Agilent Technologies 979 Operating and safety instructions

FIELD SERVICE
COMPONENT REPLACEMENT
MANUAL
vacuum technologies
DRAFT 1/27/03
Model 979 Helium
Mass Spectrometer
Leak Detector
Manual No. 699909976
Revision B
January 2003
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.

DRAFT 1/27/03
Model 979 Helium Mass Spectrometer Leak Detector
Copyright 2003
Varian Vacuum Technologies
Model 979 Helium Mass Spectrometer
Leak Detector
Alconox is a registered trademark of Alconox, Inc.
Apiezon is a registered trademark of M&I Materials Ltd.
Scotch-Brite is a trademark of 3M.
Loctite and PST are registered trademarks of Loctite Corporation
Teflon is a registered trademarks of E. I. du Pont de Nemours and Company.

Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA, 02421-3133 USA
declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità
We/Wir/Nous/Nosotros/Wij/Noi: Varian, Inc.
to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.
Frederick C. Campbell
Operations Manager
Varian Vacuum Technologies
Lexington, Massachusetts, USA
June 2002
Model 979 Helium Mass Spectrometer Leak Detector
89/336/EEC. . . . . . . . . . . . . . . . . . . . . . Electromagnetic Compatibility Directive
EN61326:1997. . . . . . . . . . . . . . . . . . . Measurement Control and Laboratory Equipment EMC Requirements
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Model 979 Helium Mass Spectrometer Leak Detector
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Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for
twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid war-
ranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of
the purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations
of Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any war-
ranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made
by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of
this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of
Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjust-
ment, written authorization from Seller or its authorized representative for the return and instructions as
to how and where these Products should be returned must be obtained. Any Product returned to Seller
for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.
Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on
any item that has been altered or has been returned by non-acceptable means of transportation. When
any Product is returned for examination and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper packing or handling, and for loss in transit, notwith-
standing any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for
determining the cause and nature of failure, and Seller’s determination with regard thereto shall be
final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at Customer expense; in addition, a charge for testing and exami-
nation may be made on Products so returned.

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Items Not Covered Under Warranty
Examples of items not normally covered under warranty include ion sources, TC gauges, O-rings,
spectrometer tube cleaning and overhaul, mechanical pump oils, vacuum system overhauls, and
obvious abuse or customer error. These items are considered normal maintenance for this type of
equipment.
3/1/00
Hazard and Safety Information
Some common international symbols used in this manual and the equipment itself are
shown below.
This manual uses the following standard safety protocols:
NOTE The notes contain important information taken from the text.
CAUTION The caution messages are displayed before procedures, which
if not followed, could cause damage to the equipment.
WARNING The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
OFF Power Switch Position Earth Ground
ON Power Switch Position Hot Surface
AC – Alternating Current Dangerous Voltage, Risk of
Electrical Shock
°
l

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Operators and service personnel must be aware of all hazards associated with this
equipment. They must know how to recognize hazardous and potentially hazardous
conditions, and know how to avoid them. The consequences of unskilled, improper, or
careless operation of the equipment can be serious. This product must only be operated and
maintained by trained personnel. Every operator or service person must read and
thoroughly understand operation/maintenance manuals and any additional information
provided by Varian Vacuum Technologies. All warning and cautions should be read
carefully and strictly observed. Consult local, state, and national agencies regarding specific
requirements and regulations. Address any safety, operation, and/or maintenance questions
to your nearest Varian Vacuum Technologies office.
Solvents
CAUTION The mechanical components of leak detectors are typically
cleaned with alcohol, methanol, or other solvents. When
heated, sprayed, or exposed to high-temperature equipment,
these solvents become flammable and explosive, causing
serious injury or death. Do not use these solvents near a
high-temperature source. Ventilate the working area with a
blower and work in a large, well-ventilated room.
Alcohol, methanol, or other solvents are irritants, narcotics,
depressants and/or carcinogens. Their inhalation and/or
ingestion may produce serious side effects. Prolonged or
continued contact with the skin will result in absorption
through the skin and moderate toxicity. Always ensure that
cleaning operations are carried out in large, well-ventilated
rooms, and wear eyeshields, gloves, and protective clothing.
CAUTION Do not clean any aluminum parts with Alconox®. Alconox is
not compatible with aluminum and will cause damage.
NOTE During reassembly, always use LoctitePST
(teflon-impregnated pipe thread compound) on pipe threads.

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v
Equipment, General
WARNING Equipment tightness is guaranteed for normal operating
conditions when the equipment leaves the factory. It is the
user’s responsibility to maintain the level of tightness
particularly when pumping dangerous products.
CAUTION The performance and operating safety of this equipment can
only be guaranteed if it is operated according to normal
conditions of use.
CAUTION Always allow at least 4 inches of clearance adjacent to the
ventilation holes at the front, back and bottom ofthe equipment
enclosure.
Power and Static
WARNING Disconnect power from the 979 before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
CAUTION Varian strongly recommends the use of surge protection to
improve the immunity of the 979 Series leak detectors against
unidirectional transients caused by the following phenomena:
❑Switching phenomena in the power network (e.g., switching
of capacitor banks)
❑Faults in the power network
❑Indirect lightning strokes
CAUTION Many components of the 979 are static sensitive devices.
Varian Vacuum Technologies recommends that you wear a
grounding device when performing any maintenance on the
979 and especially when performing maintenance of static
sensitive parts.

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WARNING This equipment is designed to meet current EEC regulations:
LVD (Low Voltage Directive, 73/23/EEC) and EMC
(Electromagnetic Compatibility, 89/336/EEC Directive) for
Installation Category II, Pollution Degree II environment for
Industrial, Scientific, Measuring and Process Control electrical
equipment.
❑Any modifications on the part of the user are liable to cause
non-compliance with regulations or affect the EMC
performance and the safety of the product. Varian Vacuum
Technologies cannot be held responsible for consequences
resulting from such intervention.
❑The equipment can be damaged by incorrect mains AC
supply voltages, the Radio Frequency (RF) and Electrostatic
Discharge (ESD) energy inputs that can exceed the
maximum ratings, operating in very high temperatures or
without adequate ventilation, immersion in liquids, and
physical abuse.
❑All electrical connections must be performed by a qualified
electrician and must comply with national and local codes.
❑Ensure that the electrical installation conforms with your
local safety requirements.
❑Electrical installation must include the appropriate branch
circuit (at least 20 A) with a long time delay and a reliable
earth ground. Do not use an extension cord.
❑Use only the power cord that was provided with your leak
detector. The use of extension cords is not recommended
and could result in damage to the equipment and loss of
warranty.
❑To avoid electric shock, connect the product power cord to
a grounded power receptacle. A protective ground
connection by way of the grounding conductor in the power
cord is essential for safe operation.
❑Before powering the unit the first time, verify that the unit is
configured to operate for the local mains supply voltage.
❑Opening the enclosure may expose hazardous voltages.
Always disconnect the power cord and interface cables
before opening the enclosure. Do not touch the power
inlet’s contacts for at least 10 seconds after disconnecting
the power cord.

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CAUTION This equipment generates, uses, and can radiate RF energy and
if not installed and used in accordance with the instructional
manual, may cause harmful interference to radio
communications.
When this equipment is operated in a commercial environment
operation is subject to the following two conditions:
❑This equipment may not cause harmful interference, and
❑This equipment must accept any interference received,
including interference (RF and ESD) that may cause
undesired operation.
This equipmentmay need to be reset after RF and/or ESD events
by cycling the Power Switch/Circuit Breaker on the back panel
of the unit.
Operation ofthis equipment in a residentialarea is also likely to
cause harmful radio communications interference in which
case the user will be required to correct the interference at his
own expense.
Vacuum Equipment and Cleanliness
Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are
some techniques that are more important in leak detector servicing than in general vacuum
work:
CAUTION Do not use silicone oil or silicone grease.
Use powder-free butyl or polycarbonate gloves to prevent skin
oils from getting on vacuum surfaces.
Do not clean any aluminum parts with Alconox®. Alconox is
not compatible with aluminum and will cause damage.
NOTE Normally, it is unnecessary to use vacuum grease. However, if
it must be used, avoid silicone types, and use it sparingly.
Apiezon®L grease is recommended (Varian Vacuum
Technologies Part No. 695400004).

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O-ring Care
When removing, checking or replacing O-rings:
NOTE Varian Vacuum Technologies recommends replacing all
O-rings during routine maintenance or during any maintenance
procedure requiring that O-rings be removed.
CAUTION Remove O-rings carefully with your fingers. Do not use metal
tools for this task. This prevents scratching of any sealing
surfaces.
❑Wipe all O-rings clean with a lint-free cloth before
installation to ensure that no foreign matter is present to
impair the seal.
❑Do not use grease or other substance on O-rings that will
come in contact with the spectrometer tube.
❑Do not use alcohol, methanol or other solvents on O-rings.
To do so causes deterioration and reduces their ability to
hold a vacuum.
❑If applicable, apply a small amount of Apiezon®L grease
and wipe the O-rings “shiny”dry.
NOTE Due to the effective cleaning nature of VacuSolv solvent and
its residue-free properties, Varian Vacuum Technologies’
Component and Spectrometer Tube Cleaning Kit
(Part Number 670029096), used in accordance with the kit
instructions, is recommended for cleaning the spectrometer
tube components. The kit can also be used for fine cleaning
other parts in the leak detector’s vacuum system such as valves
and fittings. No rinsing steps or high-temperature drying is
required following cleaning with VacuSolv. Although
appropriate precautions are advised, VacuSolv is compatible
with most materials and does not contain toxic chemicals or
CFCs (chlorofluorocarbons).

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Spectrometer Tube
CAUTION The spectrometer tube operates at a very high vacuum
produced by the high vacuum pump. Service of the
spectrometer tube requires that this vacuum be vented to the
atmosphere.
CAUTION Do not use grease or other substance on O-rings that will come
in contact with the spectrometer tube.
CAUTION If the spectrometer tube magnet comes in contact with a
magnetic surface, the magnet may lose its gauss, causing the
spectrometer tube to lose sensitivity.
WARNING Store the Ion Source in a cool, dry area in a tightly sealed
container. Wash hands thoroughly after handling the Ion
Source and especially before smoking or eating.
Gross Leak Option
If the Gross Leak option is installed:
CAUTION The Gross Leak is calibrated at the factory and if any alteration
is made, the Gross Leak must be returned to the factory for
recalibration. For returns, contact Varian Vacuum Technologies
Customer Service at 1-800-8VARIAN.

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Pumps
WARNING To avoid injury, use proper lifting techniques when moving
pumps. Your system may have pumps that require two people
to move them safely.
WARNING The vacuum pumps are also compressors; incorrect operation
may be dangerous. Study the “Mechanical Pump Operation
Manual”enclosed with your pump before starting the pumps.
The pumps are designed to prevent any thermal risk for user
safety. However, specific operating conditions may generate
temperatures >70 °C.
Hot oil will burn the skin. Service of the pumps in this area
must be performed by authorized personnel only. Stand back
from mechanical pump before starting.
CAUTION Check the oil level often. Do not allow oil-based mechanical
pumps to run when oil level is below LOW mark. Damage to
pumps can occur if operated with no oil.
WARNING To avoid injury, wait until the turbo pump is completely
stopped before disconnecting it from the vacuum system.

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Varian Services
The following are just a few of the many services that Varian offers its customers. Please see
our catalog, or contact us to learn of the services that are available. Contact Varian Vacuum
Technologies Customer Service at 1-800-8VARIAN for details.
❑Rebuilt spectrometer tubes are available on an exchange basis.
❑NIST-traceable calibrated leak testing and verification services.
Contacting Varian Vacuum Technologies
In the United States, you can contact Varian Vacuum Technologies Customer Service at
1-800-8VARIAN.
Internet users:
❑Send email to Customer Service & Technical Support at
[e-mail]
❑Visit our web site at www.varianinc.com/vacuum
❑Order on line at www.evarian.com
See the back cover of this manual for a listing of our sales and service offices.
Tools Required for Component Replacement
The following tools are required for component replacement
Materials (not Parts) Required for Component Replacement
❑Phillips screwdriver ❑9-16 Wrench
❑Slotted screwdriver ❑13-16 Wrench
❑Long slotted screwdriver ❑11-32 Nut driver
❑Crescent wrench ❑5-64 Allen wrench
❑PLCC chip extracting device,
such as an AMP 821903-5 ❑A non-metal device for removing O-rings
❑Powder-free butyl or
polycarbonate gloves ❑VacuSolv or similar solvent
❑Clean, non-magnetic surface ❑Cotton swabs
❑Lint-free wipes ❑Loctite PST 565 Thread Sealant

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Preface
This manual contains information for field replacement of components of the Model 979
Mass Spectrometer Helium Leak Detector. It is organized so that similar items or procedures
are included in a section. The manual moves from a brief overview of the leak detector to
specific replacement procedures to calibration and tuning procedures that must be run after
the replacement of certain components. Photographs are liberally used to help document
procedures. An appendix provides Assembly Drawings and Bills of Materials for reference.
The specific sections included in the manual are:
Preface Contains information relevant to the remainder
of the manual.
Section 1 “System Overview”A brief overview of the 979.
Section 2 “Cleaning the Test Port”How to clean the test port.
Section 3 “Removing the Covers
from the 979”How to open individual sections or all of the
979 covers.
Section 4 “The Internal Calibrated Leak”Detailed steps for removing and replacing the
calibrated leak.
Section 5 “Spectrometer Tube Assembly”Spectrometer tube assembly procedures from
replacement as an assembly to replacement of
individual components. This section also
includes a full overhaul procedure.
Section 6 “Test Port Thermocouple Gauge”How to access and replace the test port
thermocouple gauge.
Section 7 “TheVarianPlatform”Procedures to access and replace the printed
circuit boards that make up the Varian Platform.
Section 8 “Internal High Speed Turbo and
Mechanical Pumps”Replacement of the turbo pump and the
mechanical pumps.
Section 9 “Calibration and Manual Tuning”Procedures that must be completed after
replacement of certain components.
Section 10 “Leak Checking for Reliability”General information regarding testing for leaks
after component replacement.
Section A “Assembly Drawings and
Bills of Materials”Assembly drawings and Bills of Materials for reference.
Section B “979 COM Cable”979 COM Cable sketch and pinout assignments.
Section C “979 Spare Parts List”A table of the 979 Spare Parts List with ordering
numbers.

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Table of Contents
Warranty .............................................................................................................................................ii
Preface ..............................................................................................................................................xii
Section 1. System Overview ...........................................................................................................1-1
1.1 Front Panel Displays and Controls ......................................................................................1-1
1.1.1 Key Switch ..................................................................................................................1-2
1.2 Rear Panel...........................................................................................................................1-3
1.2.2 System Control and Communication Panel ................................................................1-3
1.3 Inside the Model 979............................................................................................................1-4
1.3.1 Inside Front View ........................................................................................................1-4
1.3.2 Side View —Card Cage Side.....................................................................................1-5
1.3.3 Side View —Calibrated Leak, Valve Block Side ........................................................1-6
1.3.4 Rear View....................................................................................................................1-6
Section 2. Cleaning the Test Port ...................................................................................................2-1
Section 3. Removing the Covers from the 979 ...............................................................................3-1
3.1 Opening the Front Panel .....................................................................................................3-1
3.2 Removing the Front Panel...................................................................................................3-3
3.3 Removing the Rear Panel....................................................................................................3-5
3.4 Removing the Side Panel ....................................................................................................3-6
3.5 Replacing All Covers and Panels.........................................................................................3-7
3.5.1 Replacing the Side Panel............................................................................................3-7
3.5.2 Replacing the Rear Panel...........................................................................................3-7
3.5.3 Replacing the Front Panel...........................................................................................3-7
Section 4. The Internal Calibrated Leak ..........................................................................................4-1
4.1 Recalibrating the Internal Calibrated Leak ..........................................................................4-1
4.2 Replacing the Internal Calibrated Leak................................................................................4-1
4.2.1 Removing the Valve Block Coil and Plunger Assembly..............................................4-2
4.2.2 Removing the Internal Calibrate Leak.........................................................................4-6
4.2.3 Replacing the Internal Calibrated Leak.......................................................................4-9
4.2.4 Examining and Cleaning the Valve Block Coil and Plunger Assembly.....................4-11
4.2.4.1 Examining and Cleaning the Cal Leak Valve Block .....................................4-11
4.2.4.2 Examining and Cleaning the Coil and Plunger Assembly ............................4-12
4.2.4.3 Examining and Cleaning the Valve Stem and End Cap ...............................4-13
4.2.5 Replacing the Coil and Plunger Assembly................................................................4-14
Section 5. Spectrometer Tube Assembly ........................................................................................5-1
5.1 Spectrometer Tube Exchange ............................................................................................5-1
5.1.1 Removing the Spectrometer Tube Assembly for Complete Exchange.......................5-1
5.1.2 Examining and Cleaning the Centering Ring and O-Ring...........................................5-5
5.2 Reinstalling the Spectrometer Tube.....................................................................................5-6
5.3 Removing the Button Thermocouple from the Spectrometer Tube .....................................5-7

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5.4 Replacing the Button Thermocouple..................................................................................5-10
5.5 Removing the Ion Source ..................................................................................................5-12
5.6 Replacing the Ion Source...................................................................................................5-15
5.7 Removing the Preamplifier.................................................................................................5-17
5.8 Replacing the Preamplifier.................................................................................................5-19
5.9 Spectrometer Tube Overhaul.............................................................................................5-20
5.9.1 Removing the Spectrometer Tube Assembly as Part of Overhaul............................5-21
5.9.2 Removing the Magnet Assembly from Spectrometer Tube as Part of Overhaul ......5-25
5.9.3 Removing the Button Thermocouple as part of Spectrometer Tube Overhaul.........5-26
5.9.4 Removing the Ion Source as part of Spectrometer Tube Overhaul..........................5-27
5.9.5 Removing the Preamplifier as Part of Spectrometer Tube Overhaul........................5-30
5.9.6 Removing the Deflecting Magnetic Pole Pieces as Part of
Spectrometer Tube Overhaul.............................................................................................5-31
5.9.7 Examining and Cleaning the Spectrometer Parts.....................................................5-32
5.10 Reassembling the Spectrometer Tube ............................................................................5-35
5.10.1 Replacing the Deflecting Magnetic Pole Pieces......................................................5-35
5.10.2 Replacing the Preamplifier as Part of Spectrometer Tube Overhaul......................5-35
5.10.3 Replacing the Ion Source as Part of Spectrometer Tube Overhaul........................5-36
5.10.4 Replacing the Button Thermocouple as Part of Spectrometer Tube Overhaul.......5-39
5.10.5 Replacing the Magnet Assembly.............................................................................5-40
5.10.6 Re-Installing the Spectrometer Tube ......................................................................5-43
Section 6. Test Port Thermocouple Gauge .....................................................................................6-1
6.1 Removing the Test Port Thermocouple Gauge ..................................................................6-1
6.2 Replacing the Test Port Thermocouple Gauge....................................................................6-3
Section 7. The Varian Platform .......................................................................................................7-1
7.1 Location of Circuit Boards ...................................................................................................7-1
7.2 Removing the Card Stack from the Card Cage ...................................................................7-3
7.2.1 Removing the Connections from the Front of the Boards...........................................7-4
7.2.2 Removing the Connections from the Back of the Boards ...........................................7-5
7.2.3 Removing the CPU Board Power Connection ............................................................7-6
7.2.4 Removing the Card Stack...........................................................................................7-7
7.3 Replacing a Board ...............................................................................................................7-8
7.4 Replacing the Card Stack into the Card Cage.....................................................................7-9
7.5 Replacing the Turbo Controller Board ...............................................................................7-10
7.5.1 Removing the Turbo Controller Board ......................................................................7-11
7.5.2 Installing the Turbo Controller Board ........................................................................7-12
7.6 The Touch Screen and Control Panel Assemblies............................................................7-12
7.6.1 Removing the Touch Screen Assembly....................................................................7-13
7.6.2 Replacing the Touch Screen Assembly....................................................................7-15
7.6.3 Removing the Control Panel Assembly.....................................................................7-16
7.6.4 Replacing the Control Panel Assembly.....................................................................7-17

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Section 8. ...................................................... Internal High Speed Turbo and Mechanical Pumps 8-1
8.1 Removing the Turbo Pump .................................................................................................8-1
8.1.1 Moving the Spectrometer Tube Assembly..................................................................8-2
8.1.2 Removing the Turbo-to-Spec Tube Manifold..............................................................8-4
8.1.3 Removing the Power and Valve Block Connections...................................................8-5
8.2 Replacing the Turbo Pump..................................................................................................8-6
8.2.1 Examining and Cleaning Centering Rings, O-rings and the Manifold.........................8-6
8.2.2 Replacing the Turbo Pump .........................................................................................8-7
8.2.3 Replace the Turbo-to-Spec Tube Manifold.................................................................8-8
8.2.4 Replacing the Spectrometer Tube ..............................................................................8-9
8.3 Replacing the Mechanical Pumps......................................................................................8-10
8.3.1 Examining and Cleaning the Centering Ring and O-Ring.........................................8-13
8.3.2 Replacing the Mechanical Pumps.............................................................................8-14
8.4 Changing the Mechanical Pump Fluid...............................................................................8-14
8.5 Replacing Tip Seals in Dry Mechanical Pumps .................................................................8-14
Section 9. Calibration and Manual Tuning ......................................................................................9-1
9.1 Calibrate the 979 .................................................................................................................9-1
9.2 Manual Tuning.....................................................................................................................9-2
9.2.1 Manual Tuning using the Front Panel Touch Screen..................................................9-2
9.2.2 Manual Tuning using the Serial Port...........................................................................9-4
9.3 Gauge Calibration Procedures.............................................................................................9-6
9.3.1 System Pressure Gauge Calibration Procedure.........................................................9-7
9.3.1.1 Vacuum (Low Pressure) Calibration ...............................................................9-7
9.3.1.2 Atmospheric Calibration .................................................................................9-8
9.3.2 Test Port Pressure Thermocouple Gauge Calibration Procedure...............................9-8
9.3.2.1 Vacuum (Low Pressure) Calibration ...............................................................9-9
9.3.2.2 Atmospheric Calibration .................................................................................9-9
Section 10. Leak Checking for Reliability .......................................................................................10-i
10.1 General Suggestions for Leak Checking .........................................................................10-i
Appendix A. Assembly Drawings and Bills of Materials ..................................................................A-1
Appendix B. 979 COM Cable ..........................................................................................................B-1
Appendix C. 979 Spare Parts List .................................................................................................. C-1
Index ..................................................................................................................................................1

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