Cognex In-Sight 1700 Series User manual

IN-SIGHT®1700 SERIES WAFER READER USER MANUAL

In-Sight®1700 Series Wafer Reader
Copyright, Trademarks, Patents
The software described in this document is furnished under license, and may be used or copied only
in accordance with the terms of such license and with the inclusion of the copyright notice shown on
this page. Neither the software, this document, nor any copies thereof may be provided to or
otherwise made available to anyone other than the licensee. Title to and ownership of this software
remains with Cognex Corporation or its licensor. Cognex Corporation assumes no responsibility for
the use or reliability of its software on equipment that is not supplied by Cognex Corporation. Cognex
Corporation makes no warranties, either express or implied, regarding the described software, its
merchantability or its fitness for any particular purpose.
The information in this document is subject to change without notice and should not be construed as
a commitment by Cognex Corporation. Cognex Corporation is not responsible for any errors that may
be present in either this document or the associated software.
Copyright © 2000-2006 Cognex Corporation.
All Rights Reserved.
This document may not be copied in whole or in part, nor transferred to any other media or language,
without the written permission of Cognex Corporation.
Revision 16
May 2006
The hardware and portions of the software described in this document may be covered by one or
more of the following U.S. patents. Other U.S. and foreign patents are pending.
In-Sight Patents pending
Hardware 4,972,359; 5,526,050; 5,657,403; 5,793,899; 5,861,910
Vision Tools 5,495,537; 5,548,326; 5,583,954; 5,602,937; 5,640,200;
5,717,785; 5,742,037; 5,751,853; 5,768,443; 5,796,868;
5,818,443; 5,825,483; 5,825,913; 5,845,007; 5,859,466;
5,872,870; 5,909,504
The following are registered trademarks of Cognex Corporation:
Cognex
Cognex, Vision for Industry
In-Sight
In-Sight "crosshair" logo
The following are trademarks of Cognex Corporation:
The Cognex logo
Other product and company names mentioned herein are the trademarks, or registered trademarks,
of their respective owners.
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In-Sight®1700 Series Wafer Reader
Regulations/Compliance
In-Sight 1721/1722 Wafer Readers
Declaration of Conformity
Manufacturer Cognex Corporation
One Vision Drive
Natick, MA 01760 USA
Declares this -marked Wafer Reader Machine Vision System Product
Product Number In-Sight 1721: P/N 800-5865-1; P/N 800-5865-1R (RoHS Compliant)
In-Sight 1722: P/N 800-5865-2; P/N 800-5865-2R (RoHS Compliant)
Complies With 89/336/EEC Electromagnetic Compatibility Directive
Compliance Standards EN 61000-6-4:2001 Class A
EN 61000-3-2:2000 + A2:2005
EN 61000-3-3:1995 + A1:2001
EN 61000-6-2:2001
European Representative Cognex France
Immeuble le Patio
104 avenue Albert 1er
92563 Rueil Malmaison
France
Safety
(UL 508:Standard for Industrial Control Equipment)
CUL Certification marks are present on products
FCC FCC Part 15, Class A
IEC 60825-1/A2:2001
EN 60825-1/A1:2002
CAN/CSA-E60825-1:2003
Compliance
SEMI This equipment conforms with the applicable requirements of
SEMI S2-0703a
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In-Sight®1700 Series Wafer Reader
In-Sight 1701 Wafer Reader
Declaration of Conformity
Manufacturer Cognex Corporation
One Vision Drive
Natick, MA 01760 USA
Declares this -marked Wafer Reader Machine Vision System Product
Product Number In-Sight 1701: P/N 800-5797-1; P/N 800-5798-1
Complies With 89/336/EEC Electromagnetic Compatibility Directive
Compliance Standards EN 55011:1998 + A1:1999 + A2:2002
EN 61000-3-2:2000 + A2:2005
EN 61000-3-3:1995 + A1:2001
EN 61000-6-2:2001
European Representative Cognex France
Immeuble le Patio
104 avenue Albert 1er
92563 Rueil Malmaison
France
Safety
Information Technology Equipment (UL 1950) 51KJ
CUL Certification marks are present on products
FCC FCC Part 15, Class A
iii

In-Sight®1700 Series Wafer Reader
In-Sight 1700 Wafer Reader
Declaration of Conformity
Manufacturer Cognex Corporation
One Vision Drive
Natick, MA 01760 USA
Declares this -marked Wafer Reader Machine Vision System Product
Product Number In-Sight 1700: P/N 800-5748-10; P/N 800-5748-20
Complies With 89/336/EEC Electromagnetic Compatibility Directive
Compliance Standards EN 55011:1998 + A1:1999 + A2:2002
EN 61000-3-2:2000 + A2:2005
EN 61000-3-3:1995 + A1:2001
EN 61000-6-1:2001
European Representative Cognex France
Immeuble le Patio
104 avenue Albert 1er
92563 Rueil Malmaison
France
Safety
Information Technology Equipment (UL 1950) 51KJ
CUL Certification marks are present on products
FCC FCC Part 15, Class A
iv

In-Sight®1700 Series Wafer Reader
Precautions
Observe these precautions when installing the In-Sight wafer reader to reduce the risk of
injury or equipment damage:
 The wafer reader is intended to be supplied by a Cognex power source (24V ±10%).
Any other voltage creates a risk of fire or shock and can damage the In-Sight
hardware.
 Do not install the wafer reader in locations that directly expose it to environmental
hazards such as excessive heat, dust, moisture, humidity, impact, vibration, corrosive
substances, flammable substances, or static electricity.
 To reduce the risk of damage or malfunction due to over-voltage, line noise,
electrostatic discharge (ESD), power surges, or other irregularities in the power
supply, route all cables and wires away from high-voltage power sources.
 Although the wafer reader is a Class 1 LED Product, it is not recommended to stare
directly into the illumination LEDs when the wafer reader is receiving power. Note
that the In-Sight 1722 wafer reader LEDs emit infrared light, therefore the illumination
LED lights are not visible.
 Do not open the wafer reader. This device does not contain user-serviceable parts.
Do not make electrical or mechanical modifications to the In-Sight hardware. The
LED emitted light levels have not been tested when the wafer reader is open,
therefore Class 1 LED Product certification is not guaranteed if the wafer reader is
open. Unauthorized modifications violate your warranty.
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In-Sight®1700 Series Wafer Reader
vi

In-Sight®1700 Series Wafer Reader
Table Of Contents
1Introduction 1
1.1 In-Sight Wafer Reader Overview ........................................................................... 1
1.2 In-Sight Support ..................................................................................................... 2
1.3 Networking an In-Sight Wafer Reader ................................................................... 2
2Installing the Wafer Reader 5
2.1 Connecting the In-Sight Wafer Reader.................................................................. 5
2.2 Configuring the Internet Browser ........................................................................... 7
2.3 Installing the In-Sight Software ............................................................................ 10
2.4 Adding the Wafer Reader to the Network ............................................................ 11
2.5 Logging On to the In-Sight Wafer Reader............................................................ 14
2.6 Communicating with the In-Sight Wafer Reader Over a Telnet Client................. 17
3Configuring a Wafer ID Application 19
3.1 SEMI®Wafer Marking Specifications................................................................... 19
3.2 Basic Concepts .................................................................................................... 20
3.3 GUI Overview....................................................................................................... 20
3.4 Getting an Image.................................................................................................. 21
3.5 Defining Config Settings....................................................................................... 23
3.6 Setting Options..................................................................................................... 37
4Managing Job Files 45
4.1 About Job Files..................................................................................................... 45
4.2 Saving Jobs.......................................................................................................... 46
4.3 Opening Jobs ....................................................................................................... 46
4.4 Sharing Jobs Between Readers........................................................................... 47
4.5 Changing the Startup Job .................................................................................... 47
5Running the Job 49
5.1 The Run tab.......................................................................................................... 49
6System Settings 53
6.1 About System Settings......................................................................................... 53
6.2 Version Information .............................................................................................. 54
6.3 Configuring Network Settings............................................................................... 54
6.4 Configuring Serial Port Settings........................................................................... 58
6.5 Managing the User List ........................................................................................ 60
6.6 Startup Options .................................................................................................... 60
7Native Mode Commands 61
7.1 Basic Native Mode Commands............................................................................ 64
7.2 Put Extended Native Mode Commands............................................................... 67
7.3 Evaluate Extended Native Mode Command Inputs and Outputs ........................ 70
7.4 Evaluate Extended Native Mode Commands (Actions)....................................... 74
7.5 Evaluate Extended Native Mode Commands (Get)............................................. 79
7.6 Evaluate Extended Native Mode Commands (Set) ............................................. 91
8Specifications 101
8.1 General Specifications ....................................................................................... 102
8.2 I/O Specifications ............................................................................................... 106
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In-Sight®1700 Series Wafer Reader
8.3 CAT5 Network Cable Specifications...................................................................113
8.4 Mechanical Specifications ..................................................................................114
Appendix A 121
Updating the Wafer Reader’s Firmware..........................................................................121
Appendix B 127
Configuring Microsoft Windows Network Settings..........................................................127
Appendix C 131
Connecting the Breakout Module....................................................................................131
Appendix D 133
1721/1722 Wafer Reader Installation Options................................................................133
Appendix E 137
1701 Wafer Reader Installation Options.........................................................................137
Appendix F 141
In-Sight 1700 Wafer Reader Mount Conversion.............................................................141
Appendix G 145
Cleaning the Reader .......................................................................................................145
viii

1 Introduction
In this section…
1.1 In-Sight Wafer Reader Overview...............................................................................1
1.2 In-Sight Support.........................................................................................................2
1.3 Networking an In-Sight Wafer Reader.......................................................................2
1.1 In-Sight Wafer Reader Overview
The In-Sight®series of high performance vision sensors are image formation wafer
readers for reading identification marks on silicon wafers. Featuring a vision processor,
advanced lighting and optics, and built-in networking support and serial communications,
the compact In-Sight wafer readers can be utilized in virtually any back-end wafer fab
process.
The In-Sight wafer readers include the following models:
 In-Sight 1722: Infrared LED lighting, 1024 x 768 image resolution and variable
working distance
 In-Sight 1721: Red LED lighting, 1024 x 768 image resolution and variable
working distance
 In-Sight 1701: Red LED lighting, 1024 x 768 image resolution, variable working
distance
 In-Sight 1700: Red LED lighting, 640 x 480 image resolution, fixed working
distance
NOTE To install the In-Sight 1721 or 1722 wafer reader using In-Sight Explorer, refer to Installing the
In-Sight® 1720 Series Wafer Reader hardware manual.
The In-Sight wafer reader is configured remotely over a network using a standard Internet
browser. This browser interface also allows remote monitoring of the wafer reader’s
operation during runtime. The wafer reader may also be controlled remotely from users’
custom application programs using In-Sight Native Mode commands to change settings
and retrieve read results.
Unless otherwise specified, references to the In-Sight 1721 wafer reader in this document
also apply to the In-Sight 1722, 1701 and 1700 models.
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Section 1: Introduction In-Sight®1700 Series Wafer Reader
2
1.2 In-Sight Support
The following resources are available to assist you in using the In-Sight wafer readers
and spreadsheet interface:
 In Sight®Guide & Reference, an on-line HTML Help file provided on the In-Sight
CD-ROM.
 The In-Sight Online Support and Learning Center at:
www.cognex.com/support/In-Sight.asp.
1.3 Networking an In-Sight Wafer Reader
The In-Sight wafer reader is designed to operate as a host system on an Ethernet TCP/IP
network. For the purposes of the instructions in this manual, an In-Sight network exists
whenever one or more wafer readers can be accessed remotely from another host on the
network.
The wafer reader may be used in several possible network configurations. For each
configuration, the wafer reader is configured using an Internet browser, which also
provides the remote display for that wafer reader.
1.3.1 Standalone In-Sight Network Configurations
A standalone In-Sight network configuration includes a connection between an In-Sight
wafer reader and a PC equipped with a network card. The In-Sight 1721 wafer reader
has an Autosense capability, allowing the wafer reader to connect directly to a PC using
either a standard CAT5 network cable or a CAT5 crossover cable. In this configuration,
neither the PC nor the wafer reader is connected to the larger, fab floor network.

In-Sight®1700 Series Wafer Reader Section 1: Introduction
Please note that the In-Sight 1700 and 1701 wafer readers require a standard CAT5
network cable and crossover coupler or a CAT5 crossover cable in this configuration.
NOTE If the Microsoft "Media Sense" feature, which automatically detects whether or not your network
interface is linked to a network, is enabled when running Microsoft Windows 2000 or XP,
communication with an In-Sight wafer reader may not be established. It is recommended to use a
hub or switch with a standard Ethernet cable to configure the In-Sight wafer reader or configure
your PC to disable the Media Sense feature. See Microsoft Knowledge Base article 239924 for
details on this process.
Figure 1-1: Standalone In-Sight Network
Configurations Using Switches/Routers
An In-Sight network may be extended to include multiple In-Sight wafer readers by using
an Ethernet switch or network router. The only limit on the size of this type of network is
the number of routers or switches connected and the number of connections they
provide.
To install multiple wafer readers on a standalone In-Sight network, use a switch/router
between the wafer readers and the remote host. Make all connections via standard,
straight-pinned CAT5 cable (Figure 1-2).
Figure 1-2: Standalone In-Sight Network With Ethernet Switch
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Section 1: Introduction In-Sight®1700 Series Wafer Reader
4
1.3.2 Fab Floor In-Sight Network Configurations
To take full advantage of its networking capabilities, the wafer reader can operate as a
host on the larger, fab floor network. The only physical difference between fab floor-
networked wafer readers and a standalone wafer reader network is that the switch/router
is connected directly to the network.
Groups of wafer readers connected to the fab floor network through a common
switch/router are referred to as a local network. Figure 1-3 shows a subnet that includes
several wafer readers and a PC.
Figure 1-3: Fab Floor Network

2 Installing the Wafer Reader
In this section…
2.1 Connecting the In-Sight Wafer Reader......................................................................6
2.2 Configuring the Internet Browser...............................................................................7
2.3 Installing the In-Sight Software................................................................................10
2.4 Adding the Wafer Reader to the Network................................................................11
2.5 Logging On to the In-Sight Wafer Reader ...............................................................14
2.6 Communicating with the In-Sight Wafer Reader Over a Telnet Client ....................17
2.1 Connecting the In-Sight Wafer Reader
This section describes the connection of the wafer reader to its standard components. To
connect the sensor to the optional 1350 Breakout Module, refer to Appendix C:
Connecting the Breakout Module. For a complete list of options and accessories, contact
your Cognex sales representative.
2.1.1 Connecting the In-Sight 1721/1722 Wafer Reader
The wafer reader has two RJ-45 connector ports: the Network Port and the Breakout Port
(see Figure 2-1). The Network Port provides the Ethernet connection for network
communications. The Breakout Port supplies connections for the 24VDC power source,
I/O, acquisition trigger, and serial communications.
Figure 2-1: Location of RJ-45 Ports
5

Section 2: Installing the Wafer Reader In-Sight®1700 Series Wafer Reader
6
2.1.2 Connecting the In-Sight 1700/1701 Wafer Reader
The In-Sight 1700/1701 wafer reader has two RJ-45 connector ports: the Network Port
and the Breakout Port (see Figure 2-2). The Network Port provides the Ethernet
connection for network communications. The Breakout Port supplies connections for the
24VDC power source, I/O, acquisition trigger, and serial communications.
Figure 2-2: Location of RJ-45 Ports
2.1.3 Connecting the Network Cable
 If you are connecting to an Ethernet switch, plug one of the RJ-45 connectors of a
CAT5 straight-pinned cable into the Network Port and plug the other end into an
available port on the switch/router.
 If you are connecting directly to an In-Sight sensor from a remote host, plug
one end of a CAT5 network cable into the wafer reader’s Network Port; plug the other
end into the remote host’s Ethernet port.
NOTE The In-Sight 1700 and 1701 wafer readers require a standard CAT5 network cable and crossover
coupler or a CAT5 crossover cable in this configuration.

In-Sight®1700 Series Wafer Reader Section 2: Installing the Wafer Reader
7
2.1.4 Connecting the Breakout Cable
The breakout cable provides access to the wafer reader’s power, serial communications,
and I/O lines. The RJ-45 connector on this cable is “keyed” to the notch in the Breakout
Port, and cannot be inadvertently plugged in to the Network Port. See Section 8.2.1:
Breakout Port Pin Assignments on page 106 for the Breakout Cable’s wiring details.
To connect the sensor using the optional 1350 Breakout Module, refer to Appendix C:
Connecting the Breakout Module.
To Connect the Breakout Cable to the In-Sight Wafer Reader:
1 Verify the 24VDC power supply being used is switched off.
2 Attach the Breakout Cable’s power (white-green wire) and ground (brown wire) to the
corresponding terminals on the power supply.
3 Connect the wires for the acquisition trigger, discrete outputs, and serial
communications to their corresponding terminals on remote devices.
4 Plug the RJ-45 connector into the wafer reader’s Breakout Port (labeled 24VDC).
5 Restore power to the 24V supply. The green power LED will indicate that the wafer
reader is receiving power.
2.2 Configuring the Internet Browser
The In-Sight wafer reader is platform and operating system independent and can be
controlled using a standard, Java-enabled Internet browser. In most cases, a PC is
needed to set up a wafer ID application but is not necessary to monitor its runtime
operation.
When configuring the In-Sight browser interface to communicate with the wafer reader,
there are two main requirements:
 The connection must be a local area network (LAN) connection (versus dial-up).
 The connection must not be routed through a proxy server, virtual private network
(VPN), or similar gateway.
The In-Sight browser interface has been tested using Microsoft Internet Explorer versions
5.0.1 and later on Windows XP, 2000 and NT 4.0. Using a Windows XP/2000/NT PC
running Microsoft Internet Explorer 6 (or later) is strongly recommended. If using Internet
Explorer 6, the Java™ Virtual Machine is not installed as part of the typical installation,
but is installed on demand when a page using a Java Applet is first encountered. The
Sun Java virtual machine can also be used on a windows-based PC. For information
regarding installation, upgrade and setup of these software packages, see Tech Note:
Browser Setup and Java Installation for the In-Sight 1700 Series Applet, which is
available on the In-Sight 1700 Series CD, or can be downloaded from the
In-Sight Online Support & Learning Center at:
www.cognex.com/support/In-Sight.asp.
Whichever virtual machine is being used, it must be enabled for the In-Sight browser
interface to execute.

Section 2: Installing the Wafer Reader In-Sight®1700 Series Wafer Reader
8
To verify that a virtual machine is enabled:
1 Open Internet Explorer.
2 From the Tools menu select Internet Options….
3 Click the Advanced tab.
If using the Microsoft Virtual Machine, under the Microsoft VM settings, verify that JIT
compiler for virtual machine enabled is checked, as shown in Figure 2-3.
Figure 2-3: Internet Options Dialog – Microsoft Virtual Machine Enabled
OR
If using the Sun Java Virtual Machine, under the Java (Sun) settings, verify that Use
Java… is checked, as shown in Figure 2-4.

In-Sight®1700 Series Wafer Reader Section 2: Installing the Wafer Reader
Figure 2-4: Internet Options Dialog – Java Virtual Machine Enabled
Also, if using the Sun Java Virtual Machine, verify that all browsers that will be running
the In-Sight applet are enabled for use with the Java Plug-in, as shown in Figure 2-5.
This can be verified from the Java Plug-in Control Panel. To open the Java Plug-in
Control Panel, select Start > Settings > Control Panel > Java Plug-in. From the Browser
tab, enable all applicable browsers.
Figure 2-5: Browser Tab – Java Plug-in Control Panel
4 If a virtual machine was enabled, the browser must be restarted for the change to be
applied.
9

Section 2: Installing the Wafer Reader In-Sight®1700 Series Wafer Reader
10
2.3 Installing the In-Sight Software
A Microsoft®Windows®-based PC is required to run the In-Sight PC Host program and to
add the wafer reader to the network. The following must be installed on the PC to load
In-Sight PC Host Software:
 A Microsoft Windows XP, 2000 or NT 4.0 (with Service Pack 4 or later) operating
system.
 Network Interface Card (at least 100Mbps) for connecting to In-Sight wafer readers
 In-Sight software (included on the CD-ROM shipped with your wafer reader).
 Internet Explorer 5.01 or higher to display the In Sight®Guide & Reference.
Perform the Following Steps to Install the In-Sight Software:
1 Shut down any applications on your PC.
2 Insert the In-Sight CD-ROM into your PC’s CD-ROM drive. If Autoplay is enabled, the
software should automatically launch the ISSetup.exe program.
3 Select the appropriate installation option; follow the setup dialogs as they appear on
screen.
4 When the installation program is complete, remove the CD from the CD-ROM drive.
If the Install Program Does Not Start Automatically:
1 Click the Start menu, click Run, then click Browse.
2 In the browse window, select the PC’s CD-ROM drive, then select the ISSetup.exe
file.
3 Click Open, then click OK to begin the installation.
4 Select the appropriate installation option; follow the setup dialogs as they appear on
screen.
5 When the installation program is complete, remove the CD from the CD-ROM drive.
Verify the In-Sight Software Installation:
1 Verify the In-Sight software installation by opening the Start menu and clicking All
Programs >Cognex > In-Sight > In-Sight Wafer ID (Java) 3.x.x >In-Sight PC Host.
2 Verify the In Sight®Guide & Reference help file installation by opening the Start
menu and clicking All Programs >Cognex > In-Sight > In-Sight Wafer ID (Java) 3.x.x
> In-Sight Help.
NOTE From the Wafer ID (Java) 3.x.x program group, select the Release Notes for current information
about In-Sight software, including new features, fixes and known issues. Registered In-Sight users
can download updated versions of In-Sight documentation at:
http://www.cognex.com/support/In-Sight.asp.