MKS P250A User manual

Type P250A / IM250A High Flow
Rate
Mass Flow Controller
Instruction Manual
2 Tech Drive
Suite 201
Andover, MA 01810
978.645.5500
978.557.5100 FAX
www.mksinst.com
1041806-001 Rev C
10/13

WARRANTY
Type P250A / IM250A Mass Flow Controller
MKS Instruments, Inc. (MKS) warrants that for one (1) year from the date of
shipment the equipment described above (the “equipment”) manufactured by MKS
shall be free from defects in materials and workmanship.
For the period commencing with the date of shipment of this equipment and ending
one (1) year later, MKS will, at its option, either repair or replace any part which is
defective in materials or workmanship or with respect to the date-related operations
warranty without charge to the purchaser. The foregoing shall constitute the
exclusive and sole remedy of the purchaser for any breach by MKS of this
warranty.
The purchaser, before returning any equipment covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrange-
ments with respect to the responsibility for shipping the equipment and handling
any other incidental charges with the MKS sales representative or distributor from
which the equipment was purchased or, in the case of a direct purchase from MKS,
with the MKS home office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and
used in accordance with the specifications recommended by MKS for the proper
and normal use of the equipment. MKS shall not be liable under any circumstances
for indirect, special, consequential, or incidental damages in connection with, or
arising out of, the sale, performance, or use of the equipment covered by this
warranty.
MKS recommends that all MKS pressure and flow products be calibrated
periodically (typically every 6 to 12 months) to ensure accurate readings. When a
product is returned to MKS for this periodic re-calibration it is considered normal
preventative maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF
MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF
ANY PATENT.

1041806-001 Rev C
10/13
Type P250A / IM250A High Flow Rate
Mass Flow Controller
2 Tech Drive
Suite 201
Andover, MA 01810
978.645.5500
978.557.5100 FAX
www.mksinst.com

ii
Copyright © 2013 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means,
electronic or mechanical, including photocopying and recording, or by any information storage or retrieval
system, except as may be expressly permitted in writing by MKS Instruments, Inc.
Printed in the United States of America
DeviceNet™ is a trademark of Open DeviceNet Vendor Association, Inc., Coral Springs, FL
Swagelokand VCRare registered trademarks of Swagelok Marketing Company, Solon, OH

Table of Contents
iii
Table of Contents
Mass Flow Device Safety Information .............................................................................................................1
Symbols Used in This Instruction Manual ....................................................................................................................1
Symbols Found on the Unit...........................................................................................................................................1
Safety Procedures and Precautions................................................................................................................................2
Sicherheitshinweise für das Massenflussgerät.................................................................................................3
In dieser Betriebsanleitung vorkommende Symbole.....................................................................................................3
Erklärung der am Gerät angebrachten Symbole............................................................................................................3
Sicherheitsvorschriften und Vorsichtsmaßnahmen .......................................................................................................4
Informations de sécurité pour appareils de mesure/contrôle de débit massique .........................................5
Symboles utilisés dans ce manuel d'utilisation..............................................................................................................5
Symboles figurant sur l'unité.........................................................................................................................................5
Mesures de sécurité et précautions................................................................................................................................6
Medidas de seguridad del dispositivo de flujo de masa..................................................................................7
Símbolos usados en este manual de instrucciones.........................................................................................................7
Símbolos hallados en la unidad .....................................................................................................................................7
Procedimientos y precauciones de seguridad ................................................................................................................8
マスフロー機器の安全に関する情報......................................................................................................................9
本取扱説明書のマーク...................................................................................................................................................9
本機器のマーク...............................................................................................................................................................9
安全対策について ..........................................................................................................................................................9
질량 유량 장치 안전 정보 ................................................................................................................................13
본지침 매뉴얼에 사용되는 기호들 .........................................................................................................................13
장치에 표시된 기호들 ...............................................................................................................................................13
안전 절차 및예방조치 ..............................................................................................................................................13
.....................................................................................................................................................................................15
How This Manual is Organized......................................................................................................................17
Chapter One: General Information ..............................................................................................................18
Introduction.................................................................................................................................................................18
How the MFC Works..................................................................................................................................................18
Operation of the MFC with Gases other than Nitrogen...............................................................................................19
Chapter Two: Installation..............................................................................................................................22
Unpacking the P250A Mass Flow Controller..............................................................................................................22
Verifying Use Requirements Prior to Installation .......................................................................................................22
Understanding Dimensional Constraints.....................................................................................................................23
Performing MFC Installation.......................................................................................................................................28

Table of Contents
iv
Chapter Three: Operation.............................................................................................................................30
Analog 9-pin / 15-pin Interface Operation ..................................................................................................................30
4-20 mA IO 15-pin Interface Operation ......................................................................................................................34
DeviceNet Interface Operation....................................................................................................................................36
RS485 Interface Operation..........................................................................................................................................40
Profibus Interface Operation........................................................................................................................................42
General Operational Functions....................................................................................................................................45
Chapter Four: Maintenance and Troubleshooting .....................................................................................50
General Information ....................................................................................................................................................50
Zeroing the MKS P250A High Flow Rate Mass Flow Controller...............................................................................50
Customer Support........................................................................................................................................................55
Repair ..........................................................................................................................................................................55
Troubleshooting...........................................................................................................................................................56
Chapter Five: Diagnostic Interface Setup, Configuration, and Operation...............................................62
Step 1: Install the Java™ Plug-In ................................................................................................................................62
Step 2: Configure TCP/IP Settings for Communication to P250A..............................................................................63
Step 3: Connect to the P250A High Flow Rate Mass Flow Controller .......................................................................65
Monitor Mode..............................................................................................................................................................66
Setup Mode..................................................................................................................................................................71
Appendix A: Product Specifications.............................................................................................................80
Performance Specifications.........................................................................................................................................80
Physical Specifications................................................................................................................................................80
Environmental Specifications......................................................................................................................................81
Electrical Specifications ..............................................................................................................................................81
Appendix B: Model Code Explanation.........................................................................................................84
Model Code Description..............................................................................................................................................84
Appendix C: Health and Safety Form..........................................................................................................88

List of Figures
v
List of Figures
Figure 1: Front View of the P250A MFC.........................................................................................................24
Figure 2: Bottom View of the P250A MFC......................................................................................................24
Figure 3: End View of the P250A MFC ...........................................................................................................25
Figure 4: Top View of the P250A MFC (DeviceNet Interface) .......................................................................25
Figure 5: Front View of the IM250A MFC ......................................................................................................26
Figure 6: Bottom View of the IM250A MFC...................................................................................................26
Figure 7: End View of the IM250A MFC.........................................................................................................27
Figure 8: Top View of the IM250A MFC (Analog Interface)..........................................................................27
Figure 9: Serial Number Label..........................................................................................................................28
Figure 10: DeviceNet Connector Pin Diagram.................................................................................................36
Figure 11: Devicenet Baud Rate Switch...........................................................................................................38
Figure 12: Devicenet MAC ID Switches..........................................................................................................38
Figure 13: RS485 Baud Rate Switch ................................................................................................................41
Figure 14: RS485 MACID Switches ................................................................................................................41
Figure 15: Profibus (female DSUB) Connector Pin Diagram ..........................................................................42
Figure 16: Profibus (male DSUB) Power Connector Pin Diagram. .................................................................43
Figure 17: Effects of the Proportional Term (Low Proportional Term) ...........................................................45
Figure 18: Effects of the Proportional Term (High Proportional Term)...........................................................46
Figure 19: Effects of the Integral Term (Low Integral Term) ..........................................................................46
Figure 20: Effects of the Integral Term (High Integral Term)..........................................................................46
Figure 21: Java Download Window..................................................................................................................63
Figure 22: Java License Agreement..................................................................................................................63
Figure 23: Java Installation Window ................................................................................................................63
Figure 24: Windows XP Shell Command Prompt............................................................................................64
Figure 25: Windows XP Shell Command Window..........................................................................................64
Figure 26: Windows XP Shell Command Window (HostIP) ...........................................................................65
Figure 27: P250A Embedded Interface (Monitor Mode / Device Page)...........................................................66
Figure 28: P250A Embedded Interface (Monitor Mode / Plot Page) ...............................................................68
Figure 29: P250A Embedded Interface (Monitor Mode / Diagnostics Page)...................................................69
Figure 30: P250A Embedded Interface (Monitor Mode / Configuration Page) ...............................................70
Figure 31: P250A Embedded Interface (Setup Mode / Configuration Page) ...................................................71
Figure 32: P250A Embedded Interface (Setup Mode / Device Page)...............................................................72
Figure 33: P250A Embedded Interface (Setup Mode / Device Page) Creating A New Gas Instance..............73
Figure 34: P250A Embedded Interface (Setup Mode / Device Page) Changing Full Scale Flow Range.........73
Figure 35: P250A Embedded Interface (Setup Mode / Plot Page) ...................................................................74
Figure 36: P250A Embedded Interface (Setup Mode / Configuration Page) ...................................................75
Figure 37: P250A Embedded Interface (Setup Mode / Optional PC Page)......................................................77
Figure 38: P250A Embedded Interface (Setup Mode / Plot Page) Enabled Optional Input.............................79

List of Tables
vi
List of Tables
Table 1: Definition of Symbols Found on the Unit............................................................................................1
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole ..............................................................................3
Tableau 3: Définition des symboles sur l'unité...................................................................................................5
Tabla 4: Definición de los símbolos hallados en la unidad................................................................................7
表5: 本機器に使用されているマークについて ...................................................................................................... 9
표6: 장치에 표시된 기호들의 정의 ..............................................................................................................13
Table 7: MKS Interface Cables........................................................................................................................ 30
Table 8: Analog I/O 9-pin DSUB Pinouts (Model Code A) ............................................................................31
Table 9: Analog I/O 15-pin DSUB Pinouts (Model Code B)...........................................................................32
Table 10: 4-20 mA I/O 15-pin DSUB Pinouts (Model Code G)......................................................................34
Table 11: DeviceNet Connector Pinouts (Model Code 6)................................................................................36
Table 12: DeviceNet Network Status LED Indicators .....................................................................................37
Table 13: RS485 Connector Pinouts (Model Code 5)......................................................................................40
Table 14: RS485 Module Status LED Indicators.............................................................................................40
Table 15: Profibus Communications Connector Pinout...................................................................................42
Table 16: Profibus Power Connector Pinout ....................................................................................................43
Table 17: MFC Troubleshooting Chart ............................................................................................................56

Mass Flow Device Safety Information
vii
List of References
The documents listed below are referenced throughout this manual.
[1] “DeviceNet Specification, Volume I: DeviceNet Communication Model and Protocol”, Open DeviceNet
Vendors Association, Inc. Release 2.0.
[2] “DeviceNet Specification, Volume II: DeviceNet Profiles and Object Library”, Open DeviceNet
Vendors Association, Inc. Release 2.0.
[3] “Sensor/Actuator Network Common Device Model”, SEMI Standards Document E54.1-0097.
[4] “Sensor/Actuator Network Communications Standard for DeviceNet”, SEMI Standards Draft Document
E54.4-0097.
[5] “Sensor/Actuator Network Specific Device Model for Mass Flow Devices”, SEMI Standards Draft
Document #2253C.
[6] “Sensor/Actuator Network Standard”, SEMI Standards Document E54-0097.
[7] SEMI E17-00-0060 Guideline for Mass Flow Controller Transient Characteristics Tests
[8] SEMI E18-00-0091 Guideline for Temperature Specifications of the Mass Flow Controller
[9] SEMI E27-00-0092 Standard for Mass Flow Controller and Mass Flow Meter Linearity
[10] SEMI E28-00-0092 Guideline for Pressure Specifications of the Mass Flow Controller
[11] SEMI E52-00-0611 Practice for Referencing Gases and Gas Mixtures Used in Digital Mass Flow
Controllers
[12] SEMI E56-00-1296 Test Method for Determining Accuracy, Linearity, Repeatability, Short Term
Reproducibility, Hysteresis, and Dead Band of Thermal Mass Flow Controllers
[13] SEMI E80-00-0299 Test Method Determining Attitude Sensitivity of Mass Flow Controllers

Mass Flow Device Safety Information
viii
This page intentionally left blank.