MKS 1150C User manual

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112760-P1
Rev C, 3/98
Instruction Manual
MKS Type 1150C
Mass Flow Controller
Six Shattuck Road
Andover, MA 01810-2449
[phone] or [phone]
Fax: [phone]
E-mail: [e-mail]
Web site: http://www.mksinst.com
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WARRANTY
Type 1150C Equipment
MKS Instruments, Inc. (MKS) warrants that the equipment described above (th
e
“equipment”) manufactured by MKS shall be free from defects in materials and
workmanship for a period of one year from date of shipment and will for a period of tw
o
years from the date of shipment, correctly perform all date-related operations, including
without limitation accepting data entry, sequencing, sorting, comparing, and reporting,
regardless of the date the operation is performed or the date involved in the operation,
provided that, if the equipment exchanges data or is otherwise used with equipment,
software, or other products of others, such products of others themselves correctl
y
perform all date-related operations and store and transmit dates and date-related dat
a
in a format compatible with MKS equipment. THIS WARRANTY IS MKS’ SOLE
WARRANTY CONCERNING DATE-RELATED OPERATIONS.
For the period commencing with the date of shipment of this equipment and ending one
year later in the case of defects in materials and workmanship, but two years later in the
case of failure to comply with the date-related operations warranty, MKS will, at its
option, either repair or replace any part which is defective in materials or workmanship
or with respect to the date-related operations warranty without charge to the purchaser.
The foregoing shall constitute the exclusive and sole remedy of the purchaser for an
y
breach by MKS of this warranty.
The purchaser, before returning any equipment covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrangements
with respect to the responsibility for shipping the equipment and handling any othe
r
incidental charges with the MKS sales representative or distributor from which the
equipment was purchased or, in the case of a direct purchase from MKS, with the MKS
home office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and used
in accordance with the specifications recommended by MKS for the proper and normal
use of the equipment. MKS shall not be liable under any circumstances for indirect,
special, consequential, or incidental damages in connection with, or arising out of, th
e
sale, performance, or use of the equipment covered by this warranty.
MKS recommends that all MKS pressure and flow products be calibrated periodicall
y
(typically every 6 to 12 months) to ensure accurate readings. When a product is
returned to MKS for this periodic re-calibration it is considered normal preventativ
e
maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF
MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR
A
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT O
F
ANY PATENT.
11-98 112760-P1
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112760-P1
Rev C, 3/98
MKS Type 1150C
Mass Flow Controller
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Copyright © 1998 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.
Printed in the United States of America
Baratronis a registered trademark of MKS Instruments, Inc., Andover, MA
Inconelis a registered trademark of Inco Alloys International, Inc., Huntington, WV
Swagelokand VCRare registered trademarks of Swagelok Marketing Co., Solon, OH
NUPROis a registered trademark of NUPRO Co., Willoughby, OH
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Table of Contents
iii
Table of Contents
Mass Flow Controller Safety Information............................................................................... 1
Symbols Used in This Instruction Manual.................................................................. 1
Symbols Found on the Unit ....................................................................................... 2
Safety Procedures and Precautions............................................................................. 3
Chapter One: General Information......................................................................................... 5
Introduction............................................................................................................... 5
How This Manual is Organized.................................................................................. 6
Customer Support...................................................................................................... 6
Chapter Two: Installation......................................................................................................7
How To Unpack the Type 1150 Unit.......................................................................... 7
Opening the Package..................................................................................... 7
Unpacking Checklist ..................................................................................... 8
Product Location and Requirements........................................................................... 8
Operating Environmental Requirements ........................................................ 8
Recommended Installation ............................................................................ 8
Setup ......................................................................................................................... 9
Dimensions ................................................................................................... 9
Mounting the 1150 Unit................................................................................ 10
Mechanical Installation.................................................................................. 11
Electrical Installation ................................................................................................. 13
Power Requirements...................................................................................... 13
Connectors.................................................................................................... 13
Interface Cables ......................................................................................................... 15
Generic Shielded Cable Guidelines................................................................ 16
Chapter Three: Overview....................................................................................................... 17
General Information................................................................................................... 17
System Operating Temperature...................................................................... 17
Changing the Range of the 1150 Unit ........................................................................ 17
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Table of Contents
iv
Calibration .................................................................................................................18
Label..........................................................................................................................18
Analog Interface Signals.............................................................................................19
Chapter Four: Operation ........................................................................................................21
How To Set the Temperature......................................................................................22
Temperature Indications.................................................................................23
How To Warm Up the 1150 MFC ..............................................................................23
How To Zero the 1150 MFC ......................................................................................24
How To Configure the Output....................................................................................25
To Display the Output in SCCM....................................................................25
Cautionary Notes........................................................................................................27
Note 1: Customer Supplied Display Equipment ............................................27
Note 2: MKS Supplied Power Supply/Display Equipment............................27
Note 3: Set Point Command..........................................................................27
Note 4: Overrange Condition........................................................................27
How To Calibrate the 1150 MFC ...............................................................................28
Chapter Five: Troubleshooting................................................................................................29
General Information ...................................................................................................29
Troubleshooting Chart ...................................................................................29
How To Check Valve Operation....................................................................31
How To Prevent Oscillation...........................................................................31
Chapter Six: Maintenance......................................................................................................33
General Information ...................................................................................................33
Cleaning and Repair...................................................................................................33
Appendix A: Product Specifications.......................................................................................35
System Specifications.................................................................................................35
Mechanical Specifications..........................................................................................35
Electrical Specifications .............................................................................................36
Appendix B: Calibration Data Sheet ......................................................................................37
Typical Calibration Data Sheet...................................................................................37
Index ......................................................................................................................................39
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List of Fi
g
ures and Tables
v
List of Figures and Tables
Figures
Figure 1: Recommended Installation for the 1150 MFC ........................................................ 8
Figure 2: Top View of the 1150 Unit..................................................................................... 9
Figure 3: Back View of the 1150 Unit................................................................................... 9
Figure 4: Side View of the 1150 Unit.................................................................................... 10
Figure 5: Location of the Mounting Holes............................................................................. 10
Figure 6: Typical System Configuration................................................................................ 11
Figure 7: Warning Label........................................................................................................18
Figure 8: Example Calibration Sheet..................................................................................... 37
Figure 9: Example Calibration Graph.................................................................................... 38
Tables
Table 1: Definition of Symbols Found on the Unit .....................................................................2
Table 2: Power (J9) Connector Pinout ......................................................................................13
Table 3: Signal (J15) Connector Pinout ....................................................................................14
Table 4: Interface Cables..........................................................................................................15
Table 5: Operating Temperature Settings..................................................................................22
Table 6: Temperature Status Indicators.....................................................................................23
Table 7: Gauge Factor Effect on the Display Range..................................................................26
Table 8: Troubleshooting Chart................................................................................................29
Table 9: Voltage Value for the Valve Control Electronics Check..............................................31
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List of Figures and Tables
vi
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Mass Flow Controller Safety Information S
y
mbols Used in This Instruction Manual
1
Mass Flow Controller Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning The WARNING sign denotes a hazard to personnel. It calls
attention to a procedure, practice, condition, or the like,
which, if not correctly performed or adhered to, could result
in injury to personnel.
Caution The CAUTION sign denotes a hazard to equipment. It calls
attention to an operating procedure, practice, or the like, which, if
not correctly performed or adhered to, could result in damage to or
destruction of all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.
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Symbols Found on the Unit Mass Flow Controller Safet
y
Information
2
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No.5007 Off (Supply)
IEC 417, No.5008 Earth (
g
round)
IEC 417, No.5017
Protective earth
(
g
round)
IEC 417, No.5019
Frame or chassis
IEC 417, No.5020 Equipotentiality IEC 417, No.5021 Direct current IEC 417, No.5031 Alternatin
g
current
IEC 417, No.5032
Both direct and
alternatin
g
current
IEC 417, No.5033-a Class ll equipment
IEC 417, No.5172-a
Three phase
alternatin
g
current
IEC 617-2 No.020206
Caution, refer to
accompanyin
g
documents
ISO 3864, No.B.3.1
Caution, risk of
electric shock
ISO 3864, No.B.3.6 Caution, hot surface
IEC 417, No.5041
Table 1: Definition of Symbols Found on the Unit
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Mass Flow Controller Safety Information Safet
y
Procedures and Precautions
3
Safety Procedures and Precautions
The following general safety precautions must be observed during all phases of operation of this
instrument. Failure to comply with these precautions or with specific warnings elsewhere in
this manual violates safety standards of intended use of the instrument and may impair the
protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the
customer’s failure to comply with these requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to an MKS Calibration and Service Center for service and repair to ensure
that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not attempt component replacement and internal adjustments. Any
service must be made by qualified service personnel only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, observe the proper safety precautions, completely purge the
instrument when necessary, and ensure that the material used is compatible with the wetted
materials in this product, including any sealing materials.
PURGE THE INSTRUMENT
After installing the unit, or before removing it from a system, purge the unit completely with a
clean, dry gas to eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This instrument must be purged under a ventilation hood, and gloves must be worn for
protection.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been
specifically certified for such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the
intended use of the instrument. Assemble and tighten fittings according to manufacturer’s
directions.
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Safety Procedures and Precautions Mass Flow Controller Safet
y
Information
4
CHECK FOR LEAK-TIGHT FITTINGS
Carefully check all vacuum component connections to ensure leak-tight installation.
OPERATE AT SAFE INLET PRESSURES
Never operate at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, install a suitable burst disc in the vacuum system
to prevent system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants to enter the unit before or during use. Contamination such as dust,
dirt, lint, glass chips, and metal chips may permanently damage the unit or contaminate the
process.
ALLOW THE UNIT TO WARM UP
If the unit is used to control dangerous gases, they should not be applied before the unit has
completely warmed up. Use a positive shutoff valve to ensure that no erroneous flow can occur
during warm up.
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Chapter One: General Information Introduction
5
Chapter One: General Information
Introduction
The MKS Type 1150C Mass Flow Controller (MFC) is designed for precise and repeatable mass
flow control of most low vapor pressure liquid or solid source materials into low pressure
processes such as Low Pressure Chemical Vapor Deposition (LPCVD), Metal Organic Molecular
Beam Epitaxy (MOMBE), and others. The Type 1150 MFC utilizes all-metal seals to eliminate
permeation normally found with the use of elastomeric sealing materials.
Mass flow measurement and control is accomplished without the need of bubbler systems or
thermal mass flow sensors. The 1150 MFC uses a Baratronpressure transducer and an integral
PID controller to control the pressure above a choked orifice. This pressure, given sonic flow, is
linearly proportional to mass flow and is appropriately scaled within the 1150 MFC to a 0 to 5
VDC output signal that is equal to 0 to 100% full rated flow.
Caution The control valve in the 1150 Mass Flow Controller is not a positive
shutoff valve. Depending upon your application, you may need to
install a separate positive shutoff valve.
The instrument is temperature controlled, and it is supplied with a computer generated
Calibration Curve and Calibration Data Sheet for the application specified when the unit was
ordered.
Note The 1150 MFC is optimized at the factory for the application parameters
specified when the unit was ordered. Contact the MKS Applications
group for a new calibration curve if your application parameters change.
The standard 1150 MFC is available with the factory set operating temperature range from 30 to
100°C. The high temperature option provides an operating temperature range of 90 to 150°C.
The 1150 MFC is bag packaged in a clean room environment.
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How This Manual is Organized Cha
p
ter One: General Information
6
How This Manual is Organized
This manual is designed to provide instructions on how to set up, install, and operate a Type
1150 unit.
Before installing your Type 1150 unit in a system and/or operating it, carefully read and
familiarize yourself with all precautionary notes in the Safety Messages and Procedures
section at the front of this manual. In addition, observe and obey all WARNING and
CAUTION notes provided throughout the manual.
Chapter One, General Information, (this chapter) introduces the product and describes the
organization of the manual.
Chapter Two, Installation, explains the environmental requirements and describes how to mount
the instrument in your system.
Chapter Three, Overview, gives a brief description of the instrument and its functionality.
Chapter Four, Operation, describes how to use the instrument and explains all the functions and
features.
Chapter Five, Troubleshooting, provides suggestions should you encounter a problem operating
the instrument.
Chapter Six, Maintenance, contains routine maintenance tasks to keep the instrument in good
working condition.
Appendix A, Product Specifications, lists the specifications of the instrument.
Appendix B, Calibration Data Sheet, defines the important information documented in this sheet.
Customer Support
Standard maintenance and repair services are available at all of our regional MKS Calibration
and Service Centers, listed on the back cover. In addition, MKS accepts the instruments of other
manufacturers for recalibration using the Primary and Transfer Standard calibration equipment
located at all of our regional service centers. Should any difficulties arise in the use of your Type
1150 instrument, or to obtain information about companion products MKS offers, contact any
authorized MKS Calibration and Service Center. If it is necessary to return the instrument to
MKS, please obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Calibration and Service Center before shipping. The ERA Number expedites handling and
ensures proper servicing of your instrument.
Please refer to the inside of the back cover of this manual for a list of MKS Calibration and
Service Centers.
Warning All returns to MKS Instruments must be free of harmful,
corrosive, radioactive, or toxic materials.
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Chapter Two: Installation How To Un
p
ack the T
yp
e 1150 Unit
7
Chapter Two: Installation
How To Unpack the Type 1150 Unit
MKS has carefully packed the Type 1150 unit so that it will reach you in perfect operating order.
Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc.,
to be certain that damage has not occurred during shipment.
Note Do not discard any packing materials until you have completed your
inspection and are sure the unit arrived safely.
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the
unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Service Center before shipping. Please refer to the inside of the back cover of this manual for a
list of MKS Calibration and Service Centers.
Caution Only qualified individuals should perform the installation and any
user adjustments. They must comply with all the necessary ESD and
handling precautions while installing and adjusting the instrument.
Proper handling is essential when working with all highly sensitive
precision electronic instruments.
Opening the Package
The 1150 controller is assembled, leak tested with helium, and calibrated in a clean room
environment. The instrument is double-bagged in this environment to ensure maintenance of its
particle free condition during shipment. It is very important to remove the bags according to
clean room practices. To maintain at least a minimal level of clean room standards, follow the
instructions below.
1. Remove the outer bag in an ante room (garmenting room) or transfer box.
Do not allow this outer bag to enter the clean room.
2. Remove the inner bag in the clean room.
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Product Location and Requirements Cha
p
ter Two: Installation
8
Unpacking Checklist
Standard Equipment:
•Type 1150 Unit
•Type 1150 Instruction Manual (this book)
Optional Equipment:
•Electrical Connector Accessories Kit: 1150C-K1
•Interface cables; refer to Interface Cables, page 15, for information
Product Location and Requirements
Operating Environmental Requirements
•Ambient Operating Temperature: 0°to 50°C (32°to 122°F)
•Ventilation requirements include sufficient air circulation
Caution The control valve in the 1150 Mass Flow Controller is not a positive
shutoff valve. Depending upon your application, you may need to
install a separate positive shutoff valve.
Recommended Installation
The recommended installation for the 1150 MFC, shown in Figure 1, includes gas purge and
vacuum lines. The dashed lines indicate which lines should be heated to the operating
temperature. Refer to Mechanical Installation, page 11, for more information.
Source Process
Inert Pur
g
e Gas
Vacuum Pump
1150
MFC
Note: Dashed lines indicates
lines that must be heated
Figure 1: Recommended Installation for the 1150 MFC
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Chapter Two: Installation Setu
p
9
Setup
The 1150 MFC is bag packaged in a clean room environment. Keep the unit bagged prior to
installation. The 1150 MFC is supplied with Swagelok®8-VCR®type male fittings. It is
important to protect the fitting seal surfaces since damaged seal surfaces may leak. Always
follow the manufacturer’s recommended installation instructions.
Dimensions
Note All dimensions are listed in inches with millimeters referenced in
parentheses.
2.62
(66.5) 3.12
(79.2)
0.25 (6.35) Wide Slots
9.50 (241)
0.35 (8.9)
0.25
(6.35)
8.75 (222)
10.25 (260)
ZERO GAIN
Figure 2: Top View of the 1150 Unit
Outlet
Inlet
6
Temperature Switch Temperature Deviation LED
1.50
(38.1)
7.28
(185)
:$51,1*
Va
p
ors ma
y
combust when
o
p
eratin
g
above their flash
p
oint.
This instrument was
factory set at oC.
Prior to operating unit:
A) Read and fully understand manual
B) Verify installed leak tight integrity
Warnin
g
Label 1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
1
2
3
4
5
6
7
8
9
SIGNAL CONDITIONER HEATER SUPPLY
VALVE TEST PT.
FLOW SIG.OUT
VALVE CLOSE
VALVE OPEN
PWR COM.
-15 VDC
+15 VDC
SET PT. INPUT
TEMP OUTPUT
OPTIONAL INPUT
SIG. COM.
SIG. COM.
P1-TEST SIG.
P2-TEST SIG.
CHASSIS
+15 VDC
NO CONNECTION
-15 VDC
TEMP. RELAY (N.O.)
TEMP. RELAY (COM.)
CHASSIS
CHASSIS
TEMP. RELAY (N.C.)
PWR COM.
CONNECTOR PINOUTS
Figure 3: Back View of the 1150 Unit
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Setup Cha
p
ter Two: Installation
10
J15 Connector
J9
Connector
Figure 4: Side View of the 1150 Unit
Mounting the 1150 Unit
The 1150 unit has four mounting holes in its base plate as shown in Figure 5. The centers of
these slots form a rectangle 8.75 inches long by 2.62 inches wide.
Mounting Holes Mounting Holes
Figure 5: Location of the Mounting Holes
Follow these guidelines when mounting the 1150 unit:
Warning Read and follow all messages in
Mass Flow Controller Safety
Information,
page 1, BEFORE attempting to install the 1150
unit. Failure to adhere to these messages could result in
injury to personnel.
•Close all valves between the 1150 MFC and the vapor source before installing the unit.
•Connect the input fitting on the 1150 unit to the vapor source.
•Connect the outlet fitting to the downstream side.
•Allow clearance to provide access to the connectors and the ZERO and GAIN pots.
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Chapter Two: Installation Setu
p
11
Mechanical Installation
Source Feed Line Temperature
It is critically important for consistent system operation that the source feed lines be adequately
heated and insulated. Remember, the coolest point in the system must be the source. The up-
and down-stream shutoff valves must also be heated and insulated, since they are integral parts of
the feed lines.
Warning Operating at temperatures above the flash point of the vapor
may cause spontaneous combustion to occur. If possible,
operate at a temperature
below the flash point of the vapor.
Refer to the Warning Label on the unit, shown in Figure 3,
page 9, for the temperature the unit was set to at the factory.
Caution 1. The system temperature must not exceed the decomposition
temperature of the vapor source material.
2. Failure to heat to all parts of the system may cause condensation,
which is detrimental to proper operation.
Insulation
Heat Tape
Customer Tubing
Figure 6: Typical System Configuration
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