Azbil Micro Flow MQV9020 User manual

Thank you for purchasing an Azbil
Corporation product.
This manual contains information
for ensuring the correct use of this
product. It also provides necessary
information for installation, main-
tenance, and troubleshooting.
This manual should be read by
those who design and maintain
equipment that uses this product.
Be sure to keep this manual nearby
for handy reference.
Digital Mass Flow Controller
for Hydrogen and Helium Gases
Model MQV9020/9050/9500/0005/
0010/0050/0200
User’s Manual
No. CP-SP-1205E
TM

NOTICE
Be sure that the user receives this manual before the product is used.
Copying or duplicating this user’s manual in part or in whole is forbidden.
The information and specifications in this manual are subject to change
without notice.
Considerable effort has been made to ensure that this manual is free from
inaccuracies and omissions. If you should find an error or omission, please
contact the azbil Group.
In no event is Azbil Corporation liable to anyone for any indirect, special or
consequential damages as a result of using this product.
Please read“Terms and Conditions”from the following URL
before ordering and use.
https://www.azbil.com/products/factory/order.html
© 2006–2019 Azbil Corporation. All Rights Reserved.
Micro FlowTM, μFTM and μF sensorTM are trademarks of Azbil Corporation in
Japan.

i
Conventions Used in This Manual
The safety precautions explained in the following section aim to prevent injury to the operator
and others, and to prevent property damage.
WARNING
Warnings are indicated when mishandling this
product might result in death or serious injury.
CAUTION
Cautions are indicated when mishandling this
product might result in minor injury to the user, or
only physical damage to the product.
In describing the product, this manual uses the icons and conventions listed below.
Use caution when handling the product.
The indicated action is prohibited.
Be sure to follow the indicated instructions.
Handling Precautions
Handling Precautions indicate items that the user should pay attention to
when handling this device.
Note Notes indicate information that might benefit the user.
This indicates the item or page that the user is requested to refer to.
(1), (2), (3): Numbers within parentheses indicate steps in a sequence or parts of an
explanation.
OFF This font indicates what is shown on the 7-segment display.
[OK] indicator This is an LED indicator on the display.
[RUN] key This is an operation key.
>>: Indicates the result of an operation or the status after the operation.

ii
Safety Precautions
WARNING
Never allow gases that are within explosion limits (in particular, mixed gases
within explosion limits that contain hydrogen) to pass through this device.
Doing so might result in an explosion accidents.
When using this device for gases that contain hydrogen, be sure to purge the
device with an inert gas (such as nitrogen or argon) before use. Use without
purging may cause an explosion.
CAUTION
Check the product connections and pipe connections for leakage before use.
Also, check the connections for leakage regularly after the start of use.
It is the user’s responsibility to ensure that gas leaks can be reliably detected.
This is especially important if a dangerous gas is used.
If the device is used for burner air-fuel ratio control, take the necessary coun-
termeasures with the equipment to prevent the occurrence of backfire and
to avoid any influence to the device even if backfire occurs. Pressure increase
or fire in the pipes caused by the backfire of the burner could damage the
controller.
This device is exclusively for hydrogen and helium gases. It cannot be used for
control or measurement of gases other than hydrogen, helium, and hydrogen-
helium mixtures (excluding mixed gases within explosion limits). Oxygen can-
not be measured even if gas-contacting sections of this device are oil-inhibited.
To use any gas that includes hydrogen, before use be sure to fill the flow path
completely with the actual gas and check that the zero point is correct when
the actual flow rate is stable at zero. If the zero point is not correct, execute flow
rate zero calibration.
This device is set initially for hydrogen gas use at the factory. To use it for he-
lium gas or mixed gases, change the gas type setting. The use of this device for
helium or mixed gases without changing the gas type setting will result in a
measurement error.
Prevent foreign matter from entering the device. If rust, water droplet, oil mist,
or dust in the pipes enters the device, measurement or control error or damage
might occur.
If there is a possibility of foreign matter entering the device, provide a filter,
strainer or mist trap capable of eliminating foreign matter 0.1 μm or greater in
diameter at the upstream. Be sure to inspect and replace the filter at regular
intervals.

iii
CAUTION
Use the device within the operating differential pressure range. Also, do not
subject it to pressure beyond the rated pressure resistance range. Doing so
might damage it.
Do not subject this device to pressure above its pressure resistance. Doing so
might damage it.
The valve on this device cannot completely shut a flow off. If complete shutoff is
required, provide a shutoff valve separately. When the external valve is closed,
it is necessary also to fully close the valve of the device using either of the fol-
lowing methods:
• Set the flow rate setpoint to zero.
• Make the valve operation mode to fully closed.
If this valve remains in normal control status when the external shutoff valve is
closed (zero flow rate), there will be an excessively large flow as soon as the ex-
ternal shutoff valve is opened. This excessive flow rate could activate the AL83
alarm (operated by the sensor safety circuit). If the sensor safety circuit is acti-
vated, flow rate measurement and flow control are not possible until the power
is turned off and back on again.
If damage could result from the abnormal functioning of this device, include ap-
propriate redundancy in the system design.
Before connecting pipes with Swagelok or VCR connections, check
the precautions in the instruction provided by the connecting joint
manufacturer.
When separately purchasing a connecting joint, use the following
made by Swagelok Co., Ltd:
1/4” Swagelok: SS-400-1-6STSC11
1/4”VCR: SS-4-VCR-1-00032SC11
The device is a precision instrument. Do not drop it or subject it to impact, or it
might be damaged.
When installing joints (UNF connections), secure the lower part of the main unit
in a vise or the like gripped between rags to protect the finished surfaces, and
turn the joint to tighten. The device may be damaged if the lower main unit is
not secured.
Mount securely in order to prevent vibration. Otherwise, equipment failure
could result.
Mount the device horizontally. Do not mount it with the display facing down.
Doing so might cause measurement error or equipment failure.

iv
CAUTION
When making the pipe connections, hold the hexagonal part of the connector
section and turn the pipe to tighten. After connecting, check that there are no
gas leaks.
If using Rc connections, take care not to coat with too much sealant.
Foreign matter or burrs in the pipes may also cause measurement errors.
Do not apply a negative voltage or a voltage exceeding 5 V to the external setup
voltage input terminal. Doing so might cause malfunction or equipment failure.
When using a relay for external contact input and/or external 3-way switching
input, always use a relay designed for micro-current use (with gold contacts).
Failure to do so could cause faulty contact, resulting in malfunction.
If there is a risk of a power surge caused by lightning, use Azbil Corporation’s
SurgeNon to prevent possible fire or equipment failure.
Gas type switching by external contact input, flow rate switching, and analog
input/output voltage range switching by external 3-way input switching should
be done only after setting the operation mode to fully closed. Switching while
controlling could cause large fluctuations.
Be sure to check that the wiring is correct before turning the power on.
Incorrect wiring could cause damage or malfunction.
Do not apply excessive force to cables or connectors when connector cables or the
AC adapter is attached. Excessive force may damage the connectors or circuit board.
Do not operate the console keys using a sharp object such as a mechanical pencil or
screwdriver. Doing so might damage the console.
When discarding the device, dispose of it as industrial waste, following local
regulations.

v
The Role of This Manual
A total of 2 different manuals are available for the MQV. Read them as necessary for your specific
requirements. If a manual you require is not available, contact the azbil Group or its dealer.
Digital Mass Flow Controller for Hydrogen and Helium Gases
Model MQV9020/9050/9500/0005/0010/0050/0200 User’s Manual
Manual No. CP-SP-1205E
This manual.
Personnel who are using the MQV digital mass flow controller (for
hydrogen and helium gases) for the first time or who are in charge of
hardware design and/or maintenance of equipment containing the
MQV should read this manual thoroughly.
This manual gives an overview of the product, describes installation,
wiring, operation, maintenance, and troubleshooting, and gives hard-
ware specifications.
Digital Mass Flow Controller MQV9005/9020/9050/9200/
9500/0002/0005/0010/0020/0050/0100/0200/0500 User’s
Manual for Communication Functions
Manual No. CP-SP-1197E
Personnel who use this device’s communications functions
should read this manual.
The manual gives an overview of communications, describes
wiring, transmission protocols, communications data, and trou-
bleshooting, and gives communications specifications.

vi
Organization of the Manual
This manual is organized as follows.
Chapter 1. INTRODUCTION
This chapter briefly describes this device and its features, and gives a
model selection guide.
Chapter 2. NAMES AND FUNCTIONS OF PARTS
This chapter describes the names and functions of this device’s parts.
Chapter 3. MOUNTING AND WIRING
This chapter describes installation, mounting, wiring and initial set-
tings of this device.
Chapter 4. BASIC OPERATION
This chapter gives the basis of how to operate this device.
Chapter 5. ADVANCED OPERATION
This chapter describes how to set functions, parameters, device infor-
mation display, and flow rate range.
Chapter 6. TROUBLESHOOTING
This chapter describes how to investigate and remedy trouble that
may occur during operation of this device.
Chapter 7. SPECIFICATIONS
This chapter describes the device’s specifications and external
dimensions.

vii
Contents
Conventions Used in This Manual
Safety Precautions
The Role of This Manual
Organization of the Manual
Contents
Chapter 1. INTRODUCTION 1-1
Introduction 1-1
Features 1-1
Functions 1-2
Model selection guide 1-7
Basic operation and advanced operation 1-8
Chapter 2. NAMES AND FUNCTIONS OF PARTS 2-1
Display 2-1
Chapter 3. MOUNTING AND WIRING 3-1
Mounting 3-2
Piping 3-7
Wiring 3-8
Chapter 4. BASIC OPERATION 4-1
4-1 Switching Displays 4-1
Basic operation 4-1
4-2 Setting the Flow Rate 4-4
Digital flow rate setup 4-5
Flow rate setup by external contact input (Advanced use) 4-7
Flow rate setup by external 3-way switching input (Advanced use) 4-8
Analog flow rate setup 4-9
4-3 Selecting the Operating Mode 4-10
Operating mode selection 4-10
Operating mode display 4-10
Chapter 5. ADVANCED OPERATION 5-1
Setup mode transition operation 5-1
5-1 Functions 5-2
Setup method 5-2
Function setup items 5-3

viii
5-2 Parameters 5-12
Parameter setup item list 5-13
5-3 Device Information Display 5-16
Setup method 5-16
Device information display item 5-17
5-4 Flow Rate Range 5-18
Setup resolution in the analog setup 5-19
Chapter 6. TROUBLESHOOTING 6-1
Alarm code display 6-1
Troubleshooting guide 6-3
Chapter 7. SPECIFICATIONS 7-1
Individual specifications 7-1
Korea Certification Mark 7-8
Gas type and control range 7-9
China RoHS 7-9
Relationship between differential pressure and flow rate (For
Hydrogen) 7-10
Relationship between differential pressure and flow rate (For Helium) 7-11
Optional parts (sold separately) 7-12
External dimensions 7-13

1-1
Chapter 1. INTRODUCTION
Introduction
MQV high performance, digital mass flow controllers with advanced
functions have been developed for the general industrial application.
They feature flow rate control with high speed and wide range ability.
MQV controllers integrate three component technologies: the ultra
quick response μF (Micro Flow) thermal flow sensor, made with pro-
prietary Azbil Corporation technology, a proportional solenoid valve,
and advanced actuator control technology.
Integrating these technologies has achieved a high-speed control with
low differential pressure.
RS-485 device
for models supporting
optional RS-485
communications
function)
Potentiometer (sold separately)
for setting ow rate
For details see page 7-17.
Controller
(e.g. SDC25/26)
24 V DC power supply
(e.g. WN790A)
MQV
Separate display unit
Front cover for
separate display
(sold separately)
AC adapter
(sold separately)
Cable with dedicated
connector (sold separately)
Device Configuration
Features
• High-speed controllability
Fast response of 300 ms or less*
(500ms for the MQV9020/9050.)
* Response time is the time required for the controlled flow rate to
reach ±2 % of the set value, starting from the fully closed state or
from when the set value is changed during control.
• Low differential pressure operation
MQV controllers can operate at a low differential pressure of 50kPa
or less.
• Wide control range
Wide control range of 1 to 100 % FS
• Wide product line-up
There are two types of models, those with integrated display and
those with separate display. On models with separate display, the
display unit can be detached to allow remote operation via the dedi-
cated 2 m cable.

1-2
Chapter 1. INTRODUCTION
• User-friendly
Runs on a general-purpose 24 V DC power supply, and the MQV's
internal power circuit and input/output circuits are isolated. When
multiple MQV are driven through the analog inputs and outputs,
as with a PLC, they can all use a common power supply even if the
PLC's analog modules are not isolated by channel. Therefore, even
without individual power supplies for each device, problems with
one circuit do not affect adjacent ones. Also provided is a handy AC
adapter (sold separately) for easy use in the laboratory.
• Display direction can be changed (models with integrated display only)
The direction of the display can be rotated 180° to match the direc-
tion of the gas flow, in case it was mounted the other way.
• Improved design (models with separate display only)
A front cover (sold separately) hides the mounting screws of the
separate display on the panel surface and improves the appearance.
• Various additional functions
The functions listed below are all standard.
Functions
All MQV models have the functions described below. For function
setup, Chapter 5. ADVANCED OPERATION
• Multi-setup (function setup C-04)
Quickly switch to one of eight preset flow set value by key opera-
tion or external input. If “Switching of SP No.” is set to external
3-way switching input, up to three set values can be switched.
• Gas type switching (function setup C-18, C-26)
The gas type to be used can be selected from the standard compat-
ible gases by key operation. Additionally, two kinds of gas type set-
tings can be changed by external contact input.
• Gas type setup (function setup C-18)
The user can set gas type conversion factors for gases other than
the standard compatible gases, and for mixed gases.
• Control flow rate range setting (function setup C-24, C-25)
The control flow range can be changed to the desired range (10 to
100 % of the flow range at factory setting) in units of 1 % FS. The
setup and display resolution levels can be improved by reducing
the control flow range. Additionally, two kinds of control flow
ranges can be switched through external contact input.

1-3
Chapter 1. INTRODUCTION
• Direct setup (function setup C-2 1)
When changing the flow set value by key input, the controlled
flow rate can follow the set value while changes are being made
(the flow set value can be changed quickly). This function is use-
ful when the user frequently changes set value, for example when
adjusting the flow set value during a trial run.
• SP ramp control (function setup C-27)
This function is used to set the set value change ramp amount
(the rate of change per second) to a constant value for the start of
control and for set value changes. With this function, the set value
change ramp amount can be set more precisely than with the slow
start function. Two different types of ramps can be set, and there
are the following 2 control modes:
•SP ramp control 1
In SP ramp-up: Ramp 1
In SP ramp-down: Ramp 2
•SP ramp control 2
In external contact OFF: Ramp 1
In external contact ON: Ramp 2
• SP limit (function setup C-35)
The lower and upper limits of the set value range can be set to de-
sired levels. (This prevents mistaken high/low settings.)
• Slow start (function setup C-1 7)
Sudden changes in the controlled flow rate, when control is started
or when the set value is changed, can be suppressed. The control
speed can be changed in eight stages within a range of about 1 to 6
seconds.
• Flow rate totalization (function setup C-09 to C-12)
MQV9020/9050: in 1 mL units
MQV9500: in 0.01 L units
MQV0005: in 0.1 L units
MQV0010/0050: in 1 L units
MQV0200: in 0.01 m3units
Integrated flow count can be up to eight digits long (to 99,999,999)
for each unit. (Display alternates between first and last 4 digits.)
The count can be reset by key operation or external contact input.
Use of external contact input makes it possible to remotely operate
the start, temporary stop, and reset of totalization. When resetting
the integrated count by key operation, the count restarts automati-
cally after it has been reset. On the other hand, when resetting
with the external contact input (by contact ON), the count restarts
when the contact is turned OFF.

1-4
Chapter 1. INTRODUCTION
• Event lamp lighting/output (function setup C-07, C-08)
Two of the event types listed below can be selected. Output ON
delay time can also be set (but delay cannot be set for totalizer
pulse output).
• Integrated flow event output (when the integrated flow event set-
ting is exceeded.)
• Totalized pulse output (pulse can be output for each totalizing
flow display unit.)
• OK output (the control flow rate is within the set value ± allow-
able range.)
• Flow rate upper or lower limit output (output in comparison
with optional upper or lower limit flow rate set value )
• Output mode (The four modes — control / fully open / control
or fully open / fully closed — can be identified and output.)
• OK lamp ON/output (function setup C-07, C-08)
The OK lamp can be set to light when the control flow rate is
within the set value ± allowable range. This function is very handy
for verifying at a glance whether or not there is a proper response
to a new set value after its value is changed. OK lamp output can
also be used as an interlock signal for subsequent processes by as-
signing it to event output and including it in a sequence program.
• PV filter (function setup C-23)
This function is used to average the detected instantaneous flow
rates (control flow rates). It can also reduce the effect of slight
pressure fluctuations.
•
Control dead band setup (prevention of valve operation) (function setup
C-22
)
This function is used to stop the valve from driving as long as the
control flow rate is within the OK range. Additionally, the OK
range (width of dead band) can be set to the desired level.
• Valve amperage display (function setup C-20)
The electric current supplied to the valve can be displayed in units
of 0.0 to 100.0 %. Additionally, use of the valve amperage alarm
detection function makes it possible to detect an inlet pressure
change or clogging of the piping at the outlet.
• Gas type external switching (function setup C- 10 to C- 12, C-
18, C-26)
Two preset types of gases (including one with a user-determined gas
type conversion factor) can be switched by external contact input.
• Control flow rate range external switching (function setup C-10
to C- 12, C-24, C-25)
Two preset control flow ranges can be switched by external contact
input.

1-5
Chapter 1. INTRODUCTION
• PV forced zero (function setup C-29)
This function forcibly sets the detected instantaneous flow rate to
0 (zero) after the delay time elapses when the flow rate setpoint has
been set to 0 (zero) or the valve mode has been changed to fully
closed. This function makes it possible to ignore the deviation of
the instantaneous flow rate zero point caused by inclination of the
piping or the like.
• Flow rate display unit change (function setup C-37)
This function is used to change the flow rate display unit to L/
min or mL/min of the MQV9500/0005. When multiple devices
are used side-by-side, this function can make the flow rate display
units uniform.
• PV display decimal point change (function setup C-38)
This function is used to shift the decimal point position of the in-
stantaneous flow rate display one digit left or right. When multiple
devices are used sideby- side, the number of digits after the deci-
mal point of the flow rate display can be made uniform.
• Valve forcibly open or close (function setup C-02, C-09 to C- 12)
This function is used to forcibly open or close the valve fully by
key operation, external contact input, or external 3-way switching
input.
• Automatic shut-off (function setup C- 13, C- 16)
The valve can be shut off automatically under the following condi-
tions:
(1) When the totalized flow count reaches the preset value.
(2) When one of the alarms, including flow rate alarms, is triggered.
• ALM (alarm) lamp ON/output/valve shut-off (function setup C-15,
C- 16, C-20)
The alarm output can be set for high and low deviations in the
flow set value and instantaneous flow rate. Additionally, an alarm
judgment delay time can also be set. If a flow rate alarm occurs or
if an alarm occurs during self diagnosis of this controller, the valve
can be forced fully closed or opened.
Handling Precautions
• The valve on this device cannot completely shut off.
• If complete shut off is required, provide a shutoff valve
separately.
• Automatic reset of totalized flow at start of control function
(function setup C- 14)
Start of control and reset of totalized flow count can be done
simultaneously by a single action (by key or external switching
input). Combining this function with the automatic shut-off func-
tion described above is handy for shutting the valve off in cases
where a fixed totalized flow amount is counted repeatedly.

1-6
Chapter 1. INTRODUCTION
• Analog scaling (function setup C-28)
This function is used to optionally change the flow rate (between
10% FS and 100 % FS) corresponding to 100 % FS analog input/
output (5 V or 20 mA).
• Analog input (flow set value) range selection (function setup
C-05, C-09)
In analog setup, the desired input range can be selected from those
shown below either by key operation or by external 3-way switch-
ing input. When doing so, the voltage input and current input
are selected automatically, as they are linked with the settings of
function setup C-06 (analog output type selection). For example,
when the voltage output (0 to 5 V or 1 to 5 V) is selected in C-06,
the voltage input is selected automatically. Likewise, when the cur-
rent output (0 to 20 mA or 4 to 20 mA output) is selected, the cur-
rent input is selected automatically.
(1) Internal reference 0 to 5 V input*/External reference 0 to 20mA input
(2) External reference 0 to 5 V input/External reference 0 to 20mA input
(3) External reference 1 to 5 V input/External reference 4 to 20mA input
*0–5 V internal-reference is used when the 5 V output termi-
nal (pin No. 20) of this controller is used as the reference.
• Analog output type/range selection (function setup C-06, C-09)
Output can be set either to instantaneous flow rate (PV) or flow set
value (SP). Furthermore, a voltage/current output range can be se-
lected from (1) to (4) shown below by key operation. Additionally,
(1)/(2) or (3)/(4) can be changed through the external 3-way
switching input. (Combinations are switched because of linkage
with the analog input range selection.)
Instantaneous flow rate (PV) output Flow set value (SP) output
(1) 0 to 5 V output (1) 0 to 5 V output
(2) 1 to 5 V output (2) 1 to 5 V output
(3) 0 to 20 mA output (3) 0 to 20 mA output
(4) 4 to 20 mA output (4) 4 to 20 mA output

1-7
Chapter 1. INTRODUCTION
Model selection guide
zMQV9020/9050
Basic
model
Nos.
Standard con-
trol flowrate
range
Display
Material of
gas-contact-
ing parts
Connection
method
Gas
type
Optional
functions
Appended
No.
Description
12345
MQV Digital mass flow controller
9020 0.2–20.0 mL/min (standard) *1
9050 0.4–50.0 mL/min (standard) *1
B Integrated display (body length: 90 mm)
C Seprate display (body length: 90 mm)
S SUS316
S 1/4" Swagelok
V1/4" VCR
H Hydrogen *2
0 Without optional functions
0 Without optional functions
1
Model with RS-485 communications (CPL)
0 Without optional functions
1 Gas-contacting parts treated
to be oil free
0 Without optional functions
D With inspection certificate
Y With traceability certificate
0 Product version
zMQV9500/0005/0010/0050/0200
Basic
model
Nos.
Standard con-
trol flowrate
range
Display
Material of
gas-contact-
ing parts
Connection
method
Gas
type
Optional
functions
Appended
No.
Description
12345
MQV Digital mass-flow controller
9500 0.004–0.500 L/min (standard)*1
0005 0.04–5.00 L/min (standard) *1
0010 0.10–10.00 L/min (standard) *1
0050 0.4–50.0 L/min (standard) *1
0200 2–200 L/min (standard) *1
B Integrated display (body length 90 mm)
C Separate display (body length 90 mm)
S SUS316
R Rc 1/4"
S 1/4" Swagelok
V1/4" VCR
U 9/16-18UNF
H Hydrogen *2
0 Without optional functions
0 Without optional functions
1
Model with RS-485 communications (CPL)
0 Without optional functions
1 Gas-contacting parts treated
to be oil free
0 Without optional functions
D With inspection certificate
Y With traceability certificate
0 Product version
Notes: *1. The unit L/min (standard) indicates the volumetric flow rate per minute converted to 20 °C, 101.325 kPa (one
atmosphere). The reference temperature can also be changed to 0 °C, 25 °C and 35 °C.
*2. This device is set initially for hydrogen gas use at the factory. It can be used for helium gas by changing the gas
type setting.

1-8
Chapter 1. INTRODUCTION
Basic operation and advanced operation
This device provides two kinds of operations, basic operation and
advanced operation. Basic operation is the state of the device during
normal use. In basic operation, the contents of the 7-segment display
can be changed to show instantaneous flow rate, flow set value, total-
ized flow value, or amperage to the valve in normal operation mode.
Also, how to set the flow set value is described in the basic operation
part.
Advanced operation is for selecting various functions or setting pa-
rameters of the device. When the device is used with the factory set-
tings, no setup operation is needed. However, to change the gas type,
set a range, set an external contact input, set upper and lower alarm
limits, or set communication conditions (for models with communi-
cation functions), it is necessary to configure various settings using
advanced operation. The diagram below gives an outline of operation
flow. Basic and advanced operation are described in Chapters 4 and
5, respectively.
Power ON
Instantaneous ow
rate display
Flow set value display
Totalized ow display
Valve amperage display
Function setup mode
Parameter setup mode
Device information display mode
DISP key
DISP key
DISP key
DISP key
key + ENT key
(3 s or more)
key (3 s or more)
key (3 s or more)
Basic operation Advanced operation
DISP key

2-1
Chapter 2. NAMES AND FUNCTIONS OF PARTS
Display
OK ALM EV1 EV2 Digital
Mass Flow
Controller
L
L/min
SP
PV
RUN ENT DISP
ALM lamp:
Lit when an alarm occurs.
EV1 lamp:
Lit when event 1 output is ON.
EV2 lamp:
Lit when event 2 output is ON.
[RUN] key:
Use this key to change the operating mode.
key:
Use this key to decrement the setting value.
Also use it to move to the function setup mode.
[DISP] key:
Use this key to switch the details displayed
on the 7-segment display.
OK lamp:
Lit when the deviation between the ow set value
and instantaneous ow rate is in the allowable range.
Set the allowable range in the parameter setup.
(For details on how to set parameters, see .)
7-segment display:
Displays the instantaneous ow rate,
ow set value, totalized ow, amperage
to the valve and the operating mode.
It also displays parameter setup values, function
setup values and details of alarms.
SP lamp:
Lit when the ow rate
setpoint is displayed.
L lamp *1:
Lit when the totalized ow is displayed.
Blinks when the cumulative
ow event occurs.
PV lamp:
Lit when the instantaneous ow
rate is displayed. L/min lamp*2:
Lit when the instantaneous ow rate
or ow set value is displayed.
[ENT] key:
Use this key to x and store the set value to
memory.
Also use it to reset the cumulative ow and to
reset alarm and move to the function setup mode.
key:
Use this key to increment the setting value.
Additionally, this key is used to change to
the device information display mode.
key:
Use this key to move to a desired digit
when changing setting value. Also use it to
move to the parameter setup mode.
[ ]
[ ]
[ ]
*1 This lamp is used for mL or m3instead of L on some models.
*2 This lamp is used for mL/min instead of L/min on some models.
Note
• Technical terms used in this manual are defined as follows:
• SP (setpoint): The flow set value (or flow rate set point)
• PV (process variable): Instantaneous flow rate (or controlled flow rate)
• Operating mode: One of 3 modes (valve fully closed/valve
control/
7-seg-
ment
display
page 5-12

2-2
Chapter 2. NAMES AND FUNCTIONS OF PARTS
zMain unit (MQV9020/9050/9500/0005/0010/0050/0200)
Pipe connection port (inlet):
This is the port through which
gas enters.
Pipe connection port (outlet):
This is the port from which
gas is discharged.
Jack for PC loader connection
Connector port:
This is used for I/O signals.
Use cable with dedicated
connector.
Jack for AC adapter:
Connect dedicated adapter here.
Model No.: 81446957-001
(24 V DC, 750 mA)
Handling Precautions
•
The former AC adapter (model No. 81446682-001, 15 V DC/350mA)
can not be used with MQV.