MKS 252D User manual

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118703-P1
Rev A, 8/96
MKS Type 252D
Exhaust Valve Controller
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Preliminary manual for the
MKS Type 252D Unit
This is a preliminary manual and MKS Instruments makes no claims as to
its accuracy or correctness. Due to continuing research and development
activities, the information contained within this manual, including product
specifications, is subject to change without notice. Please observe all
safety precautions and use appropriate procedures when handling and
operating the Type 252D Unit.
Copyright © 1996 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any
means, electronic or mechanical, including photocopying and recording, or by any information
storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments,
Inc.
Baratronis a registered trademark of MKS Instruments, Inc., Andover, MA
Please Note:
MKS Instruments provides these documents as the latest version for the revision indicated.
The material is subject to change without notice, and should be verified if used in a critical
application.
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Table of Contents
iii
Table of Contents
Safety Procedures and Precautions.......................................................................................... 1
Chapter One: General Information......................................................................................... 5
Introduction............................................................................................................... 5
How This Manual is Organized.................................................................................. 7
Customer Support...................................................................................................... 7
Chapter Two: Installation ......................................................................................................9
How To Unpack the Type 252 Unit............................................................................ 9
Unpacking Checklist ..................................................................................... 9
Setup ......................................................................................................................... 11
System Design .............................................................................................. 11
Power and Fuse Requirements....................................................................... 11
Mounting Instructions ................................................................................... 12
Interconnections............................................................................................ 12
Cables........................................................................................................... 14
Chapter Three: Overview....................................................................................................... 19
General Information................................................................................................... 19
Stepping Drive Motor................................................................................................ 20
Front Panel Controls.................................................................................................. 21
Rear Panel Controls................................................................................................... 23
Chapter Four: Operation........................................................................................................25
How To Setup the Controller .....................................................................................25
How To Tune-Up the Controller ................................................................................ 26
How To Use the Normal/Reverse Switch ................................................................... 27
How To Use External Control.................................................................................... 27
Advisory ....................................................................................................... 28
How To Use the Valve Position Option...................................................................... 29
Interconnections............................................................................................ 29
How To Use the Multiple Set Point Option................................................................31
Settings......................................................................................................... 31
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Table of Contents
iv
Selection........................................................................................................31
Interconnections.............................................................................................32
How To Use the Process Limit Option........................................................................33
Controls.........................................................................................................33
Interconnections.............................................................................................34
How To Use the Reverse Limit Switch Option ...........................................................35
Chapter Five: Maintenance and Troubleshooting....................................................................37
General Information ...................................................................................................37
Maintenance...............................................................................................................37
Alignment Procedure.....................................................................................37
Troubleshooting.........................................................................................................40
Appendix A: Product Specifications.......................................................................................43
Appendix B: Model Code Explanation...................................................................................45
Model Code................................................................................................................45
How To Order a Type 252 Unit..................................................................................46
Index ......................................................................................................................................47
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List of Fi
g
ures
List of Tables
v
List of Figures
Figure 1: Standard Pressure Control Setup................................................................................ 13
Figure 2: 253 Valve Connected in Parallel with an Isolation Valve........................................... 13
Figure 3: Front Panel Controls.................................................................................................. 21
Figure 4: Rear Panel Controls................................................................................................... 23
Figure 5: Process Limit Set Point Control................................................................................. 33
List of Tables
Table 1: Valve Connector Pinout..............................................................................................15
Table 2: Transducer Connector Pinout......................................................................................16
Table 3: Interface Connector Pinout..........................................................................................17
Table 4: Four-Step Sequence....................................................................................................20
Table 5: Valve Position Option Pinout......................................................................................30
Table 6: Multiple Set Point Option Pinout ................................................................................32
Table 7: Process Limit Option Pinout .......................................................................................34
Table 8: Test Point Voltages.....................................................................................................39
Table 9: Troubleshooting Chart ................................................................................................41
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List of Figures
List of Tables
vi
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Safety Procedures and Precautions
1
Safety Procedures and Precautions
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to an MKS Calibration and Service Center for service and repair to ensure
that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not remove instrument covers. Component replacement and internal
adjustments must be made by qualified service personnel only.
DO NOT SERVICE OR ADJUST ALONE
Do not attempt internal service or adjustment unless another person capable of rendering first aid
and resuscitation, is present.
GROUNDING THE PRODUCT
This product is grounded through the grounding conductor of the power cord. To avoid electrical
shock, plug the power cord into a properly wired receptacle before connecting it to the product
input or output terminals. A protective ground connection by way of the grounding conductor in
the power cord is essential for safe operation.
DANGER ARISING FROM LOSS OF GROUND
Upon loss of the protective-ground connection, all accessible conductive parts (including knobs
and controls that may appear to be insulating) can render an electrical shock.
GROUND AND USE PROPER ELECTRICAL FITTINGS
Dangerous voltages are contained within this instrument. All electrical fittings must be of the
type specified, and in good condition. All electrical fittings must be properly connected and
grounded.
USE THE PROPER POWER CORD
Use only the power cord and connector specified for your product.
Use only a cord in good condition.
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Safet
y
Procedures and Precautions
2
USE THE PROPER POWER SOURCE
This product is intended to operate from a power source that does not apply more than 250 Volts
RMS between the supply conductors, or between either of the supply conductors and ground. A
protective ground connection by way of the grounding conductor in the power cord is essential
for safe operation.
USE THE PROPER FUSE
Use only a fuse of the correct type, voltage rating, and current rating, as specified for your
product.
KEEP AWAY FROM LIVE CIRCUITS
Do not replace components with power cable connected. Under certain conditions, dangerous
voltages may exist even with the power cable removed. To avoid injuries, always disconnect
power and discharge circuits before touching them.
DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES
To avoid explosion, do not operate this product in an explosive atmosphere unless it has been
specifically certified for such operation.
KEEP AWAY FROM VALVE OPENING
Keep fingers, other body parts, and other materials away from the valve opening when the valve
is in operation.
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Safety Procedures and Precautions
3
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning The WARNING sign denotes a hazard. It calls attention to a
procedure, practice, condition, or the like, which, if not
correctly performed or adhered to, could result in injury to
personnel.
Caution The CAUTION sign denotes a hazard. It calls attention to an
operating procedure, practice, or the like, which, if not correctly
performed or adhered to, could result in damage to or destruction of
all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.
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