MKS MC20A User manual

136364-P1
Rev 3, 04/05
Type MC20A
High Flow Mass Flow Controller
with Analog I/O
Preliminary Copy

Copyright © 2005 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means,
electronic or mechanical, including photocopying and recording, or by any information storage or retrieval
system, except as may be expressly permitted in writing by MKS Instruments, Inc.
Printed in the United States of America
Baratron®and Mass-Flo®are registered trademarks of MKS Instruments, Inc., Andover, MA
Swagelok®and VCR®are registered trademarks of Swagelok Marketing Company, Solon, OH
Protected by U. S. Patents 5314164, 5461913, and 6505812.

Table of Contents
i
Table of Contents
Mass Flow Controller Safety Information.......................................................................................................1
Symbols Used in This Instruction Manual ....................................................................................................................1
Symbols Found on the Unit...........................................................................................................................................1
Safety Procedures and Precautions................................................................................................................................1
Sicherheitshinweise für das Massenflussgerät.................................................................................................3
In dieser Betriebsanleitung vorkommende Symbole.....................................................................................................3
Erklärung der am Gerät angebrachten Symbole............................................................................................................3
Sicherheitsvorschriften und Vorsichtsmaßnahmen .......................................................................................................3
Informations de sécurité pour appareils de mesure/contrôle de débit massique.........................................5
Symboles utilisés dans ce manuel d'utilisation..............................................................................................................5
Symboles figurant sur l'unité.........................................................................................................................................5
Mesures de sécurité et précautions................................................................................................................................5
Medidas de seguridad del dispositivo de flujo de masa..................................................................................7
Símbolos usados en este manual de instrucciones.........................................................................................................7
Símbolos hallados en la unidad.....................................................................................................................................7
Procedimientos y precauciones de seguridad ................................................................................................................7
マスフロー機器の安全に関する情報......................................................................................................................9
本取扱説明書のマーク...................................................................................................................................................9
本機器のマーク...............................................................................................................................................................9
安全対策について ..........................................................................................................................................................9
질량 유량 장치 안전 정보 ................................................................................................................................11
본지침 매뉴얼에 사용되는 기호들 .........................................................................................................................11
장치에 표시된 기호들 ...............................................................................................................................................11
안전 절차 및예방조치 ..............................................................................................................................................11
Chapter One: General Information ..............................................................................................................13
Introduction.................................................................................................................................................................13
How This Manual is Organized...................................................................................................................................14
Customer Support........................................................................................................................................................15
Chapter Two: Installation..............................................................................................................................17
How to Unpack the MC20A MFC ..............................................................................................................................17
Product Location and Requirements............................................................................................................................18
Setup............................................................................................................................................................................19
Electrical Connections.................................................................................................................................................24
Interface Cables...........................................................................................................................................................26
Chapter Three: Overview ..............................................................................................................................29
General Information ....................................................................................................................................................29
How the MC20A MFC Works ....................................................................................................................................30
Overview of Digital Operation....................................................................................................................................30
Tuning the MC20A MFC............................................................................................................................................31
Chapter Four: Operation...............................................................................................................................35

Table of Contents
ii
How to Start the MC20A MFC ...................................................................................................................................35
How to Zero the Flow Controller ................................................................................................................................35
How to Override the Valve..........................................................................................................................................37
The Optional Input.......................................................................................................................................................37
Chapter Five: Maintenance...........................................................................................................................39
General Information ....................................................................................................................................................39
Zero Adjustment..........................................................................................................................................................39
Calibration...................................................................................................................................................................39
Chapter Six: Troubleshooting.......................................................................................................................41
Troubleshooting Chart.................................................................................................................................................41
Description of Digital Error Messages ........................................................................................................................42
Appendix A: Product Specifications.............................................................................................................45
Performance Specifications.........................................................................................................................................45
Physical Specifications................................................................................................................................................46
Environmental Specifications......................................................................................................................................46
Appendix B: Gas Correction Factors ...........................................................................................................47
Explanation of Gas Correction Factor (GCF)..............................................................................................................47
Gas Correction Factors Table......................................................................................................................................48
Appendix C: Model Code Explanation.........................................................................................................51
Model Code Description..............................................................................................................................................51
Appendix D: Mass Flow Controller Sizing Guidelines ...............................................................................53
General Information ....................................................................................................................................................53
How to Determine the Flow Controller Range............................................................................................................53
Appendix E: MKS MC20A Digital MFC Graphical User Interface..........................................................55
Overview .....................................................................................................................................................................55
Software Setup.............................................................................................................................................................55
Equipment Needed ......................................................................................................................................................56
Equipment Setup .........................................................................................................................................................56
Starting the GUI ..........................................................................................................................................................57
Exiting the GUI ...........................................................................................................................................................58
Description of the Main Control Panel........................................................................................................................58
User Mode and Calibration Mode ...............................................................................................................................59
Calibration Mode Access.............................................................................................................................................60
Setting, Adding, and Deleting Gas Tables...................................................................................................................62
Adjusting PID Tuning Parameters...............................................................................................................................66
Viewing Identity Table................................................................................................................................................67
Reading Diagnostic Messages.....................................................................................................................................67
Creating and Modifying Calibration Tables................................................................................................................68
Index.................................................................................................................................................................71

List of Figures
iii
List of Figures
Figure 1: Front View of the MC20A MFC with 4 VCR Fittings......................................................................20
Figure 2: Front View of the MC20A MFC with 8 VCR Fittings (includes required mounting plate) .............20
Figure 3: Bottom View of the MC20A MFC with 4 VCR Fittings..................................................................21
Figure 4: Bottom View of the MC20A MFC with 8 VCR Fittings (includes required mounting plate)..........21
Figure 5: Inlet End View of the MC20A MFC.................................................................................................22
Figure 6: Top View of the MC20A MFC with 15-Pin Analog Interface..........................................................22
Figure 7: Serial Number Label..........................................................................................................................23
Figure 8: Effects of the Proportional Term (Low Proportional Term) .............................................................32
Figure 9: Effects of the Proportional Term (High Proportional Term).............................................................32
Figure 10: Effects of the Integral Term (Low Integral Term)...........................................................................33
Figure 11: Effects of the Integral Term (High Integral Term)..........................................................................33
Figure 12: Equipment Setup .............................................................................................................................56
Figure 13: Communications Window...............................................................................................................57
Figure 14: MC20A MFC Main Control Panel..................................................................................................57
Figure 15: Change Password Window..............................................................................................................60
Figure 16: Adding a Calibration Mode Password for a New User ...................................................................61
Figure 17: Add/Select Gas................................................................................................................................62
Figure 18: Accuracy Graphical Representation................................................................................................64
Figure 19: Gas List............................................................................................................................................64
Figure 20: Copy Gas Table...............................................................................................................................65
Figure 21: Tuning Parameters...........................................................................................................................66
Figure 22: Identity Table ..................................................................................................................................67
Figure 23: Calibration Table Operations ..........................................................................................................68

List of Tables
iv
List of Tables
Table 1: Definition of Symbols Found on the Unit............................................................................................1
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole ..............................................................................3
Tableau 3: Définition des symboles sur l'unité...................................................................................................5
Tabla 4: Definición de los símbolos hallados en la unidad................................................................................7
표6: 장치에 표시된 기호들의 정의 ..............................................................................................................11
Table 7: 15-Pin Type “D” MFC Connector Pinout – Standard Assignments (Model Code B) .......................24
Table 8: 15-Pin Type “D” MFC Connector Pinout – Alternative Assignments (Model Code E)....................25
Table 9: MKS Interface Cables........................................................................................................................26
Table 10: Troubleshooting Chart......................................................................................................................41
Table 11: Description of Digital Error Messages.............................................................................................42
Table 12: Gas Correction Factors.....................................................................................................................48
Table 13: Summary of User and Calibration Mode Capabilities .....................................................................59

Mass Flow Controller Safety Information
1
Mass Flow Controller Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning The WARNING sign denotes a hazard. It calls attention to a procedure, practice,
condition, or the like, which, if not correctly performed or adhered to, could result
in injury to personnel.
Caution The CAUTION sign denotes a hazard. It calls attention to an operating procedure,
practice, or the like, which, if not correctly performed or adhered to, could result in
damage to or destruction of all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a procedure, practice,
condition, or the like, which is essential to highlight.
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Table 1: Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No. 5007 Off (Supply) IEC 417, No. 5008 Earth (ground) IEC 417, No. 5017 Protective Earth (ground) IEC 417, No. 5019
Frame or Chassis
IEC 417, No. 5020 Equipotentiality IEC 417, No. 5021 Direct Current IEC 417, No. 5031 Alternating Current IEC 417, No. 5032
Both Direct and Alternating Current
IEC 417, No. 5033-a Class II Equipment IEC 417, No. 5172-a Three Phase Alternating Current
IEC 617-2, No. 020206
Caution (refer to accompanying
documents)
ISO 3864, No. B.3.1
Caution, Risk of Electric Shock
ISO 3864, No. B.3.6 Caution, Hot Surface IEC 417, No. 5041
Safety Procedures and Precautions
Observe the following general safety precautions during all phases of operation of this instrument.
Failure to comply with these precautions or with specific warnings elsewhere in this manual violates
safety standards of intended use of the instrument and may impair the protection provided by the
equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply with these
requirements.

Mass Flow Controller Safety Information
2
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an
MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not remove instrument covers. Component replacement and internal adjustments must be
made by qualified service personnel only.
KEEP AWAY FROM LIVE CIRCUITS
Do not replace components with power cable connected. Under certain conditions, dangerous voltages may exist even
with the power cable removed. To avoid injuries, always disconnect power and discharge circuits before touching them.
USE PROPER PROCEDURES WHEN PURGING
This instrument must be purged under a ventilation hood, and gloves must be worn to protect personnel.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been specifically certified for
such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the intended use of the
instrument. Assemble and tighten fittings according to manufacturer's directions.
CHECK FOR LEAK-TIGHT FITTINGS
Before proceeding to instrument setup, carefully check all plumbing connections to the instrument to ensure leak-tight
installation.
OPERATE AT SAFE INLET PRESSURES
This unit should never be operated at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants of any kind to enter the unit before or during use. Contamination such as dust, dirt, lint, glass
chips, and metal chips may permanently damage the unit.
ALLOW PROPER WARM UP TIME FOR TEMPERATURE-CONTROLLED UNITS
Temperature-controlled unit will only meet specifications when sufficient time is allowed for the unit to meet, and
stabilize at, the designed operating temperature. Do not zero or calibrate the unit until the warm up is complete.

Sicherheitshinweise für das Massenflussgerät
3
Sicherheitshinweise für das Massenflussgerät
In dieser Betriebsanleitung vorkommende Symbole
Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser
Betriebsanleitung.
Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. Es
macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine
sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw.
ungenügende Berücksichtigung zu Verletzungen führen kann.
Vorsicht! Das Symbol VORSICHT! weist auf eine Gefahr für das Gerät hin. Es macht auf
einen Bedienungsablauf, eine Arbeitsweise oder eine sonstige Gegebenheit
aufmerksam, deren unsachgemäße Ausführung bzw. ungenügende
Berücksichtigung zu einer Beschädigung oder Zerstörung des Gerätes oder von
Teilen des Gerätes führen kann.
Hinweis Das Symbol HINWEIS macht auf wichtige Informationen bezüglich eines
Arbeitsablaufs, einer Arbeitsweise, eines Zustands oder einer sonstige Gegebenheit
aufmerksam.
Erklärung der am Gerät angebrachten Symbole
Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können.
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole
|
Ein (Energie)
IEC 417, No.5007 Aus (Energie) IEC 417, No.5008 Erdanschluss IEC 417, No.5017 Schutzleiteranschluss IEC 417, No.5019
Masseanschluss
IEC 417, No.5020 Aquipotentialanschluss IEC 417, No.5021 Gleichstrom IEC 417, No.5031 Wechselstrom IEC 417, No.5032
Gleich- oder Wechselstrom
IEC 417, No.5033-a Durchgängige doppelte oder verstärkte Isolierung
IEC 417, No.5172-a
Dreileiter-Wechselstrom (Drehstrom)
IEC 617-2, No.020206
Warnung vor einer Gefahrenstelle
(Achtung, Dokumentation beachten)
ISO 3864, No.B.3.1
Warnung vor gefährlicher
elektrischer Spannung
ISO 3864, No.B.3.6
Höhere Temperatur an leicht
zugänglichen Teilen
IEC 417, No.5041
Sicherheitsvorschriften und Vorsichtsmaßnahmen
Folgende allgemeine Sicherheitsvorschriften sind während allen Betriebsphasen dieses Gerätes zu
befolgen. Eine Missachtung der Sicherheitsvorschriften und sonstiger Warnhinweise in dieser

Sicherheitshinweise für das Massenflussgerät
4
Betriebsanleitung verletzt die für dieses Gerät und seine Bedienung geltenden Sicherheitsstandards,
und kann die Schutzvorrichtungen an diesem Gerät wirkungslos machen. MKS Instruments, Inc.
haftet nicht für Missachtung dieser Sicherheitsvorschriften seitens des Kunden.
Niemals Teile austauschen oder Änderungen am Gerät vornehmen!
Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am
Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein.
Nur so wird sichergestellt, dass alle Schutzvorrichtungen voll funktionsfähig bleiben.
Wartung nur durch qualifizierte Fachleute!
Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten
Fachleuten durchgeführt werden, niemals vom Bedienpersonal.
Vorsicht vor stromführenden Leitungen!
Ersetzen Sie keine Komponente von Geräten, die an Netzstrom angeschlossen sind. Unter Umständen kann gefährliche
Spannung auch dann bestehen, wenn das Netzanschlusskabel von der Strmversorgung entfernt wurde. Um Verletzungen
vorzubeugen sollten zuerst alle Geräte von der Stromversorgung getrennt und alle Stromkreusläufe entladen werden.
Anweisungen zum Spülen des Gerätes
Das Gerät darf nur unter einer Ablufthaube gespült werden. Schutzhandschuhe sind zu tragen.
Gerät nicht zusammen mit explosiven Stoffen, Gasen oder Dämpfen benutzen!
Um der Gefahr einer Explosion vorzubeugen, darf dieses Gerät niemals zusammen mit (oder in der Nähe von)
explosiven Stoffen aller Art eingesetzt werden, sofern es nicht ausdrücklich für diesen Zweck zugelassen ist.
Anweisungen zum Installieren der Armaturen!
Alle Anschlussstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten
Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muss gemäß den
Anweisungen des Herstellers vorgenommen werden.
Verbindungen auf Undichtigkeiten prüfen!
Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen.
Gerät nur unter zulässigen Anschlussdrücken betreiben!
Betreiben Sie das Gerät niemals unter Drücken, die den maximal zulässigen Druck (siehe Produktspezifikationen)
übersteigen.
Verunreinigungen im Gerät vermeiden!
Stellen Sie sicher, dass Verunreinigungen jeglicher Art weder vor dem Einsatz noch während des Betriebs in das
Instrumenteninnere gelangen können. Staub- und Schmutzpartikel, Glassplitter oder Metallspäne können das Gerät
dauerhaft beschädigen oder Prozess- und Messwerte verfälschen.
Bei Geräten mit Temperaturkontrolle korrekte Anwärmzeit einhalten!
Temperaturkontrollierte Geräte arbeiten nur dann gemäß ihrer Spezifikation, wenn genügend Zeit zum Erreichen und
Stabilisieren der Betriebstemperatur eingeräumt wird. Kalibrierungen und Nulleinstellungen sollten daher nur nach
Abschluss des Anwärmvorgangs durchgeführt werden.

Informations de sécurité pour appareils de mesure/contrôle de débit massique
5
Informations de sécurité pour appareils de mesure/contrôle de débit
massique
Symboles utilisés dans ce manuel d'utilisation
Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel.
Avertissement L'indication AVERTISSEMENT signale un danger pour le personnel. Elle
attire l'attention sur une procédure, une pratique, une condition, ou toute
autre situation présentant un risque d'accident pour le personnel, en cas
d'exécution incorrecte ou de non-respect des consignes.
Attention L'indication ATTENTION signale un danger pour l'appareil. Elle attire
l'attention sur une procédure d'exploitation, une pratique, ou toute autre
situation, présentant un risque de dégât ou de destruction partielle ou totale
du produit, en cas d'exécution incorrecte ou de non-respect des consignes.
Remarque L'indication REMARQUE signale une information importante. Elle attire
l'attention sur une procédure, une pratique, une condition, ou toute autre situation,
présentant un intérêt particulier.
Symboles figurant sur l'unité
Le tableau suivant décrit les symboles pouvant apparaître sur l'unité.
Tableau 3: Définition des symboles sur l'unité
|
Marche (sous tension)
IEC 417, No.5007 Arrêt (hors tension) IEC 417, No.5008 Terre (masse) IEC 417, No.5017 Terre de protection (masse) IEC 417, No.5019
Masse
IEC 417, No.5020 Equipotentialité IEC 417, No.5021 Courant continu IEC 417, No.5031 Courant alternatif IEC 417, No.5032
Courant continu et alternatif
IEC 417, No.5033-a Matériel de classe II IEC 417, No.5172-a Courant alternatif triphasé IEC 617-2, No.020206
Attention : se reporter
à la documentation
ISO 3864, No.B.3.1
Attention : risque de
choc électrique
ISO 3864, No.B.3.6
Attention : surface brûlante
IEC 417, No.5041
Mesures de sécurité et précautions
Observer les précautions générales de sécurité suivantes pendant toutes les phases d'exploitation de cet
appareil. Le non-respect des ces précautions ou des avertissements du manuel constitue une violation
des normes de sécurité relatives à l'utilisation de l'appareil et peut compromettre la protection assurée

Informations de sécurité pour appareils de mesure/contrôle de débit massique
6
par l'appareil. MKS Instruments, Inc. rejette toute responsabilité en cas de non-respect des consignes
par les clients.
PAS DE REMPLACEMENT DE PIÈCES OU DE MODIFICATION DE L'APPAREIL
Ne pas installer de pièces de remplacement ni effectuer des modifications non autorisées sur l'appareil. Renvoyer
l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des
dispositifs de sécurité.
DÉPANNAGE UNIQUEMENT PAR DU PERSONNEL QUALIFIÉ
Le personnel d'exploitation ne doit pas essayer de sortir les composants du boîtier ou faire des réglages internes. Le
dépannage est réservé au personnel qualifié.
ÉLOIGNEMENT DES CIRCUITS SOUS-TENSION
Ne pas remplacer de composants lorsqu’un câble d’alimentation est branché. Dans certaines conditions, des tensions
dangereuses peuvent être présentes même après le retrait du câble d’alimentation. Pour éliminer tout risque de blessure,
procéder toujours à la déconnexion et décharger les circuits avant tout contact physique.
UTILISATION DES PROCÉDURES APPROPRIÉES POUR LA PURGE
Cet appareil doit être purgé sous une hotte de ventilation. Le personnel doit porter des gants de protection.
PAS D'EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF
Pour éviter toute explosion, ne pas utiliser cet appareil dans un environnement explosif, sauf en cas d'homologation
spécifique pour une telle exploitation.
UTILISATION D'ÉQUIPEMENTS ET PROCÉDURES DE SERRAGE APPROPRIÉS
Tous les équipements de l'appareil doivent être conformes à ses spécifications, et compatibles avec l'utilisation prévue de
l'appareil. Assembler et serrer les équipements conformément aux directives du fabricant.
VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS
Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation.
EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES
Ne jamais utiliser des pressions supérieures à la pression nominale maximum (se reporter aux spécifications de l'unité
pour la pression maximum admissible).
MAINTIEN DE L'UNITÉ À L'ABRI DES CONTAMINATIONS
Ne pas laisser des produits contaminants pénétrer dans l'unité avant ou pendant l'utilisation. Des produits contaminants
tels que des poussières et des fragments de tissu, de verre et de métal peuvent endommager l'unité de manière
permanente.
RESPECT DU TEMPS D'ÉCHAUFFEMENT APPROPRIÉ POUR LES UNITÉS Á RÉGULATION DE TEMPÉRATURE
Les unités à régulation de température sont conformes à leurs spécifications uniquement quand on leur laisse un temps
suffisant pour atteindre d'une manière stable la température d'exploitation. Ne pas remettre à zéro ou calibrer l'unité tant
que l'échauffement n'est pas terminé.

Medidas de seguridad del dispositivo de flujo de masa
7
Medidas de seguridad del dispositivo de flujo de masa
Símbolos usados en este manual de instrucciones
Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual.
Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños
personales. Pone de relieve un procedimiento, práctica, estado, etc. que en caso
de no realizarse o cumplirse correctamente puede causar daños personales.
Precaución El símbolo de precaución indica la posibilidad de producir daños al equipo.
Pone de relieve un procedimiento operativo, práctica, etc. que en caso de no
realizarse o cumplirse correctamente puede causar daños o la destrucción total
o parcial del equipo.
Nota El símbolo de notas indica información de importancia. Este símbolo pone de relieve
un procedimiento, práctica o condición cuyo conocimiento es esencial destacar.
Símbolos hallados en la unidad
La tabla siguiente contiene los símbolos que puede hallar en la unidad.
Tabla 4: Definición de los símbolos hallados en la unidad
|
Encendido
(alimentación eléctrica)
IEC 417, N° 5007
Apagado
(alimentación eléctrica)
IEC 417, N° 5008
Puesta a tierra
IEC 417, N° 5017 Protección a tierra IEC 417, N° 5019
Caja o chasis
IEC 417, N° 5020 Equipotencialidad IEC 417, N° 5021 Corriente continua IEC 417, N° 5031 Corriente alterna IEC 417, N° 5032
Corriente continua y alterna
IEC 417, N° 5033-a Equipo de clase II IEC 417, N° 5172-a Corriente alterna trifásica IEC 617-2, N° 020206
Precaución. Consulte los documentos
adjuntos
ISO 3864, N° B.3.1
Precaución.
Riesgo de descarga eléctrica
ISO 3864, N° B.3.6
Precaución. Superficie caliente
IEC 417, N° 5041
Procedimientos y precauciones de seguridad
Las medidas generales de seguridad descritas a continuación deben observarse durante todas las etapas
de funcionamiento del instrumento. La falta de cumplimiento de dichas medidas de seguridad o de las
advertencias específicas a las que se hace referencia en otras partes de este manual, constituye una
violación de las normas de seguridad establecidas para el uso previsto del instrumento y podría anular

Medidas de seguridad del dispositivo de flujo de masa
8
la protección proporcionada por el equipo. Si el cliente no cumple dichas precauciones y advertencias,
MKS Instruments, Inc. no asume responsabilidad legal alguna.
NO UTILICE PIEZAS NO ORIGINALES O MODIFIQUE EL INSTRUMENTO
No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto
funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS
toda vez que sea necesario repararlo o efectuar tareas de mantenimiento.
LAS REPARACIONES DEBEN SER EFECTUADAS ÚNICAMENTE POR TÉCNICOS AUTORIZADOS
Los operarios no deben retirar las tapas del instrumento. El reemplazo de los componentes y las tareas de ajuste deben
ser realizadas únicamente por personal autorizado.
MANTÉNGASE ALEJADO DE LOS CIRCUITOS ACTIVOS
No reemplace componentes con el cable de alimentación eléctrica conectado. En algunos casos, puede haber presente
alto voltaje aun con el cable de alimentación eléctrica desconectado. Para evitar lesiones personales, desconecte siempre
el cable y descargue los circuitos antes de entrar en contacto con los mismos.
USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA
El instrumento debe purgarse debajo de una campana de ventilación y deben utilizarse guantes protectores.
NO HAGA FUNCIONAR EL INSTRUMENTO EN AMBIENTES CON RIESGO DE EXPLOSIÓN
Para evitar que se produzcan explosiones, no haga funcionar este instrumento en un ambiente con riesgo de explosiones,
excepto cuando el mismo haya sido certificado específicamente para tal uso.
USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE
Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se
debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante.
COMPRUEBE QUE LOS ACCESORIOS SEAN A PRUEBA DE FUGAS
Antes de proceder con la instalación del instrumento, inspeccione cuidadosamente todas las conexiones de las tuberías
para comprobar que hayan sido instaladas a prueba de fugas.
HAGA FUNCIONAR EL INSTRUMENTO CON PRESIONES DE ENTRADA SEGURAS
No haga funcionar nunca el instrumento con presiones superiores a la máxima presión nominal (en las especificaciones
del instrumento hallará la presión máxima permitida).
MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES
No permita el ingreso de contaminantes en la unidad antes o durante su uso. Los productos contaminantes tales como
polvo, suciedad, pelusa, lascas de vidrio o virutas de metal pueden dañar irreparablemente la unidad.
CALIENTE ADECUADAMENTE LAS UNIDADES CONTROLADAS POR MEDIO DE TEMPERATURA
Las unidades controladas por medio de temperatura funcionarán de acuerdo con las especificaciones sólo cuando se las
caliente durante el tiempo suficiente para permitir que lleguen y se estabilicen a la temperatura de operación indicada.
No calibre la unidad y no la ponga en cero hasta que finalice el procedimiento de calentamiento.

マスフロー機器の安全に関する情
報
9
マスフロー機器の安全に関する情報
本取扱説明書のマーク
本マニュアルでは警告、注意、ポイントのマークを用いて重要な事項を記載しています。
警告 この表示を無視して誤った取り扱い (手順や使用方法、条件など) をすると、人が重傷
を負う可能性が想定される内容を示しています。必ずお読みください。
注意 この表示を無視して誤った取り扱い (手順や使用方法など) をすると、 製品が損傷する
可能性が想定される内容を示しています。必ずお読みください。
ポイント この表示は手順や使用方法、条件などに関する重要な情報が記載されていることを示
しています。必ずお読みください。
本機器のマーク
以下の表では、本機器に使用されているマークについて説明いたします。
|
オン (電源)
IEC 417, No. 5007 オフ (電源) IEC 417, No. 5008 接地 (アース) IEC 417, No. 5017 保護接地 (アース) IEC 417, No. 5019
フレームまたはシャーシ
IEC 417, No. 5020 等電位 IEC 417, No. 5021 直流 IEC 417, No. 5031 交流 IEC 417, No. 5032
直流と交流
IEC 417, No. 5033-a クラス 2 機器
IEC 417, No. 5172-a 三相交流
IEC 617-2, No. 020206
注意 (付属書を参照)
ISO 3864, No. B.3.1 注意 (感電の危険あり) ISO 3864, No. B.3.6 注意 (表面が熱くなっています) IEC 417, No. 5041
安全対策について
本機器を使用する際は、必ず以下の安全対策を守ってください。これらの安全対策や本マニュアルの
警告を無視すると、機器本来の用途の安全基準を侵害することになり、機器が提供する保護機能が
損なわれる可能性があります。MKS Instruments, Inc. は、顧客側の安全対策の不履行に対して
は一切責任を負いかねます。
勝手に部品を変えたり、本体を改造しないこと
本機器に代用部品を使用したり、不正な改造を加えないでください。すべての安全システムを正しく機能させるた
めの修理やメンテナンスが必要な場合は、本機器を MKS Calibration and Service Center まで戻してください。
修理は必ず専門の修理サービスを利用すること
オペレータは絶対に本機器を分解しないでください。部品の交換や内部の調整は必ず専門の修理サービスを利
用してください。

マ ス フ ロ ー 機器の 安全に 関す る 情報
10
電流が通じている回路から切断すること
電源ケーブルを接続したままで部品を交換しないでください。特定の状況では、電源ケーブルを取り外した状態
でも危険な電圧が残っている場合があります。感電などの事故を防ぐため、回路に触れる前に必ず電源から切
断し、放電してください。
浄化する場合は適切な手順で行うこと
本機器の浄化は換気フードの下で行う必要があります。また、浄化作業を行う人は必ず手袋を着用してください。
爆発の危険性のある環境で機器を使用しないこと
爆発が起きるのを防ぐため、本機器を爆発の危険性のある環境で使用しないでください。ただし、そのような環境
での使用が特別に保証されている場合は除きます。
適切な金具類を使用し、手順に従って金具の締めを行うこと
金具類は本機器の仕様と一致し、機器本来の用途に適合したものである必要があります。金具類の取り付け
や締めは、製造業者の指示に従ってください。
液体の漏れがないよう接続箇所を確認すること
本機器を設定する前に、すべての配管の接続を慎重に確認し、液体が漏れないようにしてください。
安全なインレット圧力で使用すること
定格の最大圧力を超える圧力の下で本機器を絶対に使用しないでください (最大許容圧力については仕様書
を参照)。
本機器に異物やゴミが混入しないようにすること
本機器の使用前または使用中に、ほこりやゴミ、繊維、ガラスの破片、金属片などの異物やゴミが混入しないよ
うにしてください。本機器が損傷する可能性があります。
温度調整された機器を十分に温めてから使用すること
温度調整された機器が適切な作動温度にならないうちに使用すると、仕様通りの動作をしないことがあります。
本機器が十分に温まるまでは目盛りをゼロに合わせたり、較正しないでください。

질량 유량 장치 안전 정보
11
질량 유량 장치 안전 정보
본지침 매뉴얼에 사용되는 기호들
매뉴얼 전체에 사용되는 경고, 주의 및참고 메시지의 정의.
경고 경고 표시는 위험을 나타냅니다. 이표시는 올바르게 수행되거나 지켜지지 않을
경우, 사람에게 상해를 입힐 수있는 절차, 수행지침, 상태 또는 이와 유사한
상황들에 대한 주의를 환기시킵니다.
주의 주의 표시는 위험을 나타냅니다. 이표시는 올바르게 수행되거나 지켜지지 않을
경우, 제품의 일부나 전체에 손상이나 파손을 일으킬 수있는 절차, 수행지침 또는
이와 유사한 상황들에 대한 주의를 환기시킵니다.
참고 참고 표시는 중요한 정보를 나타냅니다. 이표시는 강조할 만한 주요 절차,
수행지침, 상태 또는 이와 유사한 상황들에 대한 주의를 환기시킵니다.
장치에 표시된 기호들
다음 표는 장치에서 볼수있는 기호들을 설명합니다.
표5: 장치에 표시된 기호들의 정의
|
켬(전원)
IEC 417, No. 5007 끔(전원) IEC 417, No. 5008 접지(지면) IEC 417, No. 5017 보호 접지(지면) IEC 417, No. 5019
프레임 또는 섀시
IEC 417, No. 5020 등전위성 IEC 417, No. 5021 직류 IEC 417, No. 5031 교류 IEC 417, No. 5032
직류와 교류 모두
IEC 417, No. 5033-a 클래스 II 장비
IEC 417, No. 5172-a 3상교류 IEC 617-2, No. 020206
주의 (동봉 문서 참조)
ISO 3864, No. B.3.1 주의, 감전 위험 ISO 3864, No. B.3.6 주의, 표면이 뜨거움 IEC 417, No. 5041
안전 절차 및예방조치
본기계의 모든 작동 시에 다음의 일반 안전 예방조치를 준수하십시오. 아래 예방조치를
준수하지 않거나 본매뉴얼의 다른 부분에 있는 특정 경고를 준수하지 않을 경우, 기계
사용 목적의 안전 기준을 위반하는 것이 되며, 장비가 제공하는 보호기능을 손상시킬 수
있습니다. MKS Instruments, Inc.는고객이 본요건을 준수하지 않는 경우에 대해서는
어떠한 책임도 지지 않습니다.

질량 유량 장치 안전 정보
12
부품을 교체하거나 기계를 개조하지 마십시오
교체 부품을 설치하거나 기계에 허가되지 않은 어떠한 수정도 가하지 마십시오. 서비스와 수리가
필요한 경우에는 모든 안전 특성이 유지되도록 기계를 MKS 보정 서비스 센터(MKS Calibration and
Service Center)로보내주십시오.
자격이 있는 사람에게만 서비스를 받으십시오
작동하는 사람은 기계 겉면을 제거해서는 안됩니다. 부품 교체 및내부 조정은 자격이 있는 서비스
기사에게만 받으실 수있습니다.
전류가 통하는 회로에서 분리해 보관하십시오
전원 케이블을 연결한 채로 부품을 교체하지 마십시오. 일부 환경에서는 전원 케이블을 제거한
상태라도 위험 전압이 존재할 수있습니다. 부상을 방지하려면, 전원을 항상 분리하고 회로를
만지기 전에 회로를 방전시키십시오.
청소 시에는 적절한 절차를 사용하십시오
본기계는 환기 후드 아래에서 청소되어야 하며, 인체 보호를 위해 장갑을 착용해야 합니다.
폭발성 환경에서 작동하지 마십시오
폭발을 방지하려면, 폭발성 환경에서 작동하도록 특별히 승인받지 않은 경우 본제품을 폭발성
환경에서 작동하지 마십시오.
적절한 조립부품과 조임 절차를 사용하십시오
모든 기계 조립부품은 제품 사양과 일치해야 하고, 기계의 사용 목적에 부합해야 합니다.
제조업체의 지시에 따라 조립부품을 조립하고 조이십시오.
누출방지 조립부품을 점검하십시오
기계 설치를 진행하기 전에 기계의 모든 연관 연결부를 점검해 누출방지 설치가 되었는지
확인하십시오.
안전한 흡입 압력에서 작동하십시오
이장치는 절대 정격 최대 압력보다 높은 압력에서 작동해서는 안됩니다(최대 허용 압력에
대해서는 제품 사양을 참조하십시오).
장치를 오염이 없는 곳에 보관하십시오
장치를 사용하기 전이나 사용 중에는 어떠한 종류의 오염 물질도 허용해서는 안됩니다. 먼지, 때,
보풀, 유리 조각, 금속 조각과 같은 오염 물질은 영구적으로 장치를 손상시킬 수있습니다.
온도 제어 장치의 경우 알맞은 시동 시간을 두십시오
온도 제어 장치는 장치가 설계 작동 온도와 일치하고 이온도에서 안정화될 수있도록 충분한
시간을 허용해야만 사양에 맞게 작동합니다. 시동이 완료될 때까지 장치를 영점 설정하거나
보정하지 마십시오.

Introduction Chapter One: General Information
13
Chapter One: General Information
Introduction
The MC20A Mass Flow Controller (MFC) is a high flow, metal sealed subset of the ALTATM series of digital
mass flow devices. As such, device operation is the same and features are similar. DeviceNet MFCs are
covered under a separate manual (P/N 136365-P1) and supplement.
Based on a patented MKS Instruments measurement technique, these instruments are laminar flow controllers
whose precise indication of mass flow is achieved through the use of a bypass element in parallel with the
sensor tube. The controller includes a metal cover and RF bypass capacitors and incorporates a design that
virtually eliminates RFI and EMI interference. The MC20A MFCs carry the CE mark indicating compliance
with the EMC Directive 89/336/89.
Use the MC20A MFC when both gas flow control and gas flow measurement are required. It is supplied with
a normally closed flow control valve.
The MC20A MFCs are available in a variety of configurations and types to suit your specific application
needs. Appendix C, Model Code Explanation, page 51, contains the options that must be specified when
ordering an MFC. Configuration choices include full scale flow range, fitting type, and electrical
communications/connections.
Design Features
The design of the MC20A MFCs incorporates an advanced flow sensor, a control valve, and an optimized
bypass. The latest generation two-element sensing circuit provides accurate, repeatable performance across
the entire device operating range. A low temperature effect from ambient temperature change is ensured. The
optimized sensor/bypass arrangement minimizes the flow splitting error for gases with different properties,
which dramatically improves measurement accuracy when gases other than the calibration gas are used.
Digital Features
The digital flow calibration, coupled with a standard 11 point calibration, provides for high flow accuracy
over a wide range of setpoints. In addition, the digital control loop provides very fast control response, even
to low setpoints. The MC20A MFCs accept up to 20 gas tables. Each gas table has its own PID tuning
parameters to allow the transient response for each gas table to be optimized for the gas, full scale flow range,
and application. The unit operates like a standard analog flow controller but the gas tables and PID parameters
can be accessed digitally though a communication port using special MKS-furnished RS-232 adapter cable
and graphical user interface (GUI).
Reliability
To provide excellent reliability, the design contains a low mechanical and electronic components count and
has successfully passed the following test:
STRIFE, including temperature cycling and vibration (sine and random tests)
And with a metal braided, shielded cable, properly grounded at both ends:
EMC Directive 89/336/EEC for CE Mark compliance

Chapter One: General Information How This Manual is Organized
14
Cleanliness Features
The MC20A MFCs use only metal for all external seals. The metal seals eliminate gas permeation and ensure
extremely low external leakage. The MC20A MFC mechanical design incorporates minimal wetted surface
area and virtual leaks, assuring rapid dry-down. To further enhance its cleanliness, all internal surfaces are
precision machined, electropolished, and subjected to a proprietary cleaning process under Class 100
conditions. The instrument is assembled and packaged in a Class 100 clean room environment.
How This Manual is Organized
This manual is designed to provide instructions on how to set up, install, and operate an MC20A MFC.
Before installing and/or operating your MC20A MFC in a system, carefully read and familiarize
yourself with all precautionary notes in the Mass Flow Controller Safety Information section at the front
of this manual. In addition, observe and obey all WARNING and CAUTION notes provided throughout the
manual.
Chapter One: General Information (this chapter) introduces the product and describes the organization of the
manual.
Chapter Two: Installation explains the environmental requirements and describes how to mount the
instrument in your system.
Chapter Three: Overview gives a brief description of the instrument and its functionality.
Chapter Four: Operation describes how to use the instrument and explains all the functions and features.
Chapter Five: Maintenance lists any maintenance required to keep the instrument in good working condition.
Chapter Six: Troubleshooting provides a reference should the instrument malfunction.
Appendix A: Product Specifications lists the specifications of the instrument.
Appendix B: Gas Correction Factors lists the gas correction factors of commonly used gases.
Appendix C: Model Code Explanation describes the model code.
Appendix D: Mass Flow Controller Sizing Guidelines describes the guidelines for correctly sizing MFCs for
your process application and is provided for reference.
Appendix E: MKS MC20A Digital MFC Graphical User Interface describes the Windows®-based graphical
user interface (GUI). This appendix provides detailed information on the interface kit and user manipulation
of gas tables and PID parameters.