MKS Mass-Flo 1159B User manual

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111155-P1
Rev K, 10/96
Instruction Manual
MKS Mass-Flo®Controller
Types 1159B/2159B,
1160B/2160B, 1162B/2162B, 1163B/2163B
Six Shattuck Road
Andover, MA 01810-2449
[phone] or [phone]
Fax: [phone]
E-mail:[e-mail]
Web site: http://www.mksinst.com
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WARRANTY
Type 1159B/2159B, 1160B/2160B,
1162B/2162B Equipment
MKS Instruments, Inc. (MKS) warrants that the equipment described above (the
“equipment”) manufactured by MKS shall be free from defects in materials and
workmanship for a period of one year from date of shipment and will for a period of two
years from the date of shipment, correctly perform all date-related operations, including
without limitation accepting data entry, sequencing, sorting, comparing, and reporting,
regardless of the date the operation is performed or the date involved in the operation,
provided that, if the equipment exchanges data or is otherwise used with equipment,
software, or other products of others, such products of others themselves correctly
perform all date-related operations and store and transmit dates and date-related data
in a format compatible with MKS equipment. THIS WARRANTY IS MKS’SOLE
WARRANTY CONCERNING DATE-RELATED OPERATIONS.
For the period commencing with the date of shipment of this equipment and ending one
year later in the case of defects in materials and workmanship, but two years later in the
case of failure to comply with the date-related operations warranty, MKS will, at its
option, either repair or replace any part which is defective in materials or workmanship
or with respect to the date-related operations warranty without charge to the purchaser.
The foregoing shall constitute the exclusive and sole remedy of the purchaser for any
breach by MKS of this warranty.
The purchaser, before returning any equipment covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrangements
with respect to the responsibility for shipping the equipment and handling any other
incidental charges with the MKS sales representative or distributor from which the
equipment was purchased or, in the case of a direct purchase from MKS, with the MKS
home office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and used
in accordance with the specifications recommended by MKS for the proper and normal
use of the equipment. MKS shall not be liable under any circumstances for indirect,
special, consequential, or incidental damages in connection with, or arising out of, the
sale, performance, or use of the equipment covered by this warranty.
MKS recommends that all MKS pressure and flow products be calibrated periodically
(typically every 6 to 12 months) to ensure accurate readings. When a product is
returned to MKS for this periodic re-calibration it is considered normal preventative
maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF
MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF
ANY PATENT.
5/96 111155-P1
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111155-P1
Rev K, 10/96
MKS Mass-Flo®Controller
Types 1159B/2159B,
1160B/2160B, 1162B/2162B,
1163B/2163B
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Copyright © 1998 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.
Printed in the United States of America
Mass-Flo®is a registered trademark of MKS Instruments, Inc., Andover, MA
Cajon®, VCR®, and VCO® are registered trademarks of Cajon Company, Macedonia, OH
Kalrez® and Viton® are registered trademarks of DuPont de Nemours, E. I., & Co., Inc.,
Wilmington, DE
Neoprene®is a registered trademark of Vibration, Mountings & Controls, Inc., Bloomingdale,
NJ
Swagelok®is a registered trademark of Crawford Fitting Company, Solon, OH
NUPRO®is a registered trademark of NUPRO Company, Willoughby, OH
Kel-F®is a registered trademark of Minnesota Mining and Manufacturing, Minneapolis, MN
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Table of Contents
iii
Table of Contents
Safety Procedures and Precautions.......................................................................................... 1
Chapter One: General Information......................................................................................... 5
Introduction............................................................................................................... 5
How This Manual is Organized.................................................................................. 6
Customer Support...................................................................................................... 7
Chapter Two: Installation......................................................................................................9
How To Unpack the 1100 Series Unit........................................................................ 9
Unpacking Checklist ..................................................................................... 9
Environmental Requirements..................................................................................... 10
Interface Cables ......................................................................................................... 11
Generic Shielded Cable Description ..............................................................11
Setup ......................................................................................................................... 13
Mounting an MFC..................................................................................................... 14
Mounting an MFC Configured with a NUPRO Valve................................................ 14
Gas Line Connections................................................................................................ 15
How To Install a Swagelok Fitting................................................................ 15
Chapter Three: Overview....................................................................................................... 17
General...................................................................................................................... 17
NUPRO Positive Shut-off Valve................................................................................ 19
Interface Connectors and Cables ................................................................................ 20
Electrical Connections ............................................................................................... 21
Type “D”Connector...................................................................................... 21
P. C. Edge Card Connector............................................................................ 22
Control Valve............................................................................................................ 23
Chapter Four: Operation........................................................................................................25
Warm Up and Start Up .............................................................................................. 25
How To Start Up the Flow Controller............................................................ 25
How To Zero the Flow Controller ................................................................. 26
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Table of Contents
iv
Valve Override...........................................................................................................27
Adjusting the Speed to Set Point................................................................................27
NUPRO BN Shutoff Valve.........................................................................................27
Chapter Five: Theory of Operation.........................................................................................29
Flow Path...................................................................................................................29
Measurement Technique.............................................................................................29
Control Circuitry........................................................................................................29
Gas Correction Factor.................................................................................................31
How To Determine the Flow Controller Range...........................................................32
How To Read the Flow Output Directly .....................................................................33
Chapter Six: Maintenance......................................................................................................35
Valve Adjustment.......................................................................................................35
Repair ........................................................................................................................36
Chapter Seven: Troubleshooting............................................................................................37
Appendix A: Product Specifications.......................................................................................39
General Specifications................................................................................................39
Electrical Specifications .............................................................................................40
Mechanical Specifications..........................................................................................40
Appendix B: Gas Correction Factors......................................................................................41
Index ......................................................................................................................................45
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List of Fi
g
ures and Tables
v
List of Figures and Tables
Figures
Figure 1: Preferred Method To Connect a Shielded Cable...................................................... 12
Figure 2: Alternate Method To Connect a Shielded Cable ..................................................... 12
Figure 3: Location of the Mounting Holes............................................................................. 14
Figure 4: Aluminum Mounting Plate Holes........................................................................... 14
Figure 5: Standard Compression Fitting ................................................................................15
Figure 6: Dimensions ............................................................................................................ 18
Figure 7: NUPRO Valve Dimensions.................................................................................... 18
Figure 8: Wiring Diagram for an Input Divider...................................................................... 33
Tables
Table 1: Type “D”Connector Pinout........................................................................................21
Table 2: P. C. Edge Card Connector Pinout..............................................................................22
Table 3: Troubleshooting Chart................................................................................................37
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List of Figures and Tables
vi
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Safety Procedures and Precautions
1
Safety Procedures and Precautions
Warning Before performing mass flow controller valve adjustments,
you MUST purge your process equipment and the MFC with
an inert gas, such as argon or nitrogen, and isolate the MFC
from toxic and hazardous gases. Use an inert surrogate gas
while adjusting the valve preload as a safeguard against
inadvertent exposure to any toxic or hazardous gas. A
release of hazardous or toxic gas could cause serious injury.
If necessary, remove the MFC from the process equipment to
adjust the valve.
Questions concerning the safe handling of toxic or hazardous
gases may be answered by consulting your corporate policy,
a government agency such as OSHA or NIOSH, or experts
familiar with your process gas.
MKS assumes no liability for safe handling of toxic or
hazardous gases.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to an MKS Calibration and Service Center for service and repair to ensure
that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not remove instrument covers. Component replacement and internal
adjustments must be made by qualified service personnel only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, users must take responsibility to observe the proper safety
precautions, completely purge the instrument when necessary, and ensure that the material used
is compatible with sealing materials.
PURGE THE INSTRUMENT
After installing the unit, or before its removal from a system, be sure to purge the unit completely
with a clean dry gas to eliminate all traces of the previously used flow material.
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Safet
y
Procedures and Precautions
2
DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES
To avoid explosion, do not operate this product in an explosive atmosphere unless it has been
specifically certified for such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the
intended use of the instrument. Assemble and tighten fittings according to manufacturer's
directions.
CHECK FOR LEAK-TIGHT FITTINGS
Before proceeding to instrument setup, carefully check all plumbing connections to the
instrument to ensure leak-tight installation.
OPERATE AT SAFE INLET PRESSURES
This unit should never be operated at pressures higher than the rated maximum pressure (refer to
the product specifications for the maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, a suitable burst disc should be installed in the
vacuum system to prevent system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants of any kind to enter the unit before or during use. Contamination
such as dust, dirt, lint, glass chips, and metal chips may permanently damage the unit.
ALLOW THE UNIT TO WARM UP
If the unit is used to control dangerous gases, they should not be applied before the unit has
completely warmed up. A positive shutoff valve can be employed to ensure that no erroneous
flow can occur during warm up.
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Safety Procedures and Precautions
3
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning The WARNING sign denotes a hazard. It calls attention to a
procedure, practice, condition, or the like, which, if not
correctly performed or adhered to, could result in injury to
personnel.
Caution The CAUTION sign denotes a hazard. It calls attention to an
operating procedure, practice, or the like, which, if not correctly
performed or adhered to, could result in damage to or destruction of
all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.
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Safet
y
Procedures and Precautions
4
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Chapter One: General Information Introduction
5
Chapter One: General Information
Introduction
The MKS Mass-Flo®Controllers covered in this manual include:
MFCs with normally closed valves
•Type 1159B - MFC with Type “D”connector/valve normally closed
•Type 1160B - MFC with Recessed P.C. Edge Card connector/valve normally closed
•Type 2159B - Type 1159B with a NUPRO®BN positive shut-off valve downstream
•Type 2160B - Type 1160B with a NUPRO BN positive shut-off valve downstream
MFCs with normally opened valves
•Type 1162B - MFC with Type “D”connector/valve normally open
•Type 1163B - MFC with Recessed P.C. Edge Card connector/valve normally open
•Type 2162B - Type 1162B with a NUPRO BN positive shut-off valve downstream
•Type 2163B - Type 1163B with a NUPRO BN positive shut-off valve downstream
These MKS Mass-Flo Controllers are elastomer sealed thermal flow controllers and will be
collectively referred to as the 1100 Series in this manual.
These mass flow controllers (MFCs) accurately measure and control the mass flow rate of gases.
Based upon an MKS patented measurement technique (U.S. Patent Nos. 4464932, 4679585;
Foreign Patents - Patents Pending), each instrument is a laminar flow device whose precise
indication of mass flow is achieved through the use of a range controlling changeable bypass and
a parallel sensor tube. All controllers in the 1100 Series have a three-inch footprint and feature
the ability to accept TTL level commands to remotely open and close the control valve. The
controllers include a metal cover and RF bypass capacitors, and incorporate a design that
virtually eliminates RFI and EMI interference.
The MFC 1100 Series instruments may be powered, set point commanded, and their output
displayed by complimentary MKS equipment (Types 147/647, 160, 246, 247), or by customer
supplied devices. (Additionally, the 167 unit can be used as a readout and set point generator, but
it does not supply power; the 660 unit can be used as a power supply and readout, though it
cannot send a set point to the flow controller.) Refer to the corresponding manuals for
requirements and instructions.
The MKS MFC instruments are modular in concept and are available in a variety of types and
configurations to suit specific needs.
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How This Manual is Organized Cha
p
ter One: General Information
6
How This Manual is Organized
This manual is designed to provide instructions on how to set up and install an 1100 Series MFC
unit.
Before installing your Type 1100 Series unit in a system and/or operating it, carefully read
and familiarize yourself with all precautionary notes in the Safety Messages and Procedures
section at the front of this manual. In addition, observe and obey all WARNING and
CAUTION notes provided throughout the manual.
Chapter One, General Information, (this chapter) introduces the product and describes the
organization of the manual.
Chapter Two, Installation, explains the environmental requirements and practical considerations
to take into account when selecting the proper setting for the mass flow controller. Once the
mass flow controller is placed in its appropriate environment, follow the instructions in the Set
Up section on mechanical and electrical connections.
Chapter Three, Overview, lists the mechanical dimensions and electrical pinouts of the
instruments. It also includes information about the NUPRO valve, interface cables, and the
control valve.
Chapter Four, Operation, explains how to start up and operate the mass flow controller. Once
the mass flow controller is in operation, review the next two sections to learn how to override the
control valve and to understand how the controller adjusts flow rate to set point.
Chapter Five, Theory of Operation, describes in a general way how the 1100 Series Mass Flow
Controller operates in a gas flow system. This chapter also provides information on how to use a
Gas Correction Factor when interpreting the output signal for a gas other than Nitrogen.
Chapter Six, Maintenance, provides instructions on how to detect leakage in the unit and how to
adjust the control valve.
Chapter Seven, Troubleshooting, contains information in the event that the MFC should
malfunction.
Appendix A, Product Specifications, lists the specifications of the instrument.
Appendix B, Gas Correction Factors, provides a table listing the gas correction factors for the
most commonly used gases.
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Chapter One: General Information Customer Su
pp
ort
7
Customer Support
Standard maintenance and repair services are available at all of our regional MKS Calibration
and Service Centers, listed on the back cover. In addition, MKS accepts the instruments of other
manufacturers for recalibration using the Primary and Transfer Standard calibration equipment
located at all of our regional service centers. Should any difficulties arise in the use of your Type
1100 Series instrument, or to obtain information about companion products MKS offers, contact
any authorized MKS Calibration and Service Center. If it is necessary to return the instrument to
MKS, please obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Calibration and Service Center before shipping. The ERA Number expedites handling and
ensures proper servicing of your instrument.
Please refer to the inside of the back cover of this manual for a list of MKS Calibration and
Service Centers.
Warning All returns to MKS Instruments must be free of harmful,
corrosive, radioactive, or toxic materials.
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Customer Support Cha
p
ter One: General Information
8
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Chapter Two: Installation How To Un
p
ack the 1100 Series Unit
9
Chapter Two: Installation
How To Unpack the 1100 Series Unit
MKS has carefully packed the Type 1100 Series unit so that it will reach you in perfect operating
order. Upon receiving the unit, however, you should check for defects, cracks, broken
connectors, etc., to be certain that damage has not occurred during shipment.
Note Do not discard any packing materials until you have completed your
inspection and are sure the unit arrived safely.
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the
unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Service Center before shipping. Please refer to the inside of the back cover of this manual for a
list of MKS Calibration and Service Centers.
Unpacking Checklist
Standard Equipment:
•Type 1100 Series MFC unit (Refer to Introduction, page 5, for a description of the units
included in this series.)
Optional Equipment:
•Power Supply/Readout device
•Cabling to connect the flow controller to the readout device
(refer to Interface Connectors and Cables, page 20)
CB259-5-10 Connects the 1159/2159 and 1162/2162 units to
Type 246 and247 readouts
CB147-1-10 Connects the 1159/2159 and 1162/2162 units to
Type 167 and 647 readouts
CB259-10-10 Connects the 1160/2160 and 1163/2163 units to
Type 246 and 247 readouts
CB147-7-10 Connects the 1160/2160 and 1163/2163 units to
Type 167 and 647 readouts
Note In order for the 1100 Series MFC to com
p
l
y
with CE Mark s
p
ecifications
you must use a metal braided, shielded cable.
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Environmental Requirements Cha
p
ter Two: Installation
10
Environmental Requirements
Follow the requirements listed below when installing and using an 1100 Series MFC:
1. The normal operating temperature should remain between 15°and 40°C
(59°and 104°F).
2. The maximum gas inlet pressure is 150 psig.
3. The power input required is ±15 VDC (±5%) @ 300 mA.
A. The maximum voltage/current at startup is ±15 VDC (±5%) @ 300 mA.
B. The typical steady state voltage/current should be ±15 VDC @ 180 mA.
4. The warm-up time is 30 minutes (for warm-up time on 10 sccm units, consult the
factory).
5. For optimal performance, the instrument should remain powered at all times.
For additional MFC requirements refer to Appendix A, Product Specifications, page 39.
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