MKS 649B User manual

1023590-001
Rev B, 07/08
MKS Type 649B
(ROHS Compliant)
Pressure Controller
with an Integral Mass Flow Meter
Instruction Manual

Copyright © 2008 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any
means, electronic or mechanical, including photocopying and recording, or by any information
storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments,
Inc.
Baratron®is a registered trademark of MKS Instruments, Inc., Andover, MA
Cajon®and VCR®are registered trademarks of Cajon Company, Macedonia, OH
Viton®is registered trademark of DuPont Dow Elastomers, Inc., Wilmington, DE
Kel-F®is a registered trademark of 3M, Minneapolis, MN
Elgiloy®is a registered trademark of Elgiloy Limited Partnership, Elgin, IL
Protected by U. S. Patent 5461913; foreign patents pending.

Table of Contents
iii
Table of Contents
Safety Information.......................................................................................................................1
Symbols Used in This Instruction Manual......................................................................1
Symbols Found on the Unit............................................................................................2
Sicherheitshinweise......................................................................................................................5
In dieser Betriebsanleitung vorkommende Symbole ......................................................5
Erklärung der am Gerät angebrachten Symbole.............................................................5
Sicherheitsvorschriften und Vorsichtsmaßnahmen.........................................................6
Niemals Teile austauschen oder Änderungen am Gerät vornehmen!..........................................6
Wartung nur durch qualifizierte Fachleute!.................................................................................6
Vorsicht vor stromführenden Leitungen!.....................................................................................6
Vorsicht beim Arbeiten mit gefährlichen Stoffen!.......................................................................6
Spülen des Gerätes mit Gas!........................................................................................................6
Anweisungen zum Spülen des Gerätes........................................................................................6
Gerät nicht zusammen mit explosiven Stoffen, Gasen oder Dämpfen benutzen!........................6
Anweisungen zum Installieren der Armaturen!...........................................................................6
Verbindungen auf Undichtigkeiten prüfen!.................................................................................6
Gerät nur unter zulässigen Anschlussdrücken betreiben!............................................................6
Geeignete Berstscheibe installieren!............................................................................................6
Verunreinigungen im Gerät vermeiden!......................................................................................6
Bei Geräten mit Temperaturkontrolle korrekte Anwärmzeit einhalten!......................................7
Informations de Sécurité..............................................................................................................9
Symboles utilisés dans ce manuel d'utilisation...............................................................9
Symboles figurant sur l'unité ..........................................................................................9
Mesures de sécurité et précautions .................................................................................10
PAS DE REMPLACEMENT DE PIÈCES OU DE MODIFICATION DE L'APPAREIL.........10

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iv
DÉPANNAGE UNIQUEMENT PAR DU PERSONNEL QUALIFIÉ.......................................10
ÉLOIGNEMENT DES CIRCUITS SOUS-TENSION................................................................10
PRÉCAUTION EN CAS D'UTILISATION AVEC DES PRODUITS DANGEREUX.............10
PURGE DE L'APPAREIL...........................................................................................................10
UTILISATION DES PROCÉDURES APPROPRIÉES POUR LA PURGE..............................10
PAS D'EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF...................................10
UTILISATION D'ÉQUIPEMENTS ET PROCÉDURES DE SERRAGE APPROPRIÉS .........10
VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS...................................................10
EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES...................10
INSTALLATION D'UN DISQUE D'ÉCHAPPEMENT ADAPTÉ ............................................10
MAINTIEN DE L'UNITÉ À L'ABRI DES CONTAMINATIONS ............................................10
RESPECT DU TEMPS D'ÉCHAUFFEMENT APPROPRIÉ POUR LES UNITÉS Á
RÉGULATION DE TEMPÉRATURE........................................................................................11
Medidas de Seguridad..................................................................................................................13
Símbolos usados en este manual de instrucciones..........................................................13
Símbolos hallados en la unidad.......................................................................................13
Procedimientos y precauciones de seguridad..................................................................14
NO UTILICE PIEZAS NO ORIGINALES O MODIFIQUE EL INSTRUMENTO...................14
LAS REPARACIONES DEBEN SER EFECTUADAS ÚNICAMENTE POR
TÉCNICOS AUTORIZADOS.....................................................................................................14
MANTÉNGASE ALEJADO DE LOS CIRCUITOS ACTIVOS................................................14
TENGA CUIDADO CUANDO TRABAJE CON MATERIALES TÓXICOS ..........................14
PURGUE EL INSTRUMENTO..................................................................................................14
USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA............................14
NO HAGA FUNCIONAR EL INSTRUMENTO EN AMBIENTES CON RIESGO DE
EXPLOSIÓN ...............................................................................................................................14
USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS
PROCEDIMIENTOS DE AJUSTE.............................................................................................14

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v
COMPRUEBE QUE LOS ACCESORIOS SEAN A PRUEBA DE FUGAS .............................14
HAGA FUNCIONAR EL INSTRUMENTO CON PRESIONES DE ENTRADA
SEGURAS ...................................................................................................................................14
INSTALE UNA CÁPSULA DE SEGURIDAD ADECUADA ..................................................14
MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES..................................................14
CALIENTE ADECUADAMENTE LAS UNIDADES CONTROLADAS POR MEDIO
DE TEMPERATURA..................................................................................................................15
安全に関する情報........................................................................................................................17
本取扱説明書のマーク ....................................................................................................17
本機器のマーク ................................................................................................................17
安全対策について............................................................................................................17
勝手に部品を変えたり、本体を改造しないこと ..............................................................................18
修理は必ず専門の修理サービスを利用すること.............................................................................18
電流が通じている回路から切断すること ........................................................................................18
危険な材料を使用する場合は慎重に機器を使用すること............................................................18
機器を浄化すること.......................................................................................................................18
浄化する場合は適切な手順で行うこと .........................................................................................18
爆発の危険性のある環境で機器を使用しないこと........................................................................18
適切な金具類を使用し、手順に従って金具の締めを行うこと........................................................18
液体の漏れがないよう接続箇所を確認すること.............................................................................18
安全なインレット圧力で使用すること .............................................................................................18
適切なバーストディスクを取り付けること .........................................................................................18
本機器に異物やゴミが混入しないようにすること.............................................................................18
温度調整された機器を十分に温めてから使用すること ..................................................................18
장치 안전 정보............................................................................................................................1
본지침 매뉴얼에 사용되는 기호들.............................................................................1

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vi
장치에 표시된 기호들...................................................................................................1
안전 절차 및예방조치..................................................................................................2
부품을 교체하거나 기계를 개조하지 마십시오......................................................................2
자격이 있는 사람에게만 서비스를 받으십시오......................................................................2
전류가 통하는 회로에서 분리해 보관하십시오......................................................................2
위험한 물질과 함께 작동할 때는 주의를 기울이십시오........................................................2
기계를 청소하십시오.................................................................................................................2
청소 시에는 적절한 절차를 사용하십시오..............................................................................2
폭발성 환경에서 작동하지 마십시오.......................................................................................2
적절한 조립부품과 조임 절차를 사용하십시오......................................................................2
누출방지 조립부품을 점검하십시오........................................................................................2
안전한 흡입 압력에서 작동하십시오.......................................................................................2
적합한 안전 파열판을 설치하십시오.......................................................................................2
장치를 오염이 없는 곳에 보관하십시오..................................................................................3
온도 제어 장치의 경우 알맞은 시동 시간을 두십시오...........................................................3
Chapter One: General Information .............................................................................................5
Introduction.....................................................................................................................5
Design Features of the Integral Mass Flow Meter.............................................5
Cleanliness Features...........................................................................................6
How This Manual is Organized......................................................................................6
Manual Conventions..........................................................................................6
Customer Support...........................................................................................................7
Chapter Two: Installation ...........................................................................................................9
How To Unpack the Type 649 Unit................................................................................9
Opening the Package .........................................................................................9
Unpacking Checklist..........................................................................................10
Interface Cables ..............................................................................................................11

Table of Contents
vii
Generic Shielded Cable Description..................................................................11
Product Location and Requirements...............................................................................12
Dimensions .....................................................................................................................13
Front and Back Views........................................................................................13
Side View...........................................................................................................14
Bottom View......................................................................................................15
Setup ...............................................................................................................................16
Fittings...............................................................................................................16
Mounting Hardware...........................................................................................16
Gas Pressure.......................................................................................................16
Installing the Unit ..............................................................................................17
Electrical Information.....................................................................................................18
I/O Connector ....................................................................................................18
Initial Configuration .......................................................................................................20
Chapter Three: Overview............................................................................................................21
General Information........................................................................................................21
Pressure Control Range .....................................................................................21
Flow Range........................................................................................................22
A Typical Control System .................................................................................22
How The 649 Pressure Controller Works.......................................................................23
Flow Measurement Overview.........................................................................................24
Flow Path...........................................................................................................24
Measurement Technique....................................................................................24
Tuning the 649 Pressure Controller................................................................................25
Proportional Term..............................................................................................25
Integral Term .....................................................................................................26
Tuning the 649 Controller .................................................................................27
Priority of Commands.....................................................................................................29
Trip Points ......................................................................................................................30
Action of the Trip Points ...................................................................................30
Applications with a Large Differential Pressure.............................................................31
Labels..............................................................................................................................31
Chapter Four: Operation.............................................................................................................33

Table of Contents
viii
How To Check the Pressure Transducer Zero ................................................................33
How To Adjust the Pressure Transducer Span ...............................................................34
How To Zero the Integral Mass Flow Meter ..................................................................35
How To Tune the 649 Controller....................................................................................36
How To Adjust the Trip Point Values ............................................................................37
How To Select the Trip Point Action .............................................................................38
How To Use Trip Points as Error Indicators...................................................................40
How To Change the Pressure Output Signal Range.......................................................41
Chapter Five: Maintenance.........................................................................................................43
General Information........................................................................................................43
Zero Adjustment .............................................................................................................43
Appendix A: Product Specifications...........................................................................................45
Performance Specifications.............................................................................................45
Physical Specifications ...................................................................................................46
Environmental Specifications.........................................................................................47
Trip Point Specifications.................................................................................................47
Appendix B: Model Code Explanation.......................................................................................49
Model Code.....................................................................................................................49
Appendix C: Valve Orifice Selection .........................................................................................53
General Information........................................................................................................53
Checking the Valve Orifice Size........................................................................53
How To Verify the Orifice Selection..............................................................................54
Index ............................................................................................................................................57

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