components
1-3
Series 370 Stabil-Ion Instruction Manual - 370119
Open the front panel door to access these controls.
Figure 1-5 Stabil-Ion Vacuum Gauge Control Unit Front Panel (door open)
1. RS-232 or RS-485 Computer Interface Module 10. Select/Cancel switches used during setup
2. Process control channel setpoint override switch 11. Electrometer Module display
3. Process control channel indicator 12. Data port for Calibration Memory
4. Process control channel selector thumbwheel 13. Vacuum zero adjustment, Convectron Gauge A
5. Auto-ON switch, IG2 14. Atmosphere adjustment, Convectron Gauge A
6. Auto-ON adjustment, IG2 15. Auto ON switch, IG1
7. Vacuum zero adjustment, Convectron Gauge B 16. Auto ON adjustment, IG1
8. Atmosphere adjustment, Convectron Gauge B 17. Process control setpoint pressure down push-button
9. Up/Down switches used for menu and parameter
selection during setup
18. Process control setpoint pressure up push-button
O
IG1
O
Degas
O
Power
O
IG2
Data Port
IG1 L F1
N2 TORR
▲
▼
Cancel
Select
IG-1 AUTO
SETOFF
ATM
VAC
IG-2 AUTO
SETOFF
ATM
VAC
CONVECTRON ELECTROMETER
PROCESS CONTROLRS-232
Off SP On
▲
▲
▲
▲
Off SP On
1
2
3
4
5
6
3
Set
▲
▲
18 1416 1517 13 12
3 75 64 8 9 10 1112

1System Components
1-4
Series 370 Stabil-Ion Instruction Manual - 370119
Figure 1-6 Stabil-Ion Vacuum Gauge Control Unit Rear Panel
1. Grounding lug to be connected to earth ground with
#12 AWG conductor
7. Connector for Process Control relay contacts
2. Interconnect cable connection from Power Supply 8. Connector for RS-232 or RS-485
3. Connector for IG analog output voltage 9. Connector for analog output voltage from Convectron
Gauge A
4. Collector connector for Stabil-Ion Gauge 2 10. Collector connector for Stabil-Ion Gauge 1
5. Connector for analog output voltage from
Convectron Gauge B
11. Connector for remote parameter selection inputs
6. Connector for Dual Convectron Gauge Cable 12. Connector for remote output relay contacts from
Stabil-Ion Gauge 1 and Stabil-Ion Gauge 2
C
G
G
A
U
G
E
R
E
M
O
T
E
CA
XW
8
19
15
926
119
2513
114
91
15 8
13 25
114
ANALOG
OUTPUT B
IG1 COL.
ANALOG
RS232 (or IEEE488)
ELECTROMETER PROCESS CONTROL
REMOTE
OUTPUT
POWER
SUPPLY
GND
ANALOG
OUTPUT A
IG2 COL.
1
12 910
CONVECTRON
11
2 3 5 64 7 8
OUTPUT
3
7
0
1
0
4

1System Components
1-5
Series 370 Stabil-Ion Instruction Manual - 370119
Figure 1-7 Stabil-Ion Power Supply
1. Line power fuse 6. Line voltage selector switch
2. Grounding lug (connect to earth ground with
#12 AWG conductor)
7. Connector for interconnect cable to Control Unit
3. Degas power fuse 8. Connector for Stabil-Ion Gauge 1
4. Line voltage selector switch 9. Connector for Stabil-Ion Gauge 2
5. Line voltage selector switch 10. Connector for power cable
9
!!
ALL 3 SWITCHES MUST BE SET TO THE SAME AC LINE VOLTAGE
POWER 50-60 HZ 220 WATTS
IG2 IG1
DEGAS
FUSE
CONTROL UNIT
POWER
FUSE
10
1 2 3 4 5 6 7
FOR AC LINE VOLTAGE BETWEEN 90V TO 130V SET ALL SWITCHES TO 115V,
USE 3A, F 250V POWER FUSE, AND USE 2A, F, 250V DEGAS FUSE
FOR AC LINE VOLTAGE BETWEEN 180V TO 240V SET ALL SWITCHES TO 230V,
USE 1.6A, F, 250V POWER FUSE, AND USE 1A, F, 250V DEGAS FUSE
8

1System Components
1-6
Series 370 Stabil-Ion Instruction Manual - 370119
1
Figure 1-8 Top View of Stabil-Ion Vacuum Gauge Control Unit (cover and door removed) 1
1. For completeness, all available capabilities are assumed present. Not all capabilities may be present in the
product you have specified.